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Research on Silicon Carbide Harsh Environment Electronics

Research Project

Project/Area Number 17H03253
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionHiroshima University

Principal Investigator

Kuroki Shin-Ichiro  広島大学, ナノデバイス・バイオ融合科学研究所, 教授 (70400281)

Co-Investigator(Kenkyū-buntansha) 大島 武  国立研究開発法人量子科学技術研究開発機構, 高崎量子応用研究所 先端機能材料研究部, 上席研究員(定常) (50354949)
牧野 高紘  国立研究開発法人量子科学技術研究開発機構, 高崎量子応用研究所 先端機能材料研究部, 主任研究員(定常) (80549668)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000)
Fiscal Year 2019: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2018: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2017: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Keywordsシリコンカーバイド半導体 / 極限環境エレクトロニクス / CMOS集積回路 / 電子デバイス / 耐放射線 / シリコンカーバイド / MOSFET / 耐高温動作 / 廃炉技術 / 電子デバイス・電子機器 / 電子デバイス・集積回路 / 極限環境
Outline of Final Research Achievements

The purpose of this research is to realize 4H-SiC CMOS integrated circuits for harsh environment applications. For this purpose, self-alignment gate trench 4H-SiC MOSFETs with short-channel were suggested and demonstrated. At the trench 4H-SiC n/p MOSFETs, parasitic capacitances between gate and source, gate and drain, were successfully reduced. And at the short channel devices, short-channel effects were suppressed. The channel field-effect mobility was also successfully enhanced by introducing BaO thin film in gate oxide/ SiC interface.

Academic Significance and Societal Importance of the Research Achievements

現在福島第一原発の廃炉活動には高放射線環境下でのロボットによる作業が必要であるが、ロボットのSi半導体集積回路は、高い放射線環境下で容易に破損する。また最先端科学である(1)金星探査なども含む宇宙探査、(2)高エネルギー物理を支える加速器、(3)国際熱核融合実験炉では、耐放射線性および超高温動作可能なエレクトロニクスが強く望まれている。本研究はこのような極限環境でも動作可能なエレクトロニクスを実現しようというものであり、特に本研究プロジェクトでは耐放射線性をもつ高速動作可能なシリコンカーバイド半導体デバイスの研究を進め実現を行った。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (75 results)

All 2020 2019 2018 2017 Other

All Int'l Joint Research (3 results) Journal Article (18 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 18 results) Presentation (52 results) (of which Int'l Joint Research: 25 results,  Invited: 7 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Int'l Joint Research] KTH Royal Institute of Technology(スウェーデン)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] スウェーデン王立工科大学(スウェーデン)

    • Related Report
      2018 Annual Research Report
  • [Int'l Joint Research] KTH Royal Institute of Technology(スウェーデン)

    • Related Report
      2017 Annual Research Report
  • [Journal Article] CF4:O2 surface etching for the improvement of contact resistance and high-temperature reliability in Ni/Nb ohmic contacts on n-type 4H-SiC2020

    • Author(s)
      Vuong Van Cuong, Takamichi Miyazaki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Yasuno Satoshi, Tomoyuki Koganezawa, Shin-Ichiro Kuroki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 5 Pages: 056501-056501

    • DOI

      10.35848/1347-4065/ab86fe

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Ni and Nb thickness on low specific contact resistance and high-temperature reliability of ohmic contacts to 4H-SiC2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Yasuno Satoshi, Tomoyuki Koganezawa, Takamichi Miyazaki, Shin-Ichiro Kuroki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: 11 Pages: 116501-116501

    • DOI

      10.7567/1347-4065/ab47ac

    • NAID

      210000157183

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Gamma-ray irradiation-induced mobility enhancement of 4H-SiC NMOSFETs with a Ba-silicate interface layer2019

    • Author(s)
      Kosuke Muraoka, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda, Takahiro Makino, Akinori Takeyama, Takeshi Ohshima and Shin-Ichiro Kuroki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: 8 Pages: 081007-081007

