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Study on Functional Surface Formation by Liquid Cluster Ion Beams

Research Project

Project/Area Number 16360152
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKyoto University

Principal Investigator

TAKAOKA Gikan  Kyoto Univ., Grad.School of Engineering, Professor, 工学研究科, 教授 (90135525)

Co-Investigator(Kenkyū-buntansha) ISHIKAWA Junzo  Kyoto Univ., Grad.School of Engineering, Professor, 工学研究科, 教授 (80026278)
KAWASHITA Masakazu  Kyoto Univ., Grad.School of Engineering, Lecturer, 工学研究科, 講師 (70314234)
Project Period (FY) 2004 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥14,100,000 (Direct Cost: ¥14,100,000)
Fiscal Year 2006: ¥2,600,000 (Direct Cost: ¥2,600,000)
Fiscal Year 2005: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2004: ¥7,800,000 (Direct Cost: ¥7,800,000)
KeywordsLiquid cluster / Ion beam / Size analysis / Functional surface / Surface cleaning / Smooth surface / Surface reaction dynamics / Nano technology / 液体クラスターイオン / スパッタ / 表面改質 / 親・疎水性 / 質量分離 / TOF / クラスターイオン / アルコールクラスター / オクタンクラスター / エッチング / 化学的スパッタリング / 超平坦表面形成 / RBS / XPS
Research Abstract

A cluster is an aggregate of a few tens to several thousands of atoms, and constitutes a new phase of matter, with significantly different properties than solids, liquids and gases. They are tiny particles, which are in a position to a link between atomic state and bulk state. Cluster beams are useful tools for the investigation of the fundamentals of solid state physics, chemistry and related materials science. In this study, we have developed a liquid cluster ion beam system, and have produced liquid clusters such as alcohol, water and paraffin clusters by adiabatic expansion phenomenon. Furthermore, we have applied the liquid cluster ion beam technique to various industrial fields such as electric and electronic engineering, optical and mechanical engineering, and chemical engineering.
In order to clarify the interactions of the liquid cluster ions with solid surfaces such as Si(100), Si0_2 and/or metal surfaces, sputtering and cleaning effects were investigated using the time-of-flight and the retarding potential methods. The physical and chemical sputtering, which was much enhanced by the liquid cluster ion irradiation, was different depending on the species of the cluster and the substrate materials. For example, for the chemical sputtering of the Si surfaces by the ethanol cluster ion beams, the energy per molecule in a cluster was of much importance, and the optimum energy range was between 1 eV/molecule and 10 eV/molecule. For the case of Au surfaces, the sputtered depth decreased with the increase of the retarding voltage, and the physical sputtering was influenced by the minimum size of the cluster. Thus, the surface reaction dynamics between the liquid clusters and the surface atoms were significantly different from that of conventional wet processes.

Report

(4 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • Research Products

    (26 results)

All 2006 2005

All Journal Article (25 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Sputtering and Chemical Modification of Solid Surfaces by Water Cluster Ion Beams2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc. 16th Int Conf. on Ion Implant. Technol.(AIP)

      Pages: 190-193

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Size Analysis of Ethanol Cluster Ions and Their Sputtering Effects on Solid Surfaces2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc. 16th Int Conf. on Ion Implant. Technol.(AIP)

      Pages: 321-324

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Size Analysis of Water Cluster Ions and Their Irradiation Effects on Solid Surfaces2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Surface and Interface Analysis 38

      Pages: 1534-1538

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] High-Rate Sputtering and Chemical Modification of Silicon Surfaces Irradiated by Alcohol Cluster Ion Beams2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      e-Journal of Surface Science and Nanotechnology 4

      Pages: 473-477

    • NAID

      130004439037

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Apatite Deposition on Polymer Substrates Irradiated by Oxygen Cluster Ion Beams2006

    • Author(s)
      M.Kawashita, G.H.Takaoka et al.
    • Journal Title

      Journal of the Ceramic Society of Japan 114

      Pages: 77-81

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary 2005 Annual Research Report
  • [Journal Article] Multiparameter Characterization of Oxygen Cluster Ion Beams2006

    • Author(s)
      D.Nicolaescu, G.H.Takaoka, J.Ishikawa
    • Journal Title

      Journal of Vacuum Science and Technology B24

      Pages: 2236-2245

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Sputtering and Chemical Modification of Solid Surfaces by Water Cluster Ion Beams2006

    • Author(s)
      G.H.Takaoka, K.Nakayama, D.Takeda, M.Kawashita
    • Journal Title

      Proceedings of 16^<th> International Conference on Ion Implantation Technology (American Institute of Physics)

      Pages: 190-193

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Size Analysis of Ethanol Cluster Ions and Their Sputtering Effects on Solid Surfaces2006

