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Three-dimensional epitaxial silicon microprobe array integrated on highly functional smart sensing chip

Research Project

Project/Area Number 17206038
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

ISHIDA Makoto  Toyohashi University of Technology, Department of Engineering, Professor (30126924)

Co-Investigator(Kenkyū-buntansha) SAWADA Kazuaki  Toyohashi University of Technology, Department of Engineering, Professor (40235461)
TAKAO Hidekuni  Toyohashi University of Technology, Intelligent sensing research center, Associate Professor (40314091)
KAWASHIMA Takahiro  Toyohashi University of Technology, Department of Engineering, Assistant Professor (50378270)
Project Period (FY) 2005 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥50,180,000 (Direct Cost: ¥38,600,000、Indirect Cost: ¥11,580,000)
Fiscal Year 2007: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Fiscal Year 2006: ¥12,870,000 (Direct Cost: ¥9,900,000、Indirect Cost: ¥2,970,000)
Fiscal Year 2005: ¥26,130,000 (Direct Cost: ¥20,100,000、Indirect Cost: ¥6,030,000)
KeywordsSmart sensing chip / 3-dimensional microprobe / Epitaxial silicon probe array / Selective Vapor-liquid-solid growth / Electrical recording of neurons / Neuroscience / MOSFET on Si (111) substrate / Micro / nanotechnology
Research Abstract

Three-dimensional silicon microprobes are integrated with MOSFET circuits for use in electrical neural interface applications with microelectronics. We have proposed a vapor-liquid-solid(VLS) method to realize microprobes after the fabrication of on-chip MOSFETs using Si(111) substrate. We investigated the characteristics of the on-chip MOSFETs fabricated on Si(111) substrate. Even though the increased interface state density in the Si(111) MOS system causes low-performance of the MOFET, we have improved the electrical characteristics of the MOSFETs on Si(111) using subsequent processes of fluorine implantation and long-time Hydrogen annealing, that exhibits comparable electrical characteristics of MOSFETs to that on Si (100)substrate. In-situ doping method during the VLS growth is one possibility to realize doped-silicon probes by low-temperature process with less than 700℃. We used PH_3 or B_2H_6 mixed with silicon gas source of Si_2H_6, in order to realize n- or p-type of silicon probes, respectively. Both n- and p-types of silicon probe grown by the in-situ doping process showed low electrical resistance characteristics. Although the above VLS growth method provides probe arrays with a same probe length due to same parameters of the VLS growth, individually controlled length of probe in a same array was still problematic. To realize the different lengths of probes, we also demonstrated a repeated selective VLS growth of silicon microprobes using the catalysis of gold remaining at the tip of a preliminary VLS-grown microprobe, resulting in different probe lengths. Additionally, we have realized the integration of silicon dioxide microtube arrays and the silicon micoroprobe arrays with MOSFETs, for use in simultaneous electrical neural recordings and drug delivery into local neuronal tissue, and this proposed device could be an efficient electrical/chemical neural interface for use in numerous neuroscience applications.

Report

(4 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • Research Products

    (93 results)

All 2008 2007 2006 2005 Other

All Journal Article (64 results) (of which Peer Reviewed: 26 results) Presentation (27 results) Remarks (2 results)

  • [Journal Article] Out-of-Plane Micro Tube Arrays for Biomedical Sensors using Vapor-Liquid-Solid Growth Method2008

    • Author(s)
      K. Takei, T. Kawashima, K. Sawada, and M. Ishida
    • Journal Title

      IEEE Sensors Journal Vol.8, No.5

      Pages: 470-475

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFETs by Selective Vapor-Liquid-Solid Growth2008

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      Journal of Micromechanics and Microengineering Vol.18, No.3

      Pages: 501-509

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Batch-fabrication of nanoscale-tip silicon Neuroprobe array2008

    • Author(s)
      A. Goryu, A. Ikedo, K. Takei, T. Kawano, K. Sawada, and M. Ishida
    • Journal Title

      The Japan Society of Applied Physics(The 55rd Spring Meeting) No.3

      Pages: 1361-1361

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Out-of-Plane Mic to Tube Arrays for Biomedical Sensors using Vapor-Liquid-Solid Grow th Method2008

    • Author(s)
      K. Takei, T. Kawashima, K. Sawada, M. Ishida
    • Journal Title

      IEEE Sensors Journal Vol.8, No.5

      Pages: 470-475

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFETs by Selective Vapor-Liquid-Solid Growth2008

