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High-coupling longitudinal-type leaky surface acoustic wave using bonded dissimilar material structure and its application to high-frequency filter for next generation communications

Research Project

Project/Area Number 17H03233
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionUniversity of Yamanashi

Principal Investigator

KAKIO Shoji  山梨大学, 大学院総合研究部, 教授 (70242617)

Co-Investigator(Kenkyū-buntansha) 水野 潤  早稲田大学, ナノ・ライフ創新研究機構, 上級研究員(研究院教授) (60386737)
鈴木 雅視  山梨大学, 大学院総合研究部, 助教 (60763852)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2019: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2018: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
KeywordsSAWフィルタ / 縦型リーキー弾性表面波 / 異種材料接合 / 高周波化 / 高結合化 / 高Q化 / 高安定化 / 高性能化 / 弾性表面波 / 高周波フィルタ / 水晶 / LiNbO3・LiTaO3 / LiTaO3 / 電子・電気材料 / 移動体通信
Outline of Final Research Achievements

For the evolution of next-generation mobile communication systems, surface acoustic wave (SAW) devices with higher frequency and wide bandwidth are strongly demanded. The longitudinal-type leaky surface acoustic wave (LLSAW) has advantageous for application to high-frequency SAW devices since LLSAWs have a higher phase velocity than the general SAWs. However, LLSAWs exhibit inherent attenuation because they lose energy by continuously radiating bulk waves into the substrate.
In this study, it was found theoretically and experimentally that when the LiNbO3 or LiTaO3 thin plate with a smaller thickness than one wavelength bonded to a quartz substrate, the attenuation was reduced remarkably and the electromechanical coupling factor of the LLSAW was increased to two to three times that in the single substrate. Moreover, a shear-horizontal-type LSAW with high performance was obtained by utilizing the bonded structure.

Academic Significance and Societal Importance of the Research Achievements

次世代通信システムの実現に向けて,LiTaO3等の圧電基板を用いた弾性表面波(SAW)フィルタの高周波化と広帯域化が強く要請されている.縦波型リーキーSAW(LLSAW)は,通常のSAWと比べて1.5~2倍の伝搬速度を持つため,SAWフィルタの高周波化に有利であるが非常に大きな伝搬損失を有する.
本研究では,異種材料接合技術を用いて1波長以下の厚みをもつ圧電薄板と水晶支持基板を接合すると,弾性波エネルギーが薄板内に集中するため,LLSAWの伝搬損失が格段に低減し,広帯域化に必要な結合係数が2~3倍に増加することを明らかにし,スマートフォン等の端末用高周波フィルタへの適用可能性を示した.

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (50 results)

All 2020 2019 2018 2017 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (41 results) (of which Int'l Joint Research: 12 results,  Invited: 3 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Analysis of longitudinal leaky surface acoustic waves on LiNbO3/amorphous layer/quartz structure2020

    • Author(s)
      Asakawa Shiori、Hayashi Junki、Suzuki Masashi、Kakio Shoji、Tezuka Ami、Kuwae Hiroyuki、Yokota Hiroaki、Yonai Toshifumi、Kishida Kazuhito、Mizuno Jun
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SK Pages: SKKC12-SKKC12

    • DOI

      10.35848/1347-4065/ab8c9d

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure2020

    • Author(s)
      Kakio Shoji、Kato Yoshiki、Suenaga Ryota、Suzuki Masashi、Tezuka Ami、Kuwae Hiroyuki、Yokota Hiroaki、Yonai Toshifumi、Kishida Kazuhito、Mizuno Jun
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SK Pages: SKKC04-SKKC04

    • DOI

      10.35848/1347-4065/ab85ac

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analysis of leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to similar-material substrates2020

    • Author(s)
      Fujimaki Takumi、Suzuki Masashi、Kakio Shoji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SK Pages: SKKC01-SKKC01

    • DOI

      10.35848/1347-4065/ab79e9

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate2019

    • Author(s)
      Hayashi Junki、Yamaya Kosuke、Asakawa Shiori、Suzuki Masashi、Kakio Shoji、Tezuka Ami、Kuwae Hiroyuki、Yonai Toshifumi、Kishida Kazuhito、Mizuno Jun
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SG Pages: SGGC12-SGGC12

    • DOI

      10.7567/1347-4065/ab1132

    • NAID

      210000156596

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate2018

    • Author(s)
      Hayashi Junki、Yamaya Kosuke、Suzuki Masashi、Kakio Shoji、Suzaki Haruka、Yonai Toshifumi、Kishida Kazuhito、Mizuno Jun
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 7S1 Pages: 07LD21-07LD21

    • DOI

      10.7567/jjap.57.07ld21

    • NAID

      210000149320

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-coupling leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to high-velocity substrate2017

    • Author(s)
      Gomi Masashi、Kataoka Takuya、Hayashi Junki、Kakio Shoji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 7S1 Pages: 07JD13-07JD13

    • DOI

      10.7567/jjap.56.07jd13

    • NAID

      210000148048

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 異種材料接合構造における SAW 高調波の振る舞い2020

    • Author(s)
      浅川 詩織,鈴木 雅視,垣尾 省司,手塚 彩水,水野 潤
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2019 Annual Research Report
  • [Presentation] [講演奨励賞受賞記念講演] LiNbO3/SiO2/水晶構造におけるリーキーSAWの解析2020

    • Author(s)
      浅川 詩織,林 純貴,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,水野 潤
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 異種材料接合構造上のリーキーSAW高調波の共振特性2020

    • Author(s)
      浅川 詩織,鈴木 雅視,垣尾 省司,手塚 彩水,水野 潤
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] LiTaO3・LiNbO3薄板を用いた同種材料接合構造における縦型リーキーSAWの解析2020

    • Author(s)
      藤巻 貴海,鈴木 雅視,垣尾 省司
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Study of Low-residual Stress Amorphous Film Deposition Method for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices 【JIEP Poster Awards受賞】2019

    • Author(s)
      Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Shuichi Shoji, Shoji Kakio, and Jun Mizuno
    • Organizer
      2019 International Conference on Electronics Packaging, ICEP 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-residual stress ALD-Al2O3 intermediate layer for LiTaO3/quartz combined surface acoustic wave substrate 【Best Poster Award受賞】2019

    • Author(s)
      Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Shoji Kakio, Shuichi Shoji, and Jun Mizuno
    • Organizer
      Taiwan-Japan Workshop on Electronic Interconnection III
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] LiTaO3/quartz bonding with low-residual-stress Al2O3 amorphous intermediate layer for 5G surface acoustic wave devices2019

    • Author(s)
      Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Shuichi Shoji, Shoji Kakio and Jun Mizuno
    • Organizer
      International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] LiTaO3/水晶構造上のリーキー系弾性表面波における高結合・低損失化の要因2019

    • Author(s)
      垣尾 省司,林 純貴,浅川 詩織,鈴木 雅視,手塚 彩水,桑江 博之,横田 裕章,米内 敏文,岸田 和人,水野 潤
    • Organizer
      日本学術振興会弾性波素子技術第150委員会第156回研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 同種材料接合構造におけるリーキーSAW の解析2019

    • Author(s)
      藤巻 貴海,鈴木 雅視,垣尾 省司
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] LiNbO3/アモルファス層/水晶構造における縦型リーキーSAW の解析2019

    • Author(s)
      浅川 詩織,林 純貴,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 水負荷LiTaO3/水晶接合構造上の漏洩弾性表面波の伝搬特性2019

    • Author(s)
      垣尾 省司,加藤 良基,末永 凌大,鈴木 雅視,手塚 彩水,桑江 博之,横田 裕章,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] LiNbO3/SiO2/水晶構造におけるリーキーSAWの解析 【講演奨励賞受賞】2019

    • Author(s)
      浅川 詩織,林 純貴,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,水野 潤
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] LiNbO3同種材料接合構造におけるリーキーSAWの解析2019

    • Author(s)
      藤巻 貴海,鈴木 雅視,垣尾 省司
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Analysis of longitudinal leaky SAW on LiNbO3/amorphous layer/quartz structure2019

    • Author(s)
      Shiori Asakawa, Junki Hayashi, Masashi Suzuki, and Shoji Kakio, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, and Jun Mizuno
    • Organizer
      2019 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of leaky surface acoustic waves on similar-material bonded structure2019

    • Author(s)
      Takumi Fujimaki, Masashi Suzuki, and Shoji Kakio
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Propagation properties of leaky surface acoustic wave on water-loaded LiTaO3/quartz bonded structure2019

    • Author(s)
      Shoji Kakio, Yoshiki Kato, Ryota Suenaga, Masashi Suzuki, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, and Jun Mizuno
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of longitudinal leaky SAW on LiNbO3/amorphous layer/quartz structure2019

    • Author(s)
      Shiori Asakawa, Junki Hayashi, Masashi Suzuki, Shoji Kakio, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, and Jun Mizuno
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] リーキー系SAW伝搬解析と高性能異種材料接合基板構造への適用2019

    • Author(s)
      垣尾 省司
    • Organizer
      弾性波素子技術第150委員会夏の学校
    • Related Report
      2019 Annual Research Report
  • [Presentation] 異種材料接合による弾性表面波素子の高性能化2019

    • Author(s)
      垣尾 省司
    • Organizer
      圧電材料・デバイスシンポジウム2019
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 水負荷LiTaO3/水晶接合構造上の漏洩弾性表面波の伝搬特性2019

    • Author(s)
      垣尾 省司,加藤 良基,末永 凌大,鈴木 雅視,手塚 彩水,桑江 博之,横田 裕章,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3/アモルファス層/水晶構造における縦型リーキーSAWの解析2019

    • Author(s)
      浅川 詩織,林 純貴,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,横田 裕章,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] リーキー系SAW伝搬解析と高性能異種材料接合基板構造への適用2019

    • Author(s)
      垣尾 省司
    • Organizer
      弾性波素子技術第150委員会春の学校
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3 薄板と水晶基板の接合によるリーキー系弾性表面波の高結合・高安定化2018

    • Author(s)
      林 純貴,山谷 浩介,鈴木 雅視,垣尾 省司,須崎 遥,米内 敏文,岸田 和人,水野 潤
    • Organizer
      弾性波素子技術第150委員会第152回研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiNbO3・LiTaO3 薄板と水晶基板の接合による縦型リーキー弾性表面波の低損失化2018

    • Author(s)
      林 純貴,山谷 浩介,浅川 詩織,鈴木 雅視,垣尾 省司,桑江 博之,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第47回EM シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3/水晶構造上のリーキーSAW特性の解析-支持基板の物理定数依存性-2018

    • Author(s)
      林 純貴,浅川 詩織,鈴木 雅視,垣尾 省司,桑江 博之,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3/水晶構造における縦型リーキーSAW共振特性の解析 ―スプリアス応答の電極膜厚依存性―2018

    • Author(s)
      浅川 詩織,林 純貴,山谷 浩介,鈴木 雅視,垣尾 省司,須崎 遥,米内 敏文,岸田 和人,水野 潤
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 水晶とLiTaO3の異種材料接合によるリーキー系弾性表面波の高結合・高安定化2018

    • Author(s)
      垣尾 省司
    • Organizer
      精密工学会次世代センサ・アクチュエータ委員会第15回定期講習会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate2018

    • Author(s)
      J. Hayashi, K. Yamaya, S. Asakawa, M. Suzuki, S. Kakio, H. Kuwae, T. Yonai, K. Kishida, and J. Mizuno
    • Organizer
      IEEE International Ultrasonics Symposium 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Longitudinal Leaky SAW with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate2018

    • Author(s)
      J. Hayashi, K. Yamaya, S. Asakawa, M. Suzuki, S. Kakio, A. Tezuka, H. Kuwae, T. Yonai, K. Kishida, and J. Mizuno
    • Organizer
      The 39th Symposium on ULTRASONIC ELECTRONICS
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] LiTaO3/水晶構造上のリーキーSAW特性の解析-支持基板の物理定数依存性-2018

    • Author(s)
      林 純貴,浅川 詩織,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,米内 敏文,岸田 和人,水野 潤
    • Organizer
      電気学会電子回路研究会「圧電材料・デバイスと応用」
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3/水晶構造における縦型リーキーSAW共振特性2018

