• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Fabrication of photonic crystals by multi-exposure of oblique incident X-ray and holographic lithography

Research Project

Project/Area Number 15560038
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionRitsumeikan University

Principal Investigator

ONO Yuzo  Ritsumeikan University, Faculty of Science and Engineering, Professor, 理工学部, 教授 (90319492)

Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2005: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2004: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2003: ¥2,700,000 (Direct Cost: ¥2,700,000)
KeywordsPhotonic crystal / Holographic lithograph / X-ray lithography / Interferometric recording / Effective index / X線露光 / リソグラフィー / ホログラフィック
Research Abstract

The purpose of this project was to develop new fabrication method of photonic crystals using interference recording and X-ray exposure as with the possibility of mass productivity and industrialization with its application for optical elements in mind. In 2003, we established the interferometric recording system, developed X-ray mask fabrication process using interferometric recording and electro-plating, implemented X-ray exposure experiments using the developed process. In 2004, we developed new simple calculation method for optical property of photonic crystals, fabricated photonic crystals by only four-beam interference. In 2005, we developed new method, which can fabricate all fourteen Bravais lattice structures, proposed new method to fabricate buried defect waveguide. We completed the expected purpose. The major results are as follows.
1.We proved theoretically that all photonic crystals with fourteen Bravais lattice structure could be fabricated by three exposures of X-ray with different incident angles through three different X-ray masks with slit array structure. This method can be extended to laser interferometric method, that is, all fourteen Bravais lattices can be fabricated by three exposures of two-beam interference.
2.We proposed new simple calculation method for the transmittance of photonic crystals using the effective medium method and the matrix method. The stop-band was calculated by this method and the validity of this method was verified.
3.We proposed new method to fabricate buried defect waveguide in three-dimensional photonic crystals fabricated by interferometric method, while it had been considered to be impossible.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (32 results)

All 2006 2005 2004 2003 Other

All Journal Article (26 results) Book (3 results) Publications (3 results)

  • [Journal Article] Transmittance analysis of three-dimensional photonic crystals by the effective medium theory2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Applied Optics 45・1

      Pages: 131-136

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of three-dimensional photonic crystals by blue laser holographic lithography2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Technical digest of 7th International Confernce on Diffractive Optics DO 2005

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] All fourteen Bravais lattices can be fabricated by triple exposure of two-beam interference fringes2006

    • Author(s)
      Yuzo Ono, Takashi Ochi
    • Journal Title

      Proceedings of SPIE (Accepted)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmittance analysis of three-dimensional photonic crystals by the effective medium theory2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Applied Optics vol.45

      Pages: 131-136

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of three-dimensional photonic crystals by blue laser holographic lithography2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Technical digest of 7th International Conference on Diffractive Optics DO 2005 L-026

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmittance analysis of three-dimensional photonic crystals by the effective medium theory2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Applied Optics 45

      Pages: 131-136

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of three-dimensional photonic crystals by blue laser holographic lithography2006

    • Author(s)
      Yuzo Ono
    • Journal Title

      Technical digest of 7th International Conference on Diffractive Optics DO 2005 EOS Tech.Digest Sers.

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Classification of photonic crystals with Bravais lattice structure fabricated by four-beam interfernce2005

    • Author(s)
      Yuzo Ono, Takashi Ochi, Yoshiaki Abe, Atushi Hasegawa
    • Journal Title

      Proceedings of SPIE 5931

      Pages: 13-20

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Classification of photonic crystals with Bravais lattice structure fabricated by four-beam interference2005

    • Author(s)
      Yuzo Ono, Takashi Ochi, Yoshiaki Abe, Atsushi Hasegawa
    • Journal Title

      Proceedings of SPIE vol.5931

      Pages: 13-20

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Classification of photonic crystals with Bravais lattice structure fabricated by four-beam interference2005

    • Author(s)
      Yuzo Ono, Takashi Ochi, Yoshiaki Abe, Atsushi Hasegawa
    • Journal Title

      Proceedings of SPIE 5931

      Pages: 13-20

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Application of the effective medium theory to transmission analysis of three-dimensional photonic crystals2004

    • Author(s)
      Yuzo Ono
    • Journal Title

      Proceedings of 10th Microoptics Conference

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Transmittance analysis of three-dimensional photonic drystals by the effective medium theory2004

    • Author(s)
      Yuzou Ono
    • Journal Title

      Poat-deadline papers of Diffractive and Micro-Optics Topical Meeting

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 実効屈折率法による3次元フォトニック結晶の透過率の解析-任意原子形状への拡張-2004