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      Journal of Micromechanics and Microengineering Vol.18, No.3

      Pages: 501-509

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Out-of-Plane Micro Tube Arrays for Biomedical Sensors using Vapor-Liquid-Solid Growth Method2008

    • Author(s)
      K.Takei, T.Kawashima, K.Sawada, and M.Ishida
    • Journal Title

      IEEE Sensors Journal 7

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integration of Out-of-plane Silicon Dioxide Microtubes, Silicon Microprobes, and On-chip NMOSFET by Selective Vapor-Liquid-Solid Growth2008

    • Author(s)
      K.Takei, T.Kawashima, T.Kawano H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      Journal of Micromechanics and Microengineering Vol.18, No.3

      Pages: 501-509

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-yield growth of p-Si microprobe arrays by selective vapor-liquid-solid method using in situ doping and their properties2007

    • Author(s)
      M. S. Islam, T. Kawashima, K. Sawada, and M. Ishida
    • Journal Title

      Journal of Crystal Growth Vol.306, No.2

      Pages: 276-282

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems2007

    • Author(s)
      J. W. Kim, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      Sensors Vol.7

      Pages: 1387-1398

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs2007

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      Solid-State Sensors, Actuators and Microsystems Conference 2007(TRANSDUCERS 2007)

      Pages: 1381-1384

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Mechanical Properties of Micro Probe and Tube Array for Neural Penetrating Devices2007

    • Author(s)
      K. Takei, T. Kawashima, K. Sawada, and M. Ishida
    • Journal Title

      Engineering in Medicine and Biology Society, 2007. 29th Annual International Conference of the IEEE

      Pages: 179-182

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circnits for Neural Interface Devices2007

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      The 24th Sensor Symposium on IEEJ

      Pages: 28-31

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] p-Si Microprobe Arrays Grown at Low Temperature by Selective VLS Using In-Situ Doping and Their Properties2007

    • Author(s)
      M. S. Islam, T. Kawashima, K. Sawada, and M. Ishida
    • Journal Title

      IEEE Sensors 2007

      Pages: 496-499

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of 3-D Silicon Micro Probes for Neural Recording Using Multi-step VLS Growth2007

    • Author(s)
      A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      International Conference on Solid State Devices and Materials

      Pages: 286-287

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of Micro- and Submicro- Tube Array2007

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 233-235

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Silicon Smart Microchip for Intelligent Human Sensing2007

    • Author(s)
      M. Ishida, H. Takao, T. Kawashima, D. Akai, T. Noda, J. W. Kim, K. Takei, T. Kawano, and K. Sawada
    • Journal Title

      Technical Program & Abstracts of 10th International Conference on Advanced Materials(IUMRS-ICAM 2007)(lnvited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of Smart Microchips in TUT2007

    • Author(s)
      M. Ishida
    • Journal Title

      Korea-Japna Joint Workshop on Bio-materials and Electronic Devices for the 60th Anniversary of Dankook University(lnvited talk)

      Pages: 15-37

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] High-yield growth of p-Si microprobe arrays by selective vapor-liquid-solid method using in situ doping and their properties2007

    • Author(s)
      M.S. Islam, T. Kawashima, K. Sawada, M. Ishida
    • Journal Title

      Journal of Crystal Growth Vol.306, No.2

      Pages: 276-282

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems2007

    • Author(s)
      J.W. Kim, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      Sensors Vol.7

      Pages: 1387-1398

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] High-yieldgrowth of p-Si microprobe arrays by selective vapor-liquid-solid method using in situ doping and their properties2007

    • Author(s)
      M.S.Islam, T.Kawashima, K.Sawada, and M.Ishida
    • Journal Title

      Journal of Crystal Growth Vol.306, No.2

      Pages: 276-282

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems2007

    • Author(s)
      J.W.Kim, H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      Sensors Vol.7

      Pages: 1387-1398

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs2007

    • Author(s)
      K.Takei, T.Kawashima, H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      Solid-State Sensors, Actuators and Microsystems Conference, 2007.TRANSDUCERS2007.International

      Pages: 1381-1384

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical Properties of Micro Probe and Tube Array for Neural Penetrating Devices2007

    • Author(s)
      K.Takei, T.Kawashima, K.Sawada, and M.Ishida
    • Journal Title

      Engineering in Medicine and Biology Society, 2007.29th Annual International Conference of the IEEE

