| Budget Amount *help |
¥15,080,000 (Direct Cost: ¥11,600,000、Indirect Cost: ¥3,480,000)
Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2017: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
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| Outline of Final Research Achievements |
The combined effect of O2 and N2 plasma to the excimer-laser irradiation process was examined. Metal-organic precursor films were irradiated by the laser in O2 plasma, the films were crystalized to the metal-oxide with less oxygen vacancies than those prepared by the laser-irradiation in air. Then, the metal-organic precursor films were irradiated by the laser in N2 plasma, the films were also crystalized to the metal-oxide but included N. Metal films were irradiated by the laser in N2 plasma, especially in the case of Ti, N atoms were introduced into in Ti lattice. The introduction behaviors of N2 depended on the type of metal and it was concluded that the temperature of the film under laser irradiation and the melting point of the metal are dominant factor for introduction of N2.
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