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High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-Tools

Research Project

Project/Area Number 18206016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTohoku University

Principal Investigator

GAO Wei  Tohoku University, 大学院・工学研究科, 教授 (70270816)

Co-Investigator(Kenkyū-buntansha) ONO Takahito  東北大学, 大学院・工学研究科, 准教授 (90282095)
KURIYAGAWA Tsunemoto  東北大学, 大学院・工学研究科, 教授 (90170092)
SHIMIZU Hiroki  九州工業大学, 工学部, 准教授 (50323043)
荒井 義和  東北大学, 大学院・工学研究科, 助教 (20455801)
居 冰峰  東北大学, 大学院工学研究科, 助手 (10431529)
Project Period (FY) 2006 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥50,050,000 (Direct Cost: ¥38,500,000、Indirect Cost: ¥11,550,000)
Fiscal Year 2008: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Fiscal Year 2007: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2006: ¥30,810,000 (Direct Cost: ¥23,700,000、Indirect Cost: ¥7,110,000)
Keywordsエッジ / 3次元形状 / 計測 / マイクロ / 工具 / 光プローブ / アライメント / AFM / 三次元形状
Research Abstract

先端のコ-ナ半径が非常に小さな(1μm程度)超精密切削加工用のダイヤモンドツールのエッジの形状を原子間力顕微鏡(AFM)により計測するため, 専用の計測装置を製作した. また, 計測の際に必要となるAFMプローブとツールとの位置合わせ(アライメント)を実現するため, 光プローブを利用したアライメント機構を開発した.

Report

(4 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (37 results)

All 2009 2008 2007 2006 Other

All Journal Article (14 results) (of which Peer Reviewed: 12 results) Presentation (22 results) Remarks (1 results)

  • [Journal Article] On-machine Measurement of Tool Cutting2009

    • Author(s)
      Takemi Asai, Sayeda Ferdous, Yoshikazu Arai, Yi Yang and Wei Gao
    • Journal Title

      Edge Profiles IJAT Vol.3 No.4

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験-2009

    • Author(s)
      浅井岳見, 荒井義和, 高偉
    • Journal Title

      精密工学会誌 75(7)(印刷中)

    • NAID

      130000421706

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Maching2009

    • Author(s)
      Y. Arai, T. Asai, S. Ferdous and W. Gao
    • Journal Title

      Advanced Material Research 69-70(in press)

      Pages: 138-142

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micro-tools2009

    • Author(s)
      W. Gao, T. Asai, Y. Arai
    • Journal Title

      Annals of the CIRP 58(in press)

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Precision and fast measurement of 3D cutting edge profiles of single point diamond micra-tools2009

    • Author(s)
      W. Gao, T. Asai, Y. Arai
    • Journal Title

      Annals of the CIRP 58(In press)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] マイクロ切削工具切れ刃形状の三次元測定装置に関する研究-測定装置の構築と切れ刃形状測定実験-2009

    • Author(s)
      浅井岳見,荒井義和, 高偉
    • Journal Title

      精密工学会誌 75(印刷中)

    • NAID

      130000421706

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] AFM with the Slope Compensation Technique for High-speed Precision Measurement of Micro-structured Surfaces2008

    • Author(s)
      Yuguo Cui, BinFeng Ju, Jun Aoki, Yoshikazu Arai, Wei Gao
    • Journal Title

      Key Engineering Materials 381-382

      Pages: 35-38

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces2008

    • Author(s)
      Yuguo Cui, Yoshikazu Arai, Takemi Asai, BinFeng Ju and Wei Gao
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 9-3

      Pages: 27-32

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] A high-speed atomic force microscope for precision measurement of micro-structured surfaces2008

    • Author(s)
      Y. G. Cui, Y. Arai, T. Asai, B. F. Ju and W. Gao
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 9

      Pages: 27-32

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Bing-Feng Ju and Satoshi Kiyono ; An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools2007

    • Author(s)
      Takemi Asai, Takenori Motoki, Wei Gao
    • Journal Title

      IJPEM 8-2

      Pages: 54-58

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] AFM with the slope compensation technique for high-speed precision measurement of micro-structured surfaces2007

