Creation of optical functions below 200nm with ultra-wide band gap oxide semiconductor quantum structure
Project/Area Number |
17H01263
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Electronic materials/Electric materials
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Research Institution | Kyoto University |
Principal Investigator |
Fujita Shizuo 京都大学, 工学研究科, 教授 (20135536)
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Co-Investigator(Kenkyū-buntansha) |
尾沼 猛儀 工学院大学, 先進工学部, 教授 (10375420)
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Project Period (FY) |
2017-04-01 – 2020-03-31
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Project Status |
Completed (Fiscal Year 2019)
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Budget Amount *help |
¥44,070,000 (Direct Cost: ¥33,900,000、Indirect Cost: ¥10,170,000)
Fiscal Year 2019: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2018: ¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥15,990,000 (Direct Cost: ¥12,300,000、Indirect Cost: ¥3,690,000)
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Keywords | 光物性 / 量子井戸 / 酸化物 / 深紫外 / 量子構造 |
Outline of Final Research Achievements |
We developed an ultra-wide bandgap oxide semiconductor MgZnO and obtained deep ultraviolet cathodoluminescence covering the wavelengths below 200 nm. An environmental-friendly Mist CVD method was used for the growth, and appropriate choice of source materials allowed high-quality crystals. Internal quantum efficiency at room temperature was about 3% for MgZnO thin films with Mg composition of 0.92 emitting at 217 nm while was increased to about 13% with multiple quantum-well structure. The emission peak from the latter was 212 nm, which was shorter than that from the former, suggesting increased emission efficiency by quantum effect.
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Academic Significance and Societal Importance of the Research Achievements |
波長200 nm以下を含む深紫外領域の光は、殺菌、加工、光化学等の応用に不可欠である一方で、光源には水銀や希ガスの放電が一般に用いられている。これを固体を用いて実現することは、脱水銀や希少資源の保護に寄与するとともに、任意の波長での光源が得られるという社会的意義がある。また、深紫外領域における半導体の光物性研究という新しい学理の開拓に研究の学術的意義がある。成長にミストCVD法を用いることで、地球環境に優しい半導体技術の開拓に寄与するところが本研究の価値である。
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Report
(4 results)
Research Products
(27 results)
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[Presentation] 岩塩構造MgZnO薄膜の時間分解フォトルミネッセンス分光2020
Author(s)
工藤幹太, 石井恭平, 小野瑞生, 金子健太郎, 山口智広, 嶋紘平, 小島一信, 藤田静雄, 本田徹, 秩父重英, 尾沼猛儀
Organizer
2020年第67回応用物理学会春季学術講演会
Related Report
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