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Developments of GHz and heterro-amorphous inductor core materials for integrated circuit

Research Project

Project/Area Number 15560285
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionSojo University

Principal Investigator

MUNAKATA Makoto  Sojo University, Information, Professor, 情報学部, 教授 (10183112)

Co-Investigator(Kenkyū-buntansha) YAGI Masaaki  Sojo University, Information, Professor, 情報学部, 教授 (80005371)
Project Period (FY) 2003 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2005: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2004: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2003: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsGHz frequency / magnetic device / anisotropy field / high resistivity / hybrid thin film / coplanar transmission-line / FMR frequency / insertion loss / 電気共鳴周波数 / 磁性膜 / 磁心 / 高周波透磁率 / インダクタ / 集積回路 / 高電気抵抗
Research Abstract

(CoFeB)-(SiO_2), (CoFe)-(SiO_2) and CoFeB films were fabricated by synchronous triple rf magnetron sputtering while rotating a cylindrical electrode. Three types of films for rf application in the range over 1 GHz were obtained, and their permeability characteristics and micro-structures were investigated.
The films exhibited large anisotropy fields H_k in the range from 40 to 550 Oe, and high ferromagnetic resonance (FMR) frequencies of 1.6-6.0 GHz in permeability characteristics. They also exhibited amorphous and nano-crystal structures, which led to good soft magnetic properties with electrical resistivities ρ of 400-100,000 μΩcm and saturation magnetizations 4ΠM_s of 6.5-20 kG. The larger H_k and higher resistivities obtained were effective for attaining the higher-frequency characteristics with lower losses for magnetic devices.
A hybrid thin film coplanar transmission-line with a CoFeB metallic magnetic film was fabricated and estimated. The fabricated devices consisted of top and bottom 3μm-thick aluminum conductor layers and inner (0.5 μm-thick Polyimide) / (0.5 μm-thick CoFeB) / (0.5 μm-thick Polyimide) trilayer. The top conductor layer consisted of a signal line and ground planes on the same plane. The CoFeB metallic magnetic film, exposed to the same thermal process of the device fabrication, had a static relative permeability of about 180 and FMR frequency of about 3.7 GHz. The Polyimide had a relative permittivity of about 3.5.
As a result, a wavelength shortening ratio of the fabricated device was about 0.19 at a few gigahertzes in frequency. The line length and the insertion loss of a quarter-wavelength device were estimated to be about 7 mm and about 2.9 dB at 2 GHz.

Report

(4 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (38 results)

All 2005 2004 2003 Other

All Journal Article (32 results) Publications (6 results)

  • [Journal Article] B Contents Dependence on Anistropy Field of CoFeB Thin Film For GHz Frequency Use2005

    • Author(s)
      M.Munakata (業績5)
    • Journal Title

      IEEE.Trans.Magn. 41・10

      Pages: 3262-3264

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Uniaxial anisotropy field and crystalline structures of(CoFe)-(SiO2) magnetic thin film for operating in the GHz frequency2005

    • Author(s)
      S.I.Aoqui
    • Journal Title

      Material Science & Engineering A 413-414

      Pages: 550-554

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 携帯電話PA用インピーダンス整合器への適用を目的としたCoFeB/ポリイミドハイブリッド薄膜コプレーナー線路の低損失化2005

    • Author(s)
      中山 英俊
    • Journal Title

      日本応用磁気学会誌 29・6

      Pages: 667-674

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] B Contents Dependence on Anistropy Field of CoFeB Thin Film For GHz Frequency Use2005

    • Author(s)
      M.Munakata
    • Journal Title

      IEEE.Trans.Magn. 41-10

      Pages: 3262-3264

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Uniaxial anisotropy field and crystalline structures of (CoFe)-(Si0_2) magnetic thin film for operating in the GHz frequency2005

    • Author(s)
      S.I.Aoqui
    • Journal Title

      Material Science & Engineering A 413-414

      Pages: 550-554

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Investigation of Suppression of the Insertion Loss of a CoFeB/Polyimide Hybrid Thin-Film Coplanar Line for Impedance Matching in a Mobile Phone Power AQmplifier Modue2005

