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Nanostructure creation and its functionalization

Research Project

Project/Area Number 19206016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

ISHIHSRA Sunao  The University of Tokyo, 大学院・工学系研究科, 教授 (00422329)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Hiroshi  日本電信電話株式会社, NTT物性科学基礎研究所, 研究部長 (60374071)
WARISAWA ShinーIchi  東京大学, 大学院・工学系研究科, 准教授 (20262321)
DELAUNEY JeanーJacques  東京大学, 大学院・工学系研究科, 准教授 (80376516)
KOMETANI Reo  東京大学, 大学院・工学系研究科, 助教 (90466780)
Project Period (FY) 2007 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥47,320,000 (Direct Cost: ¥36,400,000、Indirect Cost: ¥10,920,000)
Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2009: ¥11,440,000 (Direct Cost: ¥8,800,000、Indirect Cost: ¥2,640,000)
Fiscal Year 2008: ¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Fiscal Year 2007: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Keywordsナノメカニクス / 三次元ナノ構造 / ナノ振動子 / センシングデバイス / ナノ加工 / ナノ計測 / 機械振動共振特性 / 電子ビーム・イオンビーム加工 / マイクロ・ナノデバイス / ナノ加工・計測 / 機械共振特性 / 電子ビーム・イオンビーム / ナノ加工・ナノ計測 / ナノレゾネータ / センシング / 機械共振特性評価 / 自己組織化 / 微小共振器 / 機械特性評価 / 高Q値
Research Abstract

Due to their small scales, nanomechanical structures have great potential in realizing innovative mechanical devices and machines utilizing new properties and functions. Towards pioneering mechanical engineering research field named Na"nomechanics", fundamental investigations into fabrication, measurement and characterization technologies to evaluate the dynamic properties of nanomachanical resonators and their applications to resonator-based sensing devices were conducted.

Report

(5 results)
  • 2010 Final Research Report ( PDF )
  • 2009 Annual Research Report   Self-evaluation Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (101 results)

All 2010 2009 2008 2007 Other

All Journal Article (29 results) (of which Peer Reviewed: 19 results) Presentation (63 results) Remarks (3 results) Patent(Industrial Property Rights) (6 results)

  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Vac.Sci.Technol.B 28

    • Related Report
      2010 Final Research Report
  • [Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Adv.Mech.Des.Sys.Man. 4

      Pages: 948-948

    • NAID

      130000335368

    • Related Report
      2010 Final Research Report
  • [Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • NAID

      210000068736

    • Related Report
      2010 Final Research Report
  • [Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focusedion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Microelectronic Eng. 87

      Pages: 1044-1048

    • Related Report
      2010 Final Research Report
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Related Report
      2010 Final Research Report
  • [Journal Article] Evaluation of Thermal-mechanical Vibration Amplitude and Mechanical Properties for Carbon Nanopillars Using Scanning Electron Microscopy2009

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Related Report
      2010 Final Research Report
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066954

    • Related Report
      2010 Final Research Report
  • [Journal Article] Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams2009

    • Author(s)
      R.Kometani, S.Ishihara
    • Journal Title

      Sci.Technol.Adv.Mater. 10

    • Related Report
      2010 Final Research Report
  • [Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      J.Vac.Sci.Technol. B27

      Pages: 2698-2701

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H. Ashiba, S. Warisawa, S. Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K. Tamaru, K. Nonaka, M. Nagase, H. Yamaguchi, S. Warisawa, S. Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066954

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000066954

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Thermal-mechanical Vibration Amplitude and Mechanical Properties for Carbon Nanopillars Using Scanning Electron Microscopy2009

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H.Ashiba, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam2009

    • Author(s)
      米谷玲皇, T.Ichihashi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000066925

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The fabrication of aligned pairs of gold nanowires in SO2 films by ion irradiation2009

    • Author(s)
      K.Awazu, X.Wang, T.Komatsubara, J.Watanabe, Y.Matsumoto, 割澤伸一, 石原直
    • Journal Title

