Preparation of Piezoelectric Thin Films with Nano domain Engineering
| Project/Area Number |
17360323
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
FUNAKUBO Hiroshi Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Associate Professor, 大学院・総合理工学研究科, 助教授 (90219080)
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| Co-Investigator(Kenkyū-buntansha) |
SHINOZAKI Kazuo Tokyo Institute of Technology, Graduate School of Science and Engineering, Associate Professor, 大学院・総合理工学研究科, 助教授 (00196388)
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| Project Period (FY) |
2005 – 2006
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| Project Status |
Completed (Fiscal Year 2006)
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| Budget Amount *help |
¥14,800,000 (Direct Cost: ¥14,800,000)
Fiscal Year 2006: ¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 2005: ¥10,300,000 (Direct Cost: ¥10,300,000)
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| Keywords | Nanodomain / Giant piezo response / tiezofilm / 圧膜 |
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| Research Abstract |
Piezoelectric films are very important component for MEMS applications. However, its piezoresponse was smaller than expected one from bulk materials. We found the giant piezoelectricity along {111} direction in MPB-composition PZT. In the present study, the purpose of the present study is the following issues.
1.Investigation of the origin of the large piezoresponse.
2.Investigation of the piezoresponse without PZT.
As results, the following results were obtained.
1)(100)-/(001)- oriented films with (100) volume fraction less than 50% was obtained. This film shows large d_<33> value of 400 and its origin is considered to be the domain switching.
2)Pb(Mg_<1/3>Nb_<2/3>)O_3-PbTiO_3 [PMN-PT] films with large PT content were epitaxially grown. Phase change between tetragonal and rhombohedral phases was shifted in case of films. The PT content showing maximum piezoelectric response was found to be also changed.
3)Pb(Zn_<1/3>Nb_<2/3>)O_3-PbTiO_3 [PZN-PT], which reported to show the maximum piezoresponse in bulk, was first succeeded in film form.
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Report
(3 results)
Research Products
(57 results)
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[Journal Article] Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O_3 Film by Metalorganic Chemical Vapor Deposition2006
Author(s)
S.Yokoyama, K.Takahashi, S.Okamoto, A.Nagai, J.Minamidate, K.Saito, N.Ohashi, H.Haneda, O.Sakata, S.Kimura, K.Nishida, T.Katoda, H.Funakubo
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Journal Title
Jpn. J. Appl. Phys. 45(6A)
Pages: 5102-5106
NAID
Description
「研究成果報告書概要(和文)」より
Related Report
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[Journal Article] Crystal structure, electrical properties, and mechanical response of (100)-/(001)-oriented epitaxial Pb(Mg_<1/3>Nb_<2/3>)O_3-PbTiO_3 films grown on (100)_cSrRuO_3 // (100)SrTiO_3 substrates by metal-organic chemical vapor deposition2006
Author(s)
S.Yokoyama, S.Okamoto, H.Funakubo, T.Iijima, K.Saito, H.Okino, T.Yamamoto, K.Nishida, T.Katoda, J.Sakai
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Journal Title
J. Appl. Phys. 100
Pages: 54110-54110
Description
「研究成果報告書概要(和文)」より
Related Report
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[Journal Article] Preparation and Structural Analysis of Micro-patterned Pb(Zr, Ti)O_3 Film by Metalorganic Chemical Vapor Deposition2006
Author(s)
Shintaro Yokoyama, Kenji Takahashi, Shoji Okamoto, Atsushi Nagai, Jun Minamidate, Keisuke Saito, Naoki Ohashi, Hajime Haneda, Osami Sakata, Shigeru Kimura, Ken Nishida, Takashi Katoda, Hiroshi Funakubo
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Journal Title
Jpn.J.Appl.Phys. 45(6A)
Pages: 5102-5106
NAID
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Journal Article] Crystal structure, electrical properties, and mechanical response of (100)-/(001)-oriented epitaxial Pb(Mg_<1/3>Nb_<2/3>)O_3-PbTiO_3 films grown on (100)_cSrRuO_3 / (100)SrTiO_3 substrates by metal-organic chemical vapor deposition2006
Author(s)