    • Author(s)
      Y. G. Gui
    • Journal Title

      Proceedings of ISMTII 2007

      Pages: 469-472

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An AFM-based measuring instrument for edge profile measurement of diamond cutting tool2007

    • Author(s)
      Takemi Asai
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 8・1B(in press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor2006

    • Author(s)
      Wei Gao, Takenori Motoki and Satoshi Kiyono
    • Journal Title

      Precision Engineering 30(4)

      Pages: 396-405

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor2006

    • Author(s)
      W.Gao
    • Journal Title

      Precision Engineering 30・4

      Pages: 396-405

    • Related Report
      2006 Annual Research Report
  • [Presentation] 超精密切削工具切れ刃の三次元形状測定に関する研究-加工機上測定実験-2009

    • Author(s)
      浅井岳見, 荒井義和, 高偉
    • Organizer
      2009年度精密工学会春季大会
    • Place of Presentation
      中央大学
    • Year and Date
      2009-03-11
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Precision Measurement of Edge Profiles of Cutting Micro-tools2008

    • Author(s)
      Takemi ASAI, Yoshikazu ARAI and Wei GAO
    • Organizer
      3rd International Conference on Positioning Technology
    • Place of Presentation
      Hamamatsu, Japan
    • Year and Date
      2008-12-26
    • Related Report
      2008 Final Research Report
  • [Presentation] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining2008

    • Author(s)
      Yoshikazu ARAI, Takemi ASAI and Wei GAO
    • Organizer
      The 6th CHINA-JAPAN International Conference on Ultra-Precision Machining (6th CJICUPM, 2008)
    • Place of Presentation
      Hunan University, Changsha, China
    • Year and Date
      2008-12-24
    • Related Report
      2008 Final Research Report
  • [Presentation] Nanometric Edge Profile Measurement of CuttingTools on a Diamond Turning Machine2008

    • Author(s)
      Asai, T., Arai, Y., Cui, Y. and Gao, W.
    • Organizer
      ISIST2008
    • Place of Presentation
      Shenyang, China
    • Year and Date
      2008-12-17
    • Related Report
      2008 Final Research Report
  • [Presentation] Precision Measurement of Edge Profiles of Cutting Micro-tools2008

    • Author(s)
      Takemi ASAI
    • Organizer
      3rd International Conference on Positioning Technology (ICPT2008)
    • Place of Presentation
      Hamamatsu
    • Year and Date
      2008-11-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] 3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining2008

    • Author(s)
      Yoshikazu ARAI
    • Organizer
      6th CJICUPM
    • Place of Presentation
      Changsha, China
    • Year and Date
      2008-11-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] Compensation of motion error in a high accuracy AFM2008

    • Author(s)
      Cui, Y., Arai, Y., He, G., Asai, T. and Gao, W.
    • Organizer
      ISIST2008
    • Place of Presentation
      Shenyang, China
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Nanometric Edge Profile Measurement of Cutting Tools on a Diamond Turning Machine2008

    • Author(s)
      Takemi Asai
    • Organizer
      ISIST2008
    • Place of Presentation
      Shenyang, China
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定に関する研究2008

    • Author(s)
      浅井岳見, 荒井義和, 高偉
    • Organizer
      2008年度砥粒加工学会学術講演会
    • Place of Presentation
      滋賀県立大学
    • Year and Date
      2008-09-05
    • Related Report
      2008 Final Research Report
  • [Presentation] 高速高精度原子間力顕微鏡に関する研究2008

    • Author(s)
      崔玉国, 荒井義和, 高偉
    • Organizer
      2008年度砥粒加工学会学術講演会
    • Place of Presentation
      滋賀県立大学
    • Year and Date
      2008-09-05
    • Related Report
      2008 Final Research Report
  • [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定に関する研究2008

