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Development of double side surface ultra-smoothness polishing technique by means of gearless workpiece rotation method based on new concept

Research Project

Project/Area Number 17360065
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKumamoto University

Principal Investigator

YASUI Heiji  Kumamoto University, Graduate School of Science and Technology, Professor, 大学院自然科学研究科, 教授 (30040398)

Project Period (FY) 2005 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2006: ¥5,500,000 (Direct Cost: ¥5,500,000)
Fiscal Year 2005: ¥9,800,000 (Direct Cost: ¥9,800,000)
Keywordsdouble surface polishing / high removal rate / ultra-high pressure / ultra-high speed / new method / gearless workpiece rotation / polisher / magnetic disk substrate
Research Abstract

Using ultra-high polishing pressure and polishing speed, this research aims to develop the double side surface polishing method of ultra-high removal rate for various kinds of workpieces such as magnet disk substrate, silicon wafer and so on. The new type of double side surface polishing machine based on new concept is manufactured on trial. In the machine, the workpiece is rotated by the couple of the friction forces in the reverse directions to each other, which are caused from the contact between workpiece and upper or lower polishing plate. That is, in the rotation mechanism of workpiece, the gear is not used. On the contrary, in the conventional polishing machine, the rotation of workpiece is done with the gear cut on the outside circle of carrier holding the disk substrate. Furthermore the double side surface polishing characteristics in the conditions of ultra-high polishing pressure and polishing speed using the new type of machine is examined. The summary is as follows ;
1) Imp … More rovement of polishing machine
(1) Establishment of stable rotation technique of workpiece
First of all, the couple of friction forces is caused by stepping the polishing plate. In the method, to machine the plate the precise seep is difficult. And also the stable rotation of workpiece is obtained difficult. To resolve the problem, the new technique in which the contact friction force between the workpiece and polisher is changed by holing a part of the polisher (surface is developed. Using the method, the stable rotation of workpiece is done.
(2) Development of cooling system of polisher
In the polishing conditions of ultra-high pressure and speed, large polishing heat occurs. Due to the heat, polisher surface is damaged. To solve the problem, the cooling systems of polishing plate are developed. The method is useful for the remove of generated heat.
(3) Investigation of dynamic pressure on polishing characteristics
In the condition ultra-high polishing speed, large buoyancy is found to reduce polishing pressure. On the basis of the result, the relationship between removal rate and polishing condition is cleared experimentally.
2) Development of linear type of double surface polishing machine
A linear type of double surface polishing machine in which the workpiece is rotated by the couple of friction forces as mentioned above for the rotary type of new double surface polishing machine is manufactured on trial. The machine is ascertained possible to perform the effective polishing operation.
3) Investigation of polishing characteristics using the new type of double side surface polishing machine
To clear the polishing characteristics using the new type of polishing machine, the experiment is carried out by the various kinds of polishing conditions. The influence of polishing conditions on the removal rate and smoothness is cleared experimentally. Less

Report

(3 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • Research Products

    (13 results)

All 2007 2006 2005

All Journal Article (13 results)

  • [Journal Article] アルミ磁気ディスク基板の超高圧力・超高速度ポリシングにおけるポリシャ寿命の検討(第1報)- -層ナップ構造ポリシャの場合 -2007

    • Author(s)
      安井平司, 山口寛太, 松川誠治, 山崎穣
    • Journal Title

      精密工学会誌 Vol. 73・No. 1

      Pages: 107-111

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Investigation on Polisher Life in Ultra-high Pressure and Speed Polishing of Aluminum Type of Magnetic Disk Substrate ( 1^<st> Report )-In Case of Single Nap Layer Type of Polisher-2007

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Seiji MATSUKAWA, Yutaka YAMASAKI
    • Journal Title

      Journal of the Japan Society for Precision Engineering Vol.73, No. 1

      Pages: 107-111

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Possibility of Ultra-Ultra High Pressure Polishing of Magnetic Disk Substrate2006

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Takuya NIKI
    • Journal Title

      Proc. 6th International Conference and 10th annual general meeting of the european society for precision engineering and nanotechnology

      Pages: 184-187

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Polisher Life in Ultra-smoothness Polishing of Magnetic Disk Substrate Using New Double Side Surface Polishing Machine2006

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Takuya NIKI, Shingo OTSUKA, Tomohiko NAGATA, Hisaaki KUBOTA
    • Journal Title

      Proc. ASPE 21 Annual Meeting

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Polisher Life in Ultra-smoothness Polishing of Magnetic Disk Substrate Using New Double Side Surface Polishing Machine2006

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Takuya NIKI, Shingo OTSUKA, Tomohiko NAGATA, Hisaaki KUBOTA
    • Journal Title

      Proc. American Society for Precision Engineering 21st Annual Meeting

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Possibility of Ultra-Ultra High Pressure Polishing of Magnetic Disk Substrate2006

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Takuya NIKI
    • Journal Title

      Proc.6th International Conference and 10th annual general meeting of the european society for precision engineering and nanotechnology

      Pages: 184-187

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Polisher Life in Ultra-smoothness Polishing of Magnetic Disk Substrate Using New Double Side Surface Polishing Machine2006

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Takuya NIKI, Shingo OTSUKA, Tomohiko NAGARA, Hisaaki KUBOTA
    • Journal Title

      Proc. ASPE 21 Annual Meeting

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Development of Gearless Polishing Machine for High Removal Rate and Ultra-Smoothness Double Side Surface Polishing2005

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Shouji KURIBAYASHI
    • Journal Title

      Proc. Euspen International Conference

      Pages: 465-468

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Polisher Life in Ultra-High Pressure and Ultra-High Speed Polishing of NiP Plated Aluminum Magnetic Disk Substrate2005

    • Author(s)
      Heiji YASUI, Yutaka YAMASAKI, Kanta YAMAGUCHI, Seiji MATSUKAWA, Shoji KURIBAYASHI, Takuya NIKI
    • Journal Title

      Proc. ASPE 20th Annual Meeting

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of Gearless Polishing Machine for High Removal Rate and Ultra-Smoothness Double Side Surface Polishing2005

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Shouji KURIBAYASHI
    • Journal Title

      Proc. 5th International Conference and 7th annual general meeting of the european society for precision engineering and nanotechnology

      Pages: 465-468

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Polisher Life in Ultra-High Pressure and Ultra-High Speed Polishing of NiP Plated Aluminum Magnetic Disk Substrate2005

    • Author(s)
      Heiji YASUI, Yutaka YAMASAKI, Kanta YAMAGUCHI, Seiji MATSUKAWA, Shoji KURIBAYASHI, Takuya NIKI
    • Journal Title

      Proc. American Society for Precision Engineering 20th Annual Meeting

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Development of Gearless Polishing Machine for High Removal Rate and Ultra-Smoothness Double Side Surface Polishing2005

    • Author(s)
      Heiji YASUI, Kanta YAMAGUCHI, Shouji KURIBAYASHI
    • Journal Title

      Proc.Euspen International Conference

      Pages: 465-468

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Polisher Life in Ultra-High Pressure and Ultra-High Speed Polishing of NiP Plated Aluminum Magnetic Disk Substrate2005

    • Author(s)
      Heiji YASUI, Yutaka YAMASAKI, Kanta YAMAGUCHI, Seiji MATSUKAWA, Shoji KURIBAYASHI, Takuya NIKI
    • Journal Title

      Proc.ASPE 20th Annual Meeting

    • Related Report
      2005 Annual Research Report

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Published: 2005-04-01   Modified: 2016-04-21  

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