Shintaro Yokoyama, Satoshi Okamoto, Hiroshi Funakubo, Takashi Iijima, Keisuke Saito, Hirotake Okino, Takashi Yamamoto, Ken Nishida, Takashi Katoda, Joe Sakai
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Journal Title
J.Appl.Phys. 100
Pages: 54110-54110
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Journal Article] "Characteristic Comparison of Epitaxial PZT And PMN-PT Films Grown On (100)_cSrRuO_3//(100)SrTiO_3 Substrates By Metalorganic Chemical Vapor Deposition",2006
Author(s)
Shintaro Yokoyama, Satoshi Okamoto, Keisuke Saito, Takashi Iijima, Hirotake Okino, Takashi Yamamoto, Ken Nishida, Takashi Katoda, Joe Sakai, Hiroshi Funakubo
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Journal Title
Mater. Res. Soc. Symp. Proc., 902E
Related Report
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[Journal Article] "Observation of Domain Switching in Fatigued Epitaxial Pb(Zr,Ti)O_3 Thin Films",2006
Author(s)
Yong Kwan Kim, Shintaro Yokoyama, Risako Ueno, Hitoshi Morioka, Osami Sakata, Shigeru Kimura, Keisuke Saito, Hiroshi Funakubo
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Journal Title
Mater. Res. Soc. Symp. Proc., 902E
Related Report
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[Journal Article] "Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O_3 Film by Metalorganic Chemical Vapor Deposition",2006
Author(s)
Shintaro Yokoyama, Kenji Takahashi, Shoji Okamoto, Atsushi Nagai, Jun Minamidate, Keisuke Saito, Naoki Ohashi, Hajime Haneda, Osami Sakata, Shigeru Kimura, Ken Nishida, Takashi Katoda, Hiroshi Funakubo
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Journal Title
Jpn. J. Appl. Phys., 45(6A)
Pages: 5102-5106
NAID
Related Report
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[Journal Article] "Crystal structure, electrical properties, and mechanical response of (100)-/(001)-oriented epitaxial Pb(Mg_1/3Nb_2/3)O_3-PbTiO_3 films grown on (100)_cSrRuO_3 // (100)SrTiO_3 substrates by metal-organic chemical vapor deposition",2006
Author(s)
Shintaro Yokoyama, Satoshi Okamoto, Hiroshi Funakubo, Takashi Iijima, Keisuke Saito, Hirotake Okino, Takashi Yamamoto, Ken Nishida, Takashi Katoda, Joe Sakai
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Journal Title
J. Appl. Phys., 100
Pages: 54110-54110
Related Report
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[Journal Article] Dependence of electrical properties of epitaxial Pb(Zr,Ti)O_3 thick films on crystal orientation and Zr/(Zr+Ti) ratio2005
Author(s)
S.Yokoyama, Y.Honda, H.Morioka, S.Okamoto, H.Funakubo, T.Iijima, H.Matsuda, K.Saito, T.Yamamoto, H.Okino, O.Sakata, S.Kimura
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Journal Title
Description
「研究成果報告書概要(和文)」より
Related Report
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[Journal Article] Dependence of electrical properties of epitaxial Pb(Zr, Ti)O_3 thick films on crystal orientation and Zr/(Zr+Ti) ratio2005
Author(s)
Shintaro Yokoyama, Yoshihisa Honda, Hitoshi Morioka, Shoji Okamoto, Hiroshi Funakubo, Takashi Iijima, Hirofumi Matsuda, Keisuke Saito, Takashi Yamamoto, Hirotake Okino, Osami Sakata, Shigeru Kimura
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Journal Title
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Journal Article] Polarization comparison of Pb(Zr,Ti)O_3 and Bi_4Ti_3O_<12>-based ferroelectrics,2005
Author(s)
Hiroshi Funakubo, Takayuki Watanabe, Hitoshi Morioka, Atsushi Nagai, Takahiro Oikawa, Muneyasu Suzuki, Hiroshi Uchida, Seiichiro Kouda, Keisuke Saito
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Journal Title
Materials Science and Engineering B 118
Pages: 23-27
Related Report
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[Journal Article] Dependence of electrical properties of epitaxial Pb(Zr,Ti)O_3 thick films on crystal orientation and Zr/(Zr+Ti) ratio,2005
Author(s)
Shintaro Yokoyama, Yoshihisa Honda, Hitoshi Morioka, Shoji Okamoto, Hiroshi Funakubo, Takashi Iijima, Hirofumi Matsuda, Keisuke Saito, Takashi Yamamoto, Hirotake Okino, Osami Sakata, Shigeru Kimura
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Related Report
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