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Research of homoepitaxial growth of zinc oxide film using liquid beta-diketons of metal organic material

Research Project

Project/Area Number 19656013
Research Category

Grant-in-Aid for Exploratory Research

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionSendai National College of Technology

Principal Investigator

HAGA Koichi  仙台電波工業高等専門学校, 電子工学科, 教授 (30270200)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,200,000 (Direct Cost: ¥3,200,000)
Fiscal Year 2008: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2007: ¥2,300,000 (Direct Cost: ¥2,300,000)
Keywords酸化亜鉛 / 薄膜 / ベータジケトン系原料 / エピタキシャル成長 / 酸化亜鉛基板 / βジケトン系原料 / 有機金属
Outline of Final Research Achievements

酸化亜鉛(ZnO)薄膜のホモエピタキシャル成長は有機金属気相成長(MO-CVD)法を適用し、そのZn原料としてベータジケトン材料であるZn(C_9H_<15>O_3)_2を使用した。また、堆積基板に使用したZnO表面の平坦性及び清浄化を得るために、高温熱処理及びArイオンエッチングを行った。
エピ成長したZnO薄膜は極めて平坦性と結晶性が優れていたが、Zn(C_9H_<15>O_3)_2原料が経時変化しやすく、薄膜物性値の再現性を得ることが非常に難しい結果となった。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (5 results)

All 2009 2008 2007

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (3 results)

  • [Journal Article] Epitaxial growth of ZnO films prepared by MO-CVD using Zn(C_9H_<15>O_3)_22008

    • Author(s)
      K. Haga, T. Chiba, M. Onodera, T. Kadota, C. Hasegawa
    • Journal Title

      J. Korean Physical Soc. 53

      Pages: 55-58

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Homo-epitaxial growth on ZnO substrate by MO-CVD using (C_5H_7O_2)_22007

    • Author(s)
      K. Haga, T. Shishido, K. Nakajima, T. Matsunaga
    • Journal Title

      Surface Review and Letters 14

      Pages: 783-787

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] 昇華・再結晶化プロセスによる無水アセチルアセトン亜鉛ファイバーの作製と評価2009

    • Author(s)
      関成之, 小野寺尚志, 関沢拓実, 佐久間実緒, 羽賀浩一, 関良之, 澤田豊, 宍戸統悦
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] アセチルアセトン亜鉛ファイバーを用いたMO-CVD法によるZnO薄膜のエピタキシャル成長2009

    • Author(s)
      小野寺尚志, 佐久間実緒, 関成之, 羽賀浩一
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] Epitaxial growth of ZnO films prepared by MO-CVD using Zn(C_9H_15O_3)_22007

    • Author(s)
      K. Haga, T. Chiba, M. Onodera, T. Kadota, C. Hasegawa
    • Organizer
      The 13th International Conference on II-VI Compounds
    • Place of Presentation
      Jeju, Koria
    • Year and Date
      2007-09-12
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-11-18  

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