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Lightweight and Smart Hybrid Materials by Low Temperature Ambient Bonding

Research Project

Project/Area Number 17H01275
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNational Institute for Materials Science

Principal Investigator

SHIGETOU Akitsu  国立研究開発法人物質・材料研究機構, 構造材料研究拠点, 主幹研究員 (70469758)

Co-Investigator(Kenkyū-buntansha) 水野 潤  早稲田大学, ナノ・ライフ創新研究機構, 上級研究員(研究院教授) (60386737)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥40,430,000 (Direct Cost: ¥31,100,000、Indirect Cost: ¥9,330,000)
Fiscal Year 2020: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2019: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
Fiscal Year 2018: ¥11,050,000 (Direct Cost: ¥8,500,000、Indirect Cost: ¥2,550,000)
Fiscal Year 2017: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Keywords接合 / ハイブリッド / 低温大気圧 / 電子実装 / 構造材料 / 表面・界面 / ハイブリッド接合 / 移動体 / IoT / 低温大気圧接合 / 軽量構造材料 / 低温 / 大気圧 / 異種材料接合 / 電子デバイス・機器 / 構造・機能材料
Outline of Final Research Achievements

1) Organic-inorganic hybrid bonding without high temperature and vacuum was realized for electronics packaging materials and automotive structural materials. 2) In novel bonding method, the vacuum ultraviolet irradiation in humidified nitrogen enabled the surface cleaning, partial deoxidization of native oxide, and ultrathin bridge formation, via single process (V-VUV method). Different bridge structures were available by using such as water and anmonium solution, and the thickness was tunable to obtain sufficient interdiffusion for cohesive fracture. 3) As a basic prototype of "lightweight and SMART strucural material," a hybrid body, which was composed of rolled Ti foil and PEEK and a resistance-change strain sensor substrate amid, was structured by means of V-VUV method. 4) Although it was beyond the original plan, a feasibility of water-proof bridge structure at the organic-inorganic interaface was shown.

Academic Significance and Societal Importance of the Research Achievements

学術的意義:1) 有機・無機材料のほぼ直接界面の接合達成メカニズムの解明は他に例を見ず,電子顕微鏡観察データなどを蓄積すれば,次世代複合材料の計算機設計の促進などに資する.2) 軽量かつスマートな構造材料の基礎的な実現性を示したことで,AI自動運転時代の移動体のデザインや運用概念が多様化される.社会的意義:1) 低温大気圧雰囲気で実行可能なハイブリッド接合手法は工業的に簡易なことから,異なる分野横断的に適用可能で,従来を超えた機能を有する新規な複合材料の開発が促進される.

Report

(5 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (44 results)

All 2021 2020 2019 2018 2017 Other

All Int'l Joint Research (4 results) Journal Article (11 results) (of which Int'l Joint Research: 8 results,  Peer Reviewed: 11 results,  Open Access: 9 results) Presentation (24 results) (of which Int'l Joint Research: 13 results,  Invited: 13 results) Book (3 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Int'l Joint Research] 国立台湾大学(その他の国・地域 台湾)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] 国立台湾大学(中国)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] 国立台湾大学(中国)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] 国立台湾大学(台湾)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Patchwork metasurface quantum well photodetectors with broadened photoresponse2020

    • Author(s)
      Hainey Mel F.、Mano Takaaki、Kasaya Takeshi、Jimba Yoji、Miyazaki Hiroshi、Ochiai Tetsuyuki、Osato Hirotaka、Watanabe Kazuhiro、Sugimoto Yoshimasa、Kawazu Takuya、Arai Yukinaga、Shigetou Akitsu、Miyazaki Hideki T.
    • Journal Title

      Optics Express

      Volume: 29 Issue: 1 Pages: 59-59

    • DOI

      10.1364/oe.408515

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Near-field resonant photon sorting applied: dual-band metasurface quantum well infrared photodetectors for gas sensing2020

    • Author(s)
      Hainey Mel F.、Mano Takaaki、Kasaya Takeshi、Ochiai Tetsuyuki、Osato Hirotaka、Watanabe Kazuhiro、Sugimoto Yoshimasa、Kawazu Takuya、Arai Yukinaga、Shigetou Akitsu、Miyazaki Hideki T.
    • Journal Title

