Research on plasmonic lens for ultraviolet wavelength applying nano-fabrication

• Project/Area Number: 16K04978
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Optical engineering, Photon science
• Research Institution: Kyoto Institute of Technology
• Principal Investigator: Takeda Minoru 京都工芸繊維大学, 電気電子工学系, 教授 (90510686)
• Co-Investigator(Kenkyū-buntansha): 松井 真二 兵庫県立大学, 高度産業科学技術研究所, 特任教授 (00312306) ; 岡田 真 兵庫県立大学, 高度産業科学技術研究所, 助教 (60637065)
• Project Period (FY): 2016-04-01 – 2019-03-31
• Project Status: Completed (Fiscal Year 2018)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2018: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000); Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2016: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: 表面プラズモン / マイクロレンズ / 紫外波長 / ナノインプリント / 光学素子 / 装置 / 材料

Outline of Final Research Achievements

We researched on the plasmonic lens for ultraviolet wavelength (375 nm) generating sub-wavelength sized focused beam in far field region, as an ultra compact and simple structured micro lens utilizing surface plasmon excited by metal nanostructure. A subwavelength focused spot with a focal length of 4μm was achieved with a plasmonic lens of about 5μm diameter by structure optimization using electromagnetic field simulation. We confirmed the subwavelength focused spot by measurement of the plasmonic lens actually fabricated by FIB processing on Al thin film, using a near-field optical microscope. We studied practical fabrication of plasmonic lenses applying nanoimprint technology, and we aimed to form patterns of highly integrated lens arrays by a process combining UV light nanoimprinting and Al lift-off process.

Academic Significance and Societal Importance of the Research Achievements

本研究により、超小型で高い集光特性を有する紫外波長域用マイクロレンズを実現するための有効な構造設計、及び実際の作製手法を明らかにした。またその実用化のために、ナノインプリント技術を適用した高集積化レンズアレイの作製方式を提案した。この新規光学デバイスは、半導体レーザーとの組み合わせにより、紫外波長域で極めて微小な集光スポットを生成することが可能であり、また小型で使い勝手の良い構造であることから、超微細加工の他、超高密度光記録、超高解像度顕微鏡、高感度バイオケミカル分析などを含む、広範な応用分野への適用可能性を有し、これらの研究分野の進展を促進できる意義は大きいと考えられる。

Research Products

• [Journal Article] Improvement of focusing characteristics of a surface plasmonic lens for UV wavelength (2017)
  • Author(s): Takeda Minoru、Tsuchiyama Akihiro、Okada Makoto、Matsui Shinji、Inoue Tsutomu、Aizawa Kento
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 9S Pages: 09NC02-09NC02
  • DOI: 10.7567/jjap.56.09nc02
  • NAID: 210000148305
  • Peer Reviewed
• [Journal Article] Plasmonic Lens for Ultraviolet Wavelength (2016)
  • Author(s): Minoru Takeda, Takuya Tanimoto, Tsutomu Inoue, Kento Aizawa
  • Journal Title: Jpn. J. Appl. Phys. Volume: 55
  • NAID: 210000147106
  • Peer Reviewed
• [Presentation] UV light focusing by a surface plasmonic lens and the fabrication of an integrated lens array applying nanoimprint process (2018)
  • Author(s): M.Takeda, Y.Miura, T.Inoue, K.Aizawa
  • Organizer: International Symposium on Imaging, Sensing, and Optical Memory
  • Int'l Joint Research
• [Presentation] 紫外域サブ波長ビーム集光用プラズモニックレンズの特性改善 (2018)
  • Author(s): 三浦 祐介、土山 晃裕、久保 雄季、武田 実、井上 勉、會澤 見斗
  • Organizer: 応用物理学会春季学術講演会
• [Presentation] Subwavelength UV light focsuing by a surface plasmonic lens with extended focal length (2017)
  • Author(s): Yusuke Miura, Akihiro Tsuchiyama, Minoru Takeda, Makoto Okada, Shinji Matsui, Tsutomu Inoue, Kento Aizawa
  • Organizer: International Symposium on Imaging, Sensing, and Optical Memory
  • Int'l Joint Research
• [Presentation] 紫外域サブ波長ビーム集光用プラズモニックレンズの評価 (2017)
  • Author(s): 土山 晃裕，三浦 祐介，武田 実，井上 勉，會澤 見斗
  • Organizer: 応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜
• [Presentation] Improvement of Focusing Characteristics of a Plasmonic Lens for UV Wavelength (2016)
  • Author(s): Akihiro Tsuchiyama, Minoru Takeda, Tsutomu Inoue, Kento Aizawa
  • Organizer: Interanational Symposium on Optical Memory
  • Place of Presentation: Kyoto Research Park
  • Int'l Joint Research
• [Presentation] Plasmonic Lens for Ultraviolet Wavelength (2016)
  • Author(s): Minoru Takeda, Akihiro Tsuchiyama, Tsutomu Inoue, Kento Aizawa
  • Organizer: The international Conference on Near-field Optics, Nanophotonics, and Related Techniques
  • Place of Presentation: Act City Hamamatsu
  • Int'l Joint Research