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Highly efficient thermoelectric device by hybrid thermal conduction engineering

Research Project

Project/Area Number 17H02729
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanostructural physics
Research InstitutionThe University of Tokyo

Principal Investigator

Nomura Masahiro  東京大学, 生産技術研究所, 准教授 (10466857)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2019: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2018: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2017: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Keywords熱電変換 / エネルギーハーベスティング / 熱伝導 / フォノンエンジニアリング / フォノン / フォノニック結晶 / energy harvesting / thermoelectrics / phonon engineering / フォノニクス / マイクロ・ナノデバイス / ナノ材料 / エネルギー効率化 / 熱工学
Outline of Final Research Achievements

We developed advanced thermal conduction control in semiconductor thin films and application to thermoelectric devices. Phononic nanostructures are designed and formed in Si thin films on an SOI wafer. We demonstrated directional heat flux and heat focusing for the first time. On the topic of the development of thermoelectric devices, we adopted nanoimprint technology to form phononic nanostructures in 1 cm square area at low-cost and high-through put. The nanostructuring enables lower thermal conductivity, which leads to a higher thermoelectric performance. As the result, we achieved a 10 times enhancement in the power generation density compared with an unpatterned thin film.

Academic Significance and Societal Importance of the Research Achievements

独自の測定系を用いて熱フォノニクス・フォノンエンジニアリングの物理探索を系統的に広く行い、独創的な研究によって多くの新しい知見を分野にもたらすとともに高度な熱制御技術を産み出したため、学術的に大きな意義を持つ研究であった。また、ナノ構造化による材料の熱電変換効率の向上を実証したうえで、産学連携体制の構築を行ってデバイス化を進めた。熱フォノン輸送制御という学術的に深いところから、熱電変換デバイス開発につなげる意味で社会的にも有意義な研究であったと考える。本デバイスは、エネルギー自立型低消費電力デバイス用電源としてスマート化社会を支えるため、社会への大きな波及効果が期待できる。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (114 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (1 results) Journal Article (17 results) (of which Int'l Joint Research: 11 results,  Peer Reviewed: 17 results,  Open Access: 4 results) Presentation (93 results) (of which Int'l Joint Research: 60 results,  Invited: 28 results) Remarks (2 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] フライブルク大学(ドイツ)

    • Related Report
      2019 Annual Research Report
  • [Journal Article] Measurement of the phonon mean free path spectrum in silicon membranes at different temperatures using arrays of nanoslits2020

    • Author(s)
      R. Anufriev, J. Ordonez-Miranda, and M. Nomura
    • Journal Title

      Phys. Rev. B

      Volume: 101 Issue: 11 Pages: 115301-115301

    • DOI

      10.1103/physrevb.101.115301

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Design of Planar Si Thermoelectric Generators with Phononic Crystal Patterning2019

    • Author(s)
      M. Nomura, R. Yanagisawa, P. Zimmermann, P. Ruther, and O. Paul
    • Journal Title

      Sensors and Materials

      Volume: 31 Issue: 9 Pages: 2803

    • DOI

      10.18494/SAM.2019.2297

    • ISSN
      0914-4935, 2435-0869
    • Year and Date
      2019-09-20
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Semiballistic thermal conduction in polycrystalline SiGe nanowires2019

    • Author(s)
      Okamoto Noboru、Yanagisawa Ryoto、Anufriev Roman、Mahfuz Alam Md.、Sawano Kentarou、Kurosawa Masashi、Nomura Masahiro
    • Journal Title

      Applied Physics Letters

      Volume: 115 Issue: 25 Pages: 253101-253101

    • DOI

      10.1063/1.5130659

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Probing ballistic thermal conduction in segmented silicon nanowires2019

    • Author(s)
      Anufriev Roman、Gluchko Sergei、Volz Sebastian、Nomura Masahiro
    • Journal Title

      Nanoscale

      Volume: 11 Issue: 28 Pages: 13407-13414

    • DOI

      10.1039/c9nr03863a

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermal Conductivity Reduction in a Silicon Thin Film with Nanocones2019

