Establishment of a CMOS image sensor with photon countable sensitivity, linear response and high full well capacity

• Project/Area Number: 15H02245
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Tohoku University
• Principal Investigator: Sugawa Shigetoshi 東北大学, 工学研究科, 教授 (70321974)
• Co-Investigator(Kenkyū-buntansha): 黒田 理人 東北大学, 工学研究科, 准教授 (40581294)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥44,330,000 (Direct Cost: ¥34,100,000、Indirect Cost: ¥10,230,000); Fiscal Year 2017: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000); Fiscal Year 2016: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000); Fiscal Year 2015: ¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
• Keywords: 電子デバイス・機器 / センシングデバイス / 撮像素子 / フォトンカウンティング / 1光子検出

Outline of Final Research Achievements

Toward the establishment of a CMOS image sensor with photon countable sensitivity and high full well capacity with linear response, capable of clearly capturing image shooting targets over 5 decade of light illumination conditions, an ultra-high sensitivity signal readout technology was developed in this research based on formerly developed CMOS image sensors with lateral overflow integration capacitor (LOFIC). By the minimization of capacitance of floating diffusion that convert photo-electrons to voltage signal and the introduction of multiple gain column parallel amplifiers, a very low input-referred noise performance of 0.47 electrons was achieved. Moreover, signal readout noise of input-referred 0.2 electron and full well capacity of 50,000 electrons are estimated to be obtained by introducing multi sampling readout scheme of pixel signals and lowering thermal noise of signal readout chain.

Research Products

• [Journal Article] Experimental investigation of localized stress-induced leakage current distribution in gate dielectrics using array test circuit (2018)
  • Author(s): Park H.、Teramoto A.、Kuroda R.、Suwa T.、Sugawa S.
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Issue: 4S Pages: 04FE11-04FE11
  • DOI: 10.7567/jjap.57.04fe11
  • NAID: 210000148908
  • Peer Reviewed
• [Journal Article] Effect of drain current on appearance probability and amplitude of random telegraph noise in low-noise CMOS image sensors (2018)
  • Author(s): Ichino S.、Mawaki T.、Teramoto A.、Kuroda R.、Rark H.、Wakshima S.、Goto T.、Suwa T.、Sugawa S.
  • Journal Title: Japanese Journal of Applied Physics Volume: 57 Issue: 4S Pages: 04FF08-04FF08
  • DOI: 10.7567/jjap.57.04ff08
  • NAID: 210000148922
  • Peer Reviewed
• [Journal Article] A high sensitivity 20Mfps CMOS image sensor with readout speed of 1Tpixel/sec for visualization of ultra-high speed phenomena (2017)
  • Author(s): Rihito Kuroda, Shigetoshi Sugawa
  • Journal Title: Proceedings of SPIE Volume: 10328 Pages: 1032802-1032802
  • DOI: 10.1117/12.2270787
  • Peer Reviewed
• [Journal Article] Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator (2017)
  • Author(s): Furukawa K.、Teramoto A.、Kuroda R.、Suwa T.、Hashimoto K.、Sugawa S.、Suzuki D.、Chiba Y.、Ishii K.、Shimizu A.、Hasebe K.
