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A study on EDA technology in the nanolithography era

Research Project

Project/Area Number 19700049
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Computer system/Network
Research InstitutionToyohashi University of Technology

Principal Investigator

SUGIHARA Makoto  Toyohashi University of Technology, 工学部, 講師 (80373538)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,660,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2007: ¥2,100,000 (Direct Cost: ¥2,100,000)
Keywords設計自動化 / 電子ビーム直描 / フォトマスク製造 / 部分一括描画 / 可変成に描画 / 描画スループット / 少量多品種 / CPアパーチャマスク / マルチカラムセル / 可変成型ビーム / スループット / NREコスト / 少量多品種生産
Research Abstract

本研究課題においては、集積回路製造において重要な電子線描画技術におけるコストを削減すべく、電子線描画時間を削減する集積回路設計自動化技術を確立した。単一カラムセル描画(SCC)装置装置、及び複数カラムセル(MCC)描画装置において、CPアパーチャ・マスク、及びキャラクタの大きさを最適にし、電子線描画時間を最小化する技術を確立した。また、SCC描画装置及びMCC描画装置に対する論理合成技術を確立し、集積回路の性能、及び製造コストの間のトレードオフを図ることを可能にした。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report

Research Products

(8 results)

All 2009 2008 2007

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (2 results)

  • [Journal Article] Character projection mask set optimization for enhancing throughput of MCC projection systems2008

    • Author(s)
      M. Sugihara, Y. Matsunaga, and K. Murakami
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences Vol. E91-A, No. 12

      Pages: 3451-3460

    • NAID

      10026853791

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Character projection mask set optimization for enhancing throughput of MCC projection systems2008

    • Author(s)
      M. Sugihara, Y. Matsunaga, and K. Murakami
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences E91-A

      Pages: 3451-3460

    • NAID

      10026853791

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Technology mapping technique for increasing throughput of character projection lithography2007

    • Author(s)
      M. Sugihara, K. Nakamura, Y. Matsunaga, and K. Murakami
    • Journal Title

      IEICE Transactions on Electronics Vol. E90-C, No. 5

      Pages: 1012-1020

    • NAID

      110007519668

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] 部分一括描画装置の処理能力の向上のための描画面積最適化2007

    • Author(s)
      杉原真, 松永裕介, 村上和彰
    • Journal Title

      情報処理学会論文誌 第48巻5号

      Pages: 1888-1897

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Technology mapping technique for increasing throughput of character projection lithography2007

    • Author(s)
      M. Sugihara, K. Nakamura, Y. Matsunaga, and K. Murakami
    • Journal Title

      IEICE Transactions on Electronics Vol. E90-C

      Pages: 1012-1020

    • NAID

      110007519668

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 部分一括描画装置の処理能力の向上のための描画面積最適化2007

    • Author(s)
      杉原真, 松永裕介, 村上和彰
    • Journal Title

      情報処理学会論文誌 第48巻

      Pages: 1888-1897

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Optimal character-size exploration for increasing throughput of MCC lithographic systems2009

    • Author(s)
      M. Sugihara
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      San Jose Convention Center, San Jose, CA, USA
    • Year and Date
      2009-02-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] Optimal character-size exploration for increasing throughput of MCC lithographic systems2009

    • Author(s)
      M. Sugihara
    • Organizer
      P Proc. SPIE Vol. 7271 : Alternative Lithographic Technologies, 72710L
    • Related Report
      2008 Final Research Report

URL: 

Published: 2007-03-31   Modified: 2016-04-21  

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