Establishment of piezoelectric films with large piezoelectric response using reversible clamp effect from the substrates

• Project/Area Number: 15H04121
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: FUNAKUBO Hiroshi 東京工業大学, 物質理工学院, 教授 (90219080)
• Co-Investigator(Kenkyū-buntansha): 清水 荘雄 東京工業大学, 物質理工学院, 助教 (60707587)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000); Fiscal Year 2017: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2015: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
• Keywords: 誘電体膜 / 圧電MEMS / 誘電体 / 非鉛圧電体 / クランプ効果 / ドメイン構造

Outline of Final Research Achievements

(100)/(001)-oriented tetragonal Pb(Zr0.5Ti0.5)O3 epitaxial films with 2 micro meter in thickness were grown on Si, SrTiO3 and CaF2 substrates. Volume fraction of (001) orientation, Vc, changed by the thermal strain above Curie temperature. Vc value increased by the pooling process for all films. There two contributions to the piezoelectric response were observed for all films by the XRD observation under applied an electric field.
Orientation change from (001) to (100) orientation plays a main role for the piezoelectric response. In addition, films on Si substrates show the maximum orientation change and macroscopic piezoelectric response.

Research Products

• [Int'l Joint Research] University of Nebraska/Carnegie Institution for Science/University of Pennsylvania(米国)
• [Int'l Joint Research] スイス連邦工科大学ローザンヌ校 (EPFL)(スイス)
• [Int'l Joint Research] University of New South Wales(オーストラリア)
• [Int'l Joint Research] ニューサウスウェールズ大学(オーストラリア)
• [Int'l Joint Research] オークリッジ国立研究所(米国)
• [Int'l Joint Research] ニューサウスウェールズ大学(オーストラリア)
• [Journal Article] Asymmetry in mechanical polarization switching (2017)
  • Author(s): Lu Haidong、Liu Shi、Ye Ziyu、Yasui Shintaro、Funakubo Hiroshi、Rappe Andrew M.、Gruverman Alexei
  • Journal Title: Applied Physics Letters Volume: 110 Issue: 22 Pages: 222903-222903
  • DOI: 10.1063/1.4983381
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Preface (2017)
  • Author(s): Daichi Ichinose、Takaaki Nakashima、 Yoshitaka Ehara、Takahiro Oikawa、Takao Shimizu、Osami Sakata、Tomoaki Yamada、Hiroshi Funakubo
  • Journal Title: Journal of the Ceramic Society of Japan Volume: 125 Issue: 6 Pages: P6-1-P6-3
  • DOI: 10.2109/jcersj2.125.P6-1
  • NAID: 130006899950
  • ISSN: 1348-6535, 1882-0743
  • Peer Reviewed
• [Journal Article] Charge Screening Strategy for Domain Pattern Control in Nano-scale Ferroelectric Systems (2017)
  • Author(s): T. Yamada, D. Ito, T. Sluka, O. Sakata, H. Tanaka, H. Funakubo, T. Namazu, N. Wakiya, M. Yoshino, T. Nagasaki, and N. Setter
  • Journal Title: Sci. Rep. Volume: 7 Issue: 1 Pages: 5236-5236
  • DOI: 10.1038/s41598-017-05475-x
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Electric-field-induced lattice distortion in epitaxial BiFeO3 thin films as determined by in situ time-resolved x-ray diffraction (2017)
