| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2009: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2007: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Research Abstract |
Plasma-based ion implantation (PBII) was utilized to prepare different elements including fluorine and sulfur-added DLC nano-composite films. The aim of this study was to compare the effects of element contents on the deposition and tribological properties of the films, especially to compare the friction coefficient and friction endurance, under a high vacuum environment. It was observed that S-DLC film demonstrates a considerable improvement in the tribological properties with the friction coefficient of 0.03 under a vacuum of 10^<-5>Pa.
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