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Development and application of new kinetic theory for thermal oxidation of silicon replacing the Deal-Grove model

Research Project

Project/Area Number 19686005
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionWaseda University

Principal Investigator

WATANABE Takanobu  Waseda University, 理工学術院, 准教授 (00367153)

Project Period (FY) 2007 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥24,960,000 (Direct Cost: ¥19,200,000、Indirect Cost: ¥5,760,000)
Fiscal Year 2010: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2008: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2007: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Keywords表面・界面 / 電気・電子材料 / ナノ構造形成・制御 / 分子動力学法 / 並列計算 / 並列計算機
Research Abstract

A new general rate equation for thermal oxidation of silicon was formulated. The rate equation is applicable to oxidation processes in dry and wet oxygen ambient, and explains a long-pending problem of a nonlinear oxygen pressure dependency observed in the dry oxidation. Atomistic structures of silicon oxide and germanium oxide films were modeled by means of molecular dynamics, through which the structural relaxation mechanism, diffusion behavior of oxidant molecules, stress distribution, heat transport and phonon mode decay processes are investigated.

Report

(6 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report   Self-evaluation Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report

Research Products

(80 results)

All 2011 2010 2009 2008 2007 Other

All Journal Article (22 results) (of which Peer Reviewed: 22 results) Presentation (54 results) Remarks (4 results)

  • [Journal Article] Molecular Dynamics Simulation on Longitudinal Optical Phonon Mode Decay and Heat Transport in a Silicon Nano-Structure Covered with Oxide Films2011

    • Author(s)
      T.Zushi, Y.Kamakura, K.Taniguchi, I.Ohdomari, T.Watanabe
    • Journal Title

      Jpn.J.Appl.Phys. Vol.50

      Pages: 10102-10102

    • NAID

      210000069796

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Dynamic bond-order force field2011

    • Author(s)
      T.Watanabe
    • Journal Title

      Journal of Computational Electronics

      Volume: (published on line 未定)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation on Longitudinal Optical Phonon Mode Decay and Heat Transport in a Silicon Nano-Structure Covered with Oxide Films2011

    • Author(s)
      T.Zushi, Y.Kamakura, K.Taniguchi, I.Ohdomari, T.Watanabe
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50

    • NAID

      210000069796

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Misfit Stress Relaxation Mechanism in GeO2/Ge Systems : A Classical Molecular Simulation Study2010

    • Author(s)
      T.Watanabe, T.Onda, I.Ohdomari
    • Journal Title

      ECS Transactions Vol.33

      Pages: 901-912

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of the Heat Transport in a Silicon Nano-structure Covered with Oxide Films2010

    • Author(s)
      T.Zushi, I.Ohdomari, Y.Kamakura, K.Taniguchi, T.Watanabe
    • Journal Title

      Jpn.J.Appl.Phys. Vol 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Adsorption Mechanism of Ribosomal Protein L2 onto a Silica Surface : A Molecular Dynamics Simulation Study2010

    • Author(s)
      R.Tosaka, H.Yamamoto, T.Watanabe, I.Ohdomari
    • Journal Title

      Langmuir Vol.26

      Pages: 9950-9955

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Adsorption mechanism of ribosomal protein L2 onto silica surface ; a molecular dynamics simulation study2010

    • Author(s)
      R.Tosaka, H.Tamamoto, I.Ohdomari, T.Watanabe
    • Journal Title

      Langmuir

      Volume: 26 Pages: 9950-9955

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of the Heat Transport in a Silicon Nano-structure Covered with Oxide Films2010

    • Author(s)
      T.Zushi, T.Watanabe, I.Ohdomari, Y.Kamakura, K.Taniguchi
    • Journal Title

      Japanese Journal of Applied Physics (未定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Potential energy landscape of an interstitial 0_2 molecule in a SiO_2 film near the SiO_2/Si(001) interface2008

    • Author(s)
      H.Ohta, T.Watanabe, I.Ohdomari
    • Journal Title

      Physical Review B Vol.78

      Pages: 155326-155326

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Potential energy landscape of an interstitial O2 molecule in a SiO2 film near the SiO2/Si(001) interface2008

