Nanomachining and Nano-Synthesis of Transparent Materials using Laser Plasma Soft X-Rays
| Project/Area Number |
17360348
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | University of Tsukuba |
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Principal Investigator |
MAKIMURA Tetsuya University of Tsukuba, Graduate School of Pure and Applied Sciences, Associate Professor (80261783)
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| Co-Investigator(Kenkyū-buntansha) |
MURAKAMI Kouichi University of Tsukuba, Graduate School of Pure and Applied Sciences, Professor (10116113)
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| Project Period (FY) |
2005 – 2007
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| Project Status |
Completed (Fiscal Year 2007)
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| Budget Amount *help |
¥16,010,000 (Direct Cost: ¥15,500,000、Indirect Cost: ¥510,000)
Fiscal Year 2007: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2006: ¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2005: ¥10,300,000 (Direct Cost: ¥10,300,000)
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| Keywords | lader plasma soft X-ray / transparent materials / inorganic materials / nanomachining / optical direct machining / silica glass / X-ray optics / 軟X線光学系 / 軟X線 / レーザープラズマ / 光源技術 / 精密部品加工 |
|---|
| Research Abstract |
Light in the range of vacuum ultraviolet, extreme ultraviolet and soft X-rays have short wavelengths and hence can be used to irradiate materials with resolutions in nanometer scale. Even materials which are transparent in visible or ultraviolet region can absorb light at such short wavelengths, which results in excitation of electronic states by one-photon process. So far, only etching and modification of materials have been achieved by irradiation with short-wavelength light. However, ablation, in which several layers of surfaces are removed by irradiation at high power density, have not been achieved. In the present work, we selected laser plasma soft X-rays which are generated using lasers. The soft X-rays are emitted from a plasma which is generated by irradiation of a target with focused laser light. Compared to other X-ray sources, the soft X-ray sources, the soft X-ray can be bright enough. Furthermore, it provides a practical X-ray source because it does not require any huge equipment. In addition, we have investigated and developed X-ray optics that can focus soft X-rays around 10 nm efficiently. Thus, we have developed a apparatus to irradiate materials with soft X-rays at high power densities. Using the X-ray irradiation system, we demonstrated that inorganic transparent can be irradiation with intense light at a short wavelength, for the first time in the world. Furthermore, it should be noted that trenches with of 50 nm can be fabricated by ablation. Thus, we demonstrated capability of laser plasma soft X-rays for nanomachining. In addition, a wide variety of transparent materials can be ablated by irradiation with laser plasma soft X-rays. The obtained results can be applied can be applied to fabricate micro-chemical reactors and micro-chemical analyzers. Furthermore, the higher X-rays source can be applied to material synthesis by core electron excitation and high density excitation.
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Report
(4 results)
Research Products
(115 results)
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[Presentation] Materials Processing using EUV light2008
Author(s)
Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
Organizer
Symposium in The Japan Society of Applied Physics2008 Spring Meeting
Place of Presentation
Nihon Unviersity
Year and Date
2008-05-28
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Presentation] EUV材料プロセス2008
Author(s)
牧村哲也, 藤森隆成, 新納弘之, 村上浩一
Organizer
2008年春季 第55回応用物理学関係連合講演会
Place of Presentation
日本大学 船橋キャンパス
Year and Date
2008-03-28
Related Report
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[Presentation] EUV ablation2008
Author(s)
Tetsuya Makimura, Takashige Fujimori, Hiroyuki Niino, Kouichi Murakami
Organizer
Symposium in the Insitute of Electrical Engineers of Japan 2008
Place of Presentation
Fukuoka Kogyo University
Year and Date
2008-03-21
Description
「研究成果報告書概要(欧文)」より
Related Report
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[Presentation] EUVアブレーション2008
Author(s)
牧村哲也, 藤森隆成, 新納弘之, 村上浩一
Organizer
平成20年電気学会全国大会
Place of Presentation
福岡工業大学
Year and Date
2008-03-21
Related Report
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