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Growth of inclusion-free SiC by in-situ interface observation and thermophysical property measurements

Research Project

Project/Area Number 17H04960
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Metal making/Resorce production engineering
Research InstitutionTohoku University

Principal Investigator

Kawanishi Sakiko  東北大学, 多元物質科学研究所, 助教 (80726985)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥24,310,000 (Direct Cost: ¥18,700,000、Indirect Cost: ¥5,610,000)
Fiscal Year 2019: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2018: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2017: ¥15,470,000 (Direct Cost: ¥11,900,000、Indirect Cost: ¥3,570,000)
Keywordsシリコンカーバイド / 溶液成長 / 高温物性値 / その場観察 / In-situ観察 / 熱物性 / 物性値 / 熱流動予測 / 結晶成長 / 熱伝導率 / 溶液成長法
Outline of Final Research Achievements

To obtain high-quality SiC crystals by solution growth, precise CFD simulations using reliable thermophysical properties as well as clarification of important factors for crystal growth are needed. Therefore, thermal conductivity of the solvents and the other various properties were evaluated. For example, the obtained thermal conductivities of molten Si-Cr and Si-Fe alloys were much smaller than those of molten Si. From the solution growth experiments using Si and Si-Cr solvents, the lateral SiC growth was conserved in the case of alloy solvents. By considering the CFD results, the increase of temperature gradient in front of growth interface leads to the decrease of constitutional supercooling area, resulting in maintaining the lateral growth.

Academic Significance and Societal Importance of the Research Achievements

本研究では、溶融合金の熱伝導率のレーザーフラッシュ法による実測値として世界最高温となる1600℃での計測に成功している。他にも、溶融合金の拡散係数や、SiC/溶融合金間の界面エネルギーなど、種々の高温物性値の計測法の提案および実測値の整備を行っており、今後の高温物性値の計測への応用も可能である。さらに、成長結晶の品質への影響因子として、溶媒合金の熱伝導率が特に需要であることを明らかにした。今後の高速成長と高品質化の両立という悲願の達成のためには、溶媒組成の抜本的見直しが必要であり、その際に考慮すべき一つの指針を与えた。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (21 results)

All 2020 2019 2018 2017

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (16 results) (of which Int'l Joint Research: 7 results,  Invited: 4 results)

  • [Journal Article] Measurement and Thermodynamics of Carbon Solubilities in Molten Si–Fe, Si–Ni, and Si–Cr–Fe Alloys at 2073 K2020

    • Author(s)
      Kawanishi Sakiko、Yoshikawa Takeshi
    • Journal Title

      ISIJ International

      Volume: 60 Issue: 10 Pages: 2123-2128

    • DOI

      10.2355/isijinternational.ISIJINT-2019-511

    • NAID

      130007927942

    • ISSN
      0915-1559, 1347-5460
    • Year and Date
      2020-10-15
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of thermophysical properties of molten Si-Cr and Si-Fe alloys for design of solution growth of SiC2020

    • Author(s)
      S. Kawanishi, M. Abe, C. Koyama, T. Ishikawa, H. Shibata
    • Journal Title

      Journal of Crystal Growth

      Volume: 541 Pages: 125658-125658

    • DOI

      10.1016/j.jcrysgro.2020.125658

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermomigration of molten Cr-Si-C alloy in 4H-SiC at 1873-2273 K2019

    • Author(s)
      Kawanishi Sakiko、Yoshikawa Takeshi、Shibata Hiroyuki
    • Journal Title

      Journal of Crystal Growth

      Volume: 518 Pages: 73-80

    • DOI

      10.1016/j.jcrysgro.2019.04.022

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement and Thermodynamics of Carbon Solubilities of Molten Si-Fe, Si-Ni and Si-Fe-Cr Alloys at 2073 K2019

    • Author(s)
      川西咲子, 吉川健
    • Journal Title

      Tetsu-to-Hagane

      Volume: 105 Issue: 3 Pages: 389-394

    • DOI

      10.2355/tetsutohagane.TETSU-2018-103

    • NAID

      130007605200

    • ISSN
      0021-1575, 1883-2954
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-situ Interface Observation of 3C-SiC Nucleation on Basal Planes of 4H-SiC during Solution Growth of SiC from Molten Fe-Si Alloy2018