      Pages: 179-182

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Si Probe and SiO_2 Tube Array Chip Integrated with On-chip Circuits for Neural Interface Devices2007

    • Author(s)
      K.Takei, T.Kawashima, H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      24th Sensor Symposium

      Pages: 28-31

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] p-Si Microprobe Arrays Grown at Low Temperature by Selective VLS Using In-SituDoping and Their Properties2007

    • Author(s)
      M.S.Islam, T.Kawashima, K.Sawada, and M.Ishida
    • Journal Title

      Sensors, 2007 IEEE

      Pages: 496-499

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-yield growth of p-Si microprobe arrays by selective vapo卜liquid-solid method using in situ doping and their properties2007

    • Author(s)
      A.Ikedo, N.Funagayama, T.Kawashima, H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      International Conference on Solid State Devices and Materials

      Pages: 286-287

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Micro- and Submicro- Tube Array2007

    • Author(s)
      K.Takei, T.Kawashima, T.Kawano H.Takao, K.Sawada, and M.Ishida
    • Journal Title

      2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments

      Pages: 233-235

    • Related Report
      2007 Annual Research Report
  • [Journal Article] センサとICの融合によるスマートマイクロチップ2007

    • Author(s)
      石田 誠
    • Journal Title

      計測と制御(社団法人 計測自動制御学会) Vol.46, No.2

      Pages: 84-91

    • NAID

      10018544052

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111)by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing2006

    • Author(s)
      Y. Kato, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.45, No.4

    • NAID

      10018158776

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Properties of a pn junction developed with a Si microprobe by vapour-liquid-solid growth using in situ doping2006

    • Author(s)
      M.S. Islam, T. Kawashima, K. Sawada, and M. Ishida
    • Journal Title

      Semiconductor Science and Technology Vol.21

      Pages: 1364-1368

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Fabrication of Si microprobe array for neural recording using Parylene film2006

    • Author(s)
      A. Shinoda, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      The Japan Society of Applied Physics(The 53rd Spring Meeting) No.3

      Pages: 1384-1384

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Experiment of liquid injection through SiO_2 micro tube array2006

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

      Pages: 1384-1384

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Micro Si-probe array for 3D recording of neural activities2006

    • Author(s)
      A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      The Japan Society of Applied Physics(The 53rd Spring Meeting) No.3

      Pages: 1383-1383

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability2006

    • Author(s)
      J. W. Kim, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      IEEE Sensors 2006

      Pages: 34-36

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Re-growth of Si probe using VLS method for 3-dimensional Si microprobe array2006

    • Author(s)
      N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      The Japan Society of Applied Physics(The 67th Autumn Meeting) No.3

      Pages: 1186-1186

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] A very-fine Si microprobe array aimed for in-vivo recording of neuronal activities2006

    • Author(s)
      T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida
    • Journal Title

      The Japan Neuroscience Society(The 29th Annual Meeting) Vol.55, Sub.1

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Si microprobe array chips for in-vivo recording of neural activity2006

    • Author(s)
      M. Ishida
    • Journal Title

      International Symposium on LifeChips 2006(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Smart Microchips with Sensors and Integrated Circuits of TUT2006

    • Author(s)
      M. Ishida
    • Journal Title

      Joint Seminar on Sensor and MEMS between NECTEC and IEEJ Society E(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Smart Microchips-Si microprobe array chips for recording neural activity-2006

    • Author(s)
      M. Ishida
    • Journal Title

      International Forum on Micro-Nano Hetero System Integration in Sendai(MHSI-'06)and The 2nd Fraunhofer Symposium in Sendai(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Smart Microchips of TUT2006

    • Author(s)
      M. Ishida
    • Journal Title

      Korea and Japan Joint Seminar on Semiconductor Manufacturing Process(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing2006

    • Author(s)
      Y. Kato, H. Takao, K. Sawada, M.Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.45, No.4

    • NAID

      10018158776

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Properties of a ph junction developed with a Si microprobe by vapour-liquid-solid growth using in situ doping2006

    • Author(s)
      M.S. Islam, T. Kawashima, K. Sawada, M.Ishida
    • Journal Title

      Semiconductor Science and Technology Vol.21

      Pages: 1364-1368

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Flourline Implantation and Long-Time Hydrogen Annealing2006

    • Author(s)
      Y.Kato, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      Japanese Journal of Applied Physics vol.45, No.4

