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Form measurement of the next-generation optical components by the dimension-conversion-type multi-beam optical angle sensor capable of detecting multiple information

Research Project

Project/Area Number 18H01345
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 18020:Manufacturing and production engineering-related
Research InstitutionTohoku University

Principal Investigator

Shimizu Yuki  東北大学, 工学研究科, 准教授 (70606384)

Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2020: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2019: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2018: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Keywords超精密計測 / 生産工学・加工学 / 角度センサ / フェムト秒レーザ / 生産工学 / 加工学
Outline of Final Research Achievements

Aiming to establish a technique for measurement of the profile of an ultra-precision free-form surface, a concept of the multi-beam angle sensor, in which the spatial position and the local slope of the point irradiated by a measurement laser beam in the group of the multiple laser beam can be obtained simultaneously, has been proposed. The theoretical investigation, as well as the development of the experimental setup including a fiber-based femtosecond laser source, has been carried out, and the feasibility of the proposed concept has been verified by the experimental results.

Academic Significance and Societal Importance of the Research Achievements

本研究での理論的・実験的検討結果から,次元変換型マルチビーム角度センサによって,傾斜角およびビーム位置という空間領域の多元情報を周波数領域で一括取得できることが実証され,その情報を活用した高精度自由曲面形状計測の実現可能性が見いだされた.角度情報を利用した高精度計測手法は国内外で注目を集めており,その高速化と測定不確かさ低減が課題となっているが,今後,光学系の拡張により本手法での2軸方向のスロープマップ同時取得が実現すると,学術的・工業的により高いインパクトを与える技術になるものと期待される.

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (18 results)

All 2021 2020 2019 2018 Other

All Journal Article (4 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 4 results) Presentation (11 results) (of which Int'l Joint Research: 3 results,  Invited: 3 results) Book (1 results) Remarks (2 results)

  • [Journal Article] An insight on optical metrology in manufacturing2020

    • Author(s)
      Shimizu Yuki、Chen Liang Chia、Kim Dae Wook、Chen Xiuguo、Li Xinghui、Matsukuma Hiraku
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Pages: 042003-042003

    • DOI

      10.1088/1361-6501/abc578

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Development of an Optical Angle Sensor With a Mode-Locked Femtosecond Laser Source for Surface Profile Measurement2020

    • Author(s)
      Shimizu Yuki、Takazono Shota、Kanda Yuri、Matsukuma Hiraku、Gao Wei、Inaba Hajime
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)

      Volume: -

    • DOI

      10.1115/lemp2020-8501

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] DEVELOPMENT OF AN OPTICAL ANGLE SENSOR WITH A MODE-LOCKED FEMTOSECOND LASER SOURCE FOR SURFACE PROFILE MEASUREMENT2020

    • Author(s)
      Yuki Shimizu, Shota Takazono, Hiraku Marsukuma, Hajime Inaba, Wei Gao
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing LEMP2020

      Volume: in press

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An Optical Angle Sensor Based on the Laser Autocollimation employing a Mode-locked Femtosecond Laser Source and a Single Mode Fiber Detector2019

    • Author(s)
      Shota Takazono, Yuki Shimizu, Hiraku Matsukuma, Yuri Kanda, Hajime Inaba and Wei Gao
    • Journal Title

      Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)

      Volume: 1

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] モード同期フェムト秒レーザを用いた「つながる」高精度角度計測2021

    • Author(s)
      清水裕樹
    • Organizer
      日本機械学会 IIP2021 情報・知能・精密機器部門(IIP部門)講演会 若手研究者招待講演
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Optical Metrology with a Mode-Locked Femtosecond Laser and Grating Reflectors2020

    • Author(s)
      Yuki Shimizu
    • Organizer
      International High-level Forum on High-end Measurement Instruments & The 11th International Symposium on Precision Engineering Measurements and Instrumentation
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Optical Angle Measurement with a Mode-Locked Femtosecond Laser2020

    • Author(s)
      Yuki Shimizu
    • Organizer
      International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM 2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] フェムト秒レーザ光源を用いた角度センサによる形状計測に関する研究-マルチビーム角度センサの設計と基礎特性評価-2020

    • Author(s)
      清水裕樹, 高園翔太, 神田悠利, 松隈啓, 稲場肇, 高偉
    • Organizer
      2020年度精密工学会秋季大会学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] An Optical Angle Sensor Based on the Laser Autocollimation employing a Mode-locked Femtosecond Laser Source and a Single Mode Fiber Detector2019

    • Author(s)
      Shota Takazono, Yuki Shimizu, Hiraku Matsukuma, Yuri Kanda, Hajime Inaba and Wei Gao
    • Organizer
      The 14th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 非直交型2軸ロイドミラー干渉計による2軸スケール回折格子パターニング -偏光制御ユニット改良によるパターン高精度化-2019

    • Author(s)
      清水 裕樹,真野 和樹,松永 雅教,村上 佑記,松隈 啓,高 偉
    • Organizer
      2019年度精密工学会秋季大会学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フェムト秒レーザを用いた光学式角度センサによる表面形状計測に関する研究2019

    • Author(s)
      高園翔大,清水裕樹,松隈 啓,神田悠利,稲場肇,高偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Self-calibration of Fizeau interferometer and linear scale in Littrow configuration2019

    • Author(s)
      Xin XIONG, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 高感度光学式角度センサに関する研究2019

    • Author(s)
      馬 旭,神田 悠利,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2019年度精密工学会東北支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] フェムト秒レーザ光源を用いた角度センサに関する研究-シングルモードファイバの適用-2018

    • Author(s)
      清水 裕樹,高園 翔太,中村 一貴,松隈 啓,高 偉
    • Organizer
      2019年度精密工学会春季大会学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 光学式角度センサを用いた表面形状計測に関する研究-光ファイバを受光部に用いた角度センサに関する検討-2018

    • Author(s)
      高園 翔太,清水 裕樹,松隈 啓,高 偉
    • Organizer
      精密工学会東北支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Book] 機械工学年鑑2020 (15. 加工学・加工機器 15.8 加工計測)2020

    • Author(s)
      清水裕樹
    • Publisher
      日本機械学会
    • Related Report
      2020 Annual Research Report
  • [Remarks] 東北大学 大学院工学研究科 ファインメカニクス専攻 高・清水・松隈研究室

    • URL

      http://web.tohoku.ac.jp/nanometrology/index.html

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Remarks] 高・清水研究室/精密ナノシステム研究センター

    • URL

      http://web.tohoku.ac.jp/nanometrology/

    • Related Report
      2018 Annual Research Report

URL: 

Published: 2018-04-23   Modified: 2022-01-27  

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