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Development of novel structure analysis method using one-dimensional X-ray focusing device

Research Project

Project/Area Number 19760020
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionThe University of Tokyo

Principal Investigator

YASHIRO Wataru  The University of Tokyo, 大学院・新領域創成科学研究科, 助教 (10401233)

Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥3,860,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2007: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywordsビーム応用 / 放射線 / X線 / 粒子線 / 量子ビーム / マイクロ・ナノデバイス / 半導体物性 / 表面・界面物性 / 位相問題
Research Abstract

A method to evaluate structures and strains in the neXt generation silicon device using multiple X-ray diffraction was developed. By using this method it was revealed that strains are locally relaXed at the SiO_2/Si and Si_3N_4/Si interfaces, which were formed by Kr/O_2 and Xe/NH_3 plasmas, respectively. To apply this method to investigate local structures and strains in silicon devices, a multi-layer Laue lens-type X-ray focusing device was designed by using a simulator based on Takagi-Taupin type dynamical theory of X-ray diffraction. The focusing device was fabricated by using a deposition system. For visualization of three-dimensional strain distribution, another method based on X-ray phase imaging microscopy was also developed.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (39 results)

All 2009 2008 2007

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (24 results) Book (3 results)

  • [Journal Article] Hard X-ray phase-difference microscopy using a Fresnel zone plate and a transmission grating2009

    • Author(s)
      W. Yashiro, Y. Takeda, A. Takeuchi, Y. Suzuki,, A. Momose
    • Journal Title

      Phys. Rev. Lett. 103

      Pages: 180801-180801

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Quantitative Analysis of the Strain Field beneath the Si3N4/Si(001) Interface Formed by the Xe/NH3 Plasma Nitridation using a Multiple-Wave X-ray Diffraction Phenomenon2009

    • Author(s)
      W. Yashiro, Y. Yoda, T. Aratani, A. Teramoto, T. Hattori,, K. Miki
    • Journal Title

      Trans. Mat. Res. Soc. Jpn. 34

      Pages: 597-597

    • NAID

      130004676259

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Quantitative Analysis of the Strain Field beneath the Si_3N_4/Si(001)Interface Formed by the Xe/NH_3 Plasma Nitridation using a Multiple-Wave X-ray Diffraction Phenomenon2009

    • Author(s)
      W.Yashiro, Y.Yoda, T.Aratani, A.Teramoto, T.Hattori, K.Miki
    • Journal Title

      Trans.Mat.Res.Soc.Jpn. 34

      Pages: 597-600

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hard X-ray phase-difference microscopy using a Fresnel zone plate and a transmission grating2009

    • Author(s)
      W.Yashiro, Y.Takeda, A.Takeuchi, Y.Suzuki, A.Momose
    • Journal Title

      Phys.Rev.Lett. 103

      Pages: 180801-180801

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Similarity between Strain Fields Induced by the Xe/NH3 Plasma Nitridation and the Kr/O2 Plasma OXidation Revealed by a Multi-Wave X-ray Diffraction Phenomenon2008

    • Author(s)
      W. Yashiro, Y. Yoda, Y. Matsushita, T. Aratani, A. Teramoto, T. Hattori,, K. Miki
    • Journal Title

      Trans. Mat. Res. Soc. Jpn. 33

      Pages: 607-607

    • NAID

      130007809497

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] X-ray Diffraction from Buried Bi atomic wire formed on Si(001)-near the Bi LIIIAbsorption Edge2008

    • Author(s)
      W. Yashiro, O. Sakata, K. Sakamoto,, K. Miki
    • Journal Title

      Trans. Mat. Res. Soc. Jpn. 33

      Pages: 623-623

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Recent Progress in Solving the Phase Problem in Surface and Interface Crystallography2008

    • Author(s)
      W. Yashiro
    • Journal Title

      Trans. Mat. Res. Soc. Jpn 33

      Pages: 551-551

    • NAID

      130007809511

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Similarity between Strain Fields Induced by the Xe/NH_3 Plasma Nitrid ation and the Kr/O_2 Plasma Oxidation Revealed by a Multi-Wave X-ray Diffraction Phenomenon2008