    • DOI

      10.7567/1347-4065/ab2dab

    • NAID

      210000156569

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 4H-SiC Trench pMOSFETs for High-Frequency CMOS Inverters2019

    • Author(s)
      Jun Inoue, Shin-Ichiro Kuroki, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Takahiro Makino, Takeshi Ohshima, Mikael Ostling, Carl-Mikael Zetterling
    • Journal Title

      Materials Science Forum

      Volume: 963 Pages: 837-840

    • DOI

      10.4028/www.scientific.net/msf.963.837

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Direct Bonding of 4H-SiC and SOI Wafers for Radiation-Hardened Image Sensors2019

    • Author(s)
      Fumiaki Hasebe, Tatsuya Meguro, Takahiro Makino, Takeshi Ohshima, Yasunori Tanaka, Shin-Ichiro Kuroki
    • Journal Title

      Materials Science Forum

      Volume: 963 Pages: 726-729

    • DOI

      10.4028/www.scientific.net/msf.963.726

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of Short-Channel Effects in 4H-SiC Trench MOSFETs2019

    • Author(s)
      Tomoyasu Ishii, Shin-Ichiro Kuroki, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda, Takahiro Makino, Takeshi Ohshima, Mikael Ostling, Carl-Mikael Zetterling
    • Journal Title

      Materials Science Forum

      Volume: 963 Pages: 613-616

    • DOI

      10.4028/www.scientific.net/msf.963.613

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Optimization of Ni/Nb Ratio for High-Temperature-Reliable Ni/Nb Silicide Ohmic Contact on 4H-SiC2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, Satoshi Yasuno, Tomoyuki Koganezawa, Shin-Ichiro Kuroki
    • Journal Title

      Materials Science Forum

      Volume: 963 Pages: 498-501

    • DOI

      10.4028/www.scientific.net/msf.963.498

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Ba-Introduced Thin Gate Oxide on 4H-SiC2019

    • Author(s)
      Kosuke Muraoka, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, Shin-Ichiro Kuroki
    • Journal Title

      Materials Science Forum

      Volume: 963 Pages: 451-455

    • DOI

      10.4028/www.scientific.net/msf.963.451

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Temperature Reliability of Ni/Nb Ohmic Contacts on 4H-SiC For Harsh Environment Applications2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Satoshi Yasuno, Tomoyuki Koganezawa, Takamichi Miyazaki, and Shin-Ichiro Kuroki
    • Journal Title

      Thin Solid Films

      Volume: 669 Pages: 306-314

    • DOI

      10.1016/j.tsf.2018.11.014

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-parasitic-capacitance self-aligned 4H-SiC nMOSFETs for harsh environment electronics2018

    • Author(s)
      T. Kurose, S.-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M.Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 924 Pages: 971-974

    • DOI

      10.4028/www.scientific.net/msf.924.971

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 4H-SiC pMOSFETs with Al-doped S/D and NbNi silicide ohmic contacts2018

    • Author(s)
      J. Kajihara, S.-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 924 Pages: 423-427

    • DOI

      10.4028/www.scientific.net/msf.924.423

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effects of CF4 surface etching on 4H-SiC MOS Capacitors2018

    • Author(s)
      K. Kobayakawa, K. Muraoka, H. Sezaki, S. Ishikawa, T. Maeda, and S.-I. Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 924 Pages: 465-468

    • DOI

      10.4028/www.scientific.net/msf.924.465

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Correlation between Field Effect Mobility and Accumulation Conductance at 4H-SiC MOS Interface with Barium2018

    • Author(s)
      Kosuke Muraoka, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 924 Pages: 477-481

    • DOI

      10.4028/www.scientific.net/msf.924.477

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical properties of Ti-Si-C Ohmic contact on ion-implanted n-type 4H-SiC C face2018

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 924 Pages: 409-412

    • DOI

      10.4028/www.scientific.net/msf.924.409

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of epitaxial Ti-Si-C Ohmic contact on 4H-SiC C face using pulsed-laser annealing2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamichi Miyazaki, Tomoyuki Koganezawa, Satoshi Yasuno, and Shin-Ichiro Kuroki
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 25 Pages: 2521081-2521085

    • DOI

      10.1063/1.4987136

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 4H-SiC Pseudo-CMOS Logic Inverters for Harsh Environment Electronics2017

    • Author(s)
      S-I. Kuroki, T. Kurose, H. Nagatsuma, S. Ishikawa, T. Maeda, H. Sezaki, T. Kikkawa, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 669-672

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Low Resistance Ti-Si-C Ohmic Contacts for 4H-SiC Power Devices Using Laser Annealing2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 399-402

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced-Oxidation and Interface Modification on 4H-SiC(0001) Substrate Using Alkaline Earth Metal2017

    • Author(s)
      Kosuke Muraoka, Hiroshi Sezaki, Seiji Ishikawa, Tomonori Maeda, Tadashi Sato, Takamaro Kikkawa, and Shin-Ichiro Kuroki
    • Journal Title

      Mat. Sci. Forum

      Volume: 897 Pages: 348-351

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] SiC 半導体による極限環境エレクトロニクス構築2020

    • Author(s)
      黒木伸一郎
    • Organizer
      (公財)科学技術交流財団 第 3 回「厳環境下 IoT 向け 3C-SiC 技術研究会」
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] Thickness Dependences on Interfacial Properties of SiO2/BaO2 layers on 4H-SiC (0001)2019

    • Author(s)
      Kousuke Muraoka, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, and Shin-Ichiro Kuroki
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces (ISCSI-VIII)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4H-SiC Pixel Device with UV Photodiode and MOSFETs for Radiation-Hardened UV Image Sensors2019

    • Author(s)
      Kenta Nishigaito, Tatsuya Meguro, Akinori Takeyama, Takeshi Ohshima, Yasunori Tanaka and Shin-Ichiro Kuroki
    • Organizer
      International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Suppression of Ion Channeling Effects in 4H-SiC Substrate by Tilt Angle Control of Ion Implantation2019

    • Author(s)
      Tomonori Okada, Jun Inoue, Fumitaka Nishiyama, Hiroshi Sezaki, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of 4H-SiC MOS Capacitors with Different Metal Gates after 400°C High-Temperature Aging Tests2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Temperature Reliability of 4H-SiC Devices and Single Stage 4H-SiC MOSFET Amplifier at 400℃2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Kousuke Muraoka, Tetsuya Meguro, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Pixel Array Integration with SOI-Si photodiode and 4H-SiC MOSFETs for Radiation-Hardened image sensors2019

    • Author(s)
      Tatsuya Meguro, Fumiaki Hasebe, Akinori Takeyama, Takeshi Ohshima, Yasunori Tanaka, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Radiation hardness of 4H-SiC JFETs in MGy dose ranges,” The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)2019

    • Author(s)
      A. Takeyama, K. Shimizu, T. Makino, Y. Yamazaki, S. Kuroki, Y. Tanaka, T. Ohshima
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2019 (ICSCRM2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal Reliability of 4H-SiC Devices and Integrated Circuits Based on 4H-SiC MOSFET at 400℃2019

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Tomonori Maeda, Hiroshi Sezaki, Kousuke Muraoka, Tetsuya Meguro, and Shin-Ichiro Kuroki
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Pixel Array Integration with SOI-Si photodiode and 4H-SiC MOSFETs for Radiation-Hardened image sensors2019

    • Author(s)
      Tatsuya Meguro, Fumiaki Hasebe, Akinori Takeyama, Takeshi Ohshima, Yasunori Tanaka, and Shin-Ichiro Kuroki
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Suppression of Ion Channeling Effects in 4H-SiC Substrate by Tilt Angle Control of Ion Implantation2019

    • Author(s)
      Tomonori Okada, Jun Inoue, Fumitaka Nishiyama, Hiroshi Sezaki, and Shin-Ichiro Kuroki
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4H-SiC Pixel Device for UV Image Sensors2019