    • Author(s)
      G.H.Takaoka, K.Nakayama, T.Okada, M.Kawashita
    • Journal Title

      Proceedings of 16^<th> International Conference on Ion Implantation Technology (American Institute of Physics)

      Pages: 321-324

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Size Analysis of Water Cluster Ions and Their Irradiation Effects on Solid Surfaces2006

    • Author(s)
      Gikan H.Takaoka, Kazuya Nakayama, Hidetaka Noguchi, Masakazu Kawashita
    • Journal Title

      Surface and Interface Analysis Vol.38

      Pages: 1534-1538

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High-Rate Sputtering and Chemical Modification of Silicon Surfaces Irradiated by Alcohol Cluster Ion Beams2006

    • Author(s)
      Gikan H.Takaoka, Hidetaka Noguchi, Kazuya Nakayama, Masakazu Kawashita
    • Journal Title

      e-Journal of Surface Science and Nanotechnology Vol.4

      Pages: 473-477

    • NAID

      130004439037

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Apatite Deposition on Polymer Substrates Irradiated by Oxygen Cluster Ion Beams2006

    • Author(s)
      Masakazu Kawashita, Hiroshi Shimatani, Satomi Itoh, Rei Araki, Gikan H.Takaoka
    • Journal Title

      Journal of the Ceramic Society of Japan Vol.114

      Pages: 77-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Multiparameter Characterization of Oxygen Cluster Ion Beams2006

    • Author(s)
      D.Nicolaescu, G.H.Takaoka, J.Ishikawa
    • Journal Title

      Journal of Vacuum Science ande Technology B 24(5)

      Pages: 2236-2245

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Sputtering and Chemical Modification of Solid Surfaces by Water Cluster Ion Beams2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc. 16th Int Conf. on Ion Implant. Technol. (AIP)

      Pages: 190-193

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Size Analysis of Ethanol Cluster Ions and Their Sputtering Effects on Solid Surfaces2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc. 16th Int Conf. on Ion Implant. Technol. (AIP)

      Pages: 321-324

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Production of Liquid Cluster Ions and Their Application to Surface Etching2006

    • Author(s)
      G.H.Takaoka et al.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 242

      Pages: 100-103

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Interactions of Ethanol Cluster Ion Beams With Silicon Surfaces2006

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 242

      Pages: 417-420

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fundamental Characteristics of Liquid Cluster Ion Source for Surface Modification2005

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 237

      Pages: 402-405

    • Related Report
      2005 Annual Research Report
  • [Journal Article] interactions of Argon Cluster Ion Beams with Silicon Surfaces2005

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 232

      Pages: 206-211

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Formation of Almost Delta-Layered Nanoparticles in SiO_2 Thin Film on Si Substrate by Metal Negative-Ion Implantation2005

    • Author(s)
      J.Ishikawa et al.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B 237

      Pages: 422-427

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Production of Liquid Cluster Ions and Their Application to Surface Etching2005

    • Author(s)
      G.H.Takaoka et al.
    • Journal Title

      Proc.14^<th> Int.Conf.on Ion Beam Modi.Mat.IBMM2004 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Interactions of Ethanol Cluster Ion Beams with Silicon Surfaces2005

    • Author(s)
      G.H.Takaoka, H.Noguchi, M.Kawashita
    • Journal Title

      Proc.14^<th> Int.Conf.on Ion Beam Modi.Mat.IBMM2004 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fundamental Characteristics of Liquid Cluster Ion Source for Surface Modification2005

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc.15^<th> Int.Conf.on Ion Implant.Tech.IIT2004 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Formation of Delta-Layered Nanoparticles in SiO_2 Thin Film on Si Substrate by Metal Negative-Ion Implantation2005

    • Author(s)
      J.Ishikawa et al.
    • Journal Title

      Proc.15^<th> Int.Conf.on Ion Implant.Tech.IIT2004 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Interactions of Argon Cluster Ion Beams with Silicon Surfaces2005

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc.15^<th> Int.Workshop on Inelastic Ion-Surface Collisions, IISC-15 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Photocatalytic Properties of TiO_2 Films Prepared by O_2 Cluster Ion Beam Assisted Deposition Method2005

    • Author(s)
      G.H.Takaoka, M.Kawashita et al.
    • Journal Title

      Proc.15^<th> Int.Workshop on Inelastic Ion-Surface Collisions, IISC-15 (発表予定)

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] イオンビームにより作製した生体活性材料2006

    • Inventor(s)
      高岡義寛, 川下将一
    • Industrial Property Rights Holder
      京都大学
    • Industrial Property Number
      2006-077833
    • Filing Date
      2006-03-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary

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Published: 2004-04-01   Modified: 2016-04-21  

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