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Creation of electron beam irradiated solution plasma and its application to surface modification process

Research Project

Project/Area Number 16H04506
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Composite materials/Surface and interface engineering
Research InstitutionThe University of Tokyo

Principal Investigator

Terashima Kazuo  東京大学, 大学院新領域創成科学研究科, 教授 (30176911)

Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2018: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2017: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2016: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Keywordsプラズマ / ソリューションプラズマ / 電子線励起プラズマ / 電子線励起ソリューションプラズマ / 表面処理プロセス / 微粒子 / 材料プロセス / 電子ビーム / プラズマプロセス / 材料加工・処理 / プラズマ加工 / 液体 / 電界放出 / 分離
Outline of Final Research Achievements

In this study, we created an electron beam simulated solution plasma and applied it to the surface treatment process. With regard to the former, generation of new field emission dielectric barrier discharge in high density media such as high pressure, liquid and supercritical fluid, voltage / current characteristics, and spectroscopic measurement were conducted to clarify its characteristics. In addition, the calculation simulation revealed the likelihood of qualitative behavior regarding the dependence of the firing voltage on the media generation of the discharge. In addition, by using carbon nanotubes as electrodes, we succeeded in generating stable plasma in a high density environment including supercritical and liquid. In addition, as an application of this plasma process, we succeeded in handling and deposition of fine particles.

Academic Significance and Societal Importance of the Research Achievements

本研究の成果は近年注目を浴びている、液中をはじめとする高圧、超臨界流体中での放電、放電プラズマの新しいモードの学理の構築の第一歩の基礎研究として、また、それらを用いたプラズマ表面処理技術への応用展開の第一歩として意義の深いものである。今後、これらの基礎科学の進展とともに、液中をはじめとする高圧、超臨界流体などの高密度環境中での放電、放電プラズマの利用が飛躍的に容易になるとともに医療、環境、材料、エネルギー、燃焼といtった滝の分野に渡るプラズマ応用範囲の広がりを大いに期待させる研究となっている。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (14 results)

All 2019 2018 2017 Other

All Int'l Joint Research (2 results) Journal Article (4 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 4 results) Presentation (8 results) (of which Int'l Joint Research: 6 results,  Invited: 1 results)

  • [Int'l Joint Research] CNRS(France)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] CNRS(フランス)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Generation of field-emitting surface dielectric barrier discharge in Ar and N22019

    • Author(s)
      Moriyuki Kanno, Ryo Tanaka, Sven Stauss, Tsuyohito Ito, and Kazuo Terashima
    • Journal Title

      AIP Advances

      Volume: in press

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Generation and characterization of field-emitting surface dielectric barrier discharges in liquids2018

    • Author(s)
      T. Kawamura, M. Kanno, S. Stauss, K. Kuribara, D.Z. Pai, T. Ito, K. Terashima
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 4

    • DOI

      10.1063/1.5011445

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Formation of pseudo-microgravity environment for dusty plasmas in supercritical carbon dioxide2018

    • Author(s)
      N. Sakakibara, Y. Matsubayashi, T. Ito, K. Terashima
    • Journal Title

      Physics of Plasmas 25 (2018)

      Volume: 25 Issue: 1

    • DOI

      10.1063/1.5016224

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermally conductive tough flexible elastomers as composite of slide-ring materials and surface modified boron nitride particles via plasma in solution2018

    • Author(s)
      Taku Goto, Masaki Iida, Helen Tan, Chang Liu, Koichi Mayumi, Rina Maeda, Koichi Kitahara, Kazuto Hatakeyama, Tsuyohito Ito, Yoshiki Shimizu, Hideaki Yokoyama, Kaoru Kimura, Kohzo Ito, Yukiya Hakuta, and Kazuo Terashima
    • Journal Title

      Appl. Phys. Lett. 112

      Volume: 112 Issue: 10 Pages: 101901-101901

    • DOI

      10.1063/1.5020325

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Generations and accessibilities of field-emitting surface dielectric barrier discharges in various environments2018

    • Author(s)
      M. Kanno, R. Tanaka, S. Stauss, T. Ito, and K. Terashima
    • Organizer
      71st Annual Gaseous Electronics Conference, Portland, OR, USA, November 5-9, 2018, LW1.00021
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高圧キセノン中の表面誘電体バリア放電における各放電形態の電気的特性と発光特性 (Electrical and optical emission characteristics of the different discharge regimes of surface dielectric barrier discharges in high-pressure Xe)2017

    • Author(s)
      田中遼, シュタウス・スベン, パイ・デイビッド, 寺嶋和夫
    • Organizer
      第26回 日本MRS年次大会(国際シンポジウム)
    • Place of Presentation
      横浜市開港記念会館他, 横浜市、神奈川県
    • Year and Date
      2017-12-21
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 液体中における電界放出型表面誘電体バリア放電の生成 (Generation of surface dielectric barrier discharges exhibiting field emission in liquids)2017

    • Author(s)
      川村知久, シュタウス・スベン, パイ・デイビッド, 寺嶋和夫
    • Organizer
      第26回 日本MRS年次大会(国際シンポジウム)
    • Place of Presentation
      横浜市開港記念会館他, 横浜市、神奈川県
    • Year and Date
      2017-12-21
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 0.1 - 5.0 MPaでの高密度マイクロ波Arプラズマの生成 (Generation of high density microwave Ar plasmas at pressures from 0.1 to 5.0 MPa)2017

    • Author(s)
      井上 健一,シュタウス・スベン, 金 載浩,榊原 教貴, 寺嶋 和夫
    • Organizer
      第26回 日本MRS年次大会(国際シンポジウム)
    • Place of Presentation
      横浜市開港記念会館他, 横浜市、神奈川県
    • Year and Date
      2017-12-19
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of ice dielectric barrier discharge for the development of novel reaction field in cryogenic environments2017

    • Author(s)
      N. Sakakibara, T. Ito, and K. Terashima
    • Organizer
      70th Annual Gaseous Electronics Conference, Pittsburgh, PA, USA,
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Generation and optical diagnostics of pulse-modulated microwave plasma in high-pressure argon2017

    • Author(s)
      K. Inoue, N. Sakakibara, J. Kim, T. Ito, and K. Terashima
    • Organizer
      70th Annual Gaseous Electronics Conference, Pittsburgh, PA, USA
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電界放出型表面誘電体バリア放電によるシリコンオイル中での微粒子分離2017

    • Author(s)
      菅野之行、川村、Z.Pai、栗原、伊藤剛仁、寺嶋和夫
    • Organizer
      Plasma Conference 2017
    • Related Report
      2017 Annual Research Report
  • [Presentation] フレキサブルMEMSの創製に向けたプラズマナノプロセスの深化2017

    • Author(s)
      寺嶋和夫、伊藤剛仁、後藤拓、妻木正尚、榊原教貴
    • Organizer
      Plasma Conference 2017
    • Related Report
      2017 Annual Research Report
    • Invited

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Published: 2016-04-21   Modified: 2020-03-30  

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