      Nanotechnology 20

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoelectromechanical device fabrications by 3-D nantechnology using focused-ionbeams2009

    • Author(s)
      R.Komentani, 石原直
    • Journal Title

      Science and Technology of Advanced Materials 10

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth characteristics evaluations on the 3D nansotructure fabrication by the high accuracy control of focused-ion-beam2009

    • Author(s)
      米谷玲皇, T.Hoshino, 割澤伸一, 石原直
    • Journal Title

      Microelectronic Engineering 86

      Pages: 552-555

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Journal Title

      Journal of Vacuum Science and Technology B27

      Pages: 2698-2701

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 47

      Pages: 5116-5119

    • Related Report
      2010 Final Research Report
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H.Yamaguchi, K.Kato, Y.Nakai, K.Onomitsu, S.Warisawa, S.Ishihara
    • Journal Title

      App.Phys.Lett. 92

    • Related Report
      2010 Final Research Report
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kato, Y. Nakai, K. Onomitsu, S. Warisawa, S. Ishihara
    • Journal Title

      App.Phys.Lett. 92

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition2008

    • Author(s)
      K. Nonaka, K. Tamaru, M. Nagase, H. Yamaguchi, S. Warisawa and S. Ishihara
    • Journal Title

      Japanese Journal of Applied Physics Vol. 47, No. 6

      Pages: 5116-5119

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-Situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope2008

    • Author(s)
      R. Kometani, S. Ishihara, T. Kaito and S. Matsui
    • Journal Title

      Applied Physics Express Vol. 1

    • NAID

      10025080476

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Eduction Position Control of Incorporated Gallium in the Diamond-like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition2008

    • Author(s)
      R. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito and S. Matsui
    • Journal Title

      Japanese Journal of Applied Physics Vol. 47, No. 6

      Pages: 5032-5035

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kaito, Y. Nakai, K, Onomitsu, S. Warisawa and S. Ishihara
    • Journal Title

      Applied Physics Letters Vol. 92

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Resistivity change of the diamondlike carbon, deposited by focusedion-beam Chemical vapor deposition, induced by the annealing treatmen2008

    • Author(s)
      R. Kometani, T. Ichihashi, K. Kanda, T. Suzuki, K, Niihara, S. Ishihara, T. Kaito and S. Matsui
    • Journal Title

      Journal of Vacuum Science and Technology B26, 6

      Pages: 2628-2631

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillhrs Grown by Focused-Ion-Beam-lnduced Chemical Vapor Deposition2008

    • Author(s)
      Keiichiro NONAKA, Kojiro TAMARU, Masao NAGASE, Hiroshi YAMAGUCHI, Shin'ichi WARISAWA, Sunao ISHIHARA
    • Journal Title

      Japanese Journal of Applied Physics (掲載確定)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Giant magneto-piezoresistance and internal friction in a two-dimensional electron system2007

    • Author(s)
      H. Yamaguchi, H. Okamoto, Y. Maruta, S. Ishihara, S. Miyashita, and Y. Hirayama
    • Journal Title

      Part 2 Express Letter, Japanese Journal of Applied Physics 46,27

    • NAID

      210000064035

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf.on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010).
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-03
    • Related Report
      2010 Final Research Report
  • [Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-02
    • Related Report
      2010 Final Research Report
  • [Presentation] AFM振動励起法による単層グラフェンの振動特性評価2010

    • Author(s)
      畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法により作製した3次元DLCナノ構造の機能化2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2010年度精密工学会春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法により堆積したダイアモンドライクカーボンのピエゾ抵抗効果特性評価2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      2010年度精密工学会春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Piezoresistance Effect of Diamond-Like Carbon Deposited by FIB2009

    • Author(s)
      遊佐幸樹, 米谷玲皇, 石原直, 割澤伸一
    • Organizer
      19th Academic Symposium of MRS-Japan 2009
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2009-12-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nanomanufacturing Tool Fabrications by Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dynamic Property Evaluation of Nano/Micro Mechanical Resonators Utilizing Frequency-modulated Secondary Electron Singnals2009