    • Author(s)
      H. Ohta, T. Watanabe, I. Ohdomari
    • Journal Title

      Physical Review B 78

      Pages: 1553261-7

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Potential energy landscape of an interstitial 02 molecule in a SiO2 film near the SiO2/Si(001) interfa ce2008

    • Author(s)
      H. Ohta, T. Watanabe, I. Ohdomari
    • Journal Title

      Physical Review B 78

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain-induced transconductance enhancement by pattern dependent oxidation in silicon nanowire field-effect transistors2007

    • Author(s)
      A.Seike, T.Tange, Y.Sugiura, I.Tsuchida, H.Ohta, T.Watanabe, D.Kosemura, A.Ogura, I.Ohdomari
    • Journal Title

      Applied Physics Letters 91

      Pages: 2021171-3

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strain Distribution around Si0_2/Si Interface in Si Naowires ; A Molecular Dynamics Study2007

    • Author(s)
      H.Ohta, T.Watanabe, I.Ohdomari
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 3277-3282

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] A New Kinetic Equation for Thermal Oxidation of Silicon Replacing the Deal-Grove Equation2007

    • Author(s)
      T.Watanabe, I.Ohdomari
    • Journal Title

      Journal of Electrochemical Society 154

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strain-induced transconductance enhancement by pattern dependent oxidation in silicon nanowire field-effect transistors2007

    • Author(s)
      A. Seike, T. Tange, Y. Sugiura, I. Tsuchida, H. Ohta, T. Watanabe, D. Kosemura, A. Ogura, I. Ohdomari
    • Journal Title

      Applied Physics Letters 91

      Pages: 2021171-3

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] A New Kinetic Equation for Thermal Oxidation of Silicon Replacing the Deal-Grove Equation2007

    • Author(s)
      T. Watanabe, I. Ohdomari
    • Journal Title

      Journal of Electrochemical Society 154

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Strain Distribution around Si02/Si Interface in Si Naowires; A Molecular Dynamics Study2007

    • Author(s)
      H. Ohta, T. Watanabe, I. Ohdomari
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 3277-3282

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] A New Kinetic Equation for Thermal Oxidation of Silicon Replacing the Deal-Grove Equation2007

    • Author(s)
      T. Watanabe, and I. Ohdomari
    • Journal Title

      Journal of Electrochemical Society 154

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain Distribution around Si02/Si Interface in Si Naowires; A Molecular Dynamics Study2007

    • Author(s)
      H. Ohta, T. Watanabe, and I. Ohdomari
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 3277-3282

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain-induced transconductance enhancement by pattern dependent oxidation in silicon nanowire field-effect transistors2007

    • Author(s)
      A. Seike, et al.
    • Journal Title

      Applied Physics Letters 91

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dynamic Bond-Order Force Field

    • Author(s)
      T.Watanabe
    • Journal Title

      Journal of Computational Electronics in press

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of the Heat Transport in a Silicon Nano-structure Covered with Oxide Films

    • Author(s)
      T. Zushi, T. Watanabe, I. Ohdomari, Y. Kamakura, K. Taniguchi
    • Journal Title

      Jpn. J. Appl. Phys. (in press)

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Presentation] Force Field Approaches for Modeling Oxide-Semiconductor Interfaces2011

    • Author(s)
      T.Watanabe
    • Organizer
      3^<rd> ACCMS Working Group Meeting on Advances in Nano-device simulation (Invited)
    • Place of Presentation
      Seogwipo KAL Hotel, Jeju Island, KOREA
    • Year and Date
      2011-04-02
    • Related Report
      2010 Final Research Report
  • [Presentation] Si系トンネルFETのシミュレーション2010

    • Author(s)
      渡邉孝信
    • Organizer
      電気学会シリコンナノデバイス集積化技術調査専門委員会「急峻サブスレショルドデバイスの現状と将来展望」(依頼講演)
    • Place of Presentation
      早稲田大学,新宿,東京
    • Year and Date
      2010-11-26
    • Related Report
      2010 Final Research Report
  • [Presentation] Misfit Stress Relaxation Mechanism in GeO2/Ge Systems : A Classical Molecular Simulation Study2010