  • Author(s): Nakashima Seiji、Sakata Osami、Funakubo Hiroshi、Shimizu Takao、Ichinose Daichi、Takayama Kota、Imai Yasuhiko、Fujisawa Hironori、Shimizu Masaru
  • Journal Title: Applied Physics Letters Volume: 111 Issue: 8 Pages: 082907-082907
  • DOI: 10.1063/1.5000495
  • Peer Reviewed
• [Journal Article] In-situ observation of ultrafast 90° domain switching under application of an electric field in (100)/(001)-oriented tetragonal epitaxial Pb(Zr0.4Ti0.6)O3 thin films (2017)
  • Author(s): Ehara Yoshitaka、Yasui Shintaro、Oikawa Takahiro、Shiraishi Takahisa、Shimizu Takao、Tanaka Hiroki、Kanenko Noriyuki、Maran Ronald、Yamada Tomoaki、Imai Yasuhiko、Sakata Osami、Valanoor Nagarajan、Funakubo Hiroshi
  • Journal Title: Scientific Reports Volume: 7 Issue: 1
  • DOI: 10.1038/s41598-017-09389-6
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Fabrication and Characterization of {110}-oriented Pb(Zr,Ti)O3 Thin Films on Pt/SiO2/Si substrates using PdO//Pd Buffer Layer (2017)
  • Author(s): Naoya Oshima、Kiyoshi Uchiyama、Yoshitaka Ehara、Takahiro Oikawa、Daichi Ichinose、Hiroki Tanaka、Tomoya Sato、Hiroshi Uchida、Hiroshi Funakubo
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 10S Pages: 10PF09-10PF09
  • DOI: 10.7567/jjap.56.10pf09
  • NAID: 210000148386
  • Peer Reviewed
• [Journal Article] Polarization switching behavior of one-axis-oriented lead zirconate titanate films fabricated on metal oxide nanosheet layer (2017)
  • Author(s): Uchida Hiroshi、Ichinose Daichi、Shiraishi Takahisa、Shima Hiromi、Kiguchi Takanori、Akama Akihiko、Nishida Ken、Konno Toyohiko J.、Funakubo Hiroshi
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 10S Pages: 10PF10-10PF10
  • DOI: 10.7567/jjap.56.10pf10
  • NAID: 210000148387
  • Peer Reviewed
• [Journal Article] In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr, Ti)O3 films grown on (100) Si substrates by metal organic chemical vapor deposition (2017)
  • Author(s): Shoji Okamoto、P. S. Sankara Rama Krishnan、Satoshi Okamoto、Shintaro Yokoyama、Kensuke Akiyama、Hiroshi Funakubo
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 10S Pages: 10PF12-10PF12
  • DOI: 10.7567/jjap.56.10pf12
  • NAID: 210000148389
  • Peer Reviewed
• [Journal Article] Influence of Internal Strains of (110)-One-Axis-Oriented (Ba0.5Sr0.5)TiO3 (BST) Thin Films on Their Dielectric Behaviors (2017)
  • Author(s): Naoya Oshima、Kiyoshi Uchiyama、Yoshitaka Ehara、Takahiro Oikawa、Hiroki Tanaka、Tomoya Sato、Hiroshi Uchida、Tomoaki Yamada、Hiroshi Funakubo
  • Journal Title: Science of Advanced Materials Volume: 9 Issue: 10 Pages: 1806-1809
  • DOI: 10.1166/sam.2017.2808
  • Peer Reviewed
• [Journal Article] Effect of in-plane tensile strain in (100)/(001)-oriented epitaxial PbTiO3 films on their phase transition temperature and tetragonal distortion (2017)
  • Author(s): Takaaki Nakashima, Daichi Ichinose, Yoshitaka Ehara, Takao Shimizu, Takeshi Kobayashi, Tomoaki Yamada, and Hiroshi Funakubo
  • Journal Title: Appl. Phys Lett. Volume: 110 Issue: 12 Pages: 1229021-4
