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Development of nanometer-order ultra-precision machine for realizing six-degree-of-freedom perfect relative motion between workpiece and tool

Research Project

Project/Area Number 16360078
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionShizuoka University

Principal Investigator

OIWA Takaaki  Shizuoka University, Faculty of Engineering, Professor, 工学部, 教授 (00223727)

Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥12,900,000 (Direct Cost: ¥12,900,000)
Fiscal Year 2006: ¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 2005: ¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 2004: ¥5,100,000 (Direct Cost: ¥5,100,000)
Keywordsmachine tool / coordinate measuring machine / motion error compensation / parallel kinematics machine / thermal deformation compensation
Research Abstract

To realize ultra precise machining or measurement, a machine system generating accurately relative motion between its tool and the workpiece is required as well as the accuracy improvements of each element of the machine. This research proposes a machine system using a measurement device for six-degree-of-freedom (6-DOF) motion errors between the tool and the workpiece. A hexapod-type parallel kinematics mechanism installed between the tool spindle and the surface plate is passively actuated by a conventional machine. Then, the hexapod measures the 6-DOF motions regardless with temperature fluctuation and external forces because the mechanism has a compensation device with Super-Invar rods for elastic and thermal errors of the joints and the links. Therefore, the measured 6-DOF errors compensate the tool position and orientation. First, an extensible connecting chain (strut) consisting of spherical joints and a prismatic joint with a linear scale unit has been designed and experimental … More ly manufactured. The spherical joint has been improved to eliminate thermal deformation of its ball shanks. Moreover, a compensation device with Super-Invar rods has been installed in the strut, and tested for investigating effects of the gravity and temperature change. As a result, the gravity and the temperature change have little effect on length measurement accuracy of the strut. Second, a conventional Cartesian-coordinate-geometry mechanism has been. The mechanism employs three ball-screw-driven linear positioning stages equipped with AC servomotors and rotary encoders. Positioning errors and motion errors between the surface plate and the tool spindle have been measured by using a laser interferometer length measurement system. Finally, a calibration method with a redundant passive connecting chain has been investigated for identifying 37 kinematics parameters for the hexapod mechanism. Length changes measured by the scale unit and changes calculated by the kinematics derive seven length errors of strut when the hexapod mechanism moves in its workspace. The least square method using Jacobian matrix corrects the 37 parameters and repeated so that the length errors are minimized. As a result, obtained parameters decreased positioning errors of the mechanism. Less

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (28 results)

All 2006 2005 2004 Other

All Journal Article (24 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Friction reduction using ultrasonic oscillation for rolling element linear motion guide2006

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 77・016107

      Pages: 1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Friction reduction using ultrasonic oscillation for rolling element linear motion guide2006

    • Author(s)
      Takaaki Oiwa
    • Journal Title

      Review of Scientific Instruments Vol. 77, No. 016107

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micro-positioning stage2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 76・025104

      Pages: 1-7

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] パラレルメカニズムを用いた三次元座標測定機の校正に関する研究-冗長パッシブジョイントを用いたキャリブレーション-2005

    • Author(s)
      大岩孝彰
    • Journal Title

      精密工学会誌 71・4

      Pages: 512-516

    • NAID

      10015506018

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Linear Rectangular Air Bearing Based on Squeeze Film Generated by Ultrasonic Oscillation2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 76・075101

      Pages: 1-7

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Hand-operated translation stage with sub-nanometer resolution2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 76・076105

      Pages: 1-4

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Miniaturized three-dimensional touch trigger probe using optical fiber bundle2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Measurement Science and Technology 16

      Pages: 1574-1581

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 三次元座標比較測定機2005

    • Author(s)
      大岩孝彰
    • Journal Title

      精密工学会誌 71・10

      Pages: 1275-1280

    • NAID

      130004655866

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Error Compensation System for Joints, Links and Machine Frame of Parallel Kinematics Machine2005

    • Author(s)
      大岩孝彰
    • Journal Title

      International Journal of Robotics Research 24・12

      Pages: 1087-1102

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Motion error compensation of a mechanical contact spindle using a multi-degree-of-freedom micro-positioning stage2005

    • Author(s)
      Takaaki Oiwa, Katsumi KANEKO, Akira Kyusojin
    • Journal Title

      Review of Scientific Instruments Vol. 76, No. 025104

      Pages: 1-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A calibration method for coordinate measuring machine using parallel mechanism-calibration with redundant passive prismatic joint-2005