    • Author(s)
      T.Watanabe, T.Onda, I.Ohdomari
    • Organizer
      ECS meeting
    • Place of Presentation
      Las Vegas, USA
    • Year and Date
      2010-10-14
    • Related Report
      2010 Final Research Report
  • [Presentation] Misfit Stress Relaxation Mechanism in GeO2/Ge Systems : A Classical Molecular Simulation Study2010

    • Author(s)
      T.Watanabe
    • Organizer
      ECS 218th meeting
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Siナノ構造中のLOフォノン緩和に関する分子動力学シミュレーション2010

    • Author(s)
      図師知文
    • Organizer
      秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular Dynamics Simulation of LO Phonon Mode Decay in Si Nano-Structures Covered with Oxide Films2010

    • Author(s)
      T.Zushi
    • Organizer
      The International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2010
    • Place of Presentation
      Bologna, Italy
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Molecular Dynamics Simulation on Phonon Dynamics and Heat Transport in Nanoscale Silicon2010

    • Author(s)
      T.Watanabe, T.Zushi, Y.Kamakura, K.Taniguchi, I.Ohdomari
    • Organizer
      International Symposium on Technology Evolution for Silicon Nano-Electronics
    • Place of Presentation
      Tokyo, JAPAN
    • Related Report
      2010 Final Research Report
  • [Presentation] 分子動力学法によるGeO2/Ge界面構造の基板面方位依存性に関する調査2010

    • Author(s)
      恩田知弥, 山本英明, 渡邊孝信
    • Organizer
      ゲートスタック研究会(第15回)-材料・プロセス・評価の物理-
    • Place of Presentation
      東レ総合研修センター,三島
    • Related Report
      2009 Annual Research Report
  • [Presentation] GeO2/Ge界面のストレス緩和の起源2010

    • Author(s)
      恩田知弥, 山本英明, 渡邊孝信
    • Organizer
      春季第58回応用物理学関運連合講演会
    • Place of Presentation
      東海大学,平塚市,神奈川県
    • Related Report
      2009 Annual Research Report
  • [Presentation] Large-Scale Modeling of GeO2/Ge and SiO2/Si Interface Structures2009

    • Author(s)
      T.Onda, H.Yamamoto, R.Tosaka, T Watanabe
    • Organizer
      Materials Research Society
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2009-11-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Deal-Groveモデルに代わるシリコン熱酸化速度理論2009

    • Author(s)
      渡邉孝信
    • Organizer
      第29回表面科学学術講演会,タワーホール船堀(招待講演)
    • Place of Presentation
      東京
    • Year and Date
      2009-10-28
    • Related Report
      2010 Final Research Report
  • [Presentation] Deal-Groveモデルに代わるシリコン熱酸化速度理論2009

    • Author(s)
      渡邉孝信
    • Organizer
      第29回表面科学学術講演会
    • Place of Presentation
      タワーホール船堀, 東京
    • Year and Date
      2009-10-28
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Deal-Groveモデルに代わるシリコン熱酸化速度理論2009

    • Author(s)
      渡邊孝信
    • Organizer
      第29回表面科学学術講演会
    • Place of Presentation
      タワーホール船堀,東京
    • Year and Date
      2009-10-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分子動力学法によるGeO2/Ge界面のモデリング~SiO2/Siとの違い~2009

    • Author(s)
      渡邉孝信
    • Organizer
      応用物理学会シリコンテクノロジー分科会表面・界面・シリコン材料研究委員会第113回研究集会
    • Place of Presentation
      東京大学駒場リサーチキャンパス
    • Year and Date
      2009-06-19
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Atomistic Picture of Silicon Oxidation Process ; Beyond the Deal-Grove Model2009

    • Author(s)
      T.Watanabe
    • Organizer
      International Conference on Computational & Experimental Engineering and Sciences (ICCES'09)(Keynote)
    • Place of Presentation
      Phuket, Thailand
    • Year and Date
      2009-04-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Atomistic Picture of Silicon Oxidation Process; Beyond the Deal-Grove Model2009

    • Author(s)
      T. Watanabe
    • Organizer
      International Conference on Computational & Experimental Engineering and Sciences (ICCES'09)
    • Place of Presentation
      プーケット, タイ王国
    • Year and Date
      2009-04-10
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Atomistic Picture of Silicon Oxidation Process ; Beyond the Deal-Grove Model2009