    • Author(s)
      小野雄三
    • Journal Title

      Optics Japan 2004講演予稿集

      Pages: 80-81

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] 4光束干渉で形成できるブラベー格子構造のフォトニック結晶の種類2004

    • Author(s)
      越智 隆, 阿部圭昭, 長谷川敦史, 小野雄三
    • Journal Title

      Optics Japan 2004講演予稿集

      Pages: 210-211

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Application of the effective medium theory to transmission analysis of three-dimensional photonic crystals2004

    • Author(s)
      Yuzo Ono
    • Journal Title

      Proceedings of 10th Microoptics Conference L-51

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmittance analysis of three-dimensional photonic crystals by the effective medium theory2004

    • Author(s)
      Yuzo Ono
    • Journal Title

      Post-deadline papers of Diffractive and Micro-Optics Topical Meeting PD1-1

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmissivity analysis of three-dimensional photonic crystals by the effective medium theory -Expansion to arbitrary atomic shape-2004

    • Author(s)
      Yuzo Ono
    • Journal Title

      Extended abstract of Optics Japan 2004 (In Japanese)

      Pages: 80-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Classification of photonic arystals fabricated by four beam interference2004

    • Author(s)
      Takashi Ochi, Yoshiaki Abe, Atsushi Hasegawa, Yuzo Ono
    • Journal Title

      Extended abstract of Optics Japan 2004 (In Japanese)

      Pages: 210-211

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmittance analysis of three-dimensional photonic crystals by the effective medium theory2004

    • Author(s)
      Yuzo Ono
    • Journal Title

      Post-deadline papers of Diffractive and Micro-Optics Topical Meeting

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 最近の回析光学素子-回析光学から周期構造の光学へ-2003

    • Author(s)
      小野雄三
    • Journal Title

      光学 32・8

      Pages: 468-475

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmission spectrum analysis of three-dimensional photonic crystal by the effective medium theory2003

    • Author(s)
      Yuzo Ono, Masayuki shinzo
    • Journal Title

      Proceedings of Diffractive Optics 2003

      Pages: 20-21

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 4光束干渉で形成できる3次元フォトニック結晶の種類2003

    • Author(s)
      築谷 亮, 小野 雄三
    • Journal Title

      Optics Japan 2003講演予稿集

      Pages: 184-185

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Recent advances in diffractive optical elements : From diffractive optics towards periodic structure optics2003

    • Author(s)
      Yuzo Ono
    • Journal Title

      Kogaku (in Japanese) vol.32

      Pages: 468-475

    • NAID

      10011628604

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transmission spectrum analysis of three-dimensional photonic crystal by the effective medium theory2003

    • Author(s)
      Yuzo Ono, Masayuki Shinzo
    • Journal Title

      Proceedings of Diffractive Optics 2003

      Pages: 20-21

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Classification of three-dimensional photonic crystals fabricated by four-beam interference2003

    • Author(s)
      Ryosuku Tsukitani, Yuzo Ono
    • Journal Title

      Extended abstract of Optics Japan 2003 (In Japanese)

      Pages: 184-185

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] All fourteen Bravais lattices can be fabricated by triple exposure of two-beam interference fringes

    • Author(s)
      Yuzo Ono, Takashi Ochi
    • Journal Title

      Conference on Nanoengineering : Fabrication, Properties, Optics, and Devices III (Accepted, will be presented)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Book] 回析光学素子入門-改訂増補版2006

    • Author(s)
      小野雄三(分担執筆、監修委員長)
    • Total Pages
      301
    • Publisher
      オプトロニクス社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Book] Introduction to diffractive optics : revised and enlarged edition (In Japanese)2006

    • Author(s)
      Yuzo Ono
    • Publisher
      Optronics, Tokyo
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Book] 回折光学素子入門-改訂増補版2006

    • Author(s)
      小野雄三(分担執筆、監修委員長)
    • Publisher
      オプトロニクス社
    • Related Report
      2005 Annual Research Report
  • [Publications] Yuzo Ono, Masayuki Shinzo: "Transmission spectrum analysis of three-dimensional photonic crystal by the effective medium theory"Proceedings of Diffractive Optics 2003. 20-21 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 築谷 亮祐, 小野 雄三: "4光束干渉で形成できる3次元フォトニック結晶の種類"Optics Japan 2003講演予稿集. 184-185 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 小野 雄三: "最近の回折光学素子-回折光学から周期構造の光学へ-"光学. 32・8. 468-475 (2003)

    • Related Report
      2003 Annual Research Report

URL: 

Published: 2003-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi