Practical application research of large-scale ultra-precision stages driven by non-resonant type actuator for next-generation semiconductor manufacturing

• Project/Area Number: 18760315
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Control engineering
• Research Institution: Gunma University
• Principal Investigator: HASHIMOTO Seiji Gunma University, 大学院工学研究科, 准教授 (30331987)
• Project Period (FY): 2006 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥3,880,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥180,000); Fiscal Year 2008: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2007: ¥800,000 (Direct Cost: ¥800,000); Fiscal Year 2006: ¥2,300,000 (Direct Cost: ¥2,300,000)
• Keywords: 超精密ステージ / 非共振型超音波モータ / 可変構造制御 / 適応同定 / 駆動反力制御 / 非線形摩擦 / 予測制御 / 可変構造制御法 / 非線形摩擦補 / 周波数可変制御法 / 適応制御 / 非線形摩擦補償

Research Abstract

本研究の目的は、次世代半導体製造用の電子線露光に特化した超精密ステージシステムの開発とその実用化である。この目的に対して、駆動周波数可変制御法に基づくスリップフリー駆動法を提案し、ステージの高精度化とともに高耐久化を達成した。また,可変忘却要素を用いた適応同定法により,経年変化や動特性変化に対して適応的に最適性能を保持する制御系を実現した。同時に、ステージを搭載した反力制御装置付き6自由度アクティブ除振システムを構築し、制御帯域のみを設計パラメータとする同定と制御の統合化設計法を提案し、その有効性を実験により検証した。

