Elucidation of Phase Stability and Novel Fluorite Type Ferroelectric Phase Thin Films by Controlling Stress Induced Phase Transition
| Project/Area Number |
16K14378
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
白石 貴久 東北大学, 金属材料研究所, 助教 (50758399)
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| Project Period (FY) |
2016-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2016: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | 蛍石型強誘電体 / ハフニア / ジルコニア / 直方晶相 / 極性構造 / 相安定性 / 応力誘起変態 / ドメイン構造 / 直方晶 / ドメイン / 単斜晶 / 固溶体 / 弾性的拘束 / 弾性場 / 準安定相 / 強誘電性 / 固相エピタキシー |
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| Outline of Final Research Achievements |
Recently, HfO2-based novel phase without spatial symmetry, which is interesting ferroelectric material as Pb-free and non-perovskite-type structure. Hf0.5Zr0.5O2 (HZO) thin films are one of the representative materials with the orthorhombic phase Pca21 in the wide compositional range. We have attempted and realized the epitaxial growth of HZO thin films with the orthorhombic phase Pca21 using solid-state epitaxy with ion-beam sputtering followed by rapid thermal annealing. We have also described the nanoscale morphology and the domain structure of orthorhombic (Pca21) and coexisting monoclinic (P21/c) phases in HZO thin films using the aberration-corrected scanning transmission electron microscopy. These results indicate that two effects, the solute and the elastic constraint effects, are necessary for the stabilization of the orthorhombic phase.
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Report
(3 results)
Research Products
(40 results)
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[Journal Article] Impact of mechanical stress on ferroelectricity in (Hf0.5Zr0.5)O2 thin films2016
Author(s)
T. Shiraishi, K. Katayama, T. Yokouchi, T. Shimizu, T. Oikawa, O. Sakata, H. Uchida, Y. Imai, T. Kiguchi, T.J. Konno, and H. Funakubo
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Journal Title
Appl. Phys. Lett.
Volume: 108
DOI
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Peer Reviewed
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[Presentation] Stability of ferroelectric phase in epitaxial HfO2-based films2017
Author(s)
Takanori Mimura, Kiriha Katayama, Takao Shimizu, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo
Organizer
IEEE International Symposium on Applications of Ferroelectrics (ISAF) International Workshop on Acoustic Transduction Materials and Devices (IWATMD) Piezoresponse Force Microscopy Workshop (PFM)
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[Presentation] Fe 添加されたZrO2超薄膜の結晶構造調査2016
Author(s)
Sujin Choi, 白石貴久, 清水荘雄, 舟窪浩, 木口賢紀, 今野豊彦
Organizer
日本セラミックス協会第29回秋季シンポジウム
Place of Presentation
広島大学 東広島キャンパス（広島県東広島市）
Year and Date
2016-09-07
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