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Damage free and high sensitive elemental analysis of adsorbed atoms with slow highly charged ions

Research Project

Project/Area Number 16340115
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 原子・分子・量子エレクトロニクス・プラズマ
Research InstitutionUniversity of Tokyo

Principal Investigator

KOMAKI Ken-ichiro  University of Tokyo, Graduate School of Arts and Sciences, Professor, 大学院総合文化研究科, 教授 (40012447)

Co-Investigator(Kenkyū-buntansha) YAMAZAKI Yasunori  University of Tokyo, Graduate School of Arts and Sciences, Professor, 大学院総合文化研究科, 教授 (30114903)
HATAKEYAMA Atsushi  University of Tokyo, Graduate School of Arts and Sciences, Research Associate, 大学院総合文化研究科, 助手 (70345073)
TORII Hiroyuki  University of Tokyo, Graduate School of Arts and Sciences, Research Associate, 大学院総合文化研究科, 助手 (20302838)
岡林 則夫  豊田工業大学, 工業大学院・工学研究科, ポストドクトラル研究員 (90387853)
Project Period (FY) 2004 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥16,500,000 (Direct Cost: ¥16,500,000)
Fiscal Year 2005: ¥7,900,000 (Direct Cost: ¥7,900,000)
Fiscal Year 2004: ¥8,600,000 (Direct Cost: ¥8,600,000)
Keywordshighly charged ions / high sensitive surface analysis / nanodot / nanocrator / 低速多価イオン / 表面吸着原子 / 元素分析 / 構造解析 / ポテンシャル・スパタリング
Research Abstract

Secondary ions induced with pulsed slow highly charged ions have been observed with a two-dimensional position sensitive detector for a Si(001) crystal adsorbed with hydrogen and/or fluorine atoms. From the position and timing information, not only the mass and charge of the secondary ions, but also the initial velocity and direction of emission have been determined. We found that (1)the F-Si bond is tilted 20 degree with respect to the surface normal, and (2) the yield is proportional to the charge state cubed. Because the kinetic energy is low and so does not cause serious damage on the substrate in the present experimental condition, these findings confirm that slow highly charged ions is an excellent probe of surface analysis. It was further found that slow highly charged ions form (1) nanodots, one dot for each incoming ion, the size of which is proportional to the charge state, and independent of the kinetic energy, and (2) nanocrators for a self-assembled monolayer of thiol with a size of several nm, which indiates that several tens of molecules are sputtered with one slow highly charged ions.

Report

(3 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • Research Products

    (19 results)

All 2007 2005 2004

All Journal Article (18 results) Book (1 results)

  • [Journal Article] Ecology Handbook2007

    • Author(s)
      Y.Yamazaki et al.
    • Journal Title

      (to be published)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Potential sputtering and kinetic sputtering from a water adsorbed Si(100) surface with slow highly-charged ions2005

    • Author(s)
      N.Okabayashi, K.Komaki, et al.
    • Journal Title

      Nucl. Instrum.Methods B 232

      Pages: 244-248

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] SPM observation of nano-dots induced by slow highly charged ions2005

    • Author(s)
      N.Nakamura, Y.Yamazaki et al.
    • Journal Title

      Nucl. Instrum.Methods B 232

      Pages: 261-265

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] X-ray measurements of highly charged Ar ions passing through a Ni capillary2005

    • Author(s)
      Y.Yamazaki et al.
    • Journal Title

      Nucl. Instrum.Methods B 232

      Pages: 103-110

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Motion-induced magnetic resonance of Rb atoms in a periodic magnetostatic field2005

    • Author(s)
      A.Hatakeyama, K.Komaki et al.
    • Journal Title

      Phys.Rev. Lett. 95

      Pages: 253003-4

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Potential sputtering and kinetic sputtering from a water adsorbed Si(100) surface with slow highly- charged ions2005

    • Author(s)
      N.Okabayashi, K.Komaki, et al.
    • Journal Title

      Nucl.Instrum.Methods B 232

      Pages: 244-248

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] SPM observation of nano-dots induced by slow highly charged ions2005

    • Author(s)
      N.Nakamura, Y.Yamazaki et al.
    • Journal Title

      Nucl.Instrum.Methods B 232

      Pages: 261-265

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] X-ray measurements of highly charged Ar ions passing through a Ni capillary2005

    • Author(s)
      Y.Yamazaki et al.
    • Journal Title

      Nucl.Instrum.Methods B 232

      Pages: 103-110

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Motion-induced magnetic resonance of Rb atoms in a periodic magnetostatic field2005

    • Author(s)
      A.Hatakeyama, K.Komaki et al.
    • Journal Title

      Phys.Rev.Lett. 95

      Pages: 253003-253004

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Potential sputtering and kinetic sputtering from a water adsorbed Si(100) surface with slow highly-charged ions2005

    • Author(s)
      N.Okabayashi, K.Komaki, Y.Yamazaki
    • Journal Title

      Nucl.Instrum.& Methods B 232

      Pages: 244-248

    • Related Report
      2005 Annual Research Report
  • [Journal Article] SPM observation of nano-dots induced by slow highly charged ions.2005

    • Author(s)
      N.Nakamura, M.Terada, Y.Nakai, Y.Kanai, S.Ohtani, K.Komaki, Y.Yamazaki
    • Journal Title

      Nucl.Instrum.& Methods B 232

      Pages: 261-265

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Energy- and angular- distributions of F^+ ions emitted from a F-terminated Si(100) surface with slow highly-charged ions.2005

    • Author(s)
      N.Okabayashi, K.Komaki, Y.Yamazaki
    • Journal Title

      Nucl.Instrum.& Methods B 235

      Pages: 438-442

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Observation of an HCI-Induced Nano-dot on an HOPG Surface with STM and AFM.2005

    • Author(s)
      M.Terada, N.Nakamura, Y.Nakai, Y.Kanai, S.Ohtani, K.Komaki, Y.Yamazaki
    • Journal Title

      Nucl.Instrum.& Methods B 235

      Pages: 452-455

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Potential sputtering and kinetic sputtering from a water adsorbed Si(100) surface with slow highly-charged ions2005

    • Author(s)
      N.Okabayashi, K.Komaki, Y.Yamazaki
    • Journal Title

      Nucl.Instrum.& Methods B (印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Compact electron beam ion source with high- Tc bulk superconductors2004

    • Author(s)
      N.Nakamura, K.Komaki et al.
    • Journal Title

      Rev. Sci. Instrum. 75

      Pages: 3034-3038

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Direct observation of initial-state distribution of the first electron transferred to slow HCIs with a metal surface2004

    • Author(s)
      Y.Morishita, K.Komaki et al.
    • Journal Title

      Phys. Rev.A 70

      Pages: 12902-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Compact electron beam ion with high-T_c bulk superconductors2004

    • Author(s)
      N.Nakamura, K.Komaki et al.
    • Journal Title

      Rev.Sci.Instrum. 75

      Pages: 3034-3038

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Direct observation of initial-state distribution of the first electron transferred to slow HCIs with a metal surface2004

    • Author(s)
      Y.Morishita, K.Komaki, et al.
    • Journal Title

      Phys.Rev.A 70

      Pages: 12902-12906

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Book] エコハンドブック2007

    • Author(s)
      山崎泰規他
    • Publisher
      丸善
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary

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Published: 2004-04-01   Modified: 2016-04-21  

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