3-D scanning deflectometric profiler using self-calibration rotary encoder
| Project/Area Number |
17H04901
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | National Institute of Advanced Industrial Science and Technology |
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Principal Investigator |
Kondo Yohan 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 (10586316)
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Project Status |
Completed (Fiscal Year 2019)
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| Budget Amount *help |
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2019: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2018: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2017: ¥14,950,000 (Direct Cost: ¥11,500,000、Indirect Cost: ¥3,450,000)
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| Keywords | ロータリエンコーダ / 自己校正法 / 形状計測 / 平面 / 球面 / 自由曲面 / 角度 / 三次元形状 / 平面度 / オートコリメータ / 自己校正型ロータリエンコーダ / 平行平板 / 曲率 / 形状測定システム / ペンタミラー / Dual mirror pair (DMP) / 角度測定 / オプチカルフラット / 回転振れ / 計測工学 / 超精密計測 / 精密研磨 / 機械力学・制御 / 幾何学 |
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| Outline of Final Research Achievements |
We developed an absolute surface profiler based on the local slope angle measurement of the specimen without using the reference surface, which is called the scanning deflectometric profiler (SDP). Measuring devices based on deflectometry have been developed by many laboratories as a highly accurate straightness profile measurement. On the other hand, a problem of deflectometric system was that the measurement was limited to a line (two-dimensional) profile. To solve this problem, we developed a novel method to measure the surface topography. The surface topography was calculated from radial lines obtained by rotating the specimen. We performed the comparison measurement between the SDP system and the Fizeau interferometer. Finally, the proposed method was validated through the comparison measurement.
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| Academic Significance and Societal Importance of the Research Achievements |
測定範囲Φ800 mmで、平面から数m程度までの曲率を持つ表面形状（自由曲面）を±5 nm（世界最高精度）の絶対精度で三次元形状測定できる世界で初めての測定装置の開発に成功した。本提案システムの実現により、単に、三次元形状測定の高度化を達成されるだけでなく、例えば、干渉計の参照鏡を測定・校正することにより、干渉計測法の高精度化も期待できる。また、形状そのものの測定精度に加えて、横軸（走査幅）も高精度に測長することが可能である本システムの特徴を生かし、焦点距離の長い曲面の高精度絶対曲率測定などへの適用も期待できる。
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Report
(4 results)
Research Products
(6 results)