    • Author(s)
      Kenta Nishigaito, Tatsuya Meguro, Akinori Takeyama, Takeshi Ohshima, Yasunori Tanaka, Shin-Ichiro Kuroki
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiC による耐放射線エレクトロニクス技術開発2019

    • Author(s)
      田中 保宣,清水 奎吾,小野田 忍,武山 昭憲,牧野 高紘,大島 武, 目黒 達也,黒木 伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] SiC-NMOSFETs におけるガンマ線誘起移動度増加現象とその増加機構2019

    • Author(s)
      村岡幸輔,瀬崎洋,石川誠治,前田知徳,牧野高紘,大島武,黒木伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 短チャネル SiC nMOSFET の温度特性評価2019

    • Author(s)
      石井友康,瀬崎洋,石川誠治,前田智徳,牧野高紘,大島武, 黒木伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 耐放射線 UV イメージセンサのためのフル 4H-SiC 画素デバイス2019

    • Author(s)
      西垣内 健汰,目黒 達也,武山 昭憲,大島 武,田中 保宣,黒木 伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] イオン注入角制御による 4H-SiC Trench MOSFETs のしきい値制御2019

    • Author(s)
      岡田 智徳, 井上 純, 西山 文隆, 瀬崎 洋, 黒木 伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 耐放射線イメージセンサに向けた SOI-Si/4H-SiC 画素集積化プロセス2019

    • Author(s)
      目黒 達也,長谷部 史明,武山 昭憲,大島 武,田中 保宣,黒木 伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 耐放射線イメージセンサのための 4H-SiC/SOI 基板貼り合わせ技術2019

    • Author(s)
      長谷部史明,目黒達也,武山昭憲,大島武,田中保宣,黒木伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ノーマリーオフ型 4H-SiC JFET のガンマ線耐性2019

    • Author(s)
      武山 昭憲,清水 奎吾,牧野 高紘,山﨑 雄一,大島 武,黒木 伸一郎,田中 保宣
    • Organizer
      応用物理学会 先進パワー半導体分科会 第6回講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 耐放射線イメージセンサに向けたSOI-Si/4H-SiC画素集積化プロセス2019

    • Author(s)
      目黒 達也、長谷部 史明、武山 昭憲、大島 武、田中 保宣、黒木 伸一郎
    • Organizer
      2019年第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 耐放射線UVイメージセンサのためのフル4H-SiC画素デバイス2019

    • Author(s)
      西垣内 健汰、目黒 達也、武山 昭憲、大島 武、田中 保宣、黒木 伸一郎
    • Organizer
      2019年第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ノーマリーオフ型4H-SiC JFETのガンマ線照射効果2019

    • Author(s)
      武山 昭憲、清水 奎吾、牧野 高紘、山﨑 雄一、大島 武、黒木 伸一郎、田中 保宣
    • Organizer
      2019年第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] NVESTIGATION OF CF4:O2 SURFACE ETCHING IN Ni/Nb OHMIC CONTACT ON 4H-SiC FOR HARSH ENVIRONMENT ELECTRONICS2019

    • Author(s)
      Abhinav Bhansali, Vuong Van Cuong, and Shin-Ichiro Kuroki
    • Organizer
      応用物理学会 先進パワー半導体分科会 第14回研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 4H-SiC CMOS論理回路作製に向けたBOSCHプロセスによるSiCディープエッチング2019

    • Author(s)
      森本 剣偲郎、村岡 幸輔、児島 一聡、黒木 伸一郎
    • Organizer
      2019年第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] イオン注入角制御による4H-SiC基板へのイオン注入高精度化2019

    • Author(s)
      岡田 智徳、井上 純、西山 文隆、瀬崎 洋、黒木 伸一郎
    • Organizer
      2019年第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Approach to realizing radiation-hardened devices2018

