ナノメートル3次元極微細構造形成法に関する基礎実験

• Project/Area Number: 15919044
• Research Category: Grant-in-Aid for Encouragement of Scientists
• Allocation Type: Single-year Grants
• Research Field: 工業
• Research Institution: University of Toyama
• Principal Investigator: 大山 達雄 富山大学, 技術系職員
• Project Period (FY): 2003
• Project Status: Completed (Fiscal Year 2003)
• Budget Amount: ¥220,000 (Direct Cost: ¥220,000); Fiscal Year 2003: ¥220,000 (Direct Cost: ¥220,000)