    • Author(s)
      H.Ashiba, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Homogeneous Material Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      International Symposium on the Physics of Excitation-assisted Nano-processes (ISPEN2009)
    • Place of Presentation
      Diwa Roynet Hotel Wakayama, Wakayama, Japan
    • Year and Date
      2009-11-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd International Microprocesses and Nanotechnology Conf.(MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-19
    • Related Report
      2010 Final Research Report
  • [Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd Intn'l Microprocesses and Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Related Report
      2010 Final Research Report
  • [Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion -Beam Chemical Vapor Deposition2009

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      the 22nd Intn'l Microprocesses and Nano- technology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Related Report
      2010 Final Research Report
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N.Kitajima, H.Okamoto, T.Kamada, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      22nd Intn'l Microprocesses & Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Related Report
      2010 Final Research Report
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N. Kitajima, H. Okamoto, T. Kamada, K. Onomitsu, S. Warisawa, S. Ishihara, H. Yamaguchi
    • Organizer
      22nd Intern'l Microprocesses & Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2009-11-18
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N.Kitajima, H.Okamoto, T.Kamada, K.Onomitsu, 割澤伸一, 石原直, Hiroshi Yamaguchi
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, S.Inhihara
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] The Three-Dimensional Nanostructure Growth Characteristics Evaluations for a Development of Computer Pattern Generator on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第1回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-10-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dynamic Characteristics Analysis Method on a Nanomechanical Device Fabrication Using FIB-CVD2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第1回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-10-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, BelgiumS
    • Year and Date
      2009-09-30
    • Related Report
      2010 Final Research Report
  • [Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, Belgium
    • Year and Date
      2009-09-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dynamic characterization method of GaAs membrane resonator by direct excitation using scanning probe microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagnse, H.Yamaguchi, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, Belgium
    • Year and Date
      2009-09-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] その場プローブ電流計測による集束イオンビーム3次元ナノ構造成長特性評価2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] FIB-CVDによる振動特性可変レゾネータの作製2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 表面改質によるシリコンレゾネータのQ値変化の評価2009

    • Author(s)
      清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluations of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
    • Place of Presentation
      Marco Island, Florida, USA
    • Year and Date
      2009-05-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluations of The Hopping Growth Characteristics on 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 53rd Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
    • Place of Presentation
      Marco Island, Florida, USA
    • Year and Date
      2009-05-25
    • Related Report
      2010 Final Research Report
  • [Presentation] 集束イオンビーム化学気相成長法により堆積したDLCからのGa誘起グラファイト薄膜形成2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] FIB-CVDナノ機械デバイス動特性評価のための解析モデル構築法2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 表面状態に起因するシリコンレゾネータの振動特性2009

    • Author(s)
      清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 走査プローブによるGaAsメンブレンマイクロレゾネ一夕の動的特性評価2009

    • Author(s)
      田丸耕二郎, 野中啓一郎, 永瀬雅夫, 山口浩司, 割澤伸一, 米谷玲皇, 石原直
    • Organizer
      2009年春季 第56回応用物理関係連合講演会
    • Place of Presentation
      筑波大学,茨城
    • Related Report
      2008 Annual Research Report
  • [Presentation] 集束イオンビーム3次元ナノ構造形成における成長モード評価2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年春季 第56回応用物理関係連合講演会
    • Place of Presentation
      筑波大学,茨城
    • Related Report
      2008 Annual Research Report
  • [Presentation] Evaluation Method for Quality Factor of Nano-resonator by Electron Beam2008

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka
    • Related Report
      2010 Final Research Report
  • [Presentation] Evaluation of Thermal-mechanical Vibration Amplitude Using Scanning Electron Microscopy Images2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka.
    • Related Report
      2010 Final Research Report
  • [Presentation] Direct Actuation of GaAs Membrane Using Microprobe of SPM2008