    • Author(s)
      T.Watanabe
    • Organizer
      International Conference on Computational & Experimental Engineering and Sciences(ICCES'09)
    • Place of Presentation
      Phuket, Thailand
    • Year and Date
      2009-04-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分子動力学法によるシリコンナノワイヤの酸化膜中のストレス分布の解析2009

    • Author(s)
      恩田知弥, 渡邉孝信, 山本英明, 大泊巌
    • Organizer
      第56回春季応用物理学関係連合講演
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-04-01
    • Related Report
      2008 Annual Research Report
  • [Presentation] 酸化膜に覆われたシリコンナノ構造中の熱輸送シミュレーション2009

    • Author(s)
      図師知文, 渡邉孝信, 大泊殻, 鎌倉良成, 谷口研二
    • Organizer
      第56回春季応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] 古典分子動力学法によるGeO2/Ge界面構造の大規模モデリング2009

    • Author(s)
      恩田知弥, 渡邉孝信, 大泊巌
    • Organizer
      ゲートスタック研究会第14回研究会
    • Place of Presentation
      東レリサーチセンター
    • Year and Date
      2009-01-23
    • Related Report
      2008 Annual Research Report
  • [Presentation] 分子動力学法によるGeO2/Ge界面のモデリング-SiO_2/Siとの違い-2009

    • Author(s)
      渡邉孝信, 恩田知弥, 登坂亮, 山本英明
    • Organizer
      シリコン材料・デバイス研究会(SDM)(依頼講演)
    • Place of Presentation
      東京大学,目黒区,東京都
    • Related Report
      2010 Final Research Report
  • [Presentation] Atomistic Modeling of GeO2/Ge and SiO2/Si Interface Structures2009

    • Author(s)
      T.Onda, H.Yamamoto, R.Tosaka, I.Ohdomari, T.Watanabe
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM)
    • Place of Presentation
      Sendai, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] Simulation on the Heat Transport in a Silicon Nano-structure Covered with Oxide Films2009

    • Author(s)
      T.Zushi, T.Watanabe, I.Ohdomari, Y.Kamakura, K.Taniguchi
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM)
    • Place of Presentation
      Sendai, Japan
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分子動力学法によるGeO2/Ge界面のモデリング-SiO2/Siとの違い-2009

    • Author(s)
      渡邉孝信, 恩田知弥, 登坂亮, 山本英明
    • Organizer
      シリコン材料・デバイス研究会(SDM)
    • Place of Presentation
      東京大学,目黒区,東京都
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分子動力学法によるシリコンナノ構造中の熱輸送シミュレーション2009

    • Author(s)
      図師知文, 鎌倉良成, 谷口研二, 大泊巌, 渡邉孝信
    • Organizer
      秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学,富山市,富山県
    • Related Report
      2009 Annual Research Report
  • [Presentation] GeO2/Ge(001)、GeO2/Ge(110)、GeO2/Ge(111)構造のモデリング2009

    • Author(s)
      恩田知弥, 山本英明, 大泊巌, 渡邉孝信
    • Organizer
      秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学,富山市,富山県
    • Related Report
      2009 Annual Research Report
  • [Presentation] GeO2/Ge界面構造の大規模モデリング2008

    • Author(s)
      渡邉孝信, 恩田知弥, 登坂亮, 大泊巖
    • Organizer
      NMDIF-09
    • Place of Presentation
      高知工科大学
    • Year and Date
      2008-12-23
    • Related Report
      2008 Annual Research Report
  • [Presentation] Crystal Orientation Dependency of OxidationInduced Strain in Silicon Nano Structures : A Molecular Si mulation Study2008

    • Author(s)
      T. Onda, T. Watanabe, I. Ohdomari
    • Organizer
      International Symposium on Surface Science and Nanotechnology (ISSS-5)
    • Place of Presentation
      早稲国大学
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Kinetic Model for High Pressure Oxidation of Silicon2008

    • Author(s)
      T.Watanabe, T.Onda, T.Zushi, I.Ohdomari
    • Organizer
      International workshop on dielectric thin films for future ULSI devices : science and technology.
    • Place of Presentation
      東京工業大学
    • Year and Date
      2008-11-05
    • Related Report
      2010 Final Research Report
  • [Presentation] Kinetic Model for High Pressure Oxidation of Silicon2008

