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Development on technology of micro-lithograph for manufacturing a nano-size die with low cost and high accuracy

Research Project

Project/Area Number 17360061
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionNagaoka University of Technology

Principal Investigator

TANABE Ikuo  Nagaoka University of Technology, Mechanical Engineer, Professor, 工学部, 教授 (30155189)

Co-Investigator(Kenkyū-buntansha) MIZUTANI Junnosuke  Toyama National College of Maritime Technology, Electronic Control, Associate Professor, 電子制御工学科, 助教授 (70166015)
Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥15,200,000 (Direct Cost: ¥15,200,000)
Fiscal Year 2006: ¥5,400,000 (Direct Cost: ¥5,400,000)
Fiscal Year 2005: ¥9,800,000 (Direct Cost: ¥9,800,000)
KeywordsDie / Nano-order / Micro lithograph / Laser / Laser coloring / Thickness of oxide film / Refined die / Neural network / 酸化膜厚 / ナノ金型 / リソグラフ / レーザ加工 / レーザ発色 / ホログラフ
Research Abstract

(1) New surface treatment about coloring of stainless steel and titanium using YVO_4 laser machine was developed. In this paper, the surface treatment method was established, the principle of these coloring was made clear, then the controlling method of coloring was developed and evaluated. It is concluded from the results that coloring of stainless steel and titanium using YVO_4 laser machine became possible, the coloring was changed by the thickness of the oxidization film(TiO_2 or CrO_3), a requested color could be made by the inverse analysis using nueral network.
(2) Relationship between interference color of stainless steel and thickness of oxide film was made clear. Working conditons were listed on the database so that the neural network was not used. The influences of various enviromental conditions, such as room temperature, humidity and voltage fluctuation, were investigated to achieve the micro-fabrication of coloring. Then, coloring accuracy, including the sensitive colors, … More was evaluated. In addition, wear and atmospheric corrosion resistance were investigated. It is concluded from the results that room temperature and humidity affected the accuracy of coloring, desired color was obtained by using the working conditions on database, wear resistance is sperior, however, laser-treated area was eroded.
(3) Controlling regarding coloring of the sensitive color and improvement regarding life of color were investigated to achieve high quality treatment. The ON/OFF regarding irradiation of a laser was decided by two steps data using both white and black on the conventional coloring. Sensitive color could not be made by this method because of large energy gap between each irradiation for very sensitive coloring. Therefore, we used intermediate data for controlling the ON/OFF regarding irradiation of the laser. The optimum data was made by the gray colors with the optimum level which were divided equally from white(=0 bit) to black(=256 bit). Then, improvement regarding life of color was experimented by some samples with the differ pitch of irradiation. It is concluded from the results that new coloring method was effective for controlling regarding coloring of the sensitive color, coloring with fine pitch of irradiation on the stainless steel could improve regarding erosion.
(4) Technology of micro-lithograph for manufacturing a nano-size die using pevious technology (1),(2) and (3) was developed and evaluated. Technology for measuring height of oxide film from the base material to the top of surface was first established. Relationship between its height and the coloring was then investigated The table with refined movement and fine masking system were also developed. The prototype die using the previous technology was finally manufactured and evaluated Less

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (10 results)

All 2007 2006 2005

All Journal Article (10 results)

  • [Journal Article] チタンヘのレーザ発色加工とその光触媒効果2007

    • Author(s)
      品田正人, 田辺郁男, 須貝裕之, 井山徹郎
    • Journal Title

      日本機械学会論文集(C編) 73巻・726号

      Pages: 583-588

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Surface Treatment Regarding Coloring of Titanium Using Laser and Its Photocatalytic Effects2007

    • Author(s)
      SHINADA Masato, TANABE Ikuo, SUGAI Hiroyuki, IYAMA Tetsuro
    • Journal Title

      Transactions of the Japan Society of Mechanical Engineers Vol.73-No.726

      Pages: 583-588

    • NAID

      110006224683

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] チタンへのレーザ発色加工とその光触媒効果2007

    • Author(s)
      品田正人, 田辺郁男, 須貝裕之, 井山徹郎
    • Journal Title

      日本機械学会論文集(C編) 73巻・726号

      Pages: 583-588

    • NAID

      110006224683

    • Related Report
      2006 Annual Research Report
  • [Journal Article] YVO_4レーザを用いたステンレス鋼の発色加工(発色に関する環境因子,鋭敏色,寿命の考察)2006

    • Author(s)
      品田正人, 田辺郁男, 高橋 智, 板垣 薫
    • Journal Title

      日本機械学会論文集(C編) 72巻・713号

      Pages: 235-240

    • NAID

      110004226486

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] YVO_4レーザを用いたステンレス鋼の発色加工(鋭敏色の発色管理と寿命の改善)2006

    • Author(s)
      品田正人, 田辺郁男, 島崎拓也, 板垣 薫
    • Journal Title

      日本機械学会論文集(C編) 72巻・722号

      Pages: 3406-3411

    • NAID

      110004837637

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Annual Research Report 2006 Final Research Report Summary
  • [Journal Article] Surface Treatment Regarding Coloring of Stainless Steel Using YVO4 Laser (Consideration of Environmental Factor, Sensitive Color and Life Regarding Coloring)2006

    • Author(s)
      SHINADA Masato, TANABE Ikuo, TAKAHASHI Satoshi, ITAGAKI Kaoru
    • Journal Title

      Transactions of the Japan Society of Mechanical Engineers Vol.72-No.713

      Pages: 235-240

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Surface Treatment Regarding Coloring of Stainless Steel Using YVO4 Laser (Control of Sensitive Color and Improvement Regarding Life of Coloring)2006

    • Author(s)
      SHINADA Masato, TANABE Ikuo, SHIMAZAKI Takuya, ITAGAKI Kaoru
    • Journal Title

      Transactions of the Japan Society of Mechanical Engineers Vo1.72-No.722

      Pages: 3406-3411

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] YVO4レーザを用いたステンレス鋼の発色加工(発色に関する環境因子,鋭敏色,寿命の考察)2006

    • Author(s)
      品田正人, 田辺郁男, 他2名
    • Journal Title

      日本機械学会論文集,C編 72巻.713号

      Pages: 235-240

    • Related Report
      2005 Annual Research Report
  • [Journal Article] YVO4レーザを用いたステンレス鋼の発色加工(発色に関する鋭敏色の制御)2005

    • Author(s)
      田辺郁男, 島崎拓也, 品田正人
    • Journal Title

      電気加工学会全国大会(2005)講演論文集 2005年版

      Pages: 5-8

    • Related Report
      2005 Annual Research Report
  • [Journal Article] YVO4レーザを用いたステンレス鋼の発色加工2005

    • Author(s)
      品田正人, 田辺郁男, 他2名
    • Journal Title

      第65回レーザ加工学会大会講演論文集 2005年版

      Pages: 291-291

    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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