    • Author(s)
      W. Yashiro
    • Journal Title

      Tran. Mat. Res. Soc. Jpn. (印刷中)(掲載確定)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] X-ray Diffraction from Buried Bi atomic wire formed on Si(001) -near the Bi LIII Absorption Edge2008

    • Author(s)
      W. Yashiro
    • Journal Title

      Tran. Mat. Res. Soc. Jpn. (印刷中)(掲載確定)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Recent Progress in Solving the Phase Problem in Surface and Interface Crystallography2008

    • Author(s)
      W. Yashiro
    • Journal Title

      Tran. Mat. Res. Soc. Jpn. (印刷中)(掲載確定)

    • NAID

      130007809511

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] OXidation process dependence of strain field under the SiO2/Si(001) interface revealed by X-ray multiple-wave diffraction2007

    • Author(s)
      W. Yashiro, Y. Yoda, K. Takahashi, M. Yamamoto, T. Hattori,, K. Miki
    • Journal Title

      J. Phys: Conf. Ser. 83

      Pages: 12009-12009

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Oxidation process dependence of strain field under the SiO_2/Si(001) interface revealed by X-ray multiple-wave diffraction2007

    • Author(s)
      W. Yashiro
    • Journal Title

      J. Phys.: Conference Series 83

      Pages: 120091-6

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] X線結像光学系とX線透過格子の組み合わせによる位相差分顕微鏡2009

    • Author(s)
      矢代航
    • Organizer
      第十回X線結像光学シンポジウム
    • Place of Presentation
      つくば(エポカルつくば)
    • Year and Date
      2009-11-07
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] X-ray imaging microscopy using a Fresnel zone plate and a transmission grating2009

    • Author(s)
      W. Yashiro
    • Organizer
      SRI09
    • Place of Presentation
      メルボルン(オーストラリア)
    • Year and Date
      2009-09-29
    • Related Report
      2009 Final Research Report
  • [Presentation] X-ray imaging microscopy using a Fresnel zone plate and a transmission grating2009

    • Author(s)
      矢代航
    • Organizer
      SRI09
    • Place of Presentation
      Melbourne, Australia
    • Year and Date
      2009-09-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] X線の位相計測によるシリコン酸化膜およびシリコン窒化膜/シリコン界面下のひずみの測定2009

    • Author(s)
      矢代航
    • Organizer
      埋もれた界面のX線・中性子解析に関するワークショップ2009
    • Place of Presentation
      東京(秋葉原)
    • Year and Date
      2009-07-13
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] X線多波回折現象を利用したSi結晶中の微小ひずみの測定2009

    • Author(s)
      矢代航
    • Organizer
      大見研究室研究会
    • Place of Presentation
      仙台(東北大学)
    • Year and Date
      2009-05-29
    • Related Report
      2009 Final Research Report
  • [Presentation] X線多波回折現象を利用したSi結晶中の微示ひずみの測定2009

    • Author(s)
      矢代航
    • Organizer
      大見研究室研究会
    • Place of Presentation
      仙台(東北大学)
    • Year and Date
      2009-05-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] X線の位相計測によるSi窒化膜/Si界面下の微小格子ひずみの評価2009

    • Author(s)
      矢代航
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-03-31
    • Related Report
      2009 Final Research Report
  • [Presentation] x線の位相計測によるSi窒化膜/Si界面下の微小格子ひずみの評価2009

    • Author(s)
      矢代航
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] 単一格子X線位相差分顕微鏡による高解像度位相イメージングの試み2009

    • Author(s)
      矢代航
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-03-30
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] 多波回折現象を利用したSi窒化膜/Si界面下のひずみの測定- 面方位依存性2009

    • Author(s)
      矢代航
    • Organizer
      第22回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-01-11
    • Related Report
      2009 Final Research Report
  • [Presentation] 多波回折現象を利用したSi窒化膜/Si界面下のひずみの測定-面方位依存性2009

