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Analysis of Micro-cutting Mechanisms using Continuum-Mechanics-Controlled Molecular Dynamics

Research Project

Project/Area Number 18560102
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionNagoya Institute of Technology

Principal Investigator

INAMURA Toyoshiro  Nagoya Institute of Technology, Graduate School of Engineering, Professor (60107539)

Co-Investigator(Kenkyū-buntansha) TAKEZAWA Nobuhiro  Nagoya Institute of Technology, Graduate School of Engineering, Assistant Professor (50236452)
Project Period (FY) 2006 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥3,710,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥210,000)
Fiscal Year 2007: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2006: ¥2,800,000 (Direct Cost: ¥2,800,000)
KeywordsMolecular Dynamics / Hertz Contact Theory / Defects / Crack / Monocrystalline Silicon / Simulation / Amorphous / Microdynamics / マイクロ加工 / 単結晶銅 / アモルファス銅 / せん断すべり / 解析解 / カードモデル / 先在欠陥
Research Abstract

1. A method of simulation to study atomistic scale mechanism existing in a shear deformation of a monocrystal copper has been proposed based on the hierarchical coupling of molecular dynamics and the analytical expression of the displacement field around a mode-II crack.
2. The result of the simulation shows that there is a critical state at which a shear deformation changes its nature from that caused by an external force to that progressing by itself. This result agrees well with the description of the slip deformation theory of a monocrystal and/or the Piispanen card model for microcutting.
3. During, the process before the critical state, cross slips occur in many places in a material repeatedly, each time increasing their magnitute. These cross slips block a macroscopic shear slip.
4. A macroscopic shear slip occurs at the critical state where the area composed of disordered atomic arrangement has stretched from one end to the other end of a crystal. The resultant macroscopic shear occurs in the directions of the slip planes in a crystal because the area above mentioned develops only to those directions.
5. Controlled molecular dynamics has been applied to micrometer-scale Hertz indentation using the analytical displacements derived on the basis of the Hertz contact theory.
6. Defects that will cause a ring crack can be initiated during indentation even in monocrystalline silicon with no preexisting defect.
7. Defects are initiated by the coupling of the dynamic force transmitted from an amorphous area in the specimen with the static tensile stress on the specimen surface. The coupled forces slowly loosen the crystal structure on the surface and triggers cross slips, which result in valley-like defects on the surface.

Report

(3 results)
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • Research Products

    (14 results)

All 2007 2006

All Journal Article (12 results) (of which Peer Reviewed: 4 results) Presentation (2 results)

  • [Journal Article] Dynamic Phenomena at Mode I Crack Front in Silicon Simulated by Extended Molecular Dynamics2007

    • Author(s)
      T. Inamura, N. Takezawa, K. Shibuya, K. Yamada
    • Journal Title

      Annals of the CIRP 56.1

      Pages: 561-564

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 解析解制御MDによる単結晶シリコン押し込み時のリングクラック生成メカニズム解析2007

    • Author(s)
      宍倉由記子、武澤伸浩、稲村豊四郎
    • Journal Title

      2007年度精密工学会秋季大会学術講演会論文集 (CD-ROM)

      Pages: 205-206

    • NAID

      130000421799

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ring Crack Initiation on Monocrystalline Silicon Surface in Hertz Indentation Analyzed by using Analytical-Solution-Controlled Molecular Dynamics2007

    • Author(s)
      Y. Shishikura, N. Takezawa, T. Inamura
    • Journal Title

      Proceedings of the 2007 JSPE Annual Conference 205-206

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] SPH-based Flow Simulation of Polishing Slurry Including Polished Debris in CMP Journal of JSPE2007

    • Author(s)
      K. Takano, K. Yamada, N. Takezawa, T. Suzuki, T. Inamura
    • Journal Title

      Journal of JSPE 73.1

      Pages: 90-95

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 解析解制御MDによる単結晶セリコン押し込み時のリングクラック生成メカニズム解析2007

    • Author(s)
      宍倉 由記子、武澤 伸浩、稲村 豊四郎
    • Journal Title

      2007年度精密工学会秋季大会学術講演会論文集 (CD-ROM)

      Pages: 205-206

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 研磨屑粒子を含むCMPスラリーのSPH流動シミュレーション2007

    • Author(s)
      高野薫, 山田耕一郎, 武澤伸浩, 鈴木辰俊, 稲村豊四郎
    • Journal Title

      精密工学会誌 73・1

      Pages: 90-95

    • NAID

      110006152485

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Molecular Dynamics Simulation of Micro Mechanisms in Slip Deformation Theory of Crystals2006

    • Author(s)
      T. Inamura, N. Takezawa, K. Yamada, K. Shibuya
    • Journal Title

      Annals of the CIRP 55.1

      Pages: 51-54

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 研磨屑粒子を含むCMPスラリーのSPH流動シミュレーション2006

    • Author(s)
      高野薫、山田耕一郎、武澤伸浩、鈴木辰俊、稲村豊四郎
    • Journal Title

      精密工学会誌 73・1

      Pages: 90-95

    • NAID

      110006152485

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] MDによる逆繰り込み変換MDの初期モデル生成2006

    • Author(s)
      山田雅俊、山田耕一郎、武澤伸浩、稲村豊四郎
    • Journal Title

      日本機械学会論文集A編 72・717

      Pages: 632-637

    • NAID

      110004731574

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] MD-Based Initial Model Generation for Inverse Renormalized MD Trans. JSME2006

    • Author(s)
      M. Yamada, K. Yamada, N. Takezawa, T. Inamura
    • Journal Title

      Trans. JSME 72.717

      Pages: 632-637

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Molecular Dynamics Simulation of Micro Mechanisms in Slip Deformation Theory of Crystals2006

    • Author(s)
      T.Inamura, N.Takezawa, K.Yamada, K.Shibuya
    • Journal Title

      CIRP ANNALS 55/1

      Pages: 51-54

    • Related Report
      2006 Annual Research Report
  • [Journal Article] MDによる逆繰り込み変換MDの初期モデル生成2006

    • Author(s)
      山田雅俊, 山田耕一郎, 武澤伸浩, 稲村豊四郎
    • Journal Title

      日本機械学会論文集A編 72・717

      Pages: 632-637

    • NAID

      110004731574

    • Related Report
      2006 Annual Research Report
  • [Presentation] 解析解制御MDによる単結晶シリコン押し込み時のリングクラック生成メカニズム解析2007

    • Author(s)
      宍倉由記子、武澤伸浩、稲村豊四郎
    • Organizer
      精密工学会
    • Place of Presentation
      旭川市ときわ市民ホール
    • Year and Date
      2007-09-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Ring Crack Initiation on Monocrystalline Silicon Surface in Hertz Indentation Analyzed by using Analytical-Solution-Controlled Molecular Dynamics2007

    • Author(s)
      Y. Shishikura, N. Takezawa, T. Inamura
    • Organizer
      Annual Conference of the Japan Society of Precision Engineering
    • Place of Presentation
      Asahikawa Civic Conference Center
    • Year and Date
      2007-09-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary

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Published: 2006-04-01   Modified: 2016-04-21  

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