Control and device application of multi-axis MEMS scanner by single driving apparatus

• Project/Area Number: 15H05514
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Waseda University
• Principal Investigator: Iwase Eiji 早稲田大学, 理工学術院, 准教授 (70436559)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥23,400,000 (Direct Cost: ¥18,000,000、Indirect Cost: ¥5,400,000); Fiscal Year 2017: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2016: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2015: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
• Keywords: マイクロマシン / マイクロ・ナノデバイス / MEMSスキャナ / ナノマイクロメカトロニクス

Outline of Final Research Achievements

Our objective in this research is to realize a three-dimensional (3-D) operation of a Micro-Electro-Mechanical Systems (MEMS) scanner with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3-D MEMS scanner with a single pair of beams having three resonant modes. We demonstrated the 3-D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the displacements are proportional to the voltage amplitudes of each resonant frequency in the superposed signal.

Research Products

• [Journal Article] Operation of three-dimensional MEMS mirror by single superposed driving signal (2017)
  • Author(s): Nagasawa Toshiya、Oguchi Yohei、Iwase Eiji
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 6S1 Pages: 06GN12-06GN12
  • DOI: 10.7567/jjap.56.06gn12
  • NAID: 210000147937
  • Peer Reviewed
• [Journal Article] Operation of Three-Dimensional MEMS Mirror by Single Superposed Driving Signal (2017)
  • Author(s): Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase
  • Journal Title: Japanese Journal of Applied Physics Volume: 56
  • NAID: 210000147937
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] The Design of MEMS Scanner for the Three Dimensional Actuation with a Pair of Beams (2016)
  • Author(s): 小口陽平, 飯野知紗, 岩瀬英治
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 136 Issue: 10 Pages: 448-453
  • DOI: 10.1541/ieejsmas.136.448
  • NAID: 130005598214
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] T字型支持梁を有する2軸回転MEMSスキャナにおける共振周波数比の設計 (2018)
  • Author(s): 黒澤蓮, 岩瀬英治
  • Organizer: 日本機械学会 関東学生会 第57回学生員卒業研究発表講演会
• [Presentation] Operation of Three-Dimensional MEMS Mirror by Single Superposed Driving Signal (2016)
  • Author(s): Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase
  • Organizer: the 29th International Microprocesses and Nanotechnology Conference (MNC2016)
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2016-11-08
  • Int'l Joint Research
• [Presentation] The Three-dimensional Actuation of the MEMS Scanner with Single Pair of Beams and Single Driving System (2015)
  • Author(s): Yohei Oguchi, Chisa Iino, Eiji Iwase
  • Organizer: the 28th International Microprocesses and Nanotechnology Conference (MNC2015)
  • Place of Presentation: Toyama, Japan
  • Year and Date: 2015-11-10
  • Int'l Joint Research
• [Presentation] 1対の支持梁による3次元駆動MEMSスキャナの形状設計 (2015)
  • Author(s): 小口陽平, 飯野知紗, 岩瀬英治
  • Organizer: 第32回｢センサ･マイクロマシンと応用システム」シンポジウム
  • Place of Presentation: 新潟
  • Year and Date: 2015-10-28
• [Patent(Industrial Property Rights)] Micro Drive Device and Micro Device using Same (2017)
  • Inventor(s): Eiji Iwase, Chisa Iino
  • Industrial Property Rights Holder: Eiji Iwase, Chisa Iino
  • Industrial Property Rights Type: 特許
  • Filing Date: 2017
  • Overseas
• [Patent(Industrial Property Rights)] Micro Drive Device and Micro Device using Same (2017)
  • Inventor(s): Eiji Iwase, Chisa Iino
  • Industrial Property Rights Holder: Eiji Iwase, Chisa Iino
  • Industrial Property Rights Type: 特許
  • Filing Date: 2017
  • Overseas