  • DOI: 10.1063/1.4978649
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Direct Imaging of the Relaxation of Individual Ferroelectric Interfaces in a Tensile-Strained Film (2017)
  • Author(s): Linglong Li, Ye Cao, Suhas Somnath, Yaodong Yang, Stephen Jesse, Yoshitaka Ehara, Hiroshi Funakubo, Long-Qing Chen, Sergei V. Kalinin, and Rama K. Vasudevan
  • Journal Title: Adv. Electron. Mater. Volume: - Issue: 4
  • DOI: 10.1002/aelm.201600508
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Large irreversible non-180° domain switching after poling treatment in Pb(Zr, Ti)O3 films (2016)
  • Author(s): Yoshitaka Ehara, Shintaro Yasui, Takahiro Oikawa, Takahisa Shiraishi, Naoya Oshima, Tomoaki Yamada, Yasuhiko Imai, Osami Sakata and Hiroshi Funakubo
  • Journal Title: Appl. Phys. Lett Volume: 108 Issue: 21 Pages: 212901-212901
  • DOI: 10.1063/1.4951672
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Enhancement of Dielectric Properties in Epitaxial Bismuth Ferrite-Bismuth Samarium Ferrite Superlattices (2016)
  • Author(s): Ronald Maran, Shintaro Yasui, Eugene Eliseev, Anna Morozovska, Hiroshi Funakubo, Ichiro Takeuchi, and Nagarajan Valanoor
  • Journal Title: Adv. Electron. Mater. Volume: - Issue: 8 Pages: 1600170-1600170
  • DOI: 10.1002/aelm.201600170
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Composition dependences of crystal structure and electrical properties of epitaxial Pb(Zr,Ti)O3 films grown on Si and SrTiO3 substrates (2016)
  • Author(s): Shoji Okamoto, Satoshi Okamoto, Shintaro Yokoyama, Kensuke Akiyama and Hiroshi Funakubo
  • Journal Title: Jpn. J. Appl. Phys Volume: 55 Issue: 10S Pages: 10TA08-10TA08
  • DOI: 10.7567/jjap.55.10ta08
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Growth of epitaxial tetragonal (Bi,K)TiO3 films and their ferroelectric and piezoelectric properties (2016)
  • Author(s): Yuichi Nemoto, Daichi Ichinose, Takao Shimizu, Hiroshi Uchida, Wakiko Yamaoka, Yusuke Sato and Hiroshi Funakubo
  • Journal Title: Jpn. J. Appl. Phys Volume: 55 Issue: 10S Pages: 10TA13-10TA13
  • DOI: 10.7567/jjap.55.10ta13
  • NAID: 210000147163
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Epitaxial PbZrxTi1-xO3 ferroelectric bilayers with giant electromechanical properties (2015)
  • Author(s): Hsin-Hui Huang, Qi Zhang, Esther Huang, Ronald Maran, Osami Sakata, Yoshitaka Ehara,Takahisa Shiraishi, Hiroshi Funakubo, Paul Munroe and Nagarajan Valanoor
  • Journal Title: Advanced Materials Interfaces Volume: 2 Issue: 8
  • DOI: 10.1002/admi.201500075
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Orientation Control of Epitaxial Tetragonal Pb(ZrxTi1-x)O3 Thin Films Grown on (100)KTaO3 Substrates by Tuning the Zr/(Zr+Ti) Ratio (2015)
  • Author(s): D. Ichinose, T. Nakashima, Y. Ehara, T. Oikawa, T. Shimizu, O. Sakata, T. Yamada, and H. Funakubo
  • Journal Title: Appl. Phys. Lett. Volume: 107 Issue: 2
