電子ビーム露光による高精度パターン形成技術

• Project/Area Number: 15919033
• Research Category: Grant-in-Aid for Encouragement of Scientists
• Allocation Type: Single-year Grants
• Research Field: 工業
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 田村 茂雄 東京工業大学, 文部科学技官
• Project Period (FY): 2003
• Project Status: Completed (Fiscal Year 2003)
• Budget Amount: ¥230,000 (Direct Cost: ¥230,000); Fiscal Year 2003: ¥230,000 (Direct Cost: ¥230,000)