    • Author(s)
      Shin-Ichiro Kuroki
    • Organizer
      Fukushima Research Conference“Radiation Hardness and Smartness in Remote Technology for Nuclear Decommissioning” Organized by CLADS/JAEA
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SiC極限環境エレクトロニクスと放射光による薄膜・界面状態分析2018

    • Author(s)
      黒木伸一郎
    • Organizer
      SPring-8次世代先端デバイス研究会(第6回)/第32回SPring-8先端利用技術ワークショップ
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] (チュートリアル講演)パワーエレクトロニクスと ワイドバンドギャップ半導体2018

    • Author(s)
      黒木伸一郎
    • Organizer
      薄膜材料デバイス研究会 第15回研究集会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 4H-SiC Trench pMOSFETs for High-Frequency CMOS Inverters2018

    • Author(s)
      J. Inoue, S-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T Ohshima, M. Ostling, and C-M. Zetterling
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimization of Ni/Nb Ratio for High-Temperature-Reliable Ni/Nb Silicide Ohmic Contact on 4H-SiC2018

    • Author(s)
      Vuong Van Cuong, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, Satoshi Yasuno, Tomoyuki Koganezawa, and Shin-Ichiro Kuroki
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Direct Bonding of 4H-SiC and SOI Wafers for Radiation-Hardened Image Sensors2018

    • Author(s)
      Fumiaki Hasebe, Tatsuya Meguro, Takahiro Makino, Takeshi Ohshima, Yasunori Tanaka, and Shin-Ichiro Kuroki
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of High Gamma-Ray Radiation on 3C-SiC nMOSFETs2018

    • Author(s)
      Shin-Ichiro Kuroki, Kohei Nagano, Tatsuya Meguro, Akinori Takeyama, Takahiro Makino, Takeshi Ohshima, and Yasunori Tanaka
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Ba-introduced thin gate oxide on 4H-SiC2018

    • Author(s)
      K. Muraoka, S. Ishikawa, H. Sezaki, T. Maeda, S.-I. Kuroki
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Suppression of Short-Channel Effects in 4H-SiC Trench MOSFETs2018

    • Author(s)
      T. Ishii, S.-I. Kuroki, H. Sezaki, S. Ishikawa, T. Maeda, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      12th European Conference on Silicon Carbide and Related Materials (ECSCRM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Radiation Hardened Silicon Carbide Electronics2018

    • Author(s)
      K. Muraoka, S. Ishikawa, H. Sezaki, T. Maeda, T. Makino, T. Ohshima, S.-I. Kuroki
    • Organizer
      Fukushima Research Conference“Radiation Hardness and Smartness in Remote Technology for Nuclear Decommissioning” Organized by CLADS/JAEA
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Short-channel 4H-SiC trench MOSFETs for harsh environment electronics2018

    • Author(s)
      T. Ishii, S.-I. Kuroki, H. Sezaki, S. Ishikawa, T. Maeda, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      Fukushima Research Conference“Radiation Hardness and Smartness in Remote Technology for Nuclear Decommissioning” Organized by CLADS/JAEA
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 4H-SiC nMOSFETs における表面CF4エッチングの効果2018

    • Author(s)
      小早川 貴一、村岡 幸輔、瀬崎 洋、石川 誠治、前田 知徳、黒木 伸一郎
    • Organizer
      2018年第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 4H-SiC Trench MOSFETs による短チャネル効果の抑制効果2018

    • Author(s)
      石井 友康、黒木 伸一郎、瀬崎 洋、石川 誠治、前田 智徳、牧野 高紘、大島 武、Mikael Ostling 、Carl-Mikael Zetterling
    • Organizer
      2018年第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 4H-SiC MOSFETs and Logic Inverters for Harsh Environment Electronics (Invited)2017

    • Author(s)
      Shin-Ichiro Kuroki
    • Organizer
      19th Takayanagi Kenjiro Memorial Symposium
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 4H-SiC pMOSFETs with Al-doped S/D and NbNi silicide ohmic contacts2017

    • Author(s)
      J. Kajihara, S-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-parasitic-capacitance self-aligned 4H-SiC nMOSFETs for harsh environment electronics2017