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Properties of a pn junction developed with a Si microprobe by vapour-liquid-solid growth using in situ doping2006

    • Author(s)
      M.S.Islam, T.Kawashima, K.Sawada, M.Ishida
    • Journal Title

      Semiconductor Science and Technology Vol.21

      Pages: 1364-1368

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability2006

    • Author(s)
      J.W.Kim, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      IEEE Sensors 2006 Conference

      Pages: 14-14

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Re-growth of Si probe using VLS method for 3-dimensional Si microprobe array2006

    • Author(s)
      N.Funagayama, T.Kawashima, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 67th Autumn Meeting) No.3

      Pages: 1186-1186

    • Related Report
      2006 Annual Research Report
  • [Journal Article] A very-fine Si microprobe array aimed for in-vivo recording of neuronal activities2006

    • Author(s)
      T.Kawashima, T.Kawano, H.Takao, K.Sawada, H.Kaneko, M.Ishida
    • Journal Title

      The Japan Neuroscience Society (The 29^<th> Annual Meeting) Vol.55, Sub.1

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Fabrication of Si microprobe array for neural recording using Parylene film2006

    • Author(s)
      A.Shinoda, T.Kawashima, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

      Pages: 1384-1384

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Micro Si-probe array for 3D recording of neural activities2006

    • Author(s)
      A.Ikedo, N.Funagayama, T.Kawashima, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 53rd Spring Meeting) No.3

      Pages: 1383-1383

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid(VLS)Growth Method2005

    • Author(s)
      Md. S. Islam, H. Ishino, T. Kawano, H. Takao, K. Sawada, and M. Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.44, No.4B

      Pages: 2161-2165

    • NAID

      10015703596

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Neural recording with low-invasive Si microprobe array2005

    • Author(s)
      T. Kawano, A. Ishihara, T. Harimoto, T. Kawashima, H. Takao, K. Sawada, S. Usui, and M. Ishida
    • Journal Title

      Solid-State Sensors, Actuators and Microsystems Conference 2005(TRANSDUCERS 2005), Vol.2

      Pages: 1222-1225

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities2005

    • Author(s)
      T. Kawano, A. Ishihara, T. Harimoto, H. Takao, K. Sawada, S. Usui, and M. Ishida
    • Journal Title

      The 44th Annual Conference of Japanese Society for Medical and Biological Engineering(Invited talk) Vol.43, Suppl.1

      Pages: 218-218

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Multichannel Si Microprobe Array for Neural Recording on Integrated Circuit2005

    • Author(s)
      N. Funagayama, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      IEICE Technical Report Vol.105, No.184

      Pages: 83-87

    • NAID

      110003318329

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Recording of single motor unit action potentials using Si microprobe electrode array chip-examination of electrode impedance-2005

    • Author(s)
      T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, and M. Ishida
    • Journal Title

      The Japan Society of Applied Physics(The 66th Autumn Meeting) No.3

      Pages: 1138-1138

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Improvement of Electrical Properties of Si-Microprobe Electrode Arrays for Neural Recording2005

    • Author(s)
      N. Funagayama, T. Kawano, T. Harimoto, A. Ishihara, T. Kawashima, H. Takao, K. Sawada, S. Usui, and M. Ishida
    • Journal Title

      The 22nd Sensor Symposium on IEEJ

      Pages: 265-269

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of microsensor systems2005

    • Author(s)
      M. Ishida
    • Journal Title

      International Symposium for Advanced Sensor Technology(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Intelligent Sensing Chips in TUT2005

    • Author(s)
      M. Ishida
    • Journal Title

      Joint Workshop On Future Semiconductor Sensors(Invited talk)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method2005

    • Author(s)
      Md. Shofiqul, Islam, H. Ishino, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.44, No.4B

      Pages: 2161-2165

    • NAID

      10015703596

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Neural recording with low-invasive Si microprobe array2005

    • Author(s)
      T.Kawano, A.Ishihara, T.Harimoto, T.Kawashima, H.Takao, K.Sawada, S.Usui, M.Ishida
    • Journal Title

      Technical Digest of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05) Vol.2

      Pages: 1222-1225

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities2005

    • Author(s)
      T.Kawano, A.Ishihara, T.Harimoto, H.Takao, K.Sawada, S.Usui, M.Ishida
    • Journal Title

      The 44th Annual Conference of Japanese Society for Medical and Biological Engineering Vol.43, Suppl.1

