Power-autonomous microelectronics with in-chip energy harvester

• Project/Area Number: 18H01490
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: The University of Tokyo
• Principal Investigator: TOSHIYOSHI HIROSHI 東京大学, 生産技術研究所, 教授 (50282603)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Project Status: Completed (Fiscal Year 2020)
• Budget Amount: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2020: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000); Fiscal Year 2019: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2018: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
• Keywords: MEMS / エナジーハーベスタ / 振動発電 / エレクトレット / 半導体 / マイクロマシン / マイクロマシニング / シリコン

Outline of Final Research Achievements

New technologies on power-autonomous microelectronics have been studied using MEMS vibrational energy harvester to as an energy source to retrieve electrical power from the environmental vibrations. Intermittent operation of electronics including chip-microcomputer, FRAM memory and timer-IC is confirmed using the developed energy harvester. Wireless monitoring system for environmental temperature and humidity is developed as an application of power-autonomous electronics.

Academic Significance and Societal Importance of the Research Achievements

半導体微細加工技術の進展に伴ってエレクトロニクス素子のチップ小型化は急速な勢いで進んでいるが、それに電力を供給する側は依然として電源アダプタ・電池を使い続けている。そこで本研究ではＭＥＭＳ技術によって超小型エナジーハーベスタを構成し、環境振動から得たエネルギーで電力を自給自足するエレクトロニクス技術を構築し、ＩｏＴの発展に貢献する。