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 10 Pages: 105503-105503
  • DOI: 10.7567/jjap.56.105503
  • NAID: 210000148334
  • Peer Reviewed
• [Journal Article] Analysis and reduction of leakage current of 2 kV monolithic isolator with wide trench spiral isolation structure (2016)
  • Author(s): Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
  • Journal Title: Japanese Journal of Applied Physics Volume: 55 Issue: 4S Pages: 04EF07-04EF07
  • DOI: 10.7567/jjap.55.04ef07
  • NAID: 210000146330
  • Peer Reviewed
• [Journal Article] [Paper] Analysis and Reduction Technologies of Floating Diffusion Capacitance in CMOS Image Sensor for Photon-Countable Sensitivity (2016)
  • Author(s): Fumiaki Kusuhara, Shunichi Wakashima, Satoshi Nasuno, Rihito Kuroda, Shigetoshi Sugawa
  • Journal Title: ITE Transactions on Media Technology and Applications Volume: 4 Issue: 2 Pages: 91-98
  • DOI: 10.3169/mta.4.91
  • NAID: 130005142720
  • ISSN: 2186-7364
  • Peer Reviewed / Open Access
• [Journal Article] [Paper] Floating Capacitor Load Readout Operation for Small, Low Power Consumption and High S/N Ratio CMOS Image Sensors (2016)
  • Author(s): Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
  • Journal Title: ITE Transactions on Media Technology and Applications Volume: 4 Issue: 2 Pages: 99-108
  • DOI: 10.3169/mta.4.99
  • NAID: 130005142719
  • ISSN: 2186-7364
  • Peer Reviewed / Open Access
• [Journal Article] [Paper] A High Quantum Efficiency High Readout Speed 1024 Pixel Ultraviolet-Visible-Near Infrared Waveband Photodiode Array (2016)
  • Author(s): Rihito Kuroda, Takahiro Akutsu, Yasumasa Koda, Kenji Takubo, Hideki Tominaga, Ryuta Hirose, Tomohiro Karasawa, Shigetoshi Sugawa
  • Journal Title: ITE Transactions on Media Technology and Applications Volume: 4 Issue: 2 Pages: 109-115
  • DOI: 10.3169/mta.4.109
  • NAID: 130005142727
  • ISSN: 2186-7364
  • Peer Reviewed / Open Access
• [Journal Article] [Paper] A CMOS Image Sensor with 240 μV/e^– Conversion Gain, 200 ke^– Full Well Capacity, 190-1000 nm Spectral Response and High Robustness to UV light (2016)
  • Author(s): Satoshi Nasuno, Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
  • Journal Title: ITE Transactions on Media Technology and Applications Volume: 4 Issue: 2 Pages: 116-122
  • DOI: 10.3169/mta.4.116
  • NAID: 130005142728
  • ISSN: 2186-7364
  • Peer Reviewed / Open Access
• [Journal Article] [Paper] A 20Mfps Global Shutter CMOS Image Sensor with Improved Light Sensitivity and Power Consumption Performances (2016)
  • Author(s): Rihito Kuroda, Yasuhisa Tochigi, Ken Miyauchi, Tohru Takeda, Hidetake Sugo, Fan Shao, Shigetoshi Sugawa
  • Journal Title: ITE Transactions on Media Technology and Applications Volume: 4 Issue: 2 Pages: 149-154
  • DOI: 10.3169/mta.4.149
  • NAID: 130005142726
  • ISSN: 2186-7364
  • Peer Reviewed / Open Access
• [Journal Article] Introduction of Atomically Flattening of Si Surface to Large-Scale Integration Process Employing Shallow Trench Isolation (2016)
  • Author(s): Tetsuya Goto, Rihito Kuroda, Naoya Akagawa, Tomoyuki Suwa, Akinobu Teramoto, Xiang Li, Toshiki Obara, Daiki Kimoto, Shigetoshi Sugawa, Yutaka Kamata, Yuki Kumagai, and Katsuhiko Shibusawa
  • Journal Title: ECS Journal of Solid State Science and Technology Volume: 5 Issue: 2 Pages: P67-P72
  • DOI: 10.1149/2.0221602jss
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma (2015)
  • Author(s): Tomoyuki Suwa, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Shigetoshi Sugawa, and Tadahiro Ohmi
  • Journal Title: ECS Transactions Volume: 66 Issue: 5 Pages: 277-283
  • DOI: 10.1149/06605.0277ecst
  • Peer Reviewed