    • Author(s)
      Huang Xin、Gluchko Sergei、Anufriev Roman、Volz Sebastian、Nomura Masahiro
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 11 Issue: 37 Pages: 34394-34398

    • DOI

      10.1021/acsami.9b08797

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermoelectric enhancement of silicon membranes by ultrathin amorphous films2019

    • Author(s)
      A. George, R. Yanagisawa, R. Anufriev, J. He, N. Yoshie, N. Tsujii, Q. Guo, T. Mori, S. Volz, and M. Nomura
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 11 Issue: 12 Pages: 12027-12031

    • DOI

      10.1021/acsami.8b21003

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] On the reduction and rectification of thermal conduction using phononic crystals with pacman-shaped holes2019

    • Author(s)
      Gluchko Sergei、Anufriev Roman、Yanagisawa Ryoto、Volz Sebastian、Nomura Masahiro
    • Journal Title

      Applied Physics Letters

      Volume: 114 Issue: 2 Pages: 023102-023102

    • DOI

      10.1063/1.5079931

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Coherent Thermal Conduction in Silicon Nanowires with Periodic Wings2019

    • Author(s)
      Roman Anufriev and Masahiro Nomura
    • Journal Title

      Nanomaterials

      Volume: 9 Issue: 2 Pages: 142-142

    • DOI

      10.3390/nano9020142

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Thermal phonon engineering by tailored nanostructures2018

    • Author(s)
      M. Nomura, J. Shiomi, T. Shiga, and R. Anufriev
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Pages: 080101-080101

    • NAID

      210000149393

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quasi-Ballistic Heat Conduction due to Levy Phonon Flights in Silicon Nanowires2018

    • Author(s)
      Roman Anufriev , Sergei Gluchko, Sebastian Volz, and Masahiro Nomura
    • Journal Title

      ACS Nano

      Volume: 12 Issue: 12 Pages: 11928-11928

    • DOI

      10.1021/acsnano.8b07597

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Phonon and heat transport control using pillar-based phononic crystals2018

    • Author(s)
      Anufriev Roman、Nomura Masahiro
    • Journal Title

      Science and Technology of Advanced Materials

      Volume: 19 Issue: 1 Pages: 863-870

    • DOI

      10.1080/14686996.2018.1542524

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermal conductivity reduction in silicon fishbone nanowires2018

    • Author(s)
      Maire Jeremie、Anufriev Roman、Hori Takuma、Shiomi Junichiro、Volz Sebastian、Nomura Masahiro
    • Journal Title

      Sci. Rep.

      Volume: 8 Issue: 1 Pages: 4452-4452

    • DOI

      10.1038/s41598-018-22509-0

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] フォノンエンジニアリングに基づいたナノ構造化シリコン薄膜熱電材料の開発2017

    • Author(s)
      野村政宏
    • Journal Title

      日本熱電学会誌

      Volume: 14 Pages: 12-16

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Aluminium nanopillars reduce thermal conductivity of silicon nanobeams2017

    • Author(s)
      Anufriev R.、Yanagisawa R.、Nomura M.
    • Journal Title

      Nanoscale

      Volume: 9 Issue: 39 Pages: 15083-15088

    • DOI

      10.1039/c7nr05114j

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heat conduction tuning by wave nature of phonons2017

    • Author(s)
      Maire Jeremie、Anufriev Roman、Yanagisawa Ryoto、Ramiere Aymeric、Volz Sebastian、Nomura Masahiro
    • Journal Title

      Science Advances

      Volume: 3 Issue: 8

    • DOI

      10.1126/sciadv.1700027

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Heat guiding and focusing using ballistic phonon transport in phononic nanostructures2017

    • Author(s)
      Anufriev Roman、Ramiere Aymeric、Maire Jeremie、Nomura Masahiro
    • Journal Title

      Nature Communications

      Volume: 8 Issue: 1 Pages: 15505-15505

    • DOI

      10.1038/ncomms15505

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Heat conduction engineering in pillar-based phononic crystals2017