    • Author(s)
      T. Watanabe, T. Onda, T. Zushi, I. Ohd omari
    • Organizer
      International workshop on dielectric thin films for future ULSI devices : science and technology
    • Place of Presentation
      東京工業大学
    • Year and Date
      2008-11-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] 計算科学からみた低消費電力化技術2008

    • Author(s)
      渡邉孝信
    • Organizer
      日本学術振興会未踏・ナノデバイステクノロジ-第151委員会第3回合同研究会(依頼講演)
    • Place of Presentation
      化学会館
    • Year and Date
      2008-09-19
    • Related Report
      2010 Final Research Report
  • [Presentation] 計算科学からみた低消費電力化技術2008

    • Author(s)
      渡蓬孝信
    • Organizer
      日本学術振興会未踏・ナノデバイステクノロジ-第151委員会第3回合同研究会
    • Place of Presentation
      化学会館
    • Year and Date
      2008-09-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] Ensemble Monte Carlo/Molecular Dynamics Simulation of Electron Mobility in Silicon with Ordered Dopant Arrays2008

    • Author(s)
      T. Terunuma. T. Watanabe., et al.
    • Organizer
      2008 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD2008)
    • Place of Presentation
      箱根 富士屋ホテル
    • Year and Date
      2008-09-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] 古典分子動力学法によるGeO2/Ge界面構造の大規模モデリング2008

    • Author(s)
      恩田知弥, 渡邉孝信, 大泊巌
    • Organizer
      秋季第69回応用物理学会学術講演
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] ダイナミックボンド型分子動力学法の開発2008

    • Author(s)
      渡邉孝信
    • Organizer
      第21期CAMMフォーラム本例会(依頼講演)
    • Place of Presentation
      虎ノ門パストラル
    • Year and Date
      2008-06-06
    • Related Report
      2010 Final Research Report
  • [Presentation] ダイナミックボンド型分子動力学法の開発2008

    • Author(s)
      渡邉孝信
    • Organizer
      第21期CAMMフォーラム本例会
    • Place of Presentation
      虎ノ門パストラル
    • Year and Date
      2008-06-06
    • Related Report
      2008 Annual Research Report
  • [Presentation] シリコン熱酸化速度の酸素分圧依存性の起源2008

    • Author(s)
      渡邉孝信, 太田洋道, 大泊巌
    • Organizer
      第13回ゲートスタック研究会
    • Place of Presentation
      三島
    • Year and Date
      2008-01-14
    • Related Report
      2010 Final Research Report
  • [Presentation] Si02/Si界面近傍の格子間02分子のポテンシャルエネルギーマップの作成2008

    • Author(s)
      太田洋道, 渡邉孝信, 大泊, 巌
    • Organizer
      第13回ゲートスタック研究会
    • Place of Presentation
      三島
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] シリコン熱酸化速度の酸素分圧依存性の起源2008

    • Author(s)
      渡邉孝信, 太田洋道, 大泊厳
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日大船橋
    • Related Report
      2010 Final Research Report
  • [Presentation] AFM探針-基板間の水分子の挙動に関する分子動力学シミュレーション2008

    • Author(s)
      登坂 亮, 山本英明, 小野真弥, 渡邉孝信, 大泊 巌
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日大船橋
    • Related Report
      2007 Annual Research Report
  • [Presentation] 有機シランSAM/Si02構造モデルからのX線回折強度分布2008

    • Author(s)
      山本英明, 渡邉孝信, 大泊 巌
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日大船橋
    • Related Report
      2007 Annual Research Report
  • [Presentation] 分子動力学法によるシリコンナノ構造酸化誘起歪の結晶方位依存性に関する研究2008

    • Author(s)
      恩田知弥, 太田洋道, 渡邉孝信, 大泊 巌
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日大船橋
    • Related Report
      2007 Annual Research Report
  • [Presentation] General Kinetic Theory for Thermal Oxidation of Silicon2007