  • DOI: 10.1063/1.4926963
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Polar-axis-oriented crystal growth of tetragonal PZT films on stainless steel substrate using pseudo-perovskite nanosheet buffer layer (2015)
  • Author(s): Yoshiki Minemura, Daichi Ichinose, Kohei Nagasaka, Jin Woon Kim, Hiromi Shima, Ken Nishida, Takanori Kiguchi, Toyohiko J. Konno, Naoya Oshima, Hiroshi Funakubo, and Hiroshi Uchida
  • Journal Title: AIP Advances Volume: 5 Issue: 7
  • DOI: 10.1063/1.4927208
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Negligible substrate clamping effect on piezoelectric response in (111)-epitaxial tetragonal Pb(Zr, Ti)O3 films (2015)
  • Author(s): Tomoaki Yamada, Jun Yasumoto, Daisuke Ito, Osami Sakata, Yasuhiko Imai, Takanori Kiguchi, Takahisa Shiraishi, Takao Shimizu, Hiroshi Funakubo, Masahito Yoshino, and Takanori Nagasaki
  • Journal Title: J. Appl. Phys. Volume: 118 Issue: 7
  • DOI: 10.1063/1.4927810
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Orientation and film thickness dependencies of (100)- and (111)-oriented epitaxial Pb(Mg1/3Nb2/3)O3 films grown by metal organic chemical vapor Deposition (2015)
  • Author(s): Hiroshi Funakubo , Satoshi Okamaoto, Shintaro Yokoyama, Shoji Okamoto, Junichi Kimura, Hiroshi Uchida
  • Journal Title: J. Materiomics Volume: 1 Issue: 3 Pages: 188-195
  • DOI: 10.1016/j.jmat.2015.07.004
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Domain Structure of Tetragonal Pb(Zr,Ti)O3 Nanorods and its Size Dependence (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, J. Kuroishi, T. Namazu, Y. Imai, T. Shiraishi, T. Shimizu, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Journal Title: Jpn. J. Appl. Phys. Volume: 54 Issue: 10S Pages: 10NA07-10NA07
  • DOI: 10.7567/jjap.54.10na07
  • NAID: 210000145768
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Growth of {110}-one-axis-oriented perovskite-type oxide films using self-aligned epitaxial (101)PdO//(111) Pd double layers (2015)
  • Author(s): Hiroki Tanaka, Tetsuro Kariya, Takao Shimizu, Kiyoshi Uchiyama, and Hiroshi Funakubo
  • Journal Title: Thin Solid Films Volume: 599 Pages: 133-137
  • DOI: 10.1016/j.tsf.2015.12.067
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] PLD法を用いた(Bi, Na)TiO3-BaTiO3系薄膜の作製と評価 (2018)
  • Author(s): 長谷川光勇、清水荘雄、佐藤祐介、山岡和希子、内田寛、舟窪浩
  • Organizer: 第56回セラミックス基礎科学討論会
• [Presentation] PLD法を用いた(Bi,Na)TiO3-BaTiO3系薄膜の作製と評価 (2018)
  • Author(s): 長谷川光勇、清水荘雄、佐藤祐介、山岡和希子、石田未来、内田寛、舟窪浩
  • Organizer: 第65回応用物理学会春季学術講演会
• [Presentation] 電界印加下における正方晶Pb(Zr,Ti)O3膜の結晶構造の時間応答 (2017)
  • Author(s): 佐藤智也、一ノ瀬大地、三村和仙、根本祐一、清水荘雄、今井康彦、内田寛、坂田修身、舟窪浩
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜（神奈川県）
  • Year and Date: 2017-03-14
• [Presentation] PLD法による正方晶(Bi, K)TiO3エピタキシャル膜の作製とポストアニールが強誘電性に与える影響 (2017)
  • Author(s): 根本祐一、佐藤智也、一ノ瀬大地、清水荘雄、内田寛、木口賢紀、佐藤祐介、山岡和希子、舟窪浩
  • Organizer: 第55回セラミックス協会基礎科学討論会
  • Place of Presentation: 岡山コンベンションセンター（岡山県）