    • Author(s)
      R. Anufriev and M. Nomura
    • Journal Title

      Phys. Rev. B

      Volume: 95 Issue: 15 Pages: 155432-155432

    • DOI

      10.1103/physrevb.95.155432

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Heat conduction below the amorphous limit in Si/SiO2 superlattices2019

    • Author(s)
      R. Anufriev, J. Ordonez-Miranda, and M. Nomura
    • Organizer
      The workshop on phonon lifetime from disordered to complex systems
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Phonon Engineering Learns Photonics for Heat Condution Control2019

    • Author(s)
      M. Nomura
    • Organizer
      International Symposium on Numerical Methods in Heat and Mass Transfer
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Time-Domain Thermoreflectance for Thermal Characterization of Nanostructures2019

    • Author(s)
      R. Anufriev and M. Nomura
    • Organizer
      20th International Conference on Photoacoustic and Photothermal Phenomena
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Phononics learns photonics2019

    • Author(s)
      M. Nomura
    • Organizer
      CLEO/EUROPE-EQEC 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Phononics learns photonics for heat transport control2019

    • Author(s)
      M. Nomura
    • Organizer
      Conference on Nanophononics, Bridging Statistical Physics, Molecular Modeling and Experiments
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ballistic thermal transport in silicon nanowires2019

    • Author(s)
      R. Anufriev and M. Nomura
    • Organizer
      Nanowire week
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Power enhancement of planar-type Si thermoelectric devices by nanostructuring2019

    • Author(s)
      M. Nomura and R. Yanagisawa
    • Organizer
      PACRIM13
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermoelectric Si thin film with nanostructures2019

    • Author(s)
      M. Nomura and R. Yanagisawa
    • Organizer
      Asian Advanced Materials Congress
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] フォトニクスからフォノニクスへ ~ナノ構造を使った高度な熱流制御~2019

    • Author(s)
      野村政宏
    • Organizer
      第16回 フォトニクス・イノベーションセミナー
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] ナノ構造化による熱伝導制御と環境発電応用2019

    • Author(s)
      野村政宏
    • Organizer
      2019年第3回極限ナノ造形・構造物性研究会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] ナノ構造を用いた高度熱流制御技術と熱電環境発電2019

    • Author(s)
      野村 政宏
    • Organizer
      第18回 宮崎大学未来エネルギープロジェクト講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Planar-type Si thermoelectric generators using nanopatterning2019

    • Author(s)
      M. Nomura
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Semi-ballistic thermal transport in SiGe nanowires2019

    • Author(s)
      N. Okamoto, R. Yanagisawa, M. M. Alam, K. Sawano, M. Kurosawa, and M. Nomura
    • Organizer
      CSW2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-ballistic thermal phonon transport in nanostructured Si nanowires2019

    • Author(s)
      . Nomura and R. Anufriev
    • Organizer
      CSW2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Anharmonic heat transport at interface by NEGF method2019

    • Author(s)
      Y. Guo, M. Bescond, M. Luisier, S. Volz, M. Nomura
    • Organizer
      International Workshop on Computational Nanotechnology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental Investigation of Size Effect on Surface Phonon Polaritons2019

    • Author(s)
      Y. Wu and M. Nomura
    • Organizer
      FQMD2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Coherent Control of Phonon and Thermal Conduction in Silicon Nanowires with Periodic Wings2019

    • Author(s)
      R. Anufriev and M. Nomura
    • Organizer
      FQMD2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Conductivity Reduction in Silicon Thin Film with Nanocones2019

    • Author(s)
      X. Huang, S. Gluchko, R. Anufriev, S. Volz, and M. Nomura
    • Organizer
      EDISON21
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ballistic thermal transport in silicon nanowires of different shapes, lengths, and temperatures2019

    • Author(s)
      R. Anufriev, S. Gluchko, S. Volz, and M. Nomura
    • Organizer
      EDISON21
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Planar-type Si thermoelectric energy harvesters with ultrathin Al films2019

    • Author(s)
      M. Nomura, A. George, R. Yanagisawa, N. Tsujii, T. Mori, S. Volz, and R. Anufriev
    • Organizer
      EDISON21
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Enhancement of thermoelectric performance of Si films by surface nanostructuring2019