      Nanophotonics

      Volume: 9 Issue: 16 Pages: 4775-4784

    • DOI

      10.1515/nanoph-2020-0456

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Systematic studies for improving device performance of quantum well infrared stripe photodetectors2020

    • Author(s)
      Hainey Mel F.、Mano Takaaki、Kasaya Takeshi、Ochiai Tetsuyuki、Osato Hirotaka、Watanabe Kazuhiro、Sugimoto Yoshimasa、Kawazu Takuya、Arai Yukinaga、Shigetou Akitsu、Miyazaki Hideki T.
    • Journal Title

      Nanophotonics

      Volume: 9 Issue: 10 Pages: 3373-3384

    • DOI

      10.1515/nanoph-2020-0095

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Hybrid Bonding in Ambient Atmosphere for Automotive IoT2020

    • Author(s)
      SHIGETOU Akitsu
    • Journal Title

      JOURNAL OF THE JAPAN WELDING SOCIETY

      Volume: 89 Issue: 6 Pages: 438-446

    • DOI

      10.2207/jjws.89.438

    • NAID

      130007903891

    • ISSN
      0021-4787, 1883-7204
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synchronously wired infrared antennas for resonant single-quantum-well photodetection up to room temperature2020

    • Author(s)
      Hideki T. Miyazaki, Takaaki Mano, Takeshi Kasaya, Hirotaka Osato, Kazuhiro Watanabe, Yoshimasa Sugimoto, Takuya Kawazu, Yukinaga Arai, Akitsu Shigetou, Tetsuyuki Ochiai, Yoji Jimba, Hiroshi Miyazaki
    • Journal Title

      Nature Communications

      Volume: 11 Issue: 1 Pages: 1-10

    • DOI

      10.1038/s41467-020-14426-6

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Different interfacial structures of Cu/In obtained by surface activated bonding (SAB) in vacuum and vapor-assisted vacuum ultraviolet (V-VUV) at atmospheric pressure2020

    • Author(s)
      Chiu Yu-Shan、Kao C.Robert、Shigetou Akitsu.
    • Journal Title

      Materials & Design

      Volume: 195 Pages: 109065-109065

    • DOI

      10.1016/j.matdes.2020.109065

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Different Interfacial Structures of Cu/In Obtained by Surface Activated Bonding (SAB) in Vacuum and Vapor-Assisted Vacuum Ultraviolet (V-VUV) at Atmospheric Pressure2020

    • Author(s)
      Yu-Shan Chiu, Robert Kao, Akitsu Shigetou
    • Journal Title

      Materials and Design

      Volume: -

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Organic-Inorganic Solid-State Hybridization with High-Strength and Anti-Hydrolysis Interface2019

    • Author(s)
      Tilo Hong-Wei Yang, Robert Kao, Akitsu Shigetou
    • Journal Title

      Nature: Scientific Reports

      Volume: 9

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] 次世代パワー半導体用接合技術の動向2018

    • Author(s)
      重藤 暁津, 並木尚己
    • Journal Title

      YANO E Plus

      Volume: 118 Pages: 73-76

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-temperature direct heterogeneous bonding of polyether ether ketone and platinum2017

    • Author(s)
      Fu Weixin、Shigetou Akitsu、Shoji Shuichi、Mizuno Jun
    • Journal Title

      Materials Science and Engineering: C

      Volume: 79 Pages: 860-865

    • DOI

      10.1016/j.msec.2017.05.058

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fast Atom Beam- and Vacuum-Ultraviolet-Activated Sites for Low-Temperature Hybrid Integration2017

    • Author(s)
      Yang Hong-Wei、Kao C. Robert、Shigetou Akitsu
    • Journal Title

      Langmuir

      Volume: 33 Issue: 34 Pages: 8413-8419

    • DOI

      10.1021/acs.langmuir.7b02010

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] Hybrid Bonding Without Vacuum and High Temperature for Cross-Cutting Applications2021

    • Author(s)
      SHIGETOU Akitsu
    • Organizer
      IEEE EPS/JIEP International Conference on Electronics Packaging
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 機能複合化手法としての低温大気圧異種材料接合2020