  • Year and Date: 2017-01-12
• [Presentation] 結晶構造の異なるPb(Zr, Ti)O3膜のドメイン構造に及ぼす電界印加の影響 (2017)
  • Author(s): 佐藤智也、一ノ瀬大地、根本祐一、清水荘雄、内田寛、舟窪浩
  • Organizer: 第55回セラミックス協会基礎科学討論会
  • Place of Presentation: 岡山コンベンションセンター（岡山県）
  • Year and Date: 2017-01-12
• [Presentation] Domain Structure propagation of tensile-strained {100}-oriented epitaxial tetragonal Pb(Zr, Ti)O3 films (2017)
  • Author(s): Hiroshi Funakubo, Daichi Ichinose, Tomoya Sato, Takao Shimizu, Osami Sakata, and Tomoaki Yamada
  • Organizer: PACRIM 12 (12th Pacific Rim Conference on Ceramic and Glass Technology)
  • Int'l Joint Research
• [Presentation] A Proposal of New Buffer Layer for Depositing (110)-oriented Perovskite Thin Films on (111)Pt/SiO2/Si Substrates (2017)
  • Author(s): K. Uchiyama, T. Sato, A. Akama, T. Kiguchi, T.J. Konno, N. Oshima, D. Ichinose, and H. Funakubo
  • Organizer: 2017 Joint IEEE ISAF-IWATMD-PFM Conference
  • Int'l Joint Research
• [Presentation] 強誘電体エピタキシャル薄膜の界面構造 (2017)
  • Author(s): 木口賢紀、範滄宇、白石貴久、舟窪浩、今野豊彦
  • Organizer: 第73回日本顕微鏡学会学術講演会
• [Presentation] PdO//Pdバッファ層を用いた｛110｝配向Pb(Zr,Ti)O3薄膜の作製とその物性評価 (2017)
  • Author(s): 内山潔、大島直也、江原祥隆、及川貴弘、一ノ瀬大地、田中宏樹、佐藤智也、内田寛、舟窪浩
  • Organizer: 第34回強誘電体応用会議（FMA34）
• [Presentation] Domain structure change by applying electric field of dominantly in-plane-polarized Pb(Zr,Ti)O3 thin film (2017)
  • Author(s): Daichi Ichinose, Yoshitaka Ehara, Takao Shimizu, Osami Sakata, Tomoaki Yamada, Alexei. Gruverman, and Hiroshi Funakubo
  • Organizer: STAC-10 (The Tenth International Conference on the Science and Technology for Advanced Ceramics)
  • Int'l Joint Research
• [Presentation] Time Response of Crystal Structure in Tetragonal Pb(Zr,Ti)O3 Films Under an Applied Electric Field (2017)
  • Author(s): Tomoya Sato, Daichi Ichinose, Naoya Oshima, Takanori Mimura, Yuichi Nemoto, Takao Shimizu, Yasuhiko Imai, Hiroshi Uchida, Osami Sakata, and Hiroshi Funakubo
  • Organizer: STAC-10 (The Tenth International Conference on the Science and Technology for Advanced Ceramics)
  • Int'l Joint Research
• [Presentation] エピタキシャルBiFeO3薄膜における電場印加下の格子歪 (2017)
  • Author(s): 中嶋誠二、藤沢浩訓、坂田修身、舟窪浩、清水莊雄、一ノ瀬大地、今井康彦、清水勝
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] エピタキシャルPZT膜におけるマルチドメイン構造と面内歪の緩和 (2017)
  • Author(s): 佐藤智也、一ノ瀬大地、三村和仙、清水荘雄、山田智明、舟窪浩
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] Domain structure change by applying electric field of dominantly in-plane-polarized (100)/(001)-oriented tetragonal Pb(Zr, Ti)O3 thin film (2017)
  • Author(s): Daichi Ichinose, Yoshitaka Ehara, Takao Shimizu, Osami Sakata, Tomoaki Yamada, and Hiroshi Funakubo
  • Organizer: 18th US-Japan Seminar on Dielectric and Piezoelectric Materials
  • Int'l Joint Research
• [Presentation] 正方晶PZT薄膜のドメイン構造の配向及び歪制御 (2016)
  • Author(s): 一ノ瀬大地、中島祟明、江原祥隆、及川貴弘、清水荘雄、坂田修身、山田智明、舟窪浩
  • Organizer: 第36回エレクトロセラミックス研究討論会
  • Place of Presentation: ユニオンビル（富士通労働会館）（神奈川県）
  • Year and Date: 2016-10-13