Research Products

• [Journal Article] aterial Tester Using a Controlled Oscillator and an Inertial Mass (2008)
  • Author(s): S. Hashimoto and Y. Fujii
  • Journal Title: Journal of Key Engineering Materials Vols. 381-382 Pages: 457-460
  • Peer Reviewed
• [Journal Article] 一般化予測制御に基づくエンジン制御系の二段階設計法 (2008)
  • Author(s): 橋本,奥田,岡田,足立,丹羽,梶谷
  • Journal Title: 電気学会論文誌D Vol.128-D, No.3 Pages: 251-258
  • NAID: 10021133615
  • Peer Reviewed
• [Journal Article] Predictive Control of Piezoelectric Actuators with Friction Drive Mechanism (2008)
  • Author(s): S. Hashimoto, T. Kondo and Y. Watanabe
  • Journal Title: Proc. of 2008 IEEE International Ultrasonics Symposium (IUS2008) Pages: 1842-1845
  • Peer Reviewed
• [Journal Article] Integrated Design and Control of Precision XY Stages with Active Vibration Isolator (2008)
  • Author(s): M. Nitta and S. Hashimoto
  • Journal Title: Proc. of the 18th International Conference on Electrical Machines (ICEM'08) 862 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Identification and Control of Precision XY Stages with Active Vibration Suppression System (2008)
  • Author(s): M. Nitta and S. Hashimoto
  • Journal Title: Proc. of the 13th International Conference on Power Electronics and Motion Control Conference (EPE-PEMC2008) 650 Pages: 947-952
  • Peer Reviewed
• [Journal Article] Model Predictive Control of Precision Stages with Nonlinear Friction (2008)
  • Author(s): S. Hashimoto, S. Goka and T. Kondo
  • Journal Title: Proc. of IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM2008) TP-5 Pages: 829-833
  • Peer Reviewed
• [Journal Article] Material Tester Using a Controlled Oscillator and an Inertial Mass (2008)
  • Author(s): Seiji HASHIMOTO
  • Journal Title: Journal of Key Engineering Materials 381-382 Pages: 457-460
  • Peer Reviewed
• [Journal Article] Predictive Control of Piezoelectric Actuators with Friction Drive Mechanism (2008)
  • Author(s): Seiji HASHIMOTO
  • Journal Title: Proc. of 2008 IEEE International Ultrasonics Symposium (IUS2008) Pages: 1842-1845
  • Peer Reviewed
• [Journal Article] Integrated Design and Control of Precision XY Stages with Active Vibration Isolator (2008)
  • Author(s): Mayumi Nitta
  • Journal Title: Proc. of the 18th International Conference on Ele ctrical Machines (ICEM08) 862 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Identification and Control of Precision XYStages with Active Vibration Suppression System (2008)
  • Author(s): Mayumi Nitta
  • Journal Title: Proc. of the 13th International Conference on Power Electronics and Motion Control Conference ( EPE-PEMC2008) 650 Pages: 947-952
  • Peer Reviewed
• [Journal Article] Model Predictive Control of Precision Stages with Nonlinear Friction (2008)
  • Author(s): Seiji HASHIMOTO
  • Journal Title: Proc. of IEEE/ASME International Conference on Advanced. Intelligent Mechatronics(AIM2008) Pages: 829-833
  • Peer Reviewed
• [Journal Article] 一般化予測制御に基づくエンジン制御系の二段階設計法 (2008)
  • Author(s): 橋本 誠司
  • Journal Title: 電気学会論文誌D 128・3 Pages: 251-258
  • NAID: 10021133615
  • Peer Reviewed
• [Journal Article] Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver (2007)
  • Author(s): T. N. Minh, K. Ohishi, M. Takada, S. Hashimoto, K. Kosaka, H. Kubota, and T. Ohmi
  • Journal Title: IEEJ Trans. IA Vol.127-D, No.1 Pages: 44-51
  • NAID: 10018660455
  • Peer Reviewed
• [Journal Article] High-Precision Control of Linear Actuators with Nonlinear Friction (2007)
  • Author(s): S. Hashimoto and Y. Fujii
  • Journal Title: Proc. of 14th IEEE International Conference on Mechatronics and Machine Vision in Practice 2007 (M2VIP2007) 23 Pages: 62-67
  • Peer Reviewed
• [Journal Article] High-Precision Control of Linear Actuators based on Internal Model Control (2007)
  • Author(s): S. Hashimoto, Y. Fujii, M. Kigure and T. Ishikawa
  • Journal Title: Proc. of 2nd IEEE Conf. on Industrial Electronics and Applications (ICIEA2007) Pages: 2148-2153
  • Peer Reviewed
• [Journal Article] High-Precision Control of Linear Actuators with Nonlinear Friction (2007)