Research Products

• [Int'l Joint Research] 梨花女子大学(韓国)
• [Journal Article] Enhancement of Electrostatic Induction Current of Energy Harvester by Using a Gelatinized Ionic Liquid (2019)
  • Author(s): Yamada Shunsuke、Mitsuya Hiroyuki、Ono Simpei、Toshiyoshi Hiroshi、Fujita Hiroyuki
  • Journal Title: IEEJ Trans. SM Volume: 139 Issue: 1 Pages: 7-14
  • DOI: 10.1541/ieejsmas.139.7
  • NAID: 130007542083
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed
• [Journal Article] A MEMS Accelerometer for Sub-mG Sensing (2019)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu
  • Journal Title: Sensors and Materials Volume: 31 Issue: 9 Pages: 2883-2883
  • DOI: 10.18494/sam.2019.2122 10.18494/SAM.2019.2122
  • ISSN: 0914-4935, 2435-0869
  • Peer Reviewed / Open Access
• [Journal Article] Analytical Model for MEMS Electret Energy Harvester with Long-stroke Tip-sliding Electrodes (2019)
  • Author(s): Tohyama Yukiya、Honma Hiroaki、Durand Brieux、Sugiyama Tatsuhiko、Hashiguchi Gen、Toshiyoshi Hiroshi
  • Journal Title: Sensors and Materials Volume: 31 Issue: 9 Pages: 2779-2779
  • DOI: 10.18494/sam.2019.2388 10.18494/SAM.2019.2388
  • ISSN: 0914-4935, 2435-0869
  • Peer Reviewed
• [Journal Article] A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes (2019)
  • Author(s): Honma Hiroaki、Tohyama Yukiya、Mitsuya Hiroyuki、Hashiguchi Gen、Fujita Hiroyuki、Toshiyoshi Hiroshi
  • Journal Title: Journal of Micromechanics and Microengineering Volume: 29 Pages: 084002-084002
  • DOI: 10.1088/1361-6439/ab2371
  • Peer Reviewed
• [Journal Article] MEMS vibrational energy harvesters (2019)
  • Author(s): Hiroshi Toshiyoshi, Suna Ju, Hiroaki Honma, Chang-Hyeon Ji, and Hiroyuki Fujita
  • Journal Title: Sci. Techno. Adv. Mater. Volume: vol. 20, no. 1 Pages: 124-143
  • DOI: 10.1080/14686996.2019.1569828
  • Peer Reviewed / Open Access
• [Journal Article] Improvement of Energy Conversion Effectiveness and Maximum Output Power of Electrostatic Induction-type MEMS Energy Harvesters by using Symmetric Comb-electrode Structures (2018)
  • Author(s): Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi
  • Journal Title: Journal of Micromechanics and Microengineering Volume: vol.18 Pages: 64005-64017
  • Peer Reviewed
• [Journal Article] A Water Dissolvable Electrolyte with Ionic Liquid for Eco-friendly Electronics (2018)
  • Author(s): Shunsuke Yamada and Hiroshi Toshiyoshi
  • Journal Title: Small Volume: - Pages: 1800937-1800937
  • DOI: 10.1002/smll.201800937
  • Peer Reviewed
• [Journal Article] カリウムイオンエレクトレットを用いた新しいＭＥＭＳ技術の展開 (2018)
  • Author(s): 橋口 原、杉山達彦、年吉 洋
  • Journal Title: 応用物理 Volume: vol. 87、no. 6 Pages: 436-440
  • NAID: 130007715753
  • Peer Reviewed
• [Journal Article] 無線センサ用ＭＥＭＳ振動発電デバイス (2018)
  • Author(s): 年吉 洋
  • Journal Title: 非破壊検査 Volume: vol 67、No. 6 Pages: 283-290
  • Peer Reviewed
• [Presentation] A Double-Deck Structured MEMS Electrostatic Vibrational Energy Harvester for Minimal Footprint (2019)
  • Author(s): Hiroaki Honma and Hiroshi Toshiyoshi
  • Organizer: 32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)
  • Int'l Joint Research
• [Presentation] A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET (2019)
  • Author(s): Daisuke Yamane, Hiroaki Honma, and Hiroshi Toshiyoshi
  • Organizer: 32nd Int. Conf. on Micro Electro Mechanical Systems (MEMS 2019)
  • Int'l Joint Research
• [Presentation] A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester using Pure White Noise (2019)
  • Author(s): Hiroyuki Mitsuya, Hisayuki Ashizawa, Hiroaki Homma, Gen Hashiguchi, and Hiroshi Toshiyoshi
  • Organizer: 32nd IEEE International Conference on Microelectronic Test Structures
  • Int'l Joint Research
• [Presentation] An Electrostatic Vibrational MEMS Energy Harvester of Large Power Recover Effectiveness over 92% (2019)
  • Author(s): Hiroyuki Mitsuya, Hisayuki Ashizawa, Hiroaki Homma, Gen Hashiguchi, and Hiroshi Toshiyoshi
  • Organizer: Design, Integration, Test and Packaging of MEMS and MOEMS
  • Int'l Joint Research
• [Presentation] A 1.3 Milliwatts Electrostatic Vibrational Energy Harvester with Minimal Reactive Power through Reduced Internal Stray Capacitances (2019)
  • Author(s): Hiroaki Honma, Yukiya Tohyama, and Hiroshi Toshiyoshi
  • Organizer: 20th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Int'l Joint Research
• [Presentation] Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit (2019)
  • Author(s): Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hiroshi Toshiyoshi, and Daisuke Yamane
  • Organizer: 20th International Conference on Solid-State Sensors, Actuators and Microsystems
  • Int'l Joint Research
• [Presentation] Electret assisted low-power bidirectional electrostatic microspeakers (2019)
  • Author(s): Chikako Sano, Manabu Ataka, Gen Hashiguchi, and Hiroshi Toshiyoshi
  • Organizer: 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Int'l Joint Research
• [Presentation] Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit (2019)
  • Author(s): Y. Tohyama, H. Honma, N. Ishihara, H. Sekiya, H. Toshiyoshi, and D. Yamane