    • Author(s)
      H.Nakayama
    • Journal Title

      Magn.Soc.Jpn. 29-6

      Pages: 667-674

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] B Contents Dependence on Anistropy Field of CoFeB Thin Film For GHz Frequency Use2005

    • Author(s)
      M.Munakata
    • Journal Title

      IEEE.Trans.Magn. 41・10(業績1)

      Pages: 3-3

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Uniaxial anisotropy field and crystalline structures of(CoFe)-(SiO2) magnetic thin film for operating in the GHz frequency2005

    • Author(s)
      S.I.Aoqui
    • Journal Title

      Material Science & Engineering A 413-414(業績2)

      Pages: 5-5

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 携帯電話PA用インピーダンス整合器への適用を目的としたCoFeB/ポリイミドハイブリッド薄膜コプレーナー線路の低損失化2005

    • Author(s)
      中山 英俊
    • Journal Title

      日本応用磁気学会誌 29・6(業績3)

      Pages: 8-8

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Directional Coupler Composed of CoFeB Metallic Magnetic Film/Polyimide Dielectric Film Hybrid Transmission Line2005

    • Author(s)
      K.Takizawa
    • Journal Title

      Proc.IEEE Asia Pasific Microwave Conf. 1(業績4)

      Pages: 3-3

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Development of an Integrated RF Impeadance Matching Device with LPF Function using a CoFeB Magnetic/Polyimide Dielectric Hybrid Thin-Film Transmission Line2005

    • Author(s)
      H.Nakayama
    • Journal Title

      Proc.IEEE Asia Pasific Microwave Conf. 4(業績5)

      Pages: 5-5

    • Related Report
      2005 Annual Research Report
  • [Journal Article] B Contents Dependence on Anistropy Field of CoFeB Thin Film For GHz Frequency Use2005

    • Author(s)
      M.Munakata(業績5)
    • Journal Title

      IEEE.Trans.Mag. (予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] CeFeBアモルファス金属磁性膜を用いたGHz帯用薄膜コプレーナ伝送線路の試作2004

    • Author(s)
      中山 英俊 (業績2-1)
    • Journal Title

      日本応用磁気学会誌 28・2

      Pages: 157-163

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 高電気抵抗ヘテロアモルファス膜の異方性磁界とGHz帯高周波透磁率2004

    • Author(s)
      宗像 誠 (業績2-2)
    • Journal Title

      日本応用磁気学会誌 28・3

      Pages: 200-208

    • NAID

      110002809688

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 高飽和磁化bcc・FeCo相を含む(FeCo)-(SiO_2)膜の磁気特性とGHz帯高周波透磁率特性2004

    • Author(s)
      並河 雅志 (業績3)
    • Journal Title

      日本応用磁気学会誌 28・7

      Pages: 873-8760

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] スリットパターン化したCoFe系高飽和磁化膜の磁気特性と異方性磁界制御2004

    • Author(s)
      荒木 和幸 (業績4)
    • Journal Title

      日本応用磁気学会誌 28・9

      Pages: 997-1000

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ferronmagnetic resonance ih high resistive softmagnetic amorphous (CoFeB)-SiO_2 film2004

    • Author(s)
      河本 修
    • Journal Title

      Material Science and Engineering A 375-377

      Pages: 1069-1071

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of a Coplanar Transmission Line with a CoFeB amorphous Metallic Magnetic Film for GHz Frequency Range2004

    • Author(s)
      H.Nakayama
    • Journal Title

      Magn.Soc.Jpn. 28-2

      Pages: 157-163

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Anisotropy Field and GHz Permeability of Htero-amorphous Films with High Resistivity2004

    • Author(s)
      M.Munakata
    • Journal Title

      Magn.Soc.Jpn. 28-3

      Pages: 200-208

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic Properties and GHz Permeability of (FeCo)-(SiO_2) Films with High Saturation Magnetization of bcc-FeCo Phase2004

    • Author(s)
      M.Namikawa
    • Journal Title

      Magn.Soc.Jpn. 27-4

      Pages: 873-876

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Magnetic Properties and Anistropy Field of Slit-Patterned CoFe Films with High Saturation Magnetization2004