    • Author(s)
      重藤暁津
    • Organizer
      スマートプロセス学会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Metasurface Quantum Well Photodetectors with Broadened Photoresponse Using Patchwork of Cavities within a Subwavelength Period2020

    • Author(s)
      HAINEY JR., Mel Forrest, MANO, Takaaki, KASAYA, Takeshi, 神馬 洋司, 宮嵜 博司, OCHIAI, Tetsuyuki, OOSATO, Hirotaka, 渡邉 一弘, SUGIMOTO, Yoshimasa, KAWAZU, Takuya, ARAI, Yukinaga, SHIGETOU, Akitsu, MIYAZAKI, Hideki
    • Organizer
      Metamaterials'2020 - The 14th International Congress on Artificial Materials for Novel Wave Phenomena
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dual-band Metasurface Quantum Well Infrared Photodetectors for NO2 Sensing2020

    • Author(s)
      HAINEY JR., Mel Forrest, MANO, Takaaki, KASAYA, Takeshi, OCHIAI, Tetsuyuki, OOSATO, Hirotaka, 渡邉 一弘, SUGIMOTO, Yoshimasa, KAWAZU, Takuya, ARAI, Yukinaga, SHIGETOU, Akitsu, MIYAZAKI, Hideki
    • Organizer
      2020年第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Hybrid Bonding in Ambient Atmosphere for Cross-Cutting Applications2020

    • Author(s)
      SHIGETOU Akitsu
    • Organizer
      2020 21st International Conference on Electronic Packaging Technology
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Morphology considerations for optimizing metasurface quantum well photodetector performance2020

    • Author(s)
      HAINEY JR., Mel Forrest, MANO, Takaaki, KASAYA, Takeshi, OOSATO, Hirotaka, 渡邉 一弘, SUGIMOTO, Yoshimasa, KAWAZU, Takuya, ARAI, Yukinaga, SHIGETOU, Akitsu, OCHIAI, Tetsuyuki, 神馬 洋司, 宮嵜 博司, MIYAZAKI, Hideki
    • Organizer
      2020年第67回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 位相同調アンテナを用いたメタ表面量子井戸赤外検出器2020

    • Author(s)
      宮崎 英樹, 間野 高明, 笠谷 岳士, 大里 啓孝, 渡邉 一弘, 杉本 喜正, 川津 琢也, 新井 志大, 重藤 暁津, 落合 哲行, 神馬 洋司, 宮嵜 博司, ヘネ ジュニア メル フォレスト
    • Organizer
      2020年第67回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Lead-free and Fluxless Indium Solder Bonding Process in Low Temperature through Vacuum ultraviolet (VUV)2019

    • Author(s)
      Yu-Shan Chiu, Robert Kao, Akitsu Shigetou
    • Organizer
      11th International Symposium on Environmentally Conscious Design and Inverse Manufacturing
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] IoTに向けた軽量ハイブリッドかつスマートな構造材料のための接合技術2019

    • Author(s)
      重藤 暁津
    • Organizer
      (社)エレクトロニクス実装学会2019修善寺ワークショップ
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Low Temperature and Fluxless Bonding Process of Cu-In through VUV2019

    • Author(s)
      Yu-Shan Chiu, SHIGETOU, Akitsu, Robert Kao
    • Organizer
      2019 Taiwan-Japan Workshop on Electronic Interconnection
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Hybrid Bonding in Ambient Atmosphere for 3D Integration2019

    • Author(s)
      Akitsu Shigetou, Tilo Hong-Wei. Yang, Robert Kao
    • Organizer
      The IEEE International 3D Systems Integration Conference (3DIC)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Metamaterial quantum well infrared photodetectors based on plasmon-enhanced intersubband transition2019

    • Author(s)
      MIYAZAKI, Hideki, MANO, Takaaki, KASAYA, Takeshi, OOSATO, Hirotaka, 渡邉 一弘, SUGIMOTO, Yoshimasa, KAWAZU, Takuya, OCHIAI, Tetsuyuki, ARAI, Yukinaga, SHIGETOU, Akitsu
    • Organizer
      The 7th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures (SemiconNano2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Metasurface Quantum-well Infrared Photodetectors2019

