Surface Forces between Multi-layers in Nano-scale and Application to MEMS/NEMS

• Project/Area Number: 18360078
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Tottori University
• Principal Investigator: MATSUOKA Hiroshige Tottori University, 大学院・工学研究科, 准教授 (10314569)
• Co-Investigator(Kenkyū-buntansha): FUKUI Shigehisa 鳥取大学, 大学院・工学研究科, 教授 (40273883)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥14,670,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥1,770,000); Fiscal Year 2008: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2007: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2006: ¥7,000,000 (Direct Cost: ¥7,000,000)
• Keywords: ナノ複合膜 / 表面・界面物性 / ナノマシン / 機械要素 / 超精密計測 / ヘッド・ディスク・インターフェース / 原子間力顕微鏡 / ナノトライボロジー / トライボロジー

Research Abstract

複数の任意の物質で構成されるナノ複合膜間の表面間相互作用の特性解明とその応用を目指し、理論的取扱い手法, 計測手法を開発するとともに、実際の微小機械、具体的には、磁気ディスクのヘッド・ディスク・インターフェース(HDI)および原子間力顕微鏡(AFM)のカンチレバー振動の特性解析に応用し、それらの挙動に与える影響を明らかにした。

Research Products

• [Journal Article] A new evaluation method of surface energy of ultra-thin film (2009)
  • Author(s): H. Matsuoka, K. Ono and S. Fukui
  • Journal Title: Microsyst Technol (Published online)
  • Peer Reviewed
• [Journal Article] Three-dimensional deformation analyses of the ultra-thin liquid film surface (Linearized analyses for the steady state) (2009)
  • Author(s): S. Fukui, K. Hitomi, S. Shimizu, F. Saeki and H. Matsuoka
  • Journal Title: Microsyst Technol (Published online)
  • Peer Reviewed
• [Journal Article] A new evaluation method of surface energy of ultra-thin film (2009)
  • Author(s): H. Matsuoka
  • Journal Title: Microsystem Technologies DOI 10.1007/s00542-008-0762-5(電子ジャーナル全) Pages: 4-4
  • Peer Reviewed
• [Journal Article] Three-dimensional deformation analyses of the ultra-thin liquid film surface (Linearized analyses for the steady state) (2009)
  • Author(s): S. Fukui
  • Journal Title: Microsystem Technologies DOI 10.1007/s00542-008-0764-3(電子ジャーナル全) Pages: 8-8
  • Peer Reviewed
• [Journal Article] Dynamic analysis schemes for flying head sliders over discrete track media (2008)
  • Author(s): S. Fukui, T. Kanamaru and H. Matsuoka
  • Journal Title: IEEE Trans. on Magnetics Vol.44, Pt.2 Pages: 3671-3674
  • Peer Reviewed
• [Journal Article] Dynamic analysis schemes for flying head sliders over discrete track media (2008)
  • Author(s): S. Fukui
  • Journal Title: IEEE Trans. on Magnetics 44 Pages: 3671-3674
  • Peer Reviewed
• [Journal Article] Linearized Analyses of Deformation of the Ultra-thin Lubricant Films under Gas Pressures by the Long Wave Equation (2007)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane, and H. Matsuoka
  • Journal Title: Microsyst Technol Vol.13(Online First : DOI 10.1007/s00542-006-0359-9) Pages: 1339-1345
  • Peer Reviewed
• [Journal Article] Linearized analysis of the deformation of ultra-thin lubricant films under gas pressures by the long wave equation (2007)
  • Author(s): Shigehisa Fukui, Soichi Shimizu, Kiyomi Yamane and Hiroshige Matsuoka
  • Journal Title: Mycrosystem Technologies 13 Pages: 1339-1345
  • Peer Reviewed
• [Journal Article] ステアリン酸LB膜の表面エネルギー計測(累積数の影響) (2007)
  • Author(s): 小野克典, 稲田一樹, 松岡広成, 福井茂寿
  • Journal Title: 日本機械学会中国四国学生第37回学生員卒業研究発表研究会講演前刷集 Pages: 216-216
• [Journal Article] 光てこAFMのダイナミック計測における振動振幅の補正手法の研究(先端に付加された質量・ばね・ダンピングの影響) (2007)
  • Author(s): 須山恵明, 松岡広成, 福井茂寿
  • Journal Title: 日本機械学会IIP2007情報・知能・精密機器部門講演会講演論文集 No.07-7 Pages: 197-202
• [Journal Article] スライダ気体潤滑下の液体薄膜表面の安定性解析(スライダ動特性を考慮した空気膜特性の影響) (2007)
  • Author(s): 太田浩史, 松岡広成, 福井茂寿
  • Journal Title: 日本機械学会IIP2007情報・知能・精密機器部門講演会講演論文集 No.07-7 Pages: 251-256
• [Journal Article] A Data Correction Method for the dynamic measurements by the Optical Lever AFM (2006)
  • Author(s): H.Matsuoka, S.Suyama, Y.Hoshina, S.Fukui
  • Journal Title: Extended Abstracts of 2006 Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)
  • NAID: 110004056361
• [Journal Article] AFMによる表面間力測定(フォースカーブの湿度による変化) (2006)
  • Author(s): 森田峻介, 稲田一樹, 松岡広成, 福井茂寿
  • Journal Title: 日本機械学会2006年度年次大会講演論文集 Vol.5 Pages: 621-622
• [Journal Article] Experimental Study on Vibration Transfer Characteristics of a Liquid Meniscus Bridge (2006)
  • Author(s): K.Inada, H.Mastuoka, S.Fukui
  • Journal Title: Proceedings of The Third Asia International Conference on Tribology Pages: 597-598
• [Presentation] Lubricant Deformation Analyses Caused by Gas Stresses and Surface Tension (2009)
  • Author(s): F. Saeki, S. Fukui and H. Matsuoka
  • Organizer: Asia Pacific Magnetic Recording Conference
  • Place of Presentation: Singapore
• [Presentation] A New Evaluation Method of Surface Energy of Ultra-thin Film (2008)
  • Author(s): H. Matsuoka
  • Organizer: ASME Information Storage and Processing Systems Conference
