| Budget Amount *help |
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2018: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2017: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
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| Outline of Final Research Achievements |
This study demonstrated that the increase in monomer viscosity was induced in nano-gaps between unmodified and modified fused silica surfaces. The states of ultrathin films, in which the monomer viscosity increased in comparison with bulk, were changed by chemical structures of monomers and surface modifiers. It was concluded that a new equation instead of Arrhenius-Andrade-Eyring in the field of Surface Science was needed on the basis of Surface Molecular Science. The use of resist materials showing a high consumption rate of photopolymerizable group improved the homogeneousness of nanometer-scale Young modulus in the nanometer-thick resist films, leading to nanometer-scale matters with high size fidelity to resist masks after lithography process involving dry etching processes.
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