  • Author(s): Seiji Hashimoto
  • Journal Title: Proc. of 14th Int. Conf. on Mechatronics and Machine Vision in Practice 2007(M2VIP2007) 28 Pages: 62-67
  • Peer Reviewed
• [Journal Article] High-Precision Control of Linear Actuators based on Internal Model Control (2007)
  • Author(s): Seiji Hashimoto
  • Journal Title: Proc. of 2nd IEEE Conf. on Industrial Electronics and Applications (ICIEA2007) Pages: 2148-2153
  • Peer Reviewed
• [Journal Article] Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver (2007)
  • Author(s): T.N.Minh
  • Journal Title: 電気学会論文誌D 127・1 Pages: 44-51
• [Journal Article] High-Precision Control of Linear Actuators based on Internal Model Control (2007)
  • Author(s): Seiji Hashimoto
  • Journal Title: Proc.of 2nd IEEE Conf.on Industrial Electronics and Applications (ICIEA2007) (印刷中)(accepted)
• [Journal Article] 非共振型超音波アクチュエータ駆動精密ステージの位置決め制御における摩擦補償法 (2006)
  • Author(s): 橋本,大石,小坂,石川,久保田,大見
  • Journal Title: 電気学会論文誌D Vol.126-D, No.6 Pages: 719-725
  • NAID: 10017582385
  • Peer Reviewed
• [Journal Article] Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver (2006)
  • Author(s): T. N. Minh, K. Ohishi, M. Takata, S. Hashimoto, K. Kosaka, H. Kubota and T. Ohmi
  • Journal Title: Journal of Advanced Materials Research Vols.11-12 Pages: 121-124
  • Peer Reviewed
• [Journal Article] Variable Forgetting Factor-Based Friction Compensation Method of Precision Stages (2006)
  • Author(s): S. Goka, S. Hashimoto, K. Ohishi, T. Ishikawa, S. Adachi, K. Kosaka, H. Kubota and T. Ohmi
  • Journal Title: Proc. of SICE-ICASE International Joint Conference 2006 FE03-3 Pages: 3995-4000
  • Peer Reviewed
• [Journal Article] 非共振型超音波アクチュエータ駆動精密ステージの位置決め制御における摩擦補償法 (2006)
  • Author(s): 橋本 誠司
  • Journal Title: 電気学会論文誌D 126・6 Pages: 719-725
  • NAID: 10017582385
• [Journal Article] Variable Forgetting Factor-Based Friction Compensation Method of Precision Stages (2006)
  • Author(s): Sigeki Goka
  • Journal Title: Proc.of SICE-ICASE International Joint Conference 2006 FE03-3 Pages: 3995-4000
• [Journal Article] 内部モデル制御に基づく高応答・高精度制御手法 (2006)
  • Author(s): 木暮 雅之
  • Journal Title: 電気学会産業計測研究会資料 IIC-6-120(CD-ROM)
• [Presentation] 一定振幅・離散時間入力に基づく位置制御法 (2009)
  • Author(s): 橋本
  • Organizer: 平成20年度電気学会全国大会
  • Place of Presentation: 北海道
  • Year and Date: 2009-03-19
• [Presentation] 目標軌跡を考慮した可変構造制御時の過渡応答補償法 (2009)
  • Author(s): 橋本
  • Organizer: 平成20年度電気学会全国大会
  • Place of Presentation: 北海道
  • Year and Date: 2009-03-18
• [Presentation] 一定振幅離散値入力を用いた機械共振系の振動抑制制御法 (2008)
  • Author(s): 橋本
  • Organizer: 日本機械学会関東支部ブロック合同講演会
  • Place of Presentation: 栃木
  • Year and Date: 2008-09-20
• [Presentation] 角度依存摩擦特性を考慮したシステム同定法に関する検討 (2008)
  • Author(s): 橋本
  • Organizer: 平成20年度電気学会産業応用部門大会
  • Place of Presentation: 高知
  • Year and Date: 2008-08-28
• [Presentation] Disturbance Observer- Based Internal Model Control With An Adaptive Mechanism for Linear Actuators (2007)
  • Author(s): S. Hashimoto
  • Organizer: SICE Annual Conference 2007
  • Place of Presentation: 高松
  • Year and Date: 2007-09-19
• [Presentation] Disturbance Observer-Based Internal Model Control With An Adaptive Mechanism for Linear Actuators (2007)
  • Author(s): Masayuki Kigure
  • Organizer: Proc. of the SICE Annual Conference 2007
  • Place of Presentation: 日本(高松市)
  • Year and Date: 2007-09-19
• [Presentation] 可変忘却要素を用いた適応同定法による超精密ステージの摩擦補償法 (2007)
  • Author(s): 橋本
  • Organizer: 平成19年度電気学会産業応用部門大会
  • Place of Presentation: 大阪
  • Year and Date: 2007-08-21
• [Presentation] 可変忘却要素を用いた適応同定法による超精密ステージの摩擦補償法 (2007)
  • Author(s): 五箇 成輝
  • Organizer: 平成19年度電気学会産業応用部門大会講演論文集
  • Place of Presentation: 日本(大阪市)
  • Year and Date: 2007-08-21
• [Presentation] 浮上質量法に基づく粘弾性材料試験装置の開発 (2007)
  • Author(s): 橋本
  • Organizer: 平成19年度電気学会全国大会
  • Place of Presentation: 福岡
  • Year and Date: 2007-03-19
• [Presentation] 内部モデル制御に基づく高応答・高精度制御手法 (2006)
  • Author(s): 橋本
  • Organizer: 電気学会産業計測研究会
  • Place of Presentation: 東京
  • Year and Date: 2006-09-10