• [Presentation] Domain structure of tensile and compressive strainesd epitaxial Pb(Zr,Ti)O3 films with {100} orientation (2016)
  • Author(s): 132)Hiroshi Funakubo, Daichi Ichinose, Tomoya Sato, Takao Shimizu, Osami Sakata, and Tomoaki Yamada
  • Organizer: 2016 ISFD-13 Conference (13th International Sumposium on Ferroic Domains & Micro-to Nano-scopic Structures)
  • Place of Presentation: Coast Coal Harbour Hotel（カナダ）
  • Year and Date: 2016-10-02
  • Int'l Joint Research
• [Presentation] 面内分極軸優先配向Pb(Zr,Ti)O3薄膜のドメイン構造 (2016)
  • Author(s): 一ノ瀬大地、江原祥隆、清水荘雄、坂田修身、山田智明、Alexei Gruverman、舟窪浩
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟県）
  • Year and Date: 2016-09-13
• [Presentation] PLD法による配向制御したエピタキシャル(Bi,K)TiO3膜の作製 (2016)
  • Author(s): 根本祐一、一ノ瀬 大地、清水荘雄、内田寛、佐藤祐介、山岡和希子、舟窪浩
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟県）
  • Year and Date: 2016-09-13
• [Presentation] Domain Formation of Epitaxial Tetragonal Pb(Zr, Ti)O3 Thin Films Grown Under Tensile Strain (2016)
  • Author(s): Hiroshi Funakubo, Daichi Ichinose, Takaaki Nakashima, Yoshitaka Ehara, Takao Shimizu, Osami Sakata, and Tomoaki Yamada
  • Organizer: TOPO 2016 (International Workshop on Topological Structures in Ferroic Materials)
  • Place of Presentation: Technische Universität Dresden（ドイツ）
  • Year and Date: 2016-08-16
  • Int'l Joint Research
• [Presentation] 電場印加下のエピタキシャルBiFeO3薄膜における格子歪のその場観察 (2016)
  • Author(s): 中嶋誠二、坂田修身、舟窪浩、高山幸太、藤沢浩訓、清水荘雄、一ノ瀬大地、今井康彦、清水勝
  • Organizer: 第33回強誘電体応用会議（FMA 33）
  • Place of Presentation: コープイン京都（京都府）
  • Year and Date: 2016-05-25
• [Presentation] PLD法による正方晶(Bi,K)TiO3エピタキシャル膜作製と圧電特性評価 (2016)
  • Author(s): 根本祐一、一ノ瀬大地、清水荘雄、内田寛、舟窪浩
  • Organizer: 第33回強誘電体応用会議（FMA 33）
  • Place of Presentation: コープイン京都（京都府）
  • Year and Date: 2016-05-25
• [Presentation] PLD法による正方晶(Bi,K)TiO3エピタキシャル膜作製と圧電特性評価 (2016)
  • Author(s): 根本祐一、一ノ瀬大地、清水荘雄、内田 寛、舟窪 浩
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京都）
  • Year and Date: 2016-03-19
• [Presentation] 電界印加による面内分極軸優先配向Pb(Zr,Ti)O3薄膜のドメイン構造変化 (2016)
  • Author(s): 一ノ瀬大地、江原祥隆、清水荘雄、坂田修身、山田智明、舟窪 浩
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京都）
  • Year and Date: 2016-03-19
• [Presentation] {110}一軸配向ペロブスカイト型酸化物薄膜の作製と結晶構造解析 (2016)
  • Author(s): 佐藤智也、木村純一、一ノ瀬大地、三村和仙、舟窪 浩、内山 潔
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京都）
  • Year and Date: 2016-03-19
• [Presentation] 正方晶/菱面体晶Pb(ZrxTi1-x)O3人工超格子薄膜における圧電応答の層厚依存性 (2016)
  • Author(s): 山田智明、海老原洋平、坂田修身、森岡 仁、木口賢紀、清水荘雄、舟窪 浩、吉野正人、長崎正雅
  • Organizer: 第63回応用物理学会春季学術講演会
  • Place of Presentation: 東京工業大学 大岡山キャンパス（東京都）
  • Year and Date: 2016-03-19
• [Presentation] PLD 法による正方晶(Bi,,K)TiO3 エピタキシャル膜作製と圧電特性評価 (2016)
  • Author(s): 根本祐一、一ノ瀬大地、清水荘雄、内田寛、舟窪浩
  • Organizer: 第54回セラミックス基礎科学討論会
  • Place of Presentation: アバンセ（佐賀県立男女共同参画センター・佐賀県立生涯学習センター）（佐賀県）
  • Year and Date: 2016-01-07
• [Presentation] 正方晶/菱面体晶Pb(Zr,Ti)O3 人工超格子薄膜の構造及び圧電特性の層厚依存性 (2016)
  • Author(s): 海老原洋平、山田智明、坂田修身、森岡仁、木口賢紀、今井康彦、清水荘雄、舟窪浩、吉野正人、長﨑正雅
