| Project/Area Number |
17206011
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Nagoya University (2007)
Tohoku University (2005-2006) |
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Principal Investigator |
YANG Ju Nagoya University, Graduate School of Engineering, Professor (60312609)
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| Co-Investigator(Kenkyū-buntansha) |
MURAOKA Mikio Akita University, Faculty of Engineering and Resource Science, Associate Professor (50190872)
SASAGAWA Kazuhiko Hirosaki University, Graduate of Science and Technology, Professor (50250676)
SAKA Masumi Tohoku University, Graduate School of Engineering, Professor (20158918)
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| Project Period (FY) |
2005 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥49,140,000 (Direct Cost: ¥37,800,000、Indirect Cost: ¥11,340,000)
Fiscal Year 2007: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2006: ¥12,870,000 (Direct Cost: ¥9,900,000、Indirect Cost: ¥2,970,000)
Fiscal Year 2005: ¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000)
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| Keywords | Microwave / Atomic Force / Microscope / Nono-area / Electrical Property / Quantitative Evaluation / AFM Probe / Surface Topography / 原子間力顕微鏡 / 電気特性 / 導電率 / 近接場計測 / 表面計測 |
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| Research Abstract |
To satisfy the requirement of the development of nano-technology, a microwave atomic force microscope which can measure the electrical properties of nano-materials and nano-devices in nano-meter scale was developed. By establishing a new system combined with the microwave and atomic force microscope techniques, the capability to measure the surface topography and the electrical properties of materials simultaneously was realized. The obtained results are as follows.
1.Design of microwave AFM probe
By analyzing the propagation of microwave in the probe, and the shape and dimensions of AFM probe, a waveguide which can propagate microwave in the probe effectively was designed. The most suitable structure of the microwave AFM probe was determined.
2.Fabrication of GaAs AFM probe
To restrain the attenuation of microwave propagating in the probe, GaAs wafer was used as the substrate of the probe. Using wet etching technique, GaAs AFM probe having a desired structure was fabricated successfully.
3.Completion of microwave AFM probe
A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was obtained by using FIB fabrication. A microwave AFM probe was formed successfully.
4.Construction of microwave atomic force microscope
The developed microwave AFM probe, atomic force microscope, and network analyzer were combined, and a new microwave atomic force microscope which can simultaneously measure the surface topography and the electrical properties of materials was realized.
5.Quantitative evaluation of electrical properties of materials
By using silicon wafer samples having different electrical conductivities, quantitative evaluation model was built up from the relationship between the response of microwave and the conductivity of the samples. A quantitative method to evaluate the electrical properties of materials in small area was realized.
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