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Development of oxidation-free light-emitting material of silicon microparticles that have many fine trenches

Research Project

Project/Area Number 17H04962
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Properties in chemical engineering process/Transfer operation/Unit operation
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

Inasawa Susumu  東京農工大学, 工学(系)研究科(研究院), 准教授 (30466776)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥24,050,000 (Direct Cost: ¥18,500,000、Indirect Cost: ¥5,550,000)
Fiscal Year 2019: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2018: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Fiscal Year 2017: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Keywordsシリコン / イガグリ形状 / 発光材料 / 表面酸化 / 発光輝度 / エッチング / 反応中間体 / エッチングプロセス / 発光シリコン / 微細構造形成 / エッチングメカニズム / マイクロ粒子 / SiCl4亜鉛還元反応 / プロセス / 材料合成 / 熱収支 / 物質収支 / 酸化消光フリー / 亜鉛還元反応 / SiCl4
Outline of Final Research Achievements

We examined development of silicon-based, durable light emitting particles that have unique trenched structures. Trenched silicon microparticles were obtained by chemical etching with a mixture of acids. They showed a visible orange-red emission from the trenched particles under excitation by ultra-violet (UV) light. We have revealed that oxidation under reduced pressure increased durability of the visible light emission from microparticles. Oxidation is a main cause that shortens the durability of light emission. But this result showed that oxidation would be a practical method to increase the durability if we use oxidation in a reasonable way. In addition, we have also examined etching process. Mixing of microparticles and the acid solution during etching was not preferable to proceed etching. Enough concentration of intermediate species around the microparticles is a key to produce trenched silicon microparticles.

Academic Significance and Societal Importance of the Research Achievements

本研究で対象としたシリコンマイクロ粒子は、特異なイガグリ形状である。この立体的な構造を活かし、大気中での酸化を防ぐシリコン発光材料の検討を行った。従来は酸化が消光の主原因であると捉えられていたが、本研究では減圧酸化を行うと発光輝度の低下が抑えられることを明らかにした。戦略的に酸化を用いれば、発光材料の長寿命化が可能であることを示唆する結果である。また、粒子エッチングで撹拌が逆効果であることを明らかにした。産業でも用いられるシリコンエッチングは、そのメカニズムに未解明の点が多い。イガグリ形状の制御にとどまらず、産業への貢献も可能な結果が得られた。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (5 results)

All 2019 2017

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (3 results)

  • [Journal Article] Experimental and numerical approaches on the effect of gas flow on the formation of tens-square-cm-scale mat of silicon nanowires from SiCl4 and zinc vapor2019

    • Author(s)
      Susumu Inasawa
    • Journal Title

      Journal of Crystal Growth

      Volume: 520 Pages: 11-17

    • DOI

      10.1016/j.jcrysgro.2019.05.009

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of thicker silicon wires on a sufficiently cooled substrate during the gas phase zinc reduction reaction of SiCl42019

    • Author(s)
      Naoki Shirane and Susumu Inasawa
    • Journal Title

      Journal of Crystal Growth

      Volume: 506 Pages: 171-177

    • DOI

      10.1016/j.jcrysgro.2018.10.033

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] 液相エッチングプロセスを用いた放射状粒界を持つSiマイクロ粒子の形状制御2019

    • Author(s)
      玉串泰吾、稲澤晋
    • Organizer
      化学工学会横浜大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 亜鉛還元法を用いたシリコンナノワイヤー膜合成における反応器内ガス流れの影響2017

    • Author(s)
      井上介、稲澤晋
    • Organizer
      化学工学会第49回秋季大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] シリコンワイヤーの大直径化と温度推算2017

    • Author(s)
      白根尚紀、稲澤晋
    • Organizer
      化学工学会東京大会2017
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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