Budget Amount *help |
¥7,500,000 (Direct Cost: ¥7,500,000)
Fiscal Year 2006: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 2005: ¥5,000,000 (Direct Cost: ¥5,000,000)
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Research Abstract |
In this project, it has been aimed at the development of the device which can quickly detect the molecular interacton with high sensitivity, by combining the electric properties of carbon nanotubes, immobilization technology of the solid surface, and biotechnology. As an application of it, we tried to build the high sensitive test systems for human blood, especially the detection system of pathogenic viruses. (1) Fabrication of CNT-FET by chemical vapor deposition (CVD) method. In order to improve the process yield of the CNT biosensor and to uniform the electric property of the sensor, we optimized the fabrication process of the CNT biosensor. (i) Controlling the density of CNTs by using variety of metal multilayer films as catalysts, (ii) Controlling the density of CNTs with thermal CVD condition, (iii) Controlling a number of bridging CNTs by optimization of the catalyst dimension, (iv) Installation of the load lock chamber for EB deposition system, (v) Improvement in the lift-off pr
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ocess of the electrode patterning, (vi) Introduction of the automatic measurement system for the CNT biosensor, (vii) Selective breakdown of metallic CNTs. By these optimized processes, the yield ratio of conducting sensor and FET sensor improved 12.5 times and 5.2 times respectively. (2) Fabrication of CNT-FET by CNT immobilization through self-assedmbled membrane A nanotube FET device was fabricated on a cover glass after fabricationg a sol-gel layer of 3-aminopropyltriethoxysilane (APS) at the planned site of source and drain electrodes on the glass substrate, and after subsequent immobilizing SWCNT dispersion, which is treated using a mixture of acids and hydroxyperoxide. About 60% of the devices made by the above method showed a FET property. This devices, which can reproducibly detect pH, is applicable for use as a immunosensor through modification of the CNT surface, although it showed lower sensitivity compared to that fabricated by the CVD method. (3) Detection of Hepatitis B virus surface antigen (HBs antigen) To prepare the CNT-biosensor for detection of Hepatitis B virus surface antigen, anti-HBs antibodiy was immobilized on the reverse side of CNT put on the one side of silicon wafer. HBs surface antigen was reproducibly able to measure ranging from 10 fg/ ml to 100 pg/ml. Additon of human serum at final concentration of 5% to analyte had no effect to the measurement of the CNT-biosensor in respect to its sensitivity and accuracy. Less
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