    • Author(s)
      T. Kurose, S.-I. Kuroki, S. Ishikawa, T. Maeda, H. Sezaki, T. Makino, T. Ohshima, M. Ostling, and C.-M. Zetterling
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Correlation between field effect mobility and accumulation conductance at 4H-SiC MOS interface with barium2017

    • Author(s)
      K. Muraoka, S. Ishikawa, H. Sezaki, T. Maeda, and S.-I. Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrical properties of Ti-Si-C Ohmic contact on ion-implanted n-type 4H-SiC C face2017

    • Author(s)
      Milantha De Silva, Teruhisa Kawasaki, and Shin-Ichiro Kuroki
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017 (ICSCRM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Metal/SiO2/SiCバンドアライメントのゲート電極金属依存性2017

    • Author(s)
      安野 聡、小金澤 智之、村岡 幸輔、小早川 貴一、石川 誠治、黒木 伸一郎
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 極限環境応用に向けた4H-SiC上Ni/Nbオーミックコンタクトの高温信頼性2017

    • Author(s)
      ヴォーン ヴァン クォン、石川 誠治、瀬崎 洋、前田 知徳、小金澤 智之、安野 聡、宮崎 孝道、黒木 伸一郎
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] NbNiシリサイドS/D 3C-SiC nMOSFETsと高ガンマ線照射特性2017

    • Author(s)
      永野 耕平、目黒 達也、武山 昭憲、牧野 高紘、大島 武、田中 保宣、黒木 伸一郎
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高周波CMOSインバータに向けた4H-SiCトレンチpMOSFETsの研究2017

    • Author(s)
      井上 純、黒木 伸一郎、石川 誠治、前田 知徳、瀬崎 洋、牧野 高紘、大島 武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      2018年第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Research on 400°C Thermal Stability of Ni/Nb Ohmic Contacts on 4H-SiC For Harsh Environment Applications2017

    • Author(s)
      Vuong Van Cuong, Milantha De Silva, Seiji Ishikawa, Hiroshi Sezaki, Tomonori Maeda, Takahiro Makino, Takeshi Ohshima, Yasunori Tanaka, and Shin-Ichiro Kuroki
    • Organizer
      応用物理学会 先進パワー半導体分科会 第4回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 4H-SiC pMOSFETsの高温特性及びガンマ線曝露効果2017

    • Author(s)
      梶原純, 黒木伸一郎, 瀬崎洋, 石川誠治,前田知徳, 牧野高紘, 大島武, Mikael Ostling, and Carl-Mikael Zetterling
    • Organizer
      応用物理学会 先進パワー半導体分科会 第4回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Ba導入nMOSFETsに対するBTS試験およびガンマ線照射2017

    • Author(s)
      村岡幸輔,瀬崎洋,石川誠治,前田知徳,牧野高紘,大島武,黒木伸一郎
    • Organizer
      応用物理学会 先進パワー半導体分科会 第4回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 極限環境エレクトロニクスのための4H-SiC nMOSFETs セルフアラインプロセス2017

    • Author(s)
      黒瀬 達也、黒木 伸一郎、石川 誠治、前田 知徳、瀬崎 洋、牧野 高紘、大島 武、Mikael Ostling、Carl-Mikael Zetterling
    • Organizer
      2017年第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Remarks] 広島大学研究者総覧

    • URL

      http://seeds.office.hiroshima-u.ac.jp/profile/ja.76ec61dcb6e3d155520e17560c007669.html

    • Related Report
      2019 Annual Research Report
  • [Patent(Industrial Property Rights)] 炭化珪素半導体装置の製造方法及び炭化珪素半導体装置2020

    • Inventor(s)
      黒木伸一郎, 岡田智徳, 瀬崎洋
    • Industrial Property Rights Holder
      黒木伸一郎, 岡田智徳, 瀬崎洋
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2020-026991
    • Filing Date
      2020
    • Related Report
      2019 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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