    • Author(s)
      M. Nomura, X. Huang, A. George, R. Yanagisawa, S. Gluchko, R. Anufriev, and S. Volz
    • Organizer
      XXVIII International Materials Research Congress
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Probing phonon mean free path in silicon membranes2019

    • Author(s)
      R. Anufriev, J. Ordonez-Miranda, M. Nomura
    • Organizer
      European material research metting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Length and temperature ranges of ballistic thermal conduction in serpentine silicon nanowires2019

    • Author(s)
      R. Anufriev, S. Gluchko, S. Volz, and M. Nomura
    • Organizer
      European material research metting
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of planar-type silicon thermoelectric energy harvester with phononic crystal nanostructures by nanoimprint lithography2019

    • Author(s)
      R. Yanagisawa, Patrick Ruther, Oliver Paul, and M. Nomura
    • Organizer
      PowerMEMS
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal transport by surface phonon-polaritons in SiN nanomembranes2019

    • Author(s)
      Y. Wu, J. Ordonez-Miranda, S. Gluchko, R. Anufriev, S. Volz, and M. Nomura
    • Organizer
      International Symposium on Hybrid Quantum Systems 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effective thermal conductivity tunng in Si thin film by nanopillars2019

    • Author(s)
      X. Huang, R. Yanagisawa, D. Ohori, S. Samugawa, and M. Nomura
    • Organizer
      The 2nd Pacific Rim Thermal Engineering Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental study of thermal conduction in submicron thin film2019

    • Author(s)
      Y. Wu, 野村政宏
    • Organizer
      第三回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ナノ構造化シリコン薄膜を用いたプレーナ型熱電発電デバイスの開発2019

    • Author(s)
      柳澤亮人, 野村政宏
    • Organizer
      第三回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Phonon annihilation and creation processes: A wavelet transform approach2019

    • Author(s)
      Z. Zhang, Y. Guo, M. Nomura, J. Chen, and S. Volz
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Comparison of Bolzmann transport theory and non^equilibrium Green function formalism for coherent heat transport in nanostructures2019

    • Author(s)
      Y. Guo, Z. Zhang, M. Bescond, S. Volz, and M. Nomura
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フォトレジストピラーを用いたプレーナ型熱電発電デバイスの上部ヒートシンク構造作製に向けた室設計シミュレーション2019

    • Author(s)
      柳澤 亮人, 野村 政宏
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Experimental investigation of size dependence of surface phonon polaritons heat flux2019

    • Author(s)
      Y. Wu, J. Ordonez-Miranda, S. Gluchko, R. Anufriev, S. Volz, and M. Nomura
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Thermal conductivity of Si thin film with nanopillars2019

    • Author(s)
      X. Huang, R. Yanagiswa, D. Ohori, S. Samukawa, and M. Nomura
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Siナノピラー間隔変化による熱伝導率・電気伝導率の独立制御2019

    • Author(s)
      大堀 大介, 久保山 瑛哲, 村田 正行, 山本 淳, 野村 政宏, 遠藤 和彦, 寒川 誠二
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 圧膜化したシリコンフォノニック結晶における大幅な熱伝導率低減の観測2019

    • Author(s)
      柳澤 亮人, 野村 政宏
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フォノニックナノ構造シリコン薄膜熱電デバイスの熱設計シミュレーション,2019

    • Author(s)
      柳澤 亮人, 野村 政宏
    • Organizer
      本機械学会 熱工学コンファレンス2019
    • Related Report
      2019 Annual Research Report
  • [Presentation] サブミクロンピラー表面でのマクロスケール超潤滑 II2019

    • Author(s)
      石井 義紀, 和田 義之, 石川 誠, 柳澤 亮人, 渡辺 宜朗, 野村 政宏, 三浦 浩治
    • Organizer
      日本物理学会第75回年次大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フォノニック構造を有する単結晶シリコン薄膜の熱整流 効果に関する実験的研究2019

    • Author(s)
      早勢 直紀, Laurent Jalabert, 柳澤 亮人,Roman Anufriev, 野村 政宏
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 多結晶 SiGe 薄膜を用いた熱電変換テ?ハ?イスの設計2019