    • Author(s)
      Sakiko Kawanishi and Takeshi Yoshikawa
    • Journal Title

      JOM

      Volume: 70 Issue: 7 Pages: 1239-1247

    • DOI

      10.1007/s11837-018-2912-2

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] 6H-SiC の周期ステップ構造を利用した3C-SiC の核生成制御2020

    • Author(s)
      川西咲子, 渡邉遼, 柴田浩幸
    • Organizer
      日本金属学会, 2020年春期(第166回)講演大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Effect of thermophysical properties of Si-based solution on SiC solution growth process2019

    • Author(s)
      Sakiko Kawanishi
    • Organizer
      Workshop on Innovative Metallurgical Processes for Advanced Materials 2
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Cr-Si合金を用いたSiC溶液成長時の結晶中窒素濃度2019

    • Author(s)
      八野田将吾, 川西咲子, 柴田浩幸
    • Organizer
      日本金属学会, 2019年秋期(第165回)講演大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] New Methodologies to Evaluate the Step-bunching of 4H-SiC in Different Alloy Solvents2019

    • Author(s)
      Yuchuang Yao, Sakiko Kawanishi, Didier Chaussende, Takumi Horiike and Takeshi Yoshikawa
    • Organizer
      International Conference on Silicon Carbide and Related Materials 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 静電浮遊炉におけるCr-Si融体の放射率および比熱の測定2019

    • Author(s)
      仲田結衣, 渡邊勇基, 小山千尋, 石川毅彦, 川西咲子, 柴田浩幸, 吉川健
    • Organizer
      日本熱物性学会, 第40回日本熱物性シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] Effect of Al Addition to Si-Cr Based Solvent for Solution Growth of Single Crystalline SiC2019

    • Author(s)
      Sakiko Kawanishi, Takeshi Yoshikawa and Daikoku Hironori
    • Organizer
      TMS2019 148th Annual Meeting and Exhibition
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 溶液成長法による単結晶SiC育成プロセスの研究2019

    • Author(s)
      川西咲子
    • Organizer
      日本鉄鋼協会, 第177回春季講演大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] SiC溶液成長時の溶液内熱流動に及ぼす各種物性値の影響2019

    • Author(s)
      川西咲子, 大黒寛典, 石川毅彦, 阿部舞, 柴田浩幸, 吉川健
    • Organizer
      日本金属学会, 2019年春季(第164回)講演大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] SiC溶液成長時の成長界面に及ぼすCr-Si合金溶媒の熱伝導率の影響2019

    • Author(s)
      阿部舞, 川西咲子, 柴田浩幸
    • Organizer
      日本鉄鋼協会, 第177回春季講演大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Effect of Thermal Conductivity of Solvent on Heat Flow during Solution Growth of SiC2018

    • Author(s)
      Mai Abe, Sakiko Kawanishi and Hiroyuki Shibata
    • Organizer
      European Conference on Silicon Carbide and Related Materials 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 溶融Fe-Si合金の熱伝導率の計測2018

    • Author(s)
      阿部舞, 川西咲子, 柴田浩幸
    • Organizer
      日本熱物性学会, 第39回日本熱物性シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] Real-time Observation of Solution Growth Interface of SiC Using Alloy Solvent2018

    • Author(s)
      Sakiko Kawanishi, Takeshi Yoshikawa and Kazuki Morita
    • Organizer
      TMS2018 147th Annual Meeting and Exhibition
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] SiC溶液成長時の熱流動に及ぼす溶媒の熱伝導率の影響2018

    • Author(s)
      阿部舞, 川西咲子, 柴田浩幸
    • Organizer
      日本鉄鋼協会, 第175回春季講演大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effect of degree of supersaturation on solution growth of 4H-SiC using Cr-Si solvent2017

    • Author(s)
      Yoichiro Nagamatsu, Sakiko Kawanishi, Hiroyuki Shibata and Takeshi Yoshikawa
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermodynamics of Cr in 4H-SiC at 1873 - 2273 K2017

    • Author(s)
      Sakiko Kawanishi, Hiroyuki Shibata and Takeshi Yoshikawa
    • Organizer
      The International Conference on Silicon Carbide and Related Materials 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単結晶SiCの溶液成長の物理化学2017

    • Author(s)
      川西咲子
    • Organizer
      日本金属学会, 第161回 2017年秋季講演大会
    • Related Report
      2017 Annual Research Report
    • Invited

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Published: 2017-04-28   Modified: 2021-02-19  

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