Evaluation of Piezoresistivity for Semi-conductive Nanowires by MEMS-based Strain Engineering
| Project/Area Number |
15H03893
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Kobe University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
菅野 公二 神戸大学, 工学研究科, 准教授 (20372568)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2017: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2016: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2015: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
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| Keywords | 実験ナノメカニクス / マルチフィジックス / 半導体ナノ細線 / シリコンカーバイド / ナノ材料 |
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| Outline of Final Research Achievements |
3C-SiCNWs are one of promising piezoresistive elements used in harsh environmental MEMS/NEMS applications, because of its high dielectric breakdown strength and excellent temperature/chemical stabilities. Especially, 3C-SiCNW wrapped by SiO2 shell is directly effective for fabrication of vertical structure FETs and FET-based mechanical sensors. This research clarified mechanical properties and piezoresistivity of 3C-SiCNWs wrapped with SiO2 (core/shell silicon carbide nanowires: C/S-SiCNWs) for harsh environmental MEMS/NEMS applications, using the MEMS-based nanotensile testing device. The tensile strengths for 3C-SiCNWs without SiO2 shell, and C/S-SiCNWs showed huge values of 22.4 GPa and 7.3 GPa on average, respectively. The gauge factor of the 3C-SiCNW without SiO2 shell showed -17.2 at 0.022 ε. Thus, the C/S-SiCNW has behaved as an n-type semiconductor, and it is useful as structural materials and piezoresistive elements in harsh environmental MEMS.
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Report
(4 results)
Research Products
(14 results)
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[Presentation] Mechanical Characterization of VLS-Grown Core-Shell SiC Nanowires for Nanomechanical Sensors2016
Author(s)
Shinya Nakata, Koji Sugano, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono
Organizer
29th International Microprocesses and Nanotechnology Conference (MNC2016), ANA Crowne Plaza Kyoto, Kyoto, Japan, Nov. 8-11, 2016, 9C-3-3 (2p).
Related Report
Int'l Joint Research
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[Presentation] Piezoresistance effect of VLS-synthesized core/shell-SiC nanowires2016
Author(s)
Shinya Nakata, Daiki Imoto, Koji Sugano, Francesca Rossi, Alois Lugstein, Yoshitada Isono
Organizer
International Symposium on Micro-Nano Science and Technology2016, The University of Tokyo, Tokyo, Japan, Dec. 16-18 2016, SuP-1 (1p).
Related Report
Int'l Joint Research
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