      Pages: 218-218

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Realization of In Situ Doped n-Type and p-Type Si-microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method2005

    • Author(s)
      Md.Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Japanese Journal of Applied Physics Vol.44, No.4B

      Pages: 2161-2165

    • NAID

      10015703596

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Multichannel Si Microprobe Array for Neural Recording on Integrated Circuit2005

    • Author(s)
      N.Funagayama, T.Kawano, H.Takao, K.Sawada, M.Ishida
    • Journal Title

      IEICE Technical Report Vol.105,No.184

      Pages: 83-87

    • NAID

      110003318329

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Recording of single motor unit action potentials using Si microprobe electrode array chip - examination of electrode impedance -2005

    • Author(s)
      T.Kawashima, T.Kawano, H.Takao, K.Sawada, H.Kaneko, M.Ishida
    • Journal Title

      The Japan Society of Applied Physics (The 66th Autumn Meeting) No.3

      Pages: 1138-1138

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Improvement of Electrical Properties of Si-Microprobe Electrode Arrays for Neural Recording2005

    • Author(s)
      N.Funagayama, T.Kawano, T.Harimoto, A.Ishihara, T.Kawashima, H.Takao, K.Sawada, S.Usui, M.Ishida
    • Journal Title

      The 22nd Sensor Symposium on IEEJ

      Pages: 265-269

    • Related Report
      2005 Annual Research Report
  • [Presentation] Batch-fabrication of nanoscale-tip silicon Neuroprobe array2008

    • Author(s)
      A. Goryu, A. Ikedo, K. Takei, T. Kawano, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 55rd Spring Meeting)
    • Place of Presentation
      Chiba, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Smart Microchips in TUT2007

    • Author(s)
      M. Ishida
    • Organizer
      Korea-Japan Joint Workshop on Bio-mater ials and Electronic Devices for the 60th Anniversary of Dankook University (Invit ed talk)
    • Place of Presentation
      Cheonan, Karea
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Smart Microchips of TUT2007

    • Author(s)
      M. Ishida
    • Organizer
      Korea and Japan Joint Seminar on Semiconductor Manufacturing Process (Invited talk)
    • Place of Presentation
      Seoul, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ishida, Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs2007

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      Solid-State Sensors, Actuators and Microsystems Conference 2007 (TRANSDUCERS 2007)
    • Place of Presentation
      Lyon, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Mechanical Properties of Micro Probe and Tube Array for Neural Penetrating Devices2007

    • Author(s)
      K. Takei, T. Kawashima, K. Sawada, M. Ishida
    • Organizer
      Engineering in Medicine and Biology Society, 2007. 29th Annual International Conference of the IEEE
    • Place of Presentation
      Lyon, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of Si Probe and SiO2 Tube Array Chip Integrated with On-chip Circuits for Neural Interface Devices2007

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K Sawada, M. Ishida
    • Organizer
      The 24th Sensor Symposium on IEEJ
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] p-Si Micropro be Arrays Grown at Low Temperature by Selective VLS Using In-Situ Doping and Their Properties2007

    • Author(s)
      M.S. Islam, T. Kawashima, K. Sawada, M. Ishida
    • Organizer
      IEEE Sensors 2007
    • Place of Presentation
      Georgia, USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High-yield growth of p-Si microprobe arrays by selective vapor-liquid-solid method using in situ doping and their properties2007

    • Author(s)
      A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Micro- and Submicro- Tube Array2007

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Organizer
      2007 Korea-Japan Joint Workshop on Advanced Semiconductor Processes and Equipments
    • Place of Presentation
      Busan, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Silicon Smart Microchip for Intelligent Human Sensing2007

    • Author(s)
      M. Ishida, H. Takao, T. Kawashima, D. Akai, T. Noda, J.W. Kim, K. Takei, T. Kawano, K. Sawada
    • Organizer
      Technical Program & Abstracts of 10th I nternational Conference on Advanced Mat erials (IUMRS-ICAM 2007) (Invited talk)
    • Place of Presentation
      Bangalore, India
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ishida, Si Micro Probe and SiO_2 Micro Tube Array Integrated with nMOSFETs2007

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      Solid-State Sensors, Actuators and Microsystems Conference 2007 (TRANSDUCERS 2007)
    • Place of Presentation
      Lyon, France
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Smart Microchips with Sensors and Integrated Circuits of T UT2006