    • Author(s)
      矢代航
    • Organizer
      第22回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-01-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] 位相敏感X線回折法によるNHラジカル窒化Si3N4/Si(001)界面下のひずみの測定2008

    • Author(s)
      矢代航
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学(船橋キャンパス)
    • Year and Date
      2008-03-28
    • Related Report
      2009 Final Research Report
  • [Presentation] 位相敏感X線回折法によるNHラジカル窒化Si_3N_4/Si(001)界面下のひずみの測定2008

    • Author(s)
      矢代航
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学(船橋キャンパス)
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 多波回折現象を利用したSi酸化膜/SiおよびSi窒化膜/Si界面下のひずみの測定2008

    • Author(s)
      矢代航
    • Organizer
      日本放射光学会
    • Place of Presentation
      立命館大学(びわこ・くさつキャンパス)
    • Year and Date
      2008-01-14
    • Related Report
      2009 Final Research Report 2007 Annual Research Report
  • [Presentation] 位相敏感X線回折法によるKr/O2プラズマ酸化SiO2/Si(111)界面下のひずみの測定2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2009 Final Research Report
  • [Presentation] 埋め込みBi原子細線からのX線回折-Bi L32p3/2吸収端付近の強度変化2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2009 Final Research Report
  • [Presentation] イントロダクトリートーク:X線による表面・界面構造解析における位相問題2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2009 Final Research Report
  • [Presentation] 位相敏感X線回折法によるKr/O_2プラズマ酸化SiO_2/Si(111)界面下のひずみの測定2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2007 Annual Research Report
  • [Presentation] 埋め込みBi原子細線からのX線回折-Bi L_32p_<3/2>吸収端付近の強度変化2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2007 Annual Research Report
  • [Presentation] (Invited)イントロダクトリートーク:X線による表面・界面構造解析における位相問題2007

    • Author(s)
      矢代航
    • Organizer
      第18回日本MRS学術シンポジウム
    • Place of Presentation
      日本大学(駿河台キャンパス)
    • Year and Date
      2007-12-09
    • Related Report
      2007 Annual Research Report
  • [Presentation] 位相敏感X線回折法によるSiO2/Si界面下のひずみの測定- 酸化プロセス依存性2007

    • Author(s)
      矢代航
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-08
    • Related Report
      2009 Final Research Report
  • [Presentation] 位相敏感X線回折法によるSiO_2/Si界面下のひずみの測定-酸化プロセス依存性2007

    • Author(s)
      矢代航
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-08
    • Related Report
      2007 Annual Research Report
  • [Presentation] 多波回折現象を利用したSiO2/Si界面下のひずみの測定- 深さ方向分布の酸化プロセス依存性2007

    • Author(s)
      矢代航
    • Organizer
      埋もれた界面のX線・中性子解析に関するワークショップ2007
    • Place of Presentation
      東北大学金属材料研究所
    • Year and Date
      2007-07-23
    • Related Report
      2009 Final Research Report
  • [Presentation] 多波回折現象を利用したSiO_2/Si界面下のひずみの測定-深さ方向分布の酸化プロセス依存性2007

    • Author(s)
      矢代航
    • Organizer
      埋もれた界面のX線・中性子解析に関するワークショップ2007
    • Place of Presentation
      東北大学金属材料研究所
    • Year and Date
      2007-07-23
    • Related Report
      2007 Annual Research Report
  • [Book] X線反射率法入門2009

    • Author(s)
      矢代航(桜井健次編)
    • Publisher
      講談社サイエンティフィク
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Book] 埋もれた界面のX線・中性子解析グループ編、X線反射率法入門2007

    • Author(s)
      矢代航
    • Publisher
      (社)応用物理学会
    • Related Report
      2009 Final Research Report
  • [Book] X線反射率法入門2007

    • Author(s)
      矢代航
    • Publisher
      (社)応用物理学会埋もれた界面のX線・中性子解析グループ編
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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