    • Author(s)
      浅井岳見
    • Organizer
      2008年度砥粒加工学会学術講演会(ABTEC2008)
    • Place of Presentation
      滋賀県立大学, 滋賀県
    • Year and Date
      2008-09-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高速高精度原子間力顕微鏡に関する研究2008

    • Author(s)
      崔玉国
    • Organizer
      2008年度砥粒加工学会学術講演会(ABTEC2008)
    • Place of Presentation
      滋賀県立大学, 滋賀県
    • Year and Date
      2008-09-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] A spiral scanning-type AFM for high-speed and largearea measurement euspen 20082008

    • Author(s)
      Y. Cui, G. He, Y. Arai, T. Asai, W. Gao
    • Organizer
      Zurich, Switzerland
    • Year and Date
      2008-05-21
    • Related Report
      2008 Final Research Report
  • [Presentation] A spiral scanning-type AFM for high-speed and largearea measurement2008

    • Author(s)
      Y. Cui
    • Organizer
      euspen 2008
    • Place of Presentation
      Zurich, Switzerland
    • Year and Date
      2008-05-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] An Instrument for Three-Dimensional Edge Profile Measurement of Micro-Cutting Tools2008

    • Author(s)
      T. Asai, Y. Arai, Y. Cui, W. Gao
    • Organizer
      euspen 2008
    • Place of Presentation
      Zurich, Switzerland
    • Year and Date
      2008-05-20
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] イヤモンド切削工具切れ刃形状測定装置の開発2007

    • Author(s)
      浅井岳見, 荒井義和, 高偉
    • Organizer
      2007年度精密工学会東北支部学術講演会
    • Place of Presentation
      八戸工業大学
    • Year and Date
      2007-12-01
    • Related Report
      2008 Final Research Report
  • [Presentation] 高速高精度微細形状計測用AFMに関する研究-傾斜補正による測定の高速化-2007

    • Author(s)
      崔玉国, 荒井義和, 浅井岳見, 高偉
    • Organizer
      007年度精密工学会東北支部学術講演会
    • Place of Presentation
      八戸工業大学
    • Year and Date
      2007-12-01
    • Related Report
      2008 Final Research Report
  • [Presentation] マイクロ・ダイヤモンド切削工具切れ刃形状測定装置の開発2007

    • Author(s)
      浅井岳見
    • Organizer
      2007年度精密工学会東北支部学術講演会
    • Place of Presentation
      八戸工業大学
    • Year and Date
      2007-12-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] 高速高精度微細形状計測用AFMに関する研究2007

    • Author(s)
      崔玉国
    • Organizer
      2007年度精密工学会東北支部学術講演会
    • Place of Presentation
      八戸工業大学
    • Year and Date
      2007-12-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] AFM with Slope Compensation Teqnique for High-speed Precision Measurement of Micro-structured Surfaces2007

    • Author(s)
      Y. G. Cui, B. F. Ju, J. Aoki, Y. Arai and W. Gao
    • Organizer
      ISMTII 2007
    • Place of Presentation
      Poster session
    • Year and Date
      2007-09-20
    • Related Report
      2008 Final Research Report
  • [Presentation] ダイヤモンド切削工具3Dエッジ形状の高精度自動測定装置の開発2007

    • Author(s)
      浅井岳見, 元木健順, 高偉, 清野慧
    • Organizer
      2007年度精密工学会春季大会
    • Place of Presentation
      芝浦工業大学
    • Year and Date
      2007-03-21
    • Related Report
      2008 Final Research Report
  • [Presentation] An AFM-based measuring instrument for edge profile measurement of diamond cutting tool2006

    • Author(s)
      Takemi Asai, Takenori Motoki, Wei Gao Bing-Feng Ju and Satoshi Kiyono
    • Organizer
      2nd International Conference on Positioning Technology(Jeju-do, Korea)
    • Place of Presentation
      Poster session
    • Year and Date
      2006-10-26
    • Related Report
      2008 Final Research Report
  • [Remarks]

    • URL

      http://www.nano.mech.tohoku.ac.jp/

    • Related Report
      2008 Final Research Report

URL: 

Published: 2006-04-01   Modified: 2016-04-21  

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