| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2016: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Outline of Final Research Achievements |
Microfabricated alkali vapor cells (hereafter MEMS cells) are in use for atomic-based instruments like atomic clocks or atomic magnetometers. To achieve excellent quality of spectroscopic measurements, wafer-level fabrication of MEMS cells is very important. In this study, a novel microfabrication approach using a combination of new dispenser and low-temperature anodic bonding has been developed. The newly developed Cs-dispenser consists with CsN3 crystal deposited in porous alumina structure or Si grooves with multiple re-entrant structures. This approach enables effective thermal decomposition of CsN3 at low temperature and filling sufficient amount of Cs in MEMS cells by wafer-level fabrication. Performances of the fabricated cells are comparable to those previously published by others groups, conforming the potential of the proposed process in view of the development of high-performance atomic sensors.
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