    • Author(s)
      小池 壮太, 柳澤 亮人, 黒澤 昌志, 野村 政宏
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 低損失SiNデバイス作製のためのクライオエッチング加工特性の検討2019

    • Author(s)
      半田 浩一朗,古澤 健太郎,青木 画奈,関根 徳彦,柳沢 亮人,石田 悟己,野村 政宏,岩本 敏, 田邉 孝純
    • Organizer
      第20回レーザー学会東京支部研究会 電気学会 光・量子デバイス技術研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Theoretical study of surface phonon-polaritons in SiN submicron films2019

    • Author(s)
      Y. Wu, J. Ordonez-Miranda, S. Gluchko, R. Anufriev, S. Volz, and M. Nomura
    • Organizer
      International Symposium on Hybrid Quantum Systems 2019
    • Related Report
      2019 Annual Research Report
  • [Presentation] Heat conduction in silicon thin film with black silicon nanostructure2019

    • Author(s)
      X. Huang, 野村政宏
    • Organizer
      第三回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Anharmonic heat transport through interface by non-equilibrium Green function method2019

    • Author(s)
      G. Yangyu, 野村政宏
    • Organizer
      第三回フォノンエンジニアリング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Advanced heat flux control by phononic nanostructures2019

    • Author(s)
      M. Nomura
    • Organizer
      LIMMS-Next PV Joint Energy Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Quasi-Ballistic Heat Conduction due to Levy Phonon Flights in Silicon Nanowires2019

    • Author(s)
      R. Anufriev, S. Gluchko, S. Volz, and M. Nomura
    • Organizer
      LIMMS-Next PV Joint Energy Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Phonon transport in silicon phononic crystals with pacman holes2019

    • Author(s)
      S. Gluchko, R. Anufriev, R. Yanagisawa, S. Volz, M. Nomura
    • Organizer
      LIMMS-Next PV Joint Energy Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Planar-type silicon thermoelectric generator with phononic crystal nanostructures2019

    • Author(s)
      R. Yanagisawa and M. Nomura
    • Organizer
      LIMMS-Next PV Joint Energy Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] フォノンエンジニアリングによるシリコン薄膜熱電発電デバイス開発2019

    • Author(s)
      野村 政宏, 柳澤 亮人, Paul Oliver
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] ナノインプリントによるシリコン薄膜熱電ハーベスタの作製と性能評価2019

    • Author(s)
      柳澤 亮人, Ruther Patrick, Paul Oliver, 野村 政宏
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ナノ構造化によるシリコン薄膜のZT増強と平面型熱電デバイス開発2019

    • Author(s)
      柳澤 亮人, Ruther Patrick, Paul Oliver, 野村 政宏
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Phonon transport in silicon phononic crystals with pacman holes2018

    • Author(s)
      S. Gluchko, R. Anufriev, R. Yanagisawa, S. Volz, and M. Nomura
    • Organizer
      Nanoscale and Microscale Heat Transfer VI
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quasi-ballistic heat conduction due to Levy phonon flights in silicon nanowires up to room temperature2018

    • Author(s)
      R. Anufriev, S. Gluchko, S. Vola, and M. Nomura
    • Organizer
      Nanoscale and Microscale Heat Transfer VI
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Power enhancement of silicon membrane-based thermoelectric energy harvester with tailored holey nanostructures2018

    • Author(s)
      R. Yanagisawa, and M. Nomura
    • Organizer
      PowerMEMS
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Advanced heat conduction engineering by phonon engineering and thermoelectric application2018

    • Author(s)
      M. Nomura
    • Organizer
      NAMIS Marathon Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanostructured Si film thermoelectrics2018

    • Author(s)
      M. Nomura
    • Organizer
      European Advanced Materials Congress
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Advanced heat transfer control in Si membrane by phononic nanostructures2018

    • Author(s)
      M. Nomura
    • Organizer
      The 5th Micro & Nanoscale Heat Transfer and Energy Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Necking effects control thermal conductivity of phononic membranes2018