    • Author(s)
      M. Ishida
    • Organizer
      Joint Seminar on Sensor and MEMS between NECTEC and IEEJ Society E (Invited talk)
    • Place of Presentation
      Thailand
    • Year and Date
      2006-06-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of Si microprobe array for neural recording using Parylene film2006

    • Author(s)
      A. Shinoda, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 53rd Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Experiment of liquid injection through SiO_2 micro tube array2006

    • Author(s)
      K. Takei, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 53rd Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Micro Si-probe array for 3D recording of neural activities2006

    • Author(s)
      A. Ikedo, N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 53rd Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Evaluation of Monolithically Integrated Antennas and RF Transmitters for Silicon Smart Micro Sensors with Wireless-Communication Ability2006

    • Author(s)
      J.W. Kim, H. Takao, K, Sawada, M. Ishida
    • Organizer
      IEEE Sensors 2006
    • Place of Presentation
      Daegu, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Re-growth of Si probe using VLS method for s-dimensional Si microprobe array2006

    • Author(s)
      N. Funagayama, T. Kawashima, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 67th Autumn Meeting)
    • Place of Presentation
      Shiga, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A very-fine Si microprobe array aimed for in-vive recording of ne uronal activities2006

    • Author(s)
      T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida
    • Organizer
      The Japan Neuroscience Society (The 29th Annual Meeting)
    • Place of Presentation
      Kyoto, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Si microprobe array chips for in-vive recording of neural a ctivity2006

    • Author(s)
      M. Ishida
    • Organizer
      International Symposium on LifeChips 2006, (Invited talk)
    • Place of Presentation
      Irvine, CA, USA
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Smart Microchips - Si microprobe array chips for recording neural activity-2006

    • Author(s)
      M. Ishida
    • Organizer
      International Forum on Micro-Nana Hetero System Integration in Sendai (MHSI- '06) and The 2nd Fraunhofer Symposium in Sendai (Invited talk)
    • Place of Presentation
      Sendai, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Intelligent Sensing Chips in TUT2005

    • Author(s)
      M. Ishida
    • Organizer
      Joint Workshop On Future Semiconductor Sensors (Invited talk)
    • Place of Presentation
      Dae-Gu, Korea
    • Year and Date
      2005-10-08
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of microsensor systems2005

    • Author(s)
      M. Ishida
    • Organizer
      International Symposium for Advanced Sensor Technology (Invited talk)
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2005-06-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Neural recording with low-invasive Si microprobe array2005

    • Author(s)
      T. Kawano, A. Ishihara, T. Harimoto, T. Kawashima, H. Takao, K. Sawada, S. Usui, M. Ishida
    • Organizer
      Solid-State Sensors, Actuators and Microsystems Conference 2005 (TRANSDUCERS 2005)
    • Place of Presentation
      Seoul, Korea
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Three-dimensional Multichannel Si Microprobe Electrode Array Chip for Recording Neuron Activities2005

    • Author(s)
      T. Kawano, A. Ishihara, T. Harimoto, H. Takao, K. Sawada, S. Usui, M. Ishida
    • Organizer
      The 44th Annual Conference of Japanese Society for Medical and Biological Engineering (Invited talk)
    • Place of Presentation
      Tsukuba, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Multich annel Si Microprobe Array for Neural Recording on Integrated Circuit2005

    • Author(s)
      N. Funagayama, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Organizer
      IEICE Technical Report
    • Place of Presentation
      Toyohashi, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Recording of single motor unit action potentials using Si micr oprobe electrode array chip - examination of electrode impedance2005

    • Author(s)
      T. Kawashima, T. Kawano, H. Takao, K. Sawada, H. Kaneko, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 66th Autumn Meeting)
    • Place of Presentation
      Tokushima, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement of Electri cal Properties of Si-Microprobe Electrode Arrays for Neural Recording2005

    • Author(s)
      N. Funagayama, T. Kawano, T. Harimoto, A. Ishihara, T. Kawashima, H. Takao, K. Sawada, S. Usui, M. Ishida
    • Organizer
      The 22nd Sensor Symposium on IEEJ
    • Place of Presentation
      Tokyo, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://www.dev.eee.tut.ac.jp/ishidalab/index_j

    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://www.dev.eee.tut.ac.jp/ishidalab/index_j

    • Related Report
      2007 Annual Research Report

URL: 

Published: 2005-04-01   Modified: 2016-04-21  

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