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High performance sensors based on frequency delta-sigma modulation using a THz oscillator

Research Project

Project/Area Number 18H01495
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionUniversity of Toyama

Principal Investigator

Maezawa Koichi  富山大学, 学術研究部工学系, 教授 (90301217)

Co-Investigator(Kenkyū-buntansha) 安藤 浩哉  豊田工業高等専門学校, 情報工学科, 教授 (30212674)
Project Period (FY) 2018-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2021: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2020: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2019: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2018: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
KeywordsΔΣ変調 / 共鳴トンネル / THz / センサ / 周波数ΔΣ変調 / 発振器 / マイクロフォン / FPGA / ノイズフロア
Outline of Final Research Achievements

The purpose of this study is to develop novel high performance sensors based on frequency delta-sigma modulation (FDSM) scheme using a THz oscillator. The FDSM is a core of the analog-digital converters featuring wide frequency bandwidth as well as high resolution, wide dynamic range. This can be applied to high performance sensors when we use an oscillator whose oscillation frequency depends on external physical paramters. In this study, we demonstrated high performance microphone sensors based on a cavity resonator oscillator, and also proposed a novel application of such sensors, such as atomic force microscopes.

Academic Significance and Societal Importance of the Research Achievements

本研究で対象とした周波数ΔΣ変調方式センサは、高分解能・高ダイナミックレンジ・広帯域であるとともに、本質的にデジタル出力であるという特徴を持つ。高性能なセンサにおける問題点の一つが高性能なアナログデジタル変換を必要とする点であり、本研究成果はこの点で大きな意義がある。また、本センサは外部物理量で周波数が変化する発振器ができれば様々な物理量のセンシングに適用でき、その効果は大きい。例えば、本研究で対象としたマイクロフォンセンサはメンブレンの変位をセンサする位置センサとしても利用でき、幅広い応用が期待できる。

Report

(5 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (31 results)

All 2021 2020 2019 2018

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 4 results) Presentation (23 results) (of which Int'l Joint Research: 7 results,  Invited: 1 results)

  • [Journal Article] Experimental Demonstration of a Hard-Type Oscillator Using a Resonant Tunneling Diode and Its Comparison with a Soft-Type Oscillator2021

    • Author(s)
      MAEZAWA Koichi、ITO Tatsuo、MORI Masayuki
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E104.C Issue: 12 Pages: 685-688

    • DOI

      10.1587/transele.2021ECS6002

    • NAID

      130008123357

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2021-12-01
    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Oscillator Phase Noise on Frequency Delta Sigma Modulators with a High Oversampling Ratio for Sensor Applications2021

    • Author(s)
      MAEZAWA Koichi、MORI Masayuki
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E104.C Issue: 9 Pages: 463-466

    • DOI

      10.1587/transele.2020ECS6026

    • NAID

      130008082171

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2021-09-01
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Transition Dynamics of Multistable Tunnel-Diode Oscillator Used for Effective Amplitude Modulation2021

    • Author(s)
      NARAHARA Koichi、MAEZAWA Koichi
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E104.C Issue: 1 Pages: 40-43

    • DOI

      10.1587/transele.2020ECS6012

    • NAID

      130007965112

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2021-01-01
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Noise Floor Reduction in Frequency Delta-Sigma Modulation Microphone Sensors2021

    • Author(s)
      Maezawa Koichi、Mori Masayuki、Andoh Hiroya
    • Journal Title

      Sensors

      Volume: 21 Issue: 10 Pages: 3470-3470

    • DOI

      10.3390/s21103470

    • NAID

      120007036355

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Delta-sigma modulation microphone sensors employing a resonant tunneling diode with a suspended microstrip resonator2020

    • Author(s)
      Maezawa Koichi、Ito Tatsuo、Mori Masayuki
    • Journal Title

      Sensor Review

      Volume: 40 Issue: 5 Pages: 535-542

    • DOI

      10.1108/sr-03-2020-0044

    • NAID

      120006887780

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Study on impedance matching and maximum wireless power transfer efficiency of circuits with resonant coupling based on simplified <i>S</i>-matrix2019

    • Author(s)
      Andoh Hiroya, Tsuzuki Keita, Oikawa Dai, Sugiura Toko, Tsukamoto Takehiko, Maezawa Koichi
    • Journal Title

      IEICE Electronics Express

      Volume: 16 Issue: 11 Pages: 20190156-20190156

    • DOI

      10.1587/elex.16.20190156

    • NAID

      130007661786

    • ISSN
      1349-2543
    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Possibilities of Large Voltage Swing Hard-Type Oscillators Based on Series-Connected Resonant Tunneling Diodes2018

    • Author(s)
      MAEZAWA Koichi、MORI Masayuki
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E101.C Issue: 5 Pages: 305-310

    • DOI

      10.1587/transele.E101.C.305

    • NAID

      130006729735

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2018-05-01
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of a hard-type oscillator using series-connected tunnel diodes2018

    • Author(s)
      Narahara Koichi、Maezawa Koichi
    • Journal Title

      IEICE Electronics Express

      Volume: 15 Issue: 10 Pages: 20180355-20180355

    • DOI

      10.1587/elex.15.20180355

    • NAID

      130006744393

    • ISSN
      1349-2543
    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Presentation] A microwave chaos generator circuit employing a resonant tunneling diode2021

    • Author(s)
      Umer Farooq, Masayuki Mori, Koichi Maezawa
    • Organizer
      2nd International Electronic Conference (IEC2021) - Enabling Nanoelectronics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 周波数ΔΣ変調方式変位センサを用いたAFM/表面粗さ計の可能性2021

    • Author(s)
      前澤 宏一, 森 雅之
    • Organizer
      Future Technologies from HIMEJI 2021、第13回集積化MEMSシンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] TE113モードを用いたFMΔΣ変調方式マイクロフォンセンサの特性評価2021

    • Author(s)
      中干場 翔伍、森 雅之、前澤 宏一
    • Organizer
      令和3年度(2021年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 共鳴トンネルダイオードを用いた周波数ΔΣ方式マイクロフォンセ ンサの 実験的検証2021

    • Author(s)
      相澤 一仙、 森 雅之、 前澤 宏一
    • Organizer
      令和3年度(2021年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Resonant tunneling hard-type oscillators for THz applications2021

    • Author(s)
      Koichi Maezawa, Masayuki Mori, Hiroya Andoh, and Taiichi Otsuji
    • Organizer
      東北大学 電気通信研究所 令和2年度共同プロジェクト研究発表会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 共鳴トンネルダイオードを用いたハードタイプ発振器の位相ノイズ特性評価2020

    • Author(s)
      伊藤多津生、森雅之、前澤宏一
    • Organizer
      令和2年度(2020年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ループフィードバック型発振器を用いた周波数ΔΣマイクロフォンセンサの検討2020

    • Author(s)
      田端一貴、森雅之、前澤宏一
    • Organizer
      令和2年度(2020年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Resonant Tunneling Chaos Generator on a Printed Circuit Board (PCB) Employing Bonding Wires for High Quality Inductors2020

    • Author(s)
      UMER Farooq, Masayuki MORI, Koichi MAEZAWA
    • Organizer
      令和2年度(2020年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Fluidic Self-Assembly用Geバンプ接続のマイクロ波/ミリ波特性について2020

    • Author(s)
      大寺悠介、森雅之、前澤宏一
    • Organizer
      令和2年度(2020年)応用物理学会 北陸・信越支部 学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 周波数ΔΣ変調方式センサにおける位相ノイズのシンプルなモデル化とその実験的検証2020

    • Author(s)
      前澤 宏一, 森 雅之
    • Organizer
      Future Technologies from KUMAMOTO ONLINE、第12回集積化MEMSシンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Resonant tunneling diode oscillators for high performance sensors2020

    • Author(s)
      Koichi Maezawa
    • Organizer
      東北大学 電気通信研究所 令和元年度共同プロジェクト研究発表会
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Resonant Tunneling Delta Sigma Modulation Ultrasound Sensors Using A Suspended Microstrip Disk Resonator2019

    • Author(s)
      Koichi Maezawa and Masayuki Mori
    • Organizer
      13th Topical Workshop on Heterostructure Microelectronics (TWHM 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Spurious Free Oscillations of the Resonant Tunneling Hard-Type Oscillators Having a Simple Capacitor Coupled Trigger Input2019

    • Author(s)
      Tatsuo Ito, Masayuki, Mori and Koichi Maezawa
    • Organizer
      13th Topical Workshop on Heterostructure Microelectronics (TWHM 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 共鳴トンネルダイオード発振器の回路構成と回路パラメータの位相ノイズへの影響2019

    • Author(s)
      吉田素将、森 雅之、前澤宏一
    • Organizer
      令和元年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 周波数⊿Σ型振動センサ―用発振器に対する基板歪みの効果2019

    • Author(s)
      本村彰啓、前澤宏一、森 雅之
    • Organizer
      令和元年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 周波数⊿Σ変調方式センサに対する発振器位相ノイズの影響2019

    • Author(s)
      前澤宏一、森雅之
    • Organizer
      電子情報通信学会、電子デバイス研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Resonant tunneling hard-type oscillators having a Schottky diode trigger circuit for stable and large voltage swing operation2018

    • Author(s)
      Koichi Maezawa, Motoyuki Yoshida, Masayuki Mori
    • Organizer
      The 42nd Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 1-MHz strain detection using resonant tunneling delta-sigma modulation sensors2018

    • Author(s)
      K. Maezawa, T. Tajika, M. Mori
    • Organizer
      2018 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Koichi Maezawa, Motoyuki Yoshida, Masayuki Mori2018

    • Author(s)
      Operating Mechanism and Voltage Swing Enhancement of the Hard-type Oscillators Based on Series-connected RTDs
    • Organizer
      Progress In Electromagnetics Research Symposium (PIERS 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 周波数⊿Σ変換方式を用いたマイクロフォンセンサの帯域内雑音低減2018

    • Author(s)
      村谷龍星、前澤宏一、森雅之
    • Organizer
      平成30年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 空洞共振器を用いた周波数⊿Σ型振動センサの提案2018

    • Author(s)
      本村彰啓、前澤宏一、島田知輝、山川雅輝、村谷龍星、森雅之
    • Organizer
      平成30年度応用物理学会北陸・信越支部学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 共鳴トンネルダイオードを用いた硬い発振器2018

    • Author(s)
      吉田素将、森雅之、前澤宏一
    • Organizer
      第4回有機・無機エレクトロニクスシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 周波数ΔΣ変調型センサのための10GS/s FPGA測定系の構築2018

    • Author(s)
      前澤宏一、山岡昂博、森雅之
    • Organizer
      電子情報通信学会、 電子デバイス研究会
    • Related Report
      2018 Annual Research Report

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Published: 2018-04-23   Modified: 2023-01-30  

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