  • Organizer: 第54回セラミックス基礎科学討論会
  • Place of Presentation: アバンセ（佐賀県立男女共同参画センター・佐賀県立生涯学習センター）（佐賀県）
  • Year and Date: 2016-01-07
• [Presentation] Domain structure and piezoelectric response of self-assembled tetragonal Pb(Zr,Ti)O3 Nanorods (2015)
  • Author(s): Tomoaki Yamada, Daisuke Ito, Osami Sakata, Takanori Kiguchi, Takahisa Shiraishi, Takao Shimizu, MasahitoYoshino, Hiroshi Funakubo, Takanori Nagasaki
  • Organizer: The International Chemical Congress of Pacific Basin Societies 2015 (Pacifichem 2015)
  • Place of Presentation: Hawaii Convention Center (Honolulu, Hawaii, USA)
  • Year and Date: 2015-12-15
  • Int'l Joint Research / Invited
• [Presentation] 正方晶/菱面体晶P b(Zr,Ti)O3人工超格子薄膜の作製と圧電特性の評価 (2015)
  • Author(s): 海老原洋平、山田智明、坂田修身、森岡仁、木口賢紀、今井康彦、清水荘雄、舟窪浩、吉野正人、長﨑正雅
  • Organizer: 平成27年度日本セラミックス協会東海支部学術研究発表会
  • Place of Presentation: 名古屋大学（愛知県）
  • Year and Date: 2015-12-12
• [Presentation] Orientation Control of Epitaxial Tetragonal Pb(Zr, Ti)O3 Thin Films Grown on (100)KTaO3 Substrates by Tuning the Zr/(Zr+Ti) Ratio (2015)
  • Author(s): Daichi Ichinose, Takaaki Nakashima, Yoshitaka Ehara, Takahiro Oikawa, Takao Shimizu, Osami Sakata, Tomoaki Yamada, and Hiroshi Funakubo
  • Organizer: 17th US-Japan Seminar on Dielectric and Piezoelectric Ceramics
  • Place of Presentation: Hotel Buena Vista, Matsumoto (Japan)
  • Year and Date: 2015-11-15
  • Int'l Joint Research
• [Presentation] Domain Structure and Piezoelectric Response in One-dimensional PZT Nanostructure (2015)
  • Author(s): T. Yamada, D. Ito, O. Sakata, H. Funakubo, M. Yoshino, and T. Nagasaki
  • Organizer: IUMRS-ICAM 2015 (International Conference on Advanced Materials)
  • Place of Presentation: ICC Jeju (Korea)
  • Year and Date: 2015-10-25
  • Int'l Joint Research
• [Presentation] PdO//Pd バッファ層を用いた{110} 配向Pb(Zr,Ti)O3(PZT)薄膜の作製と評価 (2015)
  • Author(s): 内山潔、大島直也、田中宏樹、江原祥隆、及川貴弘、佐藤智也、内田寛、舟窪浩
  • Organizer: 日本セラミックス協会第28回秋季シンポジウム
  • Place of Presentation: 富山大学 五福キャンパス（富山県）
  • Year and Date: 2015-09-16
• [Presentation] 正方晶Pb(Zr,Ti)O3ナノロッドのドメイン構造に及ぼす脱分極電界の影響 (2015)
  • Author(s): 山田智明、伊藤大介、坂田修身、黒石隼輝、生津資大、清水荘雄、舟窪浩、木口賢紀、吉野正人、長崎正雅
  • Organizer: 日本セラミックス協会第28回秋季シンポジウム
  • Place of Presentation: 富山大学 五福キャンパス（富山県）
  • Year and Date: 2015-09-16
• [Presentation] XRD測定による (100)/(001)配向正方晶Pb(Zr,Ti)O3膜の電界印加下の結晶構造変化の定量分析 (2015)
  • Author(s): 舟窪 浩、大島 直也、清水 荘雄、中島 光雅、江原 祥隆、及川 貴弘、内田 寛
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県）
  • Year and Date: 2015-09-13
• [Presentation] (100)/(001)配向エピタキシャルPbTiO3膜におけるドメイン構造に及ぼす温度と格子歪みの影響 (2015)
  • Author(s): 舟窪 浩、中島 崇明、一ノ瀬 大地、江原 祥隆、中島 光雅、清水 荘雄、小林 健、飯島 高志、山田 智明
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県）
  • Year and Date: 2015-09-13
• [Presentation] RFマグネトロンスパッタリング法による{110}高配向Ba(Ce,Y)O3ぺロブスカイト薄膜の作製 (2015)
  • Author(s): 佐藤 智也、一ノ瀬 大地、舟窪 浩、内山 潔
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県）
  • Year and Date: 2015-09-13
• [Presentation] 正方晶Pb(Zr,Ti)O3薄膜におけるZr/(Zr+Ti)比のドメイン構造への影響 (2015)