    • Author(s)
      R. Anufriev, A. Ramiere, J. Maire and M. Nomura
    • Organizer
      IHTC
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat conduction control in Si membrane by phononic nanostructures2018

    • Author(s)
      M. Nomura
    • Organizer
      IEEE Nano 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Heat Conduction by Long-range Electromagnetic Surface Waves in Submicron Dielectric Films2018

    • Author(s)
      S. Gluchko, R. Anufriev, R. Yanagisawa, S. Volz, and M Nomura
    • Organizer
      PIERS 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat transport in silicon phononic crystals with pacman holes2018

    • Author(s)
      S. Gluchko and M. Nomura
    • Organizer
      1st Nano and Energy mini-Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Phonon engineering with nanostructured silicon membrane for thermoelectric application2018

    • Author(s)
      R. Yanagisawa, and M. Nomura
    • Organizer
      1st Nano and Energy mini-Workshop
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Power Enhancement of Si Membrane-based Thermoelectric Generator by Aluminium Ultrathin Layer Deposition2018

    • Author(s)
      A. George, R. Yanagisawa, and M. Nomura
    • Organizer
      37th International and European Conference on Thermoelectrics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface engineering of nanobeams and nanomembranes for silicon-based thermoelectrics2018

    • Author(s)
      R. Anufriev, R. Yanagisawa, and M. Nomura
    • Organizer
      Collaboratie Conference on Materials Research
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Enhancement of Thermoelectric Performance of Si Membrane by Al Silicide Nanodots2018

    • Author(s)
      M. Nomura, A. George, R. Yanagisawa, and S. Volz
    • Organizer
      CSW2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si 表面・界面エンジニアリングによるフォノンおよび熱輸送制御とその応用2018

    • Author(s)
      野村 政宏
    • Organizer
      日本表面真空学会中部支部研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] ナノ構造化によるシリコン薄膜のフォノン輸送制御2018

    • Author(s)
      野村 政宏
    • Organizer
      応用物理学会シリコンテクノロジー分科会第212回研究集会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] フォノニック結晶を用いたウェハ型シリコン熱電デバイスの開発2018

    • Author(s)
      野村 政宏
    • Organizer
      大阪大学ナノ理工学人材育成産学コンソーシアム2018ナノ理工学セミナー
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] ナノ構造による高度な伝熱制御と熱電発電応用2018

    • Author(s)
      野村 政宏
    • Organizer
      第51回野依フォーラム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 熱フォノニクスの学理創出と高効率熱電変換への応用2018

    • Author(s)
      野村 政宏
    • Organizer
      日本熱電学会第23回研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Aluminium nanopillars reduce thermal conductivity of silicon nanobeams2018

    • Author(s)
      R. Anufriev, R. Yanagisawa, and M. Nomura
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Enhanced Performance of Si Membrane-based Thermoelectric Generator by Al Ultrathin Layer Deposition2018

    • Author(s)
      M. Nomura, A. George, and R. Yanagisawa
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] SiGeナノワイヤーにおける弾道的熱輸送2018

    • Author(s)
      岡本 昂, 柳澤 亮人, アラム マハフーズ, 澤野 憲太郎, 野村 政宏
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 多結晶シリコン薄膜フォノニックナノ構造における熱伝導率のアニール時間依存性2018

    • Author(s)
      柳澤 亮人, 辻井 直人, Paul Oliver, 森 孝雄, 野村 政宏
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] mportance of grain size for nanostructured poly-Si thermoelectric material2017

    • Author(s)
      R. Yanagisawa, N. Tsujii, O. Paul, T. Mori, and M. Nomura
    • Organizer
      The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Application
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thin Si thermoelectric material by phonon engineering2017

    • Author(s)
      M. Nomura
    • Organizer
      IUMRS-ICA2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Physics of Nanoscale Heat Transfer and Applications2017

    • Author(s)
      M. Nomura
    • Organizer
      The 9th International Electronics Cooling Technology Workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Thermophononic crystals2017

    • Author(s)
      M. Nomura
    • Organizer
      Wave Phenomena and Phonon Thermal Transport Sientific School
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] eat flux engineering in Si membrane by phononic nanostructures2017