    • Author(s)
      浅川 詩織,林 純貴,鈴木 雅視,垣尾 省司,手塚 彩水,桑江 博之,米内 敏文,岸田 和人,水野 潤
    • Organizer
      電気学会電子回路研究会「圧電材料・デバイスと応用」
    • Related Report
      2018 Annual Research Report
  • [Presentation] LiTaO3薄板と水晶基板の接合による縦型リーキー系弾性表面波の高結合・高安定化2018

    • Author(s)
      林純貴,山谷浩介,鈴木雅視,垣尾省司,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      圧電材料・デバイスシンポジウム2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] High coupling and highly stable leaky SAWs on LiTaO3 thin plate bonded to quartz substrate2018

    • Author(s)
      Shoji KAKIO, Junki HAYASHI, Kosuke YAMAYA, Masashi SUZUKI, Haruka SUZAKI, Toshifumi YONAI, Kazuhito KISHIDA, Jun MIZUNO
    • Organizer
      Seventh International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] LiTaO3/水晶構造上のリーキーSAW 共振特性の界面ボイドによる影響2018

    • Author(s)
      林純貴,山谷浩介,鈴木雅視,垣尾省司,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] LiNbO3・LiTaO3薄板/水晶基板における縦型リーキーSAW特性の基板カット角依存性2018

    • Author(s)
      山谷浩介,林純貴,鈴木雅視,垣尾省司,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Study of LiNbO3/QZ bonding with amorphous layers for 5G SAW device2018

    • Author(s)
      Haruka SUZAKI, Hiroyuki KUWAE, Kazuhito KISHIDA, Shoji KAKIO, Shuichi SHOJI, Jun MIZUNO
    • Organizer
      第24回「エレクトロニクスにおけるマイ接合・実装技術」シンポジウム (Mate)
    • Related Report
      2017 Annual Research Report
  • [Presentation] LiNbO3・LiTaO3薄板と水晶基板の接合によるリーキー系SAWの高結合化2017

    • Author(s)
      垣尾省司,五味将史,林純貴,鈴木雅視,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      弾性波素子技術第150委員会第148回研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] LiNbO3・LiTaO3薄板と高音速基板の接合によるリーキー系SAWの高結合化2017

    • Author(s)
      垣尾省司,五味将史,林純貴,鈴木雅視,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      第46回EMシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] LiNbO3薄板/水晶基板上の縦型リーキー弾性表面波の伝搬特性2017

    • Author(s)
      林純貴,山谷浩介,鈴木雅視,垣尾省司,須崎遥,米内敏文,岸田和人,水野潤
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] High-coupling leaky SAWs on LiTaO3 thin plate bonded to quartz substrate2017

    • Author(s)
      Junki HAYASHI, Masashi GOMI, Masashi SUZUKI, Shoji KAKIO, Haruka SUZAKI, Toshifumi YONAI, Kazuhito KISHIDA, Jun MIZUNO
    • Organizer
      2017 IEEE International Ultrasonics Symposium (IUS)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High coupling and highly stable leaky SAWs on LiTaO3 thin plate bonded to quartz substrate2017

    • Author(s)
      Junki HAYASHI, Kosuke YAMAYA, Masashi SUZUKI, Shoji KAKIO, Haruka SUZAKI, Toshifumi YONAI, Kazuhito KISHIDA, Jun MIZUNO
    • Organizer
      The 38th Symposium on Ultrasonic Electronics (USE2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 垣尾・鈴木研究室

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2019 Annual Research Report 2018 Annual Research Report 2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 接合基板、弾性表面波素子、弾性表面波素子デバイスおよび接合基板の製造方法2018

    • Inventor(s)
      栗本浩平,岸田和人,茅野林造,水野潤,垣尾省司
    • Industrial Property Rights Holder
      国立大学法人山梨大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-026361
    • Filing Date
      2018
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] 接合基板、弾性表面波素子、弾性表面波素子デバイスおよび接合基板の製造方法2017

    • Inventor(s)
      栗本浩平,岸田和人,茅野林造,水野潤,垣尾省司
    • Industrial Property Rights Holder
      国立大学法人山梨大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-117281
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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