• [Journal Article] Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern (2015)
  • Author(s): T. Goto, R. Kuroda, T. Suwa, A. Teramoto, N. Akagawa, D. Kimoto, S. Sugawa, T. Ohmi, Y. Kamata, Y. Kumagai, and K. Shibusawa
  • Journal Title: ECS Transactions Volume: 66 Issue: 5 Pages: 285-292
  • DOI: 10.1149/06605.0285ecst
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition (2015)
  • Author(s): A. Teramoto, Y. Nakao, T. Suwa, K. Hashimoto, T. Motoya, M. Hirayama, S. Sugawa, and T. Ohmi
  • Journal Title: ECS Transactions Volume: 66 Issue: 4 Pages: 151-159
  • DOI: 10.1149/06604.0151ecst
  • Peer Reviewed
• [Journal Article] Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System (2015)
  • Author(s): H. Sugita, Y. Koda, T. Suwa, R. Kuroda, T. Goto, H. Ishii, S. Yamashita, A. Teramoto, S. Sugawa, and T. Ohmi
  • Journal Title: ECS Transactions Volume: 66 Issue: 4 Pages: 305-314
  • DOI: 10.1149/06604.0305ecst
  • Peer Reviewed
• [Journal Article] Measurement and Analysis of Seismic Response in Semiconductor Manufacturing Equipment (2015)
  • Author(s): Kaori Komoda, Masashi Sakuma, Masakazu Yata, Yoshio Yamazaki, Fuminobu Imaizumi, Rihito Kuroda and Shigetoshi Sugawa
  • Journal Title: IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING Volume: 28 Issue: 3 Pages: 289-296
  • DOI: 10.1109/tsm.2015.2427807
  • Peer Reviewed
• [Presentation] High-speed multi-bandpass liquid-crystal filter using dual-frequency liquid crystal for real-time spectral imaging system (2018)
  • Author(s): Takahiro Ishinabe, Kohei Terashima, Kazuhiro Wako, Yasuyuki Fujihara, Yusuke Aoyagi, Maasa Murata, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Yosei Shibata, Shigetoshi Sugawa, Hideo Fujikake
  • Organizer: SPIE PHOTONICS WEST 2018
  • Int'l Joint Research
• [Presentation] A Preliminary Chip Evaluation toward Over 50Mfps Burst Global Shutter Stacked CMOS Image Sensor (2018)
  • Author(s): Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: IS&T International Symposium on Electronic Imaging 2018
  • Int'l Joint Research
• [Presentation] 高速化・高感度化技術の今後 (2018)
  • Author(s): 黒田 理人
  • Organizer: 次世代画像入力ビジョンシステム部会・映像情報メディア学会共催公開講演会『イメージセンサ３０年の進歩と更なる発展』
  • Invited
• [Presentation] 最高撮像速度5000万コマ/秒を有するプロトタイプグローバルシャッタ高速CMOSイメージセンサ (2018)
  • Author(s): 鈴木学, 鈴木将, 黒田理人, 須川成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
• [Presentation] Impact of SiO2/Si Interface Micro-roughness on SILC Distribution and Dielectric Breakdown: A Comparative Study with Atomically Flattened Devices (2017)
  • Author(s): Hyeonwoo Park, Tetsuya Goto, Rihito Kuroda, Akinobu Teramoto, Tomoyuki Suwa, Daiki Kimoto, Shigetoshi Sugawa
  • Organizer: International Reliability Physics Symposium 2017
  • Int'l Joint Research
• [Presentation] Statistical Analysis of Random Telegraph Noise in Source Follower Transistors with Various Shapes (2017)
  • Author(s): Shinya Ichino, Takezo Mawaki, Shunichi Wakashima, Akinobu Teramoto, Rihito Kuroda, Phillipe Gaubert, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa
  • Organizer: 2017 International Image Sensor Workshop
  • Int'l Joint Research
• [Presentation] Impact of Random Telegraph Noise with Various Time Constants and Number of States in CMOS Image Sensors (2017)
  • Author(s): Rihito Kuroda, Akinobu Teramoto, Shigetoshi Sugawa
  • Organizer: 2017 International Image Sensor Workshop
  • Int'l Joint Research
• [Presentation] A Spectral Imaging System with an Over 70dB SNR CMOS Image Sensor and Electrically Tunable 10nm FWHM Multi-Bandpass Filter (2017)
  • Author(s): Yasuyuki Fujihara, Yusuke Aoyagi, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Kohei Terashima, Takahiro Ishinabe, Hideo Fujikake, Kazuhiro Wako, Shigetoshi Sugawa