    • Author(s)
      M. Nomura, R. Anufriev, A. Ramiere, J. Maire, and R. Yanagisawa
    • Organizer
      International Symposium on Hybrid Quantum Systems 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat flux engineering in Si membrane by phononic nanostructures2017

    • Author(s)
      M. Nomura, R. Anufriev, A. Ramiere, J. Maire, and R. Yanagisawa
    • Organizer
      International Symposium on Hybrid Quantum Systems 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Coherent control of the phonon density of states using phononic nanostructures2017

    • Author(s)
      R. Anufriev and M. Nomura
    • Organizer
      International Symposium on Hybrid Quantum Systems 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si Phononic Crystal Membrane with ZT = 0.1 at 295 K2017

    • Author(s)
      R. Yanagisawa, N. Tsujii, T. Mori, and M. Nomura
    • Organizer
      International Conference on Thermoelectrics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat conduction control by phonon band engineering2017

    • Author(s)
      M. Nomura, J. Maire, R. Yanagisawa, A. Ramiere, and R. Anufriev
    • Organizer
      EDISON20
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Creating and focusing directional heat fluxes using phononic nanostructures2017

    • Author(s)
      R. Anufriev, A. Ramiere, R. Yanagisawa, J. Maire, and M. Nomura
    • Organizer
      EDISON20
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ballistic Phonon Transport in Si Nanowires2017

    • Author(s)
      J. Maire, R. Anufriev, and M. Nomura
    • Organizer
      PHONONICS2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat transfer control by Si phononic nanostructures2017

    • Author(s)
      M. Nomura
    • Organizer
      PHONONICS2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Nanoscale Heat Guiding and Focusing Using Phononic Crystal Nanostructures2017

    • Author(s)
      R. Anufriev, A. Ramiere, J. Maire, and M. Nomura
    • Organizer
      PHONONICS2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Conductance of Hole- and Pillar-Based Phononic Crystals at Low Temperatures2017

    • Author(s)
      R. Anufriev, and M. Nomura
    • Organizer
      PHONONICS2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat focusing using directional phonon transport in nanostructured Si membrane2017

    • Author(s)
      M. Nomura, A. Ramiere, J. Maire, and R. Anufriev
    • Organizer
      CSW2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heat Conduction Tuning Based on the Wave Nature of Phonons2017

    • Author(s)
      J. Maire, R. Anufriev, R. Yanagisawa, A. Ramiere, S. Volz, and M. Nomura
    • Organizer
      2017 MRS Spring Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ballistic Phonon Transport in Si Nanowires2017

    • Author(s)
      J. Maire, R. Anufriev, and M. Nomura
    • Organizer
      2017 MRS Spring Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Coherent Control of Thermal Conductance in Hole- and Pillar-Based Phononic Crystals2017

    • Author(s)
      R. Anufriev, and M. Nomura
    • Organizer
      2017 MRS Spring Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Phonon MFP Spectrum Probing Using Phononic Crystals2017

    • Author(s)
      M. Nomura, J. Nakagawa, K. Sawano, J. Maire, R. Anufriev, S. Volz
    • Organizer
      2017 MRS Spring Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Phonon MFP Spectrum Probing Using Phononic Crystals2017

    • Author(s)
      R. Anufriev, A. Ramiere, J. Maire, and M. Nomura
    • Organizer
      2017 MRS Spring Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 野村研究室ホームページ

    • URL

      http://www.nlab.iis.u-tokyo.ac.jp/index.html

    • Related Report
      2019 Annual Research Report 2017 Annual Research Report
  • [Remarks] 野村研究室ホームページ

    • URL

      http://www.nlab.iis.u-tokyo.ac.jp/

    • Related Report
      2018 Annual Research Report
  • [Patent(Industrial Property Rights)] 熱電変換装置、電子機器および熱電変換装置の製造方法2019

    • Inventor(s)
      野村政宏,柳澤亮人他
    • Industrial Property Rights Holder
      野村政宏,柳澤亮人他
    • Industrial Property Rights Type
      特許
    • Filing Date
      2019
    • Related Report
      2019 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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