Study on the one-dimensional structure of metals on semiconductor surfaces and buried interfaces

• Project/Area Number: 16360017
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: The University of Tokyo
• Principal Investigator: TAKAHASHI Toshio The University of Tokyo, Institute for Solid State Physics, Professor, 物性研究所, 教授 (20107395)
• Co-Investigator(Kenkyū-buntansha): AKIMOTO Koichi Nagoya University, School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (40262852) ; 中谷 信一郎 東京大学, 物性研究所, 助手 (40198122)
• Project Period (FY): 2004 – 2006
• Project Status: Completed (Fiscal Year 2006)
• Budget Amount: ¥14,000,000 (Direct Cost: ¥14,000,000); Fiscal Year 2006: ¥1,600,000 (Direct Cost: ¥1,600,000); Fiscal Year 2005: ¥2,600,000 (Direct Cost: ¥2,600,000); Fiscal Year 2004: ¥9,800,000 (Direct Cost: ¥9,800,000)
• Keywords: x-ray diffraction / surface structure / buried interface / 1D structure / semiconductor / silicon / silver / gold / 高指数面 / 金属1次元構造 / X線回析 / STM / 金属一次元構造

Research Abstract

The surface structure of Si(111)-6xl-Ag was investigated using surface X-ray diffraction techniques at the Photon Factory. By analyzing the CTR scattering intensities along 00 rod, the positions of the Ag and reconstructed Si atoms perpendicular to the surface were determined. The results agreed well with the HCC model proposed for a 3xl structure induced by alkali-metals on a Si(111) substrate. The heights of the surface Ag and Si atoms thus determined show that those surface atoms make little perpendicular displacement when the surface structure changes from Si(111)-√<3>x√<3>-Ag to Si(111)-6xl-Ag by the desorption of the Ag atoms. From the GIXD measurement, the in-plane arrangement of the surface Ag atoms was determined. The results indicate that the Ag atoms move large distances laterally at the phase transition between the 6xl and 3xl structures.
Next we studied the structure of Si(111)-5x2-Au using surface X-ray diffraction. The surface structure was analyzed from the measurements of diffraction spots observed by GIXD. The least-squrares fit was done for the three models; Marks and Plass model proposed by transmission electron diffraction (1995) and theoretical models based on the first principles calculations by Erwin (2003) and Riikonen (2005). The results indicate that the most probable model is Erwin's model, but the structural parameters should be modified considerably. Similarly, we studied the Si(111)-5x2-Au structure when the surface is buried with a amorphous silicon layer of about 5 nm thickness. We could clearly observe some diffraction spots from the buried interface. The CTR scattering intensity distributions observed were consistent with those calculated for Erwin's model.