  • Organizer: 2017 International Image Sensor Workshop
  • Int'l Joint Research
• [Presentation] 10Mfps 960 Frames Video Capturing Using a UHS Global Shutter CMOS Image Sensor with High Density Analog Memories (2017)
  • Author(s): Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Yuki Kumagai, Akira Chiba, Noriyuki Miura, Naoya Kuriyama, Shigetoshi Sugawa
  • Organizer: 2017 International Image Sensor Workshop
  • Int'l Joint Research
• [Presentation] Experimental Investigation of Localized Stress Induced Leakage Current Distribution in Gate Dielectrics Using Array Test Circuit (2017)
  • Author(s): Hyeonwoo Park, Tomoyuki Suwa, Rihito Kuroda, Akinobu Teramoto, Shigetoshi Sugawa
  • Organizer: 2017 International Conference on Solid State Devices and Materials
  • Int'l Joint Research
• [Presentation] Analysis of Random Telegraph Noise Behaviors of nMOS and pMOS toward Back Bias Voltage Changing (2017)
  • Author(s): Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Shinya Ichino, Shigetoshi Sugawa
  • Organizer: 2017 International Conference on Solid State Devices and Materials
  • Int'l Joint Research
• [Presentation] Impact of Drain Current to Appearance Probability and Amplitude of Random Telegraph Noise in Low Noise CMOS Image Sensors (2017)
  • Author(s): Shinya Ichino, Takezo Mawaki, Akinobu Teramoto, Rihito Kuroda, Hyeonwoo Park, Takeru Maeda, Shunichi Wakashima, Tetsuya Goto, Tomoyuki Suwa, Shigetoshi Sugawa
  • Organizer: 2017 International Conference on Solid State Devices and Materials
  • Int'l Joint Research
• [Presentation] Narrow-Bandpass Liquid Crystal Filter for Real-Time Multi Spectral Imaging Systems (2017)
  • Author(s): Kohei Terashima, Takahiro Ishinabe, Kazuo Wako, Yasuyuki Fujihara, Yusuke Aoyagi, Maasa Murata, Satoshi Nasuno, Shunichi Wakashima, Rihito Kuroda, Yosei Shibata, Shigetoshi Sugawa, Hideo Fujikake
  • Organizer: International Display Workshops
  • Int'l Joint Research
• [Presentation] Spectral Absorption Imaging with an Over 70dB SNR CMOS Image Sensor (2017)
  • Author(s): Maasa Murata, Yasuyuki Fujihara, Yusuke Aoyagi, Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: 電気関係学会東北支部連合大会
• [Presentation] 画素SFで発生するランダムテレグラフノイズの統計的解析 ～ トランジスタ形状・時定数・遷移数の影響 ～ (2017)
  • Author(s): 黒田理人, 寺本章伸, 市野真也, 間脇武蔵, 若嶋駿一, 須川成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
• [Presentation] SNR 70dB超のCMOSイメージセンサと半値幅10nmのチューナブルマルチバンドパスフィルタを用いた分光イメージングシステム (2017)
  • Author(s): 青柳雄介, 藤原康行, 村田真麻, 那須野悟史, 若嶋駿一, 黒田理人, 寺島康平, 石鍋隆宏, 藤掛英夫, 若生一広, 須川成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
• [Presentation] 紫外吸光とチャージアンプ回路を用いた高感度・小型リアルタイムガス濃度計 (2017)
  • Author(s): 石井 秀和, 永瀬 正明, 池田 信一, 志波 良信, 白井 泰雪, 黒田 理人, 須川 成利
  • Organizer: 電子情報通信学会・シリコン材料・デバイス研究会
• [Presentation] 局所的ストレス誘起ゲートリーク電流の統計的分布の解析とSi表面平坦化工程による低減 (2017)
  • Author(s): 朴 賢雨, 黒田 理人, 後藤 哲也, 諏訪 智之, 寺本 章伸, 木本 大幾, 須川 成利
  • Organizer: 電子情報通信学会・シリコン材料・デバイス研究会
• [Presentation] 高精度アレイテスト回路計測技術を用いたソースフォロアトランジスタの動作条件変化によるランダムテレグラフノイズの挙動解析 (2017)
  • Author(s): 市野 真也, 間脇 武蔵, 寺本 章伸, 黒田 理人, 若嶋 駿一, 須川 成利
  • Organizer: 電子情報通信学会・シリコン材料・デバイス研究会
• [Presentation] 撮像速度1000万コマ／秒を超える高速度CMOSイメージセンサ技術の進展 (2017)
  • Author(s): 黒田 理人, 鈴木 学, 鈴木 将, 須川 成利
  • Organizer: 高速度イメージングとフォトニクスに関する総合シンポジウム2017
• [Presentation] リアルタイム分光イメージングシステム用の高速ナローバンドパス液晶フィルタ (2017)
  • Author(s): 寺島康平, 石鍋隆宏, 若生一広, 藤原康行, 青柳雄介, 村田真麻, 那須野悟史, 若嶋駿一, 黒田理人, 柴田陽生, 須川成利, 藤掛英夫
  • Organizer: Optics & Photonics Japan 2017
• [Presentation] Atomically flat interface for noise reduction in SOI-MOSFETs (2017)
  • Author(s): Gaubert P.、Kircher A.、Park H.、Kuroda R.、Sugawa S.、Goto T.、Suwa T.、Teramoto A.