  • Place of Presentation: Santa Clara, USA
  • Year and Date: 2008-06-16
• [Presentation] A new contact model for head disk interface (HDI)with ultra-thin liquid film and ultra-small spacing (2008)
  • Author(s): H. Matsuoka
  • Organizer: Digest of Intermag Europe
  • Place of Presentation: Madrid, Spain
  • Year and Date: 2008-05-08
• [Presentation] A new evaluation method of surface energy of ultra-thin film (2008)
  • Author(s): H. Matsuoka, K. Ono and S. Fukui
  • Organizer: ASME Information Storage and Processing Systems Conference
  • Place of Presentation: Santa Clara, CA
• [Presentation] Three-dimensional deformation analyses of the ultra-thin liquid film surface (Linearized analyses for the steady state) (2008)
  • Author(s): S. Fukui, K. Hitomi, S. Shimizu, F. Saeki and H. Matsuoka
  • Organizer: ASME Information Storage and Processing Systems Conference
  • Place of Presentation: Santa Clara, CA
• [Presentation] A new contact model for head disk interface (HDI) with ultra-thin liquid film and ultra-small spacing (2008)
  • Author(s): H. Matsuoka, H. Kokumai and S. Fukui
  • Organizer: Digest of Intermag Europe(HO-13)
  • Place of Presentation: Madrid
• [Presentation] Dynamic analysis schemes for flying head sliders over discrete track media (2008)
  • Author(s): S. Fukui, T. Kanamaru and H. Matsuoka
  • Organizer: Digest of Intermag Europe(GF-05)
  • Place of Presentation: Madrid
• [Presentation] Experimental study on effects of contact angle on static and dynamic characteristics of a liquid meniscus bridge in macroscopic scale (2007)
  • Author(s): Hiroshige Matsuoka
  • Organizer: STLE/ASME International Joint Tribology Conference
  • Place of Presentation: 米国サンディエゴ
  • Year and Date: 2007-10-22
• [Presentation] Experimental study on effects of contact angle on static and dynamic characteristics of a liquid meniscus bridge in macroscopic scale (2007)
  • Author(s): H. Matsuoka, S. Fukui, K. Inada and K. Ishihara
  • Organizer: Proceedings of the STLE/ASME International Joint Tribology Conference (IJTC2007)
  • Place of Presentation: San Diego, California, USA
• [Presentation] Deformation characteristics of the ultrathin liquid film surface considering the effects of polar endgroups (2007)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane and H. Matsuoka
  • Organizer: Proceedings of the STLE/ASME International Joint Tribology Conference (IJTC2007)
  • Place of Presentation: San Diego, California, USA
• [Presentation] Molecular gas-film lubrication analyses under fixed finite-width slider- A comparison between the CIP method and linearized analyses (2006)
  • Author(s): T. Kanamaru, K. Yamane, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
• [Presentation] Experimental study on vibration transfer characteristics of a liquid meniscus bridge (2006)
  • Author(s): K. Inada, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
• [Presentation] Time evolution analyses of ultra-thin liquid film surface by the long wave equation (Influences by initial/boundary configurations and physical parameters of the liquid surface) (2006)
  • Author(s): S. Shimizu, K. Yamane, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
• [Presentation] A data correction method for the dynamic measurements by the optical lever AFM (Effect for concentrated mass and spring at the cantilever end) (2006)
  • Author(s): S. Suyama, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
• [Presentation] A data correction method for the dynamic measurements by the optical lever AFM (2006)
  • Author(s): H. Matsuoka, S. Suyama, Y. Hoshina and S. Fukui
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S17-03)
• [Presentation] Experimental study on dynamic characteristics of a liquid meniscus bridge (2006)
  • Author(s): H. Matsuoka, K. Inada, A. Yamaguchi and S. Fukui
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S02-05)
• [Presentation] Linearized analyses of deformation of the ultra-thin lubricant films under gas pressures by the long wave equation (2006)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane and H. Matsuoka
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S14-01)
• [Remarks]
  • URL: http://www.damp.tottori-u.ac.jp/~lab2/index_j.html
• [Remarks] ASME Information Storage and ProcessingSystems (ISPS) Division, Best Tribology and Head-Disk Interface Track Paper Award (米国機械学会 情報ストレージ・処理システム部門セッション優秀論文賞)受賞者 : 松岡広成、小野克典、福井茂壽受賞日 : 2008年6月16日受賞論文 : A New Evaluation Method ofSurface Energy of Ultra-thin Film
• [Remarks] 船井情報科学振興賞受賞者 : 松岡広成受賞日 : 2009年4月18日受賞対象 : 液体超薄膜の力学特性の解明と超高密度記録への応用
• [Remarks] 日本機械学会船井特別賞受賞者 : 福井茂壽受賞日 : 2009 年3 月24 日受賞対象 : 分子流体潤滑理論の構築とその情報ナノシステム作動性解析への展開
• [Remarks]
  • URL: http://www.damp.tottori-u.ac.jp/~lab2/index_j.html