  • Organizer: The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Int'l Joint Research
• [Presentation] Power Enhancement through Reduced Stray Capacitance by Airborne Electrical Interconnection for MEMS Electrostatic Vibrational Energy Harvester (2019)
  • Author(s): Hiroaki Honma and Hiroshi Toshiyoshi
  • Organizer: The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Int'l Joint Research
• [Presentation] ＭＥＭＳエレクトレット振動発電デバイスの産業化 (2019)
  • Author(s): 三屋裕幸、芦澤久幸、本間浩章、藤田博之、橋口 原、年吉 洋
  • Organizer: 第６６回 応用物理学会春季学術講演会
  • Invited
• [Presentation] エレクトレット電位増強による非定常振動発電特性の向上 (2019)
  • Author(s): 本間浩章、遠山幸也、年吉 洋
  • Organizer: 電気学会Ｅ部門総合研究会
• [Presentation] エレクトレット薄膜を用いた静電誘導型ＭＥＭＳ振動発電 (2019)
  • Author(s): 年吉 洋、橋口 原
  • Organizer: 日本表面真空学会
• [Presentation] エネルギー回収効率９２％のＭＥＭＳ振動エナジーハーベスタ (2019)
  • Author(s): 三屋裕幸、芦澤久幸、本間浩章、橋口 原、年吉 洋
  • Organizer: 電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] 1.3ｍＷ級ＭＥＭＳ環境振動発電素子とＩｏＴ応用大容量キャパシタへの高速充電 (2019)
  • Author(s): 本間浩章、年吉 洋
  • Organizer: 電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] エレクトレットを利用した低消費電力静電マイクロスピーカー (2019)
  • Author(s): 佐野智華子、安宅 学、橋口 原、年吉 洋
  • Organizer: 電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] ＭＥＭＳ振動発電素子の浮遊容量削減法の検証 (2019)
  • Author(s): 池野 翔、本間浩章、遠山幸也、年吉 洋
  • Organizer: 電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] ダブルデッキ構造によるＭＥＭＳ振動発電素子の小型化 (2019)
  • Author(s): 本間浩章、年吉 洋
  • Organizer: 応用物理学会・集積化ＭＥＭＳ技術研究会・第１１回集積化ＭＥＭＳシンポジウム
• [Presentation] MEMS Vibrational Energy Harvesters using High-Density Solid-Ion Electret for IoT Applications (2018)
  • Author(s): Hiroshi Toshiyoshi
  • Organizer: 13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)
  • Int'l Joint Research / Invited
• [Presentation] MEMS Vibrational Energy Harvester for IoT Wireless Sensor Applications (2018)
  • Author(s): Hiroshi Toshiyoshi
  • Organizer: 2018 International Conference on Smart Sensors (ICSS 2018)
  • Int'l Joint Research / Invited
• [Presentation] ower Density Enhancement of Electret Based Energy Harvester with Symmetric Comb-Electrode Structure (2018)
  • Author(s): Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi
  • Organizer: Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors
  • Int'l Joint Research
• [Presentation] Development of a metal-cantilever electrostatic vibration power generator combined with potassium ion electret technique (2018)
  • Author(s): Hideaki Koga, Hiroyuki Mitsuya, Hiroshi Toshiyoshi, Yuji Toyama, Tatsuhiko Sugiyama, Gen Hashiguchi
  • Organizer: Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment
  • Int'l Joint Research
• [Presentation] MEMS Vibrational Energy Harvesters for Perpetual Electronics (2018)
  • Author(s): Hiroshi Toshiyoshi
  • Organizer: 2018 International Conference on Solid State Devices and Materials
  • Int'l Joint Research / Invited
• [Presentation] A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations (2018)
  • Author(s): Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hidehiko Sekiya, Hiroshi Toshiyoshi, and Daisuke Yamane
  • Organizer: 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Int'l Joint Research
• [Presentation] A Power-Density-Enhanced MEMS Electrostatic Energy Harvester with Symmetrized High-Aspect Ratio Comb Electrodes (2018)
  • Author(s): Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, and Hiroshi Toshiyoshi
  • Organizer: 18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
  • Int'l Joint Research
• [Patent(Industrial Property Rights)] 発電素子の製造方法、および、発電素子 (2020)
  • Inventor(s): 年吉 洋（東大）、下村典子（鷺宮）、芦澤久幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、下村典子（鷺宮）、芦澤久幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2020-057713
  • Filing Date: 2020
• [Patent(Industrial Property Rights)] 振動発電素子 (2019)
  • Inventor(s): 年吉 洋、藤田博之、芦澤久幸、 三屋裕幸、石橋和徳
  • Industrial Property Rights Holder: 年吉 洋、藤田博之、芦澤久幸、 三屋裕幸、石橋和徳
  • Industrial Property Rights Type: 特許
  • Filing Date: 2019
  • Overseas
• [Patent(Industrial Property Rights)] 環境発電装置 (2019)
  • Inventor(s): 矢嶋赳彬、年吉 洋、本間浩章、遠山幸也、三屋裕幸
  • Industrial Property Rights Holder: 矢嶋赳彬、年吉 洋、本間浩章、遠山幸也、三屋裕幸
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2019-116310
  • Filing Date: 2019
• [Patent(Industrial Property Rights)] 静電型デバイス、静電型デバイス中間体および製造方法 (2019)
  • Inventor(s): 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2019-106231
  • Filing Date: 2019
• [Patent(Industrial Property Rights)] 静電型デバイスおよび静電型デバイス製造方法 (2019)
  • Inventor(s): 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2019-106230
  • Filing Date: 2019
• [Patent(Industrial Property Rights)] 振動発電素子 (2019)
  • Inventor(s): 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2019-008337
  • Filing Date: 2019
• [Patent(Industrial Property Rights)] 櫛歯型素子の製造方法 (2018)
  • Inventor(s): 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2018-215631
  • Filing Date: 2018
• [Patent(Industrial Property Rights)] 振動発電素子 (2018)
  • Inventor(s): 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Holder: 年吉 洋（東大）、本間浩章（東大）、三屋裕幸（鷺宮）
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2018-215630
  • Filing Date: 2018