  • Organizer: 2017 International Conference on Noise and Fluctuations
  • Int'l Joint Research
• [Presentation] 広光波長帯域イメージセンサ技術と分光イメージングへの展開 (2017)
  • Author(s): 黒田理人
  • Organizer: 次世代画像入力ビジョンシステム部会第170回定例会「次世代イメージセンサと新技術の展開」
  • Place of Presentation: 東京理科大学森戸記念館（東京都・新宿区）
  • Invited
• [Presentation] 急峻pn接合Siダイオード技術を用いた高感度・高速性能低加速電圧電子線検出器 (2017)
  • Author(s): 黒田理人, 幸田安真, 原昌也, 角田博之, 須川成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
  • Place of Presentation: NHK放送技術研究所（東京都・世田谷区）
• [Presentation] 高密度アナログメモリを搭載した超高速グローバルシャッタCMOSイメージセンサ (2017)
  • Author(s): 鈴木学, 鈴木将, 黒田理人, 熊谷勇喜, 千葉亮, 三浦規之, 栗山尚也, 須川成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
  • Place of Presentation: NHK放送技術研究所（東京都・世田谷区）
• [Presentation] 撮像速度1000万コマ/秒を超える高速度CMOSイメージセンサの高感度化・多記録枚数化 (2017)
  • Author(s): 黒田理人
  • Organizer: 次世代画像入力ビジョンシステム部会第171回定例会
  • Place of Presentation: 東京理科大学森戸記念館（東京都・新宿区）
  • Invited
• [Presentation] 画素毎の接続を有する3次元積層を用いた先進グローバルシャッタCMOSイメージセンサ技術 (2016)
  • Author(s): 黒田理人
  • Organizer: SEMICON Japan2016 TechSTAGE・STS 先端デバイス・プロセスセッション(2)
  • Place of Presentation: 東京ビッグサイト（東京都・江東区）
  • Year and Date: 2016-12-14
  • Invited
• [Presentation] An Over 1Mfps Global Shutter CMOS Image Sensor with 480 Frame Storage Using Vertical Analog Memory Integration (2016)
  • Author(s): Manabu Suzuki, Masashi Suzuki, Rihito Kuroda, Yuki Kumagai, Akira Chiba, Noriyuki Miura, Naoya Kuriyama, Shigetoshi Sugawa
  • Organizer: 2016 IEEE International Electron Devices Meeting
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2016-12-05
  • Int'l Joint Research
• [Presentation] A Dead-time free global shutter stacked CMOS image sensor with in-pixel LOFIC and ADC using pixel-wise connections (2016)
  • Author(s): Rihito Kuroda, Hidetake Sugo, Shunichi Wakashima, Shigetoshi Sugawa
  • Organizer: 3rd International Workshop on Image Sensors and Imaging Systems
  • Place of Presentation: 東京工業大学 田町キャンパス（東京都・港区）
  • Year and Date: 2016-11-17
  • Int'l Joint Research / Invited
• [Presentation] 190-1100 nm waveband multispectral imaging system using high UV-light resistance 94dB dynamic range CMOS image sensor (2016)
  • Author(s): Yasuyuki Fujihara, Satoshi Nasuno, Shunichi Wakashima, Yusuke Aoyagi, Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: 3rd International Workshop on Image Sensors and Imaging Systems
  • Place of Presentation: 東京工業大学 田町キャンパス（東京都・港区）
  • Year and Date: 2016-11-17
  • Int'l Joint Research
• [Presentation] A High Sensitivity 20Mfps CMOS Image Sensor with Readout speed of 1Tpixel/sec for Visualization of Ultra-high Speed Phenomena (2016)
  • Author(s): Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: The 31st International Congress on High-speed Imaging and Photonics
  • Place of Presentation: ホテル阪急エキスポパーク（大阪府・吹田市）
  • Year and Date: 2016-11-07
  • Int'l Joint Research / Invited
• [Presentation] A High Sensitivity Compact Gas Concentration Sensor using UV Light and Charge Amplifier Circuit (2016)
  • Author(s): Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda,Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: IEEE Sensors 2016
  • Place of Presentation: Orlando, USA
  • Year and Date: 2016-10-30
  • Int'l Joint Research
• [Presentation] 190-1100 nm Waveband Multispectral Imaging System using High Light Resistance Wide Dynamic Range CMOS Image Sensor (2016)
  • Author(s): Yasuyuki Fujihara, Satoshi Nasuno, Shunichi Wakashima, Yusuke Aoyagi, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: IEEE Sensors 2016