Research Products

• [Journal Article] Structural study of Si(111)-6×1-Ag surface using surface x-ray diffraction (2007)
  • Author(s): K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Surf. Sci. (印刷中)
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Structure of the oxidized 4H-SiC(0001)-3 × 3 surface (2007)
  • Author(s): W.Voegeli, K.Akimoto, T.Urata, S.Nakatani, K.Sumitani, T.Takahashi, Y.Hisada, Y.Mitsuoka, S.Mukainakano, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Surf. Sci. 601 Pages: 1048-1053
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Structural study of Si(111)-6 × 1-Ag surface using surface x-ray diffraction (2007)
  • Author(s): K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Surf. Sci. (in printing)
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Structure of the oxidized 4H-SiC(0001)-3x3 surface (2007)
  • Author(s): W.Voegeli, K.Akimoto, T.Urata, S.Nakatani, K.Sumitani, T.Takahashi, Y.Hisada, Y.Mitsuoka, S.Mukainakano, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Surf. Sci. 601 Pages: 1048-1053
• [Journal Article] Structural study of Si(111)-6x1-Ag surface using surface x-ray diffraction (2007)
  • Author(s): K.Sumitani, K.Masuzawa, T.Hoshino, R.Yoshida, S.Nakatani, T.Takahashi, H.Tajiri, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Surf. Sci. (印刷中)
• [Journal Article] Study of the surface structure of Si(111)-6xl(3xl)-Ag using x-ray crystal truncation rod scattering (2006)
  • Author(s): K..Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Appl. Surf. Sci. 252 Pages: 5288-5291
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Structure of the SiC (0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction (2006)
  • Author(s): W.Voegeli, K..Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
  • Journal Title: Appl. Surf. Sci. 252 Pages: 5259-5262
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Study of the surface structure of Si(111)-6xl(3xl)-Ag using x-ray crystal truncation rod scattering (2006)
  • Author(s): K.Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Appl. Surf. Sci. 252 Pages: 5288-5291
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Structure of the SiC (0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction (2006)
  • Author(s): W.Voegeli, K.Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
  • Journal Title: Appl. Surf. Sci. 252 Pages: 5259-5262
  • Description: 「研究成果報告書概要(欧文)」より
• [Journal Article] Crystallization process of high-K gate dielectrics studied by surface X-ray diffraction (2005)
  • Author(s): N.Terasawa
  • Journal Title: Appl.Surf.Sci. (印刷中)
• [Journal Article] Surface X-ray diffraction in transmision geometry (2004)
  • Author(s): H.Tajiri, O.Sakatani, T.Takahashi
  • Journal Title: Appl. Surf. Sci. 234 Pages: 404-408
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Sample holder assembly covering a wide range of temperatures for surface X-ray diffraction (2004)
  • Author(s): H.Tajiri, K.Sumitani, S.Nakatani, T.Takahashi, K.Akimoto, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Appl. Surf. Sci. 237 Pages: 645-648
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Structure of the Si(113) surface studied by surface X-ray diffraction (2004)
  • Author(s): Y.Mizuno, K.Akimoto, T.Aoyama, H.Suzuki, H.Nakahara, A.Ichimiya, K.Sumitani, T.Takahashi, X.W.Zhang, H.Sugiyama, H.Kawata
  • Journal Title: Appl. Surf. Sci. 237 Pages: 40-44
  • Description: 「研究成果報告書概要(和文)」より
• [Journal Article] Structure of the Si(113) surface studied by X-ray diffraction (2004)
  • Author(s): Y.Mizuno
  • Journal Title: Appl.Surf.Sci. 237 Pages: 40-44
• [Journal Article] Sample holder assembly covering a wide range of temperature for surface X-ray diffraction (2004)
  • Author(s): H.Tajiri
  • Journal Title: Appl.Surf.Sci. 237 Pages: 645-648
• [Journal Article] Study of the surface structure of Si(111)-6x1(3x1)-Ag using x-ray crystal truncation rod scattering
  • Author(s): K.Sumitani, K.Masuzwa, T.Hoshino, S.Naktani, T.Takahashi, H.Tajiri, A.Koichi, H.Sugiyama, X.Zhang, H.Kawata
  • Journal Title: Appl.Surf.Sci. (in press)
• [Journal Article] Structure of the SiC(0001) 3x3 Reconstruction Studied by Surface X-ray Diffraction
  • Author(s): W.Voegeli, K.Akimoto, T.Aoyama, K.Sumitani, S.Nakatani, H.Tajiri, T.Takahashi, Y.Hisada, S.Mukainakano, X.Zhang, H.Sugiyama, H.Kawata
  • Journal Title: Appl.Surf.Sci. (in press)
• [Journal Article] Hugh Sensitive Imaging of Atomic Arrangement of Ge Clusters Buried in a Si Crystal by X-ray Fluorescence Holography
  • Author(s): S.Kusano, S.Nakatani, K.Sumitani, T.Takahashi, Y.Yoda, N.Usami, Y.Shiraki
  • Journal Title: Jpn.J.Appl.Phys.Part 2 (in press)
• [Book] 表面物性工学ハンドブック 第2版 2.2.5 X線回析 (XRD) (2007)
  • Author(s): 高橋 敏男 (小間篤等編)
  • Publisher: 丸善