| Budget Amount *help |
¥15,340,000 (Direct Cost: ¥11,800,000、Indirect Cost: ¥3,540,000)
Fiscal Year 2019: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2018: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2017: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
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| Outline of Final Research Achievements |
Diamond-like carbon (DLC) film is a general term for amorphous carbon film composed of sp3 and sp2 bonded carbon and hydrogen. By the evaluation of the relationship between the film structure and their heat resistance, the objective was to clarify the guidelines for improving the heat resistance from the thermal decomposition reaction process of the DLC film. DLC films with various structures were prepared. After investigation of the film structure, we evaluated the temperature dependence of the desorbed molecules released during heating and the change in the sp2/sp3 bonding carbon ratio of the film by heating. These were indicted that the thermal decomposition progressed uniformly by heating when the initial structure of the DLC film was uniform. These results indicated that hydrogen atom desorption started at about 400°C, and then hydrocarbon desorption occurred. Therefore, it was shown that hydrogen in the film is important as a factor that determines heat resistance.
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