  • Place of Presentation: Orlando, USA
  • Year and Date: 2016-10-30
  • Int'l Joint Research
• [Presentation] 動作電圧変化時の過渡状態におけるランダムテレグラフノイズの挙動に関する研究 (2016)
  • Author(s): 間脇武蔵, 寺本章伸, 黒田理人, 市野真也, 後藤哲也, 諏訪智之, 須川成利
  • Organizer: 電子情報通信学会技術研究報告・シリコン材料・デバイス研究会
  • Place of Presentation: 東北大学青葉山キャンパス（宮城県・仙台市）
  • Year and Date: 2016-10-26
• [Presentation] Low Frequency Noise of Accumulation-Mode n- and p-MOSFETs fabricated on (110) Crystallographic Silicon-Oriented Wafers (2016)
  • Author(s): Philippe Gaubert, Akinobu Teramoto and Shigetoshi Sugawa
  • Organizer: 2016 International Conference on Solid State Devices and Materials
  • Place of Presentation: つくば国際会議場（茨城県・つくば市）
  • Year and Date: 2016-09-26
  • Int'l Joint Research
• [Presentation] Dynamic Response of Random Telegraph Noise Time Constants toward Bias Voltage Changing (2016)
  • Author(s): T. Mawaki, A. Teramoto, S. Ichino, R. Kuroda, T. Goto, T. Suwa, S. Sugawa
  • Organizer: 平成28年度電気関係学会東北支部連合大会
  • Place of Presentation: 東北工業大学八木山キャンパス（宮城県・仙台市）
  • Year and Date: 2016-08-30
• [Presentation] On-Chip Optical Filter Technology with Low Extinction Coefficient SiN for Ultraviolet-Visible-Near Infrared Light Waveband Spectral Imaging (2016)
  • Author(s): Yasumasa Koda, Yhang Ricardo Sipauba Carvalho da Silva, Loic Julien, Daisuke Sawada, Tetsuya Goto, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: 2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
  • Place of Presentation: 函館国際ホテル（北海道・函館市）
  • Year and Date: 2016-07-04
  • Int'l Joint Research
• [Presentation] A Dead-time Free Global Shutter CMOS Image Sensor with in-pixel LOFIC and ADC using Pixel-wise Connection (2016)
  • Author(s): Hidetake Sugo, Shunichi Wakashima, Rihito Kuroda, Yuichiro Yamashita, Hirofumi Sumi, Tzu-Jui Wang, Po-Sheng Chou, Ming -Chieh Hsu and Shigetoshi Sugawa
  • Organizer: 2016 Symposium on VLSI Circuits
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2016-06-15
  • Int'l Joint Research
• [Presentation] Random Telegraph Noise Measurement and Analysis based on Arrayed Test Circuit toward High S/N CMOS Image Sensors (2016)
  • Author(s): Rihito Kuroda, Akinobu Teramoto and Shigetoshi Sugawa
  • Organizer: 29th IEEE International Conference on Microelectronic Test Structures
  • Place of Presentation: メルパルク横浜（神奈川県・横浜市）
  • Year and Date: 2016-03-28
  • Int'l Joint Research / Invited
• [Presentation] Wide dynamic range LOFIC CMOS image sensors: principle, achievements and extendibility (2016)
  • Author(s): Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: International Forum on Detectors for Photon Science
  • Place of Presentation: 富士ビューホテル（山梨県・富士河口湖町）
  • Year and Date: 2016-02-29
  • Int'l Joint Research / Invited
• [Presentation] CMOSイメージセンサの高速化・高感度化・広光波長帯域化技術 (2016)
  • Author(s): 黒田理人, 須川成利
  • Organizer: 第191回研究集会 シリコンテクノロジー分科会ナノ・接合技術研究会「接合技術の新展開」
  • Place of Presentation: 宝塚大学梅田キャンパス（大阪府・大阪市）
  • Year and Date: 2016-02-28
  • Invited
• [Presentation] A Dead-time Free Global Shutter CMOS Image Sensor with in-pixel LOFIC and ADC using Pixel-wise Connections (2016)
  • Author(s): Rihito Kuroda, Hidetake Sugo, Shunichi Wakashima, and Shigetoshi Sugawa
  • Organizer: Symposium on VLSI Circuits 2016報告会
  • Place of Presentation: 神戸大学・梅田インテリジェントラボラトリ（大阪府・大阪市）
• [Presentation] 画素毎の接続を用いた画素内に横型オーバーフロー蓄積容量およびAD変換器を有する露光時間途切れのないグローバルシャッタ積層型CMOSイメージセンサ (2016)
  • Author(s): 黒田 理人, 須郷 秀武, 若 嶋駿一, 須川 成利
  • Organizer: 映像情報メディア学会技術報告・情報センシング研究会
  • Place of Presentation: 機会振興会館（東京都・港区）