    • Author(s)
      K.Araki
    • Journal Title

      Magn.Soc.Jpn. 28-9

      Pages: 997-1000

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Ferromagnetic resonance in high resistive softmagnetic amorphous (CoFeB)-SiO_2 film2004

    • Author(s)
      O.Kohmoto
    • Journal Title

      Material Science and Engineering A 375-377

      Pages: 1069-1071

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] 高電気抵抗ヘテロアモルファス膜の異方性磁界とGHz帯高周波透磁率2004

    • Author(s)
      宗像 誠(業績1)
    • Journal Title

      日本応用磁気学会誌 28・3

      Pages: 200-208

    • NAID

      110002809688

    • Related Report
      2004 Annual Research Report
  • [Journal Article] CoFeBアモルファス金属磁性膜を用いたGHz帯用薄膜コプレーナ伝送線路の試作2004

    • Author(s)
      中山 英俊(業績2)
    • Journal Title

      日本応用磁気学会誌 28・2

      Pages: 157-163

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 高飽和磁化bcc-FeCo相を含む(FeCo)-(SiO_2)膜の磁気特性とGHz帯高周波透磁率特性2004

    • Author(s)
      並河 雅志(業績3)
    • Journal Title

      日本応用磁気学会誌 28・7

      Pages: 873-876

    • Related Report
      2004 Annual Research Report
  • [Journal Article] スリットパターン化したCoFe系高飽和磁化膜の磁気特性と異方性磁界制御2004

    • Author(s)
      荒木 和幸(業績4)
    • Journal Title

      日本応用磁気学会誌 28・9

      Pages: 997-1000

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 高異方性磁界を持つCo-Fe-B系軟磁性膜のGHz帯透磁率特性2003

    • Author(s)
      並河雅志 (業績1)
    • Journal Title

      日本応用磁気学会誌 27・4

      Pages: 371-374

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transport anisotropy in hetero-amorphous(CoFeB)-SiO_2 thin films2003

    • Author(s)
      P.Jonnesson
    • Journal Title

      J.Appl.Phys., 93・10

      Pages: 8101-8103

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] In-plane anisotropy in hetero-amorphous (CoFeB)-SiO_2 thin films2003

    • Author(s)
      P.Jonnesson
    • Journal Title

      J.Appl.Phy. : special issue (paper) of MRS 754

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] GHz Permeability of Soft Magnetic Co-Fe-B Films with High Anisotropy Fields2003

    • Author(s)
      M.Namikawa
    • Journal Title

      Magn.Soc.Jpn. 27-4

      Pages: 371-374

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Transport anisotropy in hetero-amorphous (CoFeB)-SiO_2 thin films2003

    • Author(s)
      P.Jonnesson
    • Journal Title

      J.Appl.Phys. 93-10

      Pages: 8101-8103

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] In-plane anisotropy in hetero-amorphous (CoFeB)-SiO_2 thin films

    • Author(s)
      P.Jonnesson
    • Journal Title

      J.Appl.Phy.(special issue (paper) of MRS) 754

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] 並河雅志: "高異方性磁界を持つCo-Fe-B系軟磁性膜のGHz帯透磁率特性"日本応用磁気学会誌. 27・4. 371-374 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] P.Jonnesson: "Transport anisotropy in hetero-amorphous (CoFeB)-SiO_2 thin films"J.Appl.Phys.. 93・10. 8101-8103 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] P.Jonnesson: "In-plane anisotropy in heter-amorphous (CoFeB)-SiO_2 thin films"The Proceedings of the MRS Cof.as a special issue of J.Appl.Phys.. 754. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 宗像 誠: "高電気抵抗ヘテロアモルファス膜の異方性磁界とGHz帯高周波透磁率"日本応用磁気学会誌. 27・3. 200-208 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 中山英俊: "CoFeBアモルファス金属磁性膜を用いたGHz帯用薄膜コプレーナー伝送線路の試作"日本応用磁気学会誌. 27・4. (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Munakata: "Uniaxial Anisotrop Field of (Co_<18>Fe_<82>)-(SiO_2) thin film Core in the GHz Frequency Range"IEEE.Trans.Mag.. (2004)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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