  • Author(s): 一ノ瀬 大地、中島 祟明、江原 祥隆、清水 荘雄、坂田 修身、山田 智明、舟窪 浩
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県）
  • Year and Date: 2015-09-13
• [Presentation] {100}, {111}配向Pb(Zr,Ti)O3ナノロッドのドメイン構造とそのサイズ依存性 (2015)
  • Author(s): 山田 智明、伊藤 大介、坂田 修身、黒石 隼輝、生津 資大、清水 荘雄、舟窪 浩、吉野 正人、長崎 正雅
  • Organizer: 第76回応用物理学会秋季学術講演会
  • Place of Presentation: 名古屋国際会議場（愛知県）
  • Year and Date: 2015-09-13
• [Presentation] Large Piezoelectricity Driven by Electrically-Induced High-Density Ferroelastic Domains in Tetragonal Pb(Zr, Ti)O3 Films (2015)
  • Author(s): Hiroshi FUNAKUBO, Mitsumasa NAKAJIMA, Hiorshi NAKAKI, Tomoaki YAMADA, Ayumi WADA, Takahiro OIKAWA, Takaaki NAKASHIMA, Yohitaka EHARA, Naoya OSHIMA, Alexei GRUVERMAN
  • Organizer: ISAF-ISIF-PFM 2015
  • Place of Presentation: Matrix @ Biopolis (Singapore)
  • Year and Date: 2015-05-24
  • Int'l Joint Research / Invited
• [Presentation] Piezoelectric Response in Epitaxial PZT 1D-Nanorods and 2D-Thin Films (2015)
  • Author(s): Tomoaki YAMADA, Jun YASUMOTO, Daisuke ITO, Osami SAKATA, Takanori KIGUCHI, Hidenori TANAKA, Yoshitaka EHARA, Shintaro YASUI, Takahiro OIKAWA, Hiroshi FUNAKUBO, Masahito YOSHINO, Takanori NAGASAKI
  • Organizer: ISAF-ISIF-PFM 2015
  • Place of Presentation: Matrix @ Biopolis (Singapore)
  • Year and Date: 2015-05-24
  • Int'l Joint Research
• [Presentation] 正方晶Pb(Zr，Ti)O3 ナノロッドのドメイン構造とそのサイズ依存性 (2015)
  • Author(s): 山田智明、伊藤大介、坂田修身、黒石隼輝、生津資大、白石貴久、清水荘雄、舟窪 浩、吉野正人、長崎正雅
  • Organizer: 第32回強誘電体応用会議（FMA 32）
  • Place of Presentation: コープイン京都（京都府）
  • Year and Date: 2015-05-20
• [Presentation] PdO/Pd バッファ層を用いた｛110｝配向ペロブスカイト薄膜の作製とその物性評価 (2015)
  • Author(s): 内山 潔、大島直也、江原祥隆、及川貴弘、田中宏樹、佐藤智也、内田 寛、舟窪 浩
  • Organizer: 第32回強誘電体応用会議（FMA 32）
  • Place of Presentation: コープイン京都（京都府）
  • Year and Date: 2015-05-20
• [Remarks] 東京工業大学 物質理工学院 材料系材料コース 舟窪研究室
  • URL: http://f-lab.iem.titech.ac.jp/f-lab.htm
• [Remarks] 東京工業大学 物質理工学院 材料系材料コース 舟窪研究室
  • URL: http://f-lab.iem.titech.ac.jp/f-lab.htm
• [Remarks] 東京工業大学物質理工学院材料系舟窪研究室ホームページ
  • URL: http://f-lab.iem.titech.ac.jp/f-lab.htm
• [Patent(Industrial Property Rights)] 圧電薄膜、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 (2018)
  • Inventor(s): 佐藤祐介 佐藤和希子 石田未来 舟窪浩 長谷川光勇 清水荘雄
  • Industrial Property Rights Holder: 佐藤祐介 佐藤和希子 石田未来 舟窪浩 長谷川光勇 清水荘雄
  • Industrial Property Rights Type: 特許
  • Filing Date: 2018
• [Patent(Industrial Property Rights)] 圧電薄膜、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 (2017)
  • Inventor(s): 佐藤祐介 森下純平 佐藤和希子 舟窪浩 清水荘雄 根本祐一
  • Industrial Property Rights Holder: 佐藤祐介 森下純平 佐藤和希子 舟窪浩 清水荘雄 根本祐一
  • Industrial Property Rights Type: 特許
  • Filing Date: 2017
• [Patent(Industrial Property Rights)] 圧電薄膜、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置 (2016)
  • Inventor(s): 政井琢、佐藤祐介、森下純平、舟窪浩、清水荘雄、根本祐一
  • Industrial Property Rights Holder: 政井琢、佐藤祐介、森下純平、舟窪浩、清水荘雄、根本祐一
  • Industrial Property Rights Type: 特許
  • Filing Date: 2016-12-22
  • Overseas