• [Presentation] Advanced CMOS Image Sensor Development (2015)
  • Author(s): Rihito Kuroda
  • Organizer: Tohoku Univ. - imec Seminar 2015 Sendai Symposium on Analytical Science 2015 Joint Seminar on "Unobtrusive Sensing & Daily Health Screening"
  • Place of Presentation: 東北大学青葉山キャンパス（宮城県・仙台市）
  • Year and Date: 2015-11-13
  • Int'l Joint Research
• [Presentation] An Ultraviolet Radiation Sensor Using Differential Spectral Response of Silicon Photodiodes (2015)
  • Author(s): Yhang Ricardo Sipauba Carvalho da Silva, Yasumasa Koda, Satoshi Nasuno, Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: IEEE Sensors 2015
  • Place of Presentation: Busan, South Korea
  • Year and Date: 2015-11-01
  • Int'l Joint Research
• [Presentation] Electrical Properties of MOSFETs Introducing Atomically Flat Gate Insulator/Silicon Interface (2015)
  • Author(s): Tetsuya GOTO, Rihito KURODA, Tomoyuki SUWA, Akinobu TERAMOTO, Toshiki OBARA, Daiki KIMOTO
  • Organizer: 電子情報通信学会 シリコン材料・デバイス研究会
  • Place of Presentation: 東北大学青葉山キャンパス（宮城県・仙台市）
  • Year and Date: 2015-10-29
• [Presentation] Analysis and reduction of leakage current of 2kV monolithic isolator with wide trench spiral isolation structure (2015)
  • Author(s): Yusuke Takeuchi, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials
  • Place of Presentation: 札幌コンベンションセンター（北海道・札幌市）
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] 電荷電圧変換ゲイン240uV/e-、飽和電子数200ke-、感度波長帯域190-1000nmを有するCMOSイメージセンサ (2015)
  • Author(s): 那須野悟史, 若嶋駿一, 楠原史章, 黒田理人, 須川成利
  • Organizer: 映像情報メディア学会技術報告 情報センシング研究会
  • Place of Presentation: 機会振興会館（東京都・港区）
  • Year and Date: 2015-09-18
• [Presentation] フローティングディフュージョン容量成分の解析・低減技術と高感度・高飽和CMOSイメージセンサへの適用 (2015)
  • Author(s): 楠原史章, 若嶋駿一, 那須野悟史, 黒田理人, 須川成利
  • Organizer: 映像情報メディア学会技術報告 情報センシング研究会
  • Place of Presentation: 機会振興会館（東京都・港区）
  • Year and Date: 2015-09-18
• [Presentation] CMOSイメージセンサの高感度化・高速化・光波長広帯域 －IISW2015・VLSI2015東北大学報告より－ (2015)
  • Author(s): 須川成利
  • Organizer: 次世代画像入力ビジョンシステム部会
  • Place of Presentation: 機会振興会館（東京都・港区）
  • Year and Date: 2015-08-07
  • Invited
• [Presentation] A Linear Response Single Exposure CMOS Image Sensor with 0.5e- Readout Noise and 76ke- Full Well Capacity (2015)
  • Author(s): Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: 2015 SYMPOSIUM ON VLSI CIRCUITS
  • Place of Presentation: リーガロイヤルホテル京都（京都府・京都市）
  • Year and Date: 2015-06-15
  • Int'l Joint Research
• [Presentation] A 80% QE High Readout Speed 1024 Pixel Linear Photodiode Array for UV-VIS-NIR Spectroscopy (2015)
  • Author(s): Rihito Kuroda, Takahiro Akutsu, Yasumasa Koda, Kenji Takubo, Hideki Tominaga, Ryuuta Hirose, Tomohiro Karasawa and Shigetoshi Sugawa
  • Organizer: 2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
  • Place of Presentation: Vaals, Netherlands
  • Year and Date: 2015-06-08
  • Int'l Joint Research
• [Presentation] Analysis and Reduction of Floating Diffusion Capacitance Components of CMOS Image Sensor for Photon-Countable Sensitivity (2015)
  • Author(s): Fumiaki Kusuhara, Shunichi Wakashima, Satoshi Nasuno, Rihito Kuroda and Shigetoshi Sugawa
  • Organizer: 2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
  • Place of Presentation: Vaals, Netherlands
  • Year and Date: 2015-06-08
  • Int'l Joint Research
• [Presentation] A 20Mfps Global Shutter CMOS Image Sensor with Improved Sensitivity and Power Consumption (2015)
  • Author(s): Shigetoshi Sugawa, Rihito Kuroda, Tohru Takeda, Fan Shao, Ken Miyauchi and Yasuhisa Tochigi