    • Author(s)
      T.Watanabe, I.Ohdomari
    • Organizer
      The 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-9)
    • Place of Presentation
      東大生産研
    • Year and Date
      2007-11-13
    • Related Report
      2010 Final Research Report
  • [Presentation] General Kinetic Theory for Thermal Oxidation of Silicon2007

    • Author(s)
      T. Watanabe
    • Organizer
      The 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-9)
    • Place of Presentation
      東大
    • Year and Date
      2007-11-13
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Deal-Grove 理論に代わるシリコン熱酸化の新しい運動理論2007

    • Author(s)
      渡邉孝信, 太田洋道, 大泊巌
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東大生産研
    • Year and Date
      2007-11-03
    • Related Report
      2010 Final Research Report
  • [Presentation] Deal-Grove理論に代わるシリコン熱酸化の新しい運動理論2007

    • Author(s)
      渡邉孝信, 太田洋道, 大泊 巌
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東大生産研
    • Year and Date
      2007-11-03
    • Related Report
      2007 Annual Research Report
  • [Presentation] 大規模分子シミュレーションによる有機シランSAM/SiO2界面構造に関する研究2007

    • Author(s)
      山本 英明, 渡邉 孝信, 谷井 孝至, 大泊 巌
    • Organizer
      第27回表面科学講演大会
    • Place of Presentation
      東大生産研
    • Year and Date
      2007-11-01
    • Related Report
      2007 Annual Research Report
  • [Presentation] 周期的な不純物原子配列を有する半導体の電気伝導シミュレーション2007

    • Author(s)
      照沼知英, 渡邉孝信, 品田賢宏, 鎌倉良成, 谷口研二, 大泊 巌
    • Organizer
      SDM, VLD, 応物シリコンテクノロジー分科会共催 平年19年10月合同研究会
    • Place of Presentation
      東京・機械振興会館
    • Year and Date
      2007-10-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] A New Kinetic Equation for Thermal Oxidation of Silicon Replacing the Deal-Grove Equation2007

    • Author(s)
      T.Watanabe
    • Organizer
      211th Meeting of The Electrochemical Society(Invited)
    • Place of Presentation
      Chicago, USA.
    • Related Report
      2010 Final Research Report
  • [Presentation] A New Kinetic Equation for Thermal Oxidation of Silicon Replacing the Deal-Grove Equation2007

    • Author(s)
      T. Watanabe
    • Organizer
      211th Meeting of The Electrochemical Society
    • Place of Presentation
      アメリカ・シカゴ
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Interface Structure of an Organosilane Monolayer/Si02 Substrate; a Grand Canonical Monte Carlo Simulation Study2007

    • Author(s)
      H. Yamamoto, T. Watanabe, I. Ohdomari
    • Organizer
      The 9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-9)
    • Place of Presentation
      東大生産研
    • Related Report
      2007 Annual Research Report
  • [Presentation] 周期的な不純物原子配列を有する半導体の電気伝導シミュレーション2007

    • Author(s)
      照沼知英, 渡邉孝信, 品田賢宏, 鎌倉良成, 谷口研二, 大泊 巌
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] MDGRAPE-3を用いた有機シランSAM/Si02界面構造の大規模分子シミュレーション2007

    • Author(s)
      山本英明, 渡邉孝信, 大泊 巌
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 分子動力学法によるSi02/Si界面近傍のボイド分布の解析2007

    • Author(s)
      太田洋道, 渡邉孝信, 大泊 巌
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Related Report
      2007 Annual Research Report
  • [Remarks] 早稲田大学研究者データベース

    • URL

      https://www.wnp7.waseda.jp/Rdb/app/ip/ipi0201.html

    • Related Report
      2010 Final Research Report
  • [Remarks] 研究室ホームページ

    • URL

      http://www.watanabe.nano.waseda.ac.jp/

    • Related Report
      2010 Final Research Report
  • [Remarks] 早稲田大学研究者データベース

    • URL

      https://www.wnp7.waseda.jp/Rdb/app/ip/ipi0201.html

    • Related Report
      2009 Self-evaluation Report
  • [Remarks] 研究室ホームページ

    • URL

      http://www.watanabe.nano.waseda.ac.jp/

    • Related Report
      2009 Self-evaluation Report

URL: 

Published: 2007-03-31   Modified: 2016-04-21  

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