    • Author(s)
      MIYAZAKI, Hideki, MANO, Takaaki, KASAYA, Takeshi, OOSATO, Hirotaka, 渡邉 一弘, SUGIMOTO, Yoshimasa, KAWAZU, Takuya, OCHIAI, Tetsuyuki, ARAI, Yukinaga, SHIGETOU, Akitsu
    • Organizer
      The Fourth A3 Metamaterials Forum
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Inorganic-Organic Low Temperature Hybrid Bonding with Anti-Hydrolysis Interface2019

    • Author(s)
      SHIGETOU, Akitsu
    • Organizer
      The 20th International Conference on Electronic Packaging Technology (ICEPT)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 軽量ハイブリッドかつスマートな構造材料創製のための低温大気圧接合技術2019

    • Author(s)
      重藤 暁津
    • Organizer
      (社)エレクトロニクス実装学会 実装フェスタ関西
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] A Single Process for Homogeneous and Heterogeneous Bonding in Flexible Electronics Ethanol-Assisted Vacuum Ultraviolet (E-VUV) Irradiation Process2019

    • Author(s)
      T. H. Yang, C. Y. Yang, C. R. Kao, A. Shigetou
    • Organizer
      2019 International Conference on Electronics Packaging (ICEP)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Printing of Flexible Electronics for Wearable Applications2019

    • Author(s)
      MINARI, Takeo, LIU, Xu-Ying, SUN, Qingqing, LI, Wanli, SHIGETOU, Akitsu, 金原 正幸
    • Organizer
      2019 IEEE/JIEP International Conference on Electronics Packaging
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 低温大気圧有機無機ハイブリッド接合に必要な極薄架橋構造の設計2019

    • Author(s)
      重藤 暁津, 楊 弘偉, 高 振宏
    • Organizer
      第25回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 高信頼性低温大気圧有機無機ハイブ リッド接合2018

    • Author(s)
      重藤 暁津, 楊弘偉, Robert Kao
    • Organizer
      マイクロエレクトロニクスシンポジウム(MES)
    • Related Report
      2018 Annual Research Report
  • [Presentation] Low Temperature and Non-Vacuum Surface Modification for Robust Hybrid Bonding2018

    • Author(s)
      SHIGETOU, Akitsu, Hongwei Yang, Robert Kao
    • Organizer
      Solid State Devices and Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 機能性材料創製のための低温大気圧接合技術 - 要素技術と将来展望 -2018

    • Author(s)
      重藤暁津
    • Organizer
      日本学術振興会153委員会 プラズマ材料科学スクール
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] メタ表面量子井戸赤外線検出器2018

    • Author(s)
      宮崎英樹ら計9名,重藤暁津は最終著者
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Hybrid Bonding Among Polymers, Metals and Semiconductors for Lightweight and Smart Structural Materialss2017

    • Author(s)
      Akitsu Shigeotu
    • Organizer
      Materials Science Conference & SMART Center Workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 新しい機能性材料創製の”道具”としての ハイブリッド接合2017

    • Author(s)
      重藤暁津
    • Organizer
      東レ 専門自主講座
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Book] 溶接接合教室-特論編-「異種材料の低温大気圧接合」2020

    • Author(s)
      重藤暁津
    • Publisher
      溶接学会
    • Related Report
      2019 Annual Research Report
  • [Book] 真空紫外光照射と極薄架橋形成による有機・無機材料の低温大気圧混載接合の要素技術(第4章 親水性表面の応用展開・活用事例). 超親水・親油性表面の技術2018

    • Author(s)
      重藤 暁津
    • Total Pages
      16
    • Publisher
      サイエンス&テクノロジー
    • ISBN
      9784864281713
    • Related Report
      2018 Annual Research Report
  • [Book] 超親水・親油性表面の技術(第4章)2018

    • Author(s)
      重藤暁津
    • Total Pages
      15
    • Publisher
      サイエンス&テクノロジー
    • ISBN
      9784864281713
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 積層体の製造方法、積層体、及び、暖房便座装置2019

    • Inventor(s)
      重藤暁津,楊弘偉
    • Industrial Property Rights Holder
      国立研究開発法人物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Related Report
      2019 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 接合方法2017

    • Inventor(s)
      重藤暁津,水野潤,庄子習一
    • Industrial Property Rights Holder
      物質・材料研究機構 早稲田大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2017
    • Acquisition Date
      2017
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2022-05-13  

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