  • Organizer: 2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
  • Place of Presentation: Vaals, Netherlands
  • Year and Date: 2015-06-08
  • Int'l Joint Research
• [Presentation] A CMOS Image Sensor with 240μV/e- Conversion Gain, 200ke- Full Well Capacity and 190-1000nm Spectral Response (2015)
  • Author(s): Satoshi Nasuno, Shunichi Wakashima, Fumiaki Kusuhara, Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: 2015 INTERNATIONAL IMAGE SENSOR WORKSHOP
  • Place of Presentation: Vaals, Netherlands
  • Year and Date: 2015-06-08
  • Int'l Joint Research
• [Presentation] Ultra-Low Temperature Flattening Technique of Silicon Surface Using Xe/H2 Plasma (2015)
  • Author(s): Tomoyuki Suwa, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Shigetoshi Sugawa and Tadahiro Ohmi
  • Organizer: 227th Meeting of The Electrochemical Society
  • Place of Presentation: Chicago, USA
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern (2015)
  • Author(s): Tetsuya Goto, Rihito Kuroda, Tomoyuki Suwa, Akinobu Teramoto, Naoya Akagawa, Daiki Kimoto, Shigetoshi Sugawa, Tadahiro Ohmi, Yutaka Kamata, Yuki Kumagai and Katsuhiko Shibusawa
  • Organizer: 227th Meeting of The Electrochemical Society
  • Place of Presentation: Chicago, USA
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition (2015)
  • Author(s): Akinobu Teramoto, Yukihisa Nakao, Tomoyuki Suwa, Keiichi Hashimoto, Tsukasa Motoya, Masaki Hirayama, Shigetoshi Sugawa, and Tadahiro Ohmi
  • Organizer: 227th Meeting of The Electrochemical Society
  • Place of Presentation: Chicago, USA
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] Effect of Process Temperature of Al2O3 Atomic Layer Deposition Using Accurate Process Gasses Supply System (2015)
  • Author(s): Hisaya Sugita, Yasukasa Koda, Tomoyuki Suwa, Rihito Kuroda, Tetsuya Goto, Hidekazu Ishii, Satoru Yamashita, Akinobu Teramoto, Shigetoshi Sugawa, and Tadahiro Ohmi
  • Organizer: 227th Meeting of The Electrochemical Society
  • Place of Presentation: Chicago, USA
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] ゲート絶縁膜/Si界面の原子オーダー平坦化によるランダムテレグラフノイズ低減効果 (2015)
  • Author(s): 黒田理人, 後藤哲也, 赤川直也, 木本大幾, 寺本章伸, 須川 成利
  • Organizer: 映像情報メディア学会技術報告 情報センシング研究会
  • Place of Presentation: 東京理科大学森戸記念館（東京都・新宿区）
  • Year and Date: 2015-05-08
• [Presentation] UV/VIS/NIR imaging technologies: challenges and opportunities (2015)
  • Author(s): Rihito Kuroda, Shigetoshi Sugawa
  • Organizer: 2015 SPIE Sensing Technology + Applications
  • Place of Presentation: Baltimore, USA
  • Year and Date: 2015-04-20
  • Int'l Joint Research / Invited
• [Book] The Micro-World Observed by Ultra High-Speed Cameras: We See What You Don’t See, Part III Cameras with CCD/CMOS Sensors, Cameras with on-chip memory CMOS image sensors (2017)
  • Author(s): Rihito Kuroda, Shigetoshi Sugawa
  • Total Pages: 22
  • Publisher: Springer International Publishing
  • ISBN: 9783319614908
• [Book] 車載センシング技術の開発と ADAS、自動運転システムへの応用 第2章 第1節 CMOSイメージセンサの広ダイナミックレンジ化技術 (2017)
  • Author(s): 黒田 理人
  • Total Pages: 17
  • Publisher: 技術情報協会
  • ISBN: 9784861046582
• [Book] 光アライアンス2017年12月号 三次元積層を用いた先進CMOSイメージセンサ技術 (2017)
  • Author(s): 黒田 理人
  • Total Pages: 5
  • Publisher: 日本工業出版
• [Patent(Industrial Property Rights)] 光センサ及びその信号読み出し方法並びに固体撮像装置及びその信号読み出し方法 (2015)
  • Inventor(s): 須川 成利、黒田 理人、若嶋 駿一
  • Industrial Property Rights Holder: 国立大学法人東北大学
  • Industrial Property Rights Type: 特許
  • Filing Date: 2015
  • Acquisition Date: 2017