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21^<st> Microprocesses and Nanotechnology Conf.(MNC2008)
    • Place of Presentation
      Fukuoka
    • Related Report
      2010 Final Research Report
  • [Presentation] Drastic Improvement in mechanical properties of micromechanical resonators using a strain-engineered heterostructure2008

    • Author(s)
      K.Kato, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      15^<th> International Conference on Molecular Beam Epitaxy (MBE2008)
    • Place of Presentation
      at the University of British Columbia, Vancouver, Canada
    • Related Report
      2010 Final Research Report
  • [Presentation] The Three-Dimensional Nano-Electromechanical Tool Fabrications by FIB-CVD for the Nono-Factory Creation2008

    • Author(s)
      R. Kometani and S. Ishihara
    • Organizer
      The Fouth International Nanotechnoligy Conference on Communication and Cooperation(INC4)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Resistivity change of the diamondlike carbon, deposited by focusedion-beam chemical vapor deposition, induced by the annealing treatment2008

    • Author(s)
      R. Kometani, T. Ichihashi, K. Kanda, T. Suzuk, K. Niihara, S. Ishihara, T. Kaito, S. Matsui
    • Organizer
      The 52nd International Conference on Electron, Ion and Photon Beam technoligy and Nanoabrication(EIPBN2008)
    • Place of Presentation
      Portland, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Drastic Improvement in mechanical properties of microechanical resonators using a strain-engineered heterostructure2008

    • Author(s)
      K. Kato, K. Onomitsu, S. Warisawa, S. Ishihara, H. Yamaguchi
    • Organizer
      15th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      Vancouver, Canada
    • Related Report
      2008 Annual Research Report
  • [Presentation] Evaluation of Thermal-Machanical Vibration Amplitude Using Scanning Electron Microscopy Image2008

    • Author(s)
      K. Nonaka, K. Tamaru, M. Nagase, H. Yamaguchi, S. Warisawa, S.Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Direct Actuation of GaAs Membrane Using Microprobe of SPMA2008

    • Author(s)
      K. Tamaru, K. Nonaka, M. Nagase, H. Yamaguchi, S. Warisawa, S.Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Graphite Shell Film Fromation induced by Eduction Phenomenon of Ga Implanted by Focused-ion-beam2008

    • Author(s)
      R. Kometani, T. Ichihashi, S. Warisawa and S. Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Rapid Directed Self-Assembly of Cylinder-Forming Diblock Copolymers2008

    • Author(s)
      T. Yamaguchi, Y. Ozaki, J. Hayashi, K. Yamazaki, S. Waeisawa, S. Ishihara, and H. Yamaguchi
    • Organizer
      International Symposium on Engineering Micro-/Nano-Materials Based on Self-Assembling and Self-organization(ISEM2008)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] lmprovement Charecteristics of micromechanical resonators by epitaxially-induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kato, Y. Nakai, K. Onomitsu, S. Warisawa, S. Ishihara
    • Organizer
      International Symposium on Novel Nano-Electro-Mechanical 3D Structures: Fabrication and Properties(NT2008)
    • Place of Presentation
      Ishikawa, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano electro-mechanical device fabrication by 3-D nanotechnoligy using focused-ion-beam2008

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      International Symposium on Novel Nano-Electro-Mechanical 3D Structures: Fabrication and Properties(NT2008)
    • Place of Presentation
      Ishikawa, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] ブロック共重合体の面内ハーフシリンダー相の高速配向2008

    • Author(s)
      山口徹, 尾崎秦野, 林順三, 山崎謙治, 割澤伸一, 石原直, 山口浩司
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Related Report
      2008 Annual Research Report
  • [Presentation] 静的変位解放によるシリコンカンチレバーに振動特性評価2008

    • Author(s)
      野中啓一郎, 田丸耕二郎, 永瀬雅夫, 山口浩司, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Related Report
      2008 Annual Research Report
  • [Presentation] GaASメンブレンのマイクロプローブによる加振と振幅検出2008

    • Author(s)
      田丸耕二郎, 野中啓一郎, 永瀬雅夫, 山口浩司, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Related Report
      2008 Annual Research Report
  • [Presentation] 集束イオンビーム注入Gaの析出現象により引起されるグラファイト薄膜の形成2008

