Research on the Nanolaboratory for the consruction of new nanodeviees
| Project/Area Number | 15360136 |
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Nagoya University |
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Principal Investigator |
FUKUDA Toshio Nagoya University, Department of Micro-Nano Systems Engineering, Professor, 大学院・工学研究科, 教授 (70156785)
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| Co-Investigator(Kenkyū-buntansha) |
ARAI Fumihito Tohoku University, Department of Bioengineering and Robotics, Professor, 大学院・工学研究科, 教授 (90221051)
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| Project Period (FY) |
2003 – 2005
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| Project Status |
Completed(Fiscal Year 2005)
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| Budget Amount *help |
¥15,000,000 (Direct Cost : ¥15,000,000)
Fiscal Year 2005 : ¥3,800,000 (Direct Cost : ¥3,800,000)
Fiscal Year 2004 : ¥4,100,000 (Direct Cost : ¥4,100,000)
Fiscal Year 2003 : ¥7,100,000 (Direct Cost : ¥7,100,000)
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| Keywords | Nanomanipulation / Carbon Nanotubes / Micro / Nano Processing / Nanotechnology / Electron Microscopes / Nanofabrication / Nanoprobes / Nanodevices |
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| Research Abstract |
1. Development of ultra-small nanorobotic manipulator
We developed an ultra-small nanorobotic manipulator inside a transmission electron microscope (TEM ; Hitachi, H-800) and proposed a TEM sample preparation method inside a scanning electron microscope (SEM ; JEOL, JSM6500F). We also experimentally constructed an ultra-small nanorobotic inside a TEM (JEOL, JEM-2100) to control of the whole system by PC, observe by CCD camera, and analyze the elemental property by energy-dispersive X-ray spectroscopy (EDS).
2. Fabrication/ Film deposition based on Nanolaboratory
We have done the EDS elemental analysis of the deposited thin film by electron-beam-induced deposition (EBID) of single carbon nanotube (CNT). Using W(CO)_6 as precursor, the conductive deposition had high purity of tungsten as 98% by mass. It was also revealed that the field emission voltage was reduced approximately 20% by the CNT emitter modified with ruthenium dioxide (RuO_2).
3. Manipulation/Assembly based on Nanolaboratory
In situ fabrication of nanobearing unit with a telescoping multi-walled CNT, which is partially peeled off outer layers, has been done. In situ experiments revealed a detail process with high-resolution and transmission image of TEM.
4 Measurement/Evaluation based on Nanolaboratory
We revealed the sliding motions of the telescoping nanotube depended on the applied external electric field. A new type distance nano-sensor was also proposed and evaluated by detecting the emission current of single CNT, the resistance change between outer and inner layers of telescoping nanotube, and the sliding resistance change between single CNT and substrate.
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Report
(4results)
Research Products
(21results)