    • Author(s)
      Takaaki Oiwa, Keiichi Shutoh
    • Journal Title

      Journal of the Japan Society for Precision Engineering Vol. 71, No. 4

      Pages: 512-516

    • NAID

      10015506018

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Linear Rectangular Air Bearing Based on Squeeze Film Generated by Ultrasonic Oscillation2005

    • Author(s)
      Takaaki Oiwa, Ryosuke Suzuki
    • Journal Title

      Review of Scientific Instruments Vol. 71, No. 075101

      Pages: 1-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Hand-operated translation stage with sub-nanometer resolution2005

    • Author(s)
      Takaaki Oiwa, M.Senjo, M.Nakajima, T.Masuda
    • Journal Title

      Review of Scientific Instruments Vol. 71, No. 075105

      Pages: 1-4

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Miniaturized three-dimensional touch trigger probe using optical fiber bundle2005

    • Author(s)
      Takaaki Oiwa, Toshio Tanaka
    • Journal Title

      Measurement Science and Technology Vol. 16

      Pages: 1574-1581

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 3D Co-ordinate Comparator Using Reference Workpiece2005

    • Author(s)
      Takaaki Oiwa, Motohiro Senjo, Masaharu Nakajima, Naomi Makita, Jiro Otsuka
    • Journal Title

      Journal of the Japan Society for Precision Engineering Vol. 71, No.10

      Pages: 1276-1280

    • NAID

      110001868411

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Error Compensation System for Joints, Links and Machine Frame of Parallel Kinematic Machine2005

    • Author(s)
      Takaaki Oiwa
    • Journal Title

      International Journal of Robotics Research Vol. 24, No. 12

      Pages: 1087-1102

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Linear rectangular air bearing based on squeeze film generated by ultrasonic oscillation2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 76,075101

      Pages: 1-7

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Hand-operated translational stage with subnanometer resolution2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Review of Scientific Instruments 76,076105

      Pages: 1-4

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Miniaturized three-dimensional touch trigger probe using optical fibre bundle2005

    • Author(s)
      大岩孝彰
    • Journal Title

      Measurement Science and Technology 16

      Pages: 1574-1581

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Error compensation system for joints, links and machine frame of parallel kinematics machines2005

    • Author(s)
      大岩孝彰
    • Journal Title

      International journal of robotics research 24,12

      Pages: 1087-1102

    • Related Report
      2005 Annual Research Report
  • [Journal Article] パラレルメカニズムを用いた三次元座標測定機の校正に関する研究-冗長パッシブジョイントを用いたキャリブレーション-2005

    • Author(s)
      大岩孝彰, 首藤圭一
    • Journal Title

      精密工学会誌 71巻4号(印刷中)

    • NAID

      10015506018

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Ultra-precise machine system using hexapod-type measurement device for six-degree-of-freedom relative motions between tool and workpiece

    • Author(s)
      大岩孝彰
    • Journal Title

      International Journal of Precision Engineering and Manufacturing (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Ultra-precise machine system using hexapod-type measurement device for six-degree-of-freedom relative motions between tool and workpiece

    • Author(s)
      Takaaki Oiwa
    • Journal Title

      International Journal of Precision Engineering and Manufacturing (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Ultra-precise machine system using hexapod-type measurement device for six-degree-of-freedom relative motions between tool and workpiece

    • Author(s)
      大岩孝彰
    • Journal Title

      International Journal of Precision Engineering and Manufacturing (印刷中)

    • Related Report
      2006 Annual Research Report
  • [Patent(Industrial Property Rights)] 非接触支持装置2006

    • Inventor(s)
      大岩孝彰
    • Industrial Property Rights Holder
      静岡大学
    • Industrial Property Number
      2006-150211
    • Filing Date
      2006-05-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 位置決め装置および位置決め方法2006

    • Inventor(s)
      大岩孝彰
    • Industrial Property Rights Holder
      静岡大学
    • Industrial Property Number
      2006-274378
    • Filing Date
      2006-10-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 直動案内および送りねじの摩擦低減方法2004

    • Inventor(s)
      大岩孝彰
    • Industrial Property Rights Holder
      科学技術振興機構
    • Industrial Property Number
      2004-069314
    • Filing Date
      2004-03-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 超音波ガイドユニット2004

    • Inventor(s)
      大岩孝彰
    • Industrial Property Rights Holder
      科学技術振興機構
    • Industrial Property Number
      2004-241007
    • Filing Date
      2004-08-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary

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Published: 2004-04-01   Modified: 2016-04-21  

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