HIGH ASPECT RATIO MICRO-MACHINING OF MAGNETIC MATERIALS AND MAGNETIC MICRO-PUMP FOR MEDICAL USE
| Project/Area Number |
17360143
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | KYUSHU INSTITUTE OF TECHNOLOGY |
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Principal Investigator |
YAMASAKI Jiro KYUSHU INSTITUTE OF TECHNOLOGY, GRADUATE SCHOOL OF ENGINEERING, PROFESSOR, 工学研究科, 教授 (40108668)
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| Co-Investigator(Kenkyū-buntansha) |
HONDA Takashi KYUSHU INSTITUTE OF TECHNOLOGY, GRADUATE SCHOOL OF ENGINEERING, ASSOCIATE PROFESSOR, 工学研究科, 助教授 (70295004)
TAKEZAWA Masaaki KYUSHU INSTITUTE OF TECHNOLOGY, GRADUATE SCHOOL OF ENGINEERING, RESEARCH ASSOCIATE, 工学研究科, 助手 (20312671)
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| Project Period (FY) |
2005 – 2006
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| Project Status |
Completed (Fiscal Year 2006)
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| Budget Amount *help |
¥13,500,000 (Direct Cost: ¥13,500,000)
Fiscal Year 2006: ¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2005: ¥9,500,000 (Direct Cost: ¥9,500,000)
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| Keywords | PARMANENT MAGNET / MICRO-MASHINING / MEMS / MAGNETIC MATERIALS / MICRO-PUMP / MICRO-ROBOT |
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| Research Abstract |
The aim of this research is to develop fundamental technologies which can be apply to fabricate magnetic micropump by MEMS(micro electro mechanical system)
It is possible to drive the magnetic micro-machine through energy in space generated by magnetic fields without wires. This characteristic feature of the wireless driving make the magnetic micro-machine simple in structure because of lack of driving coils near moving structure. On the other hand, a human body does not respond to an applied field generated by conventional coils, since water has very small permeability(diamagnetism). So, it become possible to leave the magnetic micro-machine in a human body and drive it from outside by applied fields. Such medical application of micro-machine can be operated only by the magnetic driving. To achieve such magnetic micro-machine, effort was made to develop fundamental technologies listed below.
1) Micro-machining of permanent magnets: To fabricate thin film magnets by mold-ejection method, micro-machining with high aspect ration of Si and A12O3 was done. By constructing the inductive coupling RIE machine operative at low temperature, micro-machining technology with aspect ratio around a few ten was developed.
2)Thin film magnets with high energy products: To use for thin film magnets with mold-ejection method, efforts were made to develop anisotropic permanents magnets with rapid quenching and electro deposition. By control of quenching speed and residual stress, anisotropic ribbon magnets and electro -deposited magnets were developed.
3) Micro-pump mechanism with high pumping pressure: For pumping sticky liquid in a human body, high pumping-pressure mechanism as well as simple structure are needed for the micro-pump. To achieve above purpose, several enlarged pump models were developed and tested by wireless driving.
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Report
(3 results)
Research Products
(16 results)
