２軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出

Research Project

Project/Area Number	15H02212
Research Category	Grant-in-Aid for Scientific Research (A)
Allocation Type	Single-year Grants
Section	一般
Research Field	Production engineering/Processing studies
Research Institution	Tohoku University
Principal Investigator	高偉東北大学, 工学研究科, 教授 (70270816)
Co-Investigator(Kenkyū-buntansha)	清水裕樹東北大学, 工学研究科, 准教授 (70606384) 伊東聡東北大学, 工学研究科, 助教 (00624818)
Project Period (FY)	2015-04-01 – 2019-03-31
Project Status	Granted (Fiscal Year 2015)
Budget Amount *help	¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000) Fiscal Year 2015: ¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Keywords	超精密計測 / 生産工学 / 加工学