Fabrication of photonic crystals by multi-exposure of oblique incident X-ray and holographic lithography
| Project/Area Number |
15560038
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Ritsumeikan University |
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Principal Investigator |
ONO Yuzo Ritsumeikan University, Faculty of Science and Engineering, Professor, 理工学部, 教授 (90319492)
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| Project Period (FY) |
2003 – 2005
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| Project Status |
Completed (Fiscal Year 2005)
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| Budget Amount *help |
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2005: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2004: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2003: ¥2,700,000 (Direct Cost: ¥2,700,000)
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| Keywords | Photonic crystal / Holographic lithograph / X-ray lithography / Interferometric recording / Effective index / X線露光 / リソグラフィー / ホログラフィック |
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| Research Abstract |
The purpose of this project was to develop new fabrication method of photonic crystals using interference recording and X-ray exposure as with the possibility of mass productivity and industrialization with its application for optical elements in mind. In 2003, we established the interferometric recording system, developed X-ray mask fabrication process using interferometric recording and electro-plating, implemented X-ray exposure experiments using the developed process. In 2004, we developed new simple calculation method for optical property of photonic crystals, fabricated photonic crystals by only four-beam interference. In 2005, we developed new method, which can fabricate all fourteen Bravais lattice structures, proposed new method to fabricate buried defect waveguide. We completed the expected purpose. The major results are as follows.
1.We proved theoretically that all photonic crystals with fourteen Bravais lattice structure could be fabricated by three exposures of X-ray with different incident angles through three different X-ray masks with slit array structure. This method can be extended to laser interferometric method, that is, all fourteen Bravais lattices can be fabricated by three exposures of two-beam interference.
2.We proposed new simple calculation method for the transmittance of photonic crystals using the effective medium method and the matrix method. The stop-band was calculated by this method and the validity of this method was verified.
3.We proposed new method to fabricate buried defect waveguide in three-dimensional photonic crystals fabricated by interferometric method, while it had been considered to be impossible.
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Report
(4 results)
Research Products
(32 results)
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[Book] 回析光学素子入門-改訂増補版2006
Author(s)
小野雄三(分担執筆、監修委員長)
Total Pages
301
Publisher
オプトロニクス社
Description
「研究成果報告書概要(和文)」より
Related Report
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