    • Author(s)
      米谷玲皇, 市橋鋭也, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Related Report
      2008 Annual Research Report
  • [Presentation] Control of Young's Modulus fbr Carbon Nanopillars Grown by Focused Ion BeamInduced Chemical Vapor Deposition2007

    • Author(s)
      K. Nonaka, K. Tamaru, M. Nagase, H. Yamaguchi, S. Warisawa, and S. lshihara
    • Organizer
      20th International Microprocesses anq Nanotechnology Conference
    • Place of Presentation
      Kyoto,Japan
    • Year and Date
      2007-11-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] Two-Dimensional Arrangement of Vertically Oriented Cylindrical Domains of Diblock Copolymers Using Graphoepitaxy with Artificial Guiding Pattern Layout2007

    • Author(s)
      T. Yamaguchi, M. Edamoto, S. Warisawa, S. Ishihara, and H. Yamaguchi
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto,Japan
    • Year and Date
      2007-11-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] FIB-CVDによるカーボンナノピラーの構造解析2007

    • Author(s)
      野中 啓一郎, 田丸 耕二郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年度精密工学会秋季大会学術講i演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] ナノ機械振動子の製作・評価2007

    • Author(s)
      加藤 慶一, 項 大雨, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] FIB-CVDにより作製したカーボンナノピラーの構造解析2007

    • Author(s)
      田丸 耕二郎, 野中 啓一郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年秋季第68回応用物理学会学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-07
    • Related Report
      2007 Annual Research Report
  • [Presentation] AFMによるGaAsメンブレン構造の振動解析2007

    • Author(s)
      田丸 耕二郎, 加藤 慶一, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2007-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 引張応力印加による微小機械共振器の特性改善2007

    • Author(s)
      加藤 慶一, 中井 康貴, 小野満 恒二, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2007-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] カーボンナノピラーにおける熱励起機械振動の振幅評価2007

    • Author(s)
      野中 啓一郎, 田丸 耕二郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2007-03-19
    • Related Report
      2007 Annual Research Report
  • [Presentation] Control of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2007

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      20^<th> Intn'l Microprocesses and Nanotechnology Conf.(MNC2007)
    • Place of Presentation
      Kyoto
    • Related Report
      2010 Final Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.nanome.t.u-tokyo.ac.jp

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.nanome.t.u-tokyo.ac.jp

    • Related Report
      2009 Self-evaluation Report
  • [Remarks]

    • URL

      http://www.nanome.t.u-tokyo.ac.jp/

    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造体の作製方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2010-122423
    • Filing Date
      2010-05-28
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 微小構造体の製造方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2010-141690
    • Filing Date
      2010-06-22
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 薄膜振動子およびその製造方法2009

    • Inventor(s)
      永瀬雅夫, 山口浩司, 石原直, 割澤伸一, 田丸耕二郎
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2009-078589
    • Filing Date
      2009-03-27
    • Related Report
      2010 Final Research Report 2009 Self-evaluation Report 2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小機械共振器ならびに微小機械検出素子2009

    • Inventor(s)
      石原直, 割澤伸一, 加藤慶一, 山口浩司, 小野満恒二
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2008-070933
    • Filing Date
      2009-03-19
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 微小機械共振器ならびに微小機械検出素子2008

    • Inventor(s)
      石原直, 割澤伸一, 加藤慶一, 山口浩司, 小野満恒二
    • Industrial Property Rights Holder
      東京大学, 日本電信電話 (株)
    • Industrial Property Number
      2008-070933
    • Filing Date
      2008-03-19
    • Related Report
      2009 Self-evaluation Report
  • [Patent(Industrial Property Rights)] 微小機械共振器ならびに微小機械検出素子2008

    • Inventor(s)
      石原 直, 割澤 伸一, 加藤 慶一, 山口 浩司, 小